CN104139336A - A trimming tool - Google Patents
A trimming tool Download PDFInfo
- Publication number
- CN104139336A CN104139336A CN201410186905.2A CN201410186905A CN104139336A CN 104139336 A CN104139336 A CN 104139336A CN 201410186905 A CN201410186905 A CN 201410186905A CN 104139336 A CN104139336 A CN 104139336A
- Authority
- CN
- China
- Prior art keywords
- layer
- ground floor
- grinding stone
- finishing board
- dressing tool
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
A trimming tool is provided and can accurately recognize the using limit. The trimming tool (2) is used for trimming a grinding stone (26) on a grinding wheel (18), and is provided with a trimming plate (4) for trimming the grinding stone and a supporting plate (6) for fixing the trimming plate onto the upper surface (6a). The trimming plate comprises a first layer (8) adhered to the supporting plate and a second layer (10) ground by the grinding stone. The first layer and the second layer show different color phases. The first layer is exposed by grinding of the second layer, so that the using limit can be recognized by the colors.
Description
Technical field
The present invention relates to the dressing tool for the grinding stone of emery wheel is repaired.
Background technology
In recent years, in order to realize the device of small-size light-weight, require the grinding wafer being formed by the material such as silicon or sapphire to obtain thin.For example, utilize the grinding attachment that has assembled emery wheel to carry out the grinding of wafer, this emery wheel has grinding stone for grinding (grinding stone).On the maintenance platform of grinding attachment, keep wafer, the emery wheel of rotation is pressed on the machined surface of wafer, thereby wafer is carried out to grinding.
For example, in the bond material such as pottery or thermosetting resin, mix the abrasive particle such as diamond or CBN, form above-mentioned grinding stone by sintering.In the time utilizing this grinding stone to rub to wafer, the multiple abrasive particles that expose on the surface of grinding stone play a role as cutting edge respectively, scrape off the machined surface of wafer.
On the other hand, along with the carrying out of grinding, grinding stone also wears away, and engenders new abrasive particle on the surface of the grinding stone contacting with the machined surface of wafer.By this effect (is claimed to act on from sharp (self sharpening) etc.), suppressed due to abrasive particle routed fall, the reduction of the grinding performance that causes such as obstruction, passivation, realized good machining.
But untapped grinding stone can suitably not expose abrasive particle, and the height of grinding stone also exists deviation.Therefore,, for abrasive particle suitably being exposed and making the height of grinding stone consistent, before the grinding of wafer, implement the finishing process (for example,, with reference to patent documentation 1) that finishing board is carried out to grinding.
Finishing board is for example formed as the thickness of 1mm～5mm left and right, and rear side is bonded on resinous support plate.When this finishing board due to and grinding stone between friction wear away, and be replaced in the time being thinned to certain degree.Judge the replacing period of finishing board by the method such as visual.
Patent documentation 1: TOHKEMY 2009-142906 communique
But, in the above-mentioned method such as visual, may not correctly judge the replacing period of finishing board.Therefore, there are the following problems: replacing is worn away the finishing board of the limit (operating limit) and continues to use, thereby mistake grinding support plate may damage grinding stone.
Summary of the invention
The present invention completes in view of the above problems, and its object is, the dressing tool that can correctly identify operating limit is provided.
According to the present invention, dressing tool is provided, this dressing tool is repaired the grinding stone of emery wheel, and this dressing tool is characterised in that to have: finishing board, it is repaired this grinding stone; And support plate, this finishing board is fixed on the upper surface of this support plate, this finishing board is made up of the second layer that is bonded in the ground floor on this support plate and be ground by this grinding stone, this ground floor and this second layer illustrate different form and aspect, ground floor, because the abrasion of this second layer are exposed, can be identified operating limit by color thus.
In addition, in described dressing tool, be preferably, the described second layer comprises abrasive particle, and described ground floor is made up of the abrasive grain layer that comprises abrasive particle contacting with this second layer and the non-abrasive grain layer that do not comprise abrasive particle.
Dressing tool of the present invention has by the ground floor of different form and aspect and the finishing board that the second layer forms are shown, therefore can correctly identify dressing tool according to the form and aspect of finishing board and whether arrive operating limit.
Brief description of the drawings
(A) of Fig. 1 is the stereogram that the structure example of the dressing tool of present embodiment is schematically shown, (B) of Fig. 1 is the cutaway view that the structure example of the dressing tool of present embodiment is schematically shown.
Fig. 2 is the side view that the use state of the dressing tool of present embodiment is schematically shown.
(A) of Fig. 3 is the stereogram that the structure example of the dressing tool of the 2nd mode is schematically shown, (B) of Fig. 3 is the cutaway view that the structure example of the dressing tool of the 2nd mode is schematically shown.
Label declaration
2: dressing tool; 4: finishing board; 4a: upper surface; 4b: lower surface; 6: support plate; 6a: upper surface; 6b: lower surface; 8: ground floor; 10: the second layer; 12: grinding attachment; 14: main shaft; 16: collar bush; 18: emery wheel; 20: wheel installed part; 22: rotating mechanism; 24: wheel base station; 26: grinding stone; 28: keep platform; 28a: surface.
Detailed description of the invention
Below, with reference to accompanying drawing, embodiments of the present invention are described.(A) of Fig. 1 is the stereogram that the structure example of the dressing tool of present embodiment is schematically shown, (B) of Fig. 1 is the cutaway view that the structure example of the dressing tool of present embodiment is schematically shown.
As shown in Figure 1, the dressing tool 2 of present embodiment has and is formed as smooth discoid finishing board 4.On the lower surface 4b of finishing board 4, be bonded with the support plate 6 of supporting finishing board 4.
Support plate 6 is formed by materials such as resins.In addition, support plate 6 is formed as diameter than large discoid of finishing board 4, makes it possible to support finishing board 4 all.
Finishing board 4 comprises the ground floor 8 of the lower surface 4b side on the upper surface 6a that is bonded in support plate 6 and at least two kinds of such layers of the second layer 10 of upper surface 4a side.By making this finishing board 4 and emery wheel 18 (with reference to Fig. 2) rotation and grinding stone 26 (with reference to Fig. 2) being pressed on the upper surface 4a of finishing board 4, grinding stone 26 is repaired.
For example, use the composite material that mixes the abrasive particle such as white fused alumina (WA), green carbon (GC) in the bond materials such as pottery, thermosetting resin to form the second layer 10 of upper surface 4a side.Wherein, according to the structure of grinding stone 26 etc., the bond material and the abrasive particle that form the second layer 10 are changed.
The ground floor 8 of lower surface 4b side at least and the second layer 10 between border near region (below for borderline region) there is the structure similar to the second layer 10.Specifically, the borderline region of ground floor 8 is abrasive grain layers of comprising abrasive particle identical with the second layer 10.Wherein, the form and aspect shown in this abrasive grain layer are different from the form and aspect shown in the second layer 10.Other regions of ground floor 8 become the non-abrasive grain layer that does not comprise abrasive particle.
Like this, make the borderline region of ground floor 8 comprise abrasive particle, thereby even if the upper surface 4a side of the finishing board 4 that along with the abrasion of finishing board 4, ground floor 8 is exposed to contact with grinding stone 26 also can suitably be proceeded finishing process.In addition, also can in ground floor 8 all, comprise abrasive particle.
In one or both of ground floor 8 and the second layer 10, add the pigment etc. of giving regulation form and aspect (color).Specifically, in one or both of ground floor 8 and the second layer 10, add pigment etc., make the form and aspect shown in ground floor 8 different with the form and aspect shown in the second layer 10.
In addition, the thickness of ground floor 8 and the second layer 10 is adjusted to, and in the time that dressing tool 2 arrives operating limit, ground floor 8 is exposed to the upper surface 4a side of the finishing board 4 contacting with grinding stone 26.Thus, the form and aspect of the ground floor 8 exposing according to the upper surface 4a side at finishing board 4, can easily recognize dressing tool 2 and arrive operating limit.
Ground floor 8 and the second layer 10 are preferably configured to the bright color that at least one party illustrates that lightness is higher.In addition, ground floor 8 and the second layer 10 are preferably configured at least one party any one party in red, blue, green are shown.Because the visuognosis of this color is higher, be therefore applicable to the purposes of identification operating limit.
Can manufacture above-mentioned finishing board 4 by the manufacture method similar to the manufacture method of finishing board in the past.For example, can in above-mentioned composite material, add any pigment and independent moulding ground floor 8 and the second layer 10, after their are linked, carry out sintering, manufacture thus the finishing board 4 of present embodiment.In addition, also can and carry out after sintering at separately moulding ground floor 8 and the second layer 10, utilize bonding agent etc. to carry out bonding to them.
Then, the finishing process of the grinding stone 26 of the dressing tool 2 to use present embodiment describes.Fig. 2 is the side view that the use state of the dressing tool of present embodiment is schematically shown.
As shown in Figure 2, the grinding attachment 12 using in finishing process has main shaft 14 is supported to the collar bush cylindraceous 16 for rotating.The support column (not shown) that collar bush 16 is arranged on grinding attachment 12 by travel mechanism (not shown) is upper, moves up at upper and lower.
Be fixed with the wheel installed part 20 of assembling emery wheel 18 in the lower end side of main shaft 14.Be linked with the rotating mechanism 22 that comprises motor etc. in the upper end side of main shaft 14, the emery wheel 18 being assemblied on wheel installed part 20 rotates by the revolving force transmitting from rotating mechanism 22.
Emery wheel 18 has the base station 24 of taking turns cylindraceous being formed by aluminium, stainless steel and other metal materials.Take turns on the circular lower surface of base station 24 at this, on whole circumference, be fixed with multiple grinding stone 26.
Below wheel installed part 20, be provided with and keep platform 28.Keep the rotating mechanisms (not shown) such as platform 28 and motor to link, be rotated around the rotating shaft parallel with the direction of principal axis of main shaft 14.
Keep the surperficial 28a of platform 28 to become the maintenance face of the machined objects such as attracting holding wafer.On maintenance face, act on by the stream (not shown) keeping the inside of platform 22 to form the negative pressure that has attraction source (not shown), produce the attraction that attracts machined object.
On this maintenance platform 28, adsorb under the state of lower surface 6b side of support plate 6, make emery wheel 18 and keep platform 28 to rotate, collar bush 16 is declined.If regulate the slippage of collar bush 16, make the lower surface of grinding stone 26 (front end) be pressed on the upper surface 4a of finishing board 4, grinding stone 26 is repaired.
In the time that the finishing of the grinding stone 26 by above-mentioned wears away finishing board 4, the second layer 10 attenuation gradually.In the time that dressing tool 2 arrives operating limit and loses the second layer 10 completely, expose in the upper surface 4a of finishing board 4 side the ground floor 8 that form and aspect are different from the form and aspect of the second layer 10.
As mentioned above, the dressing tool 2 of present embodiment has by the ground floor 8 of different form and aspect and the finishing board 4 that the second layer 10 forms are shown, therefore can correctly identify dressing tool 2 according to the form and aspect of finishing board 4 and whether arrive operating limit.
In addition, the invention is not restricted to the record of above-mentioned embodiment, can carry out various changes and implement.For example, in the above-described embodiment, make ground floor 8 identical with the diameter of the second layer 10, make in the time that dressing tool 2 arrives operating limit to expose ground floor 8 in upper surface 4a side all, but the structure of dressing tool 2 is not limited to this.
(A) of Fig. 3 is the stereogram that the structure example of the dressing tool of the 2nd mode is schematically shown, (B) of Fig. 3 is the cutaway view that the structure example of the dressing tool of the 2nd mode is schematically shown.In addition, in Fig. 3 (A), in order to understand the shape etc. of ground floor 8, utilize the profile etc. that is shown in dotted line ground floor 8.And (B) of Fig. 3 illustrates the AA ' cross section of Fig. 3 (A).
As shown in Figure 3, the dressing tool 2 of the 2nd mode has finishing board 4, and this finishing board 4 comprises discoid three ground floors 8 and covers the discoid second layer 10 of ground floor 8.The second layer 10 is formed as thicker than ground floor 8 and diameter is larger than ground floor 8.
Ground floor 8 with the mode of the surperficial 6a side contacts of support plate 6, be configured in the lower surface 4b side of finishing board 4.In this structure, in the time that finishing board 4 wears away, only in a part for upper surface 4a side, expose ground floor 8.
In addition, the dressing tool that comprises three ground floors 82 shown in Figure 3, but the quantity of the ground floor 8 comprising in finishing board 4 is not particularly limited.In addition, the flat shape of ground floor 8 and the second layer 10 is also not particularly limited, for example, can be also ellipse, polygon etc.
In addition, dressing tool 2 of the present invention can use with the object that is shaped as of grinding stone 26, also can use taking the dressing of grinding stone 26 as object.In the shaping purposes of grinding stone 26, use the finishing board 4 that comprises the abrasive particle that size is larger, in the dressing purposes of grinding stone 26, use the finishing board 4 that comprises the smaller abrasive particle of size.
And, only otherwise depart from object scope of the present invention, can suitably change to implement structure, the method etc. of above-mentioned embodiment.
Claims (2)
1. a dressing tool, its grinding stone to emery wheel is repaired, and this dressing tool is characterised in that to have:
Finishing board, it is repaired this grinding stone; And
Support plate, this finishing board is fixed on the upper surface of this support plate,
This finishing board is made up of the second layer that is bonded in the ground floor on this support plate and be ground by this grinding stone,
This ground floor and this second layer illustrate different form and aspect,
Ground floor, because the abrasion of this second layer are exposed, can be identified operating limit by color thus.
2. dressing tool according to claim 1, is characterized in that,
The described second layer comprises abrasive particle,
Described ground floor is made up of the abrasive grain layer that comprises abrasive particle contacting with this second layer and the non-abrasive grain layer that do not comprise abrasive particle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013100084A JP2014217935A (en) | 2013-05-10 | 2013-05-10 | Dressing tool |
| JP2013-100084 | 2013-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104139336A true CN104139336A (en) | 2014-11-12 |
Family
ID=51848761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410186905.2A Pending CN104139336A (en) | 2013-05-10 | 2014-05-05 | A trimming tool |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2014217935A (en) |
| CN (1) | CN104139336A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111633479A (en) * | 2020-06-15 | 2020-09-08 | 郑州磨料磨具磨削研究所有限公司 | Method for repairing scribing cutter for gallium arsenide wafer |
| CN111823140A (en) * | 2019-04-15 | 2020-10-27 | 株式会社迪思科 | Dressing tool |
| CN112589676A (en) * | 2019-10-02 | 2021-04-02 | 株式会社迪思科 | Dressing tool |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6732381B2 (en) * | 2016-10-03 | 2020-07-29 | 株式会社ディスコ | Cutting equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01222863A (en) * | 1988-02-29 | 1989-09-06 | Honda Motor Co Ltd | Method for forming grinding wheel in thread groove grinding |
| JPH11239976A (en) * | 1998-02-24 | 1999-09-07 | Nissan Motor Co Ltd | Vitrified super abrasive grain grinding wheel |
| JP2009142906A (en) * | 2007-12-11 | 2009-07-02 | Disco Abrasive Syst Ltd | Dresser board and dressing method |
| CN201283536Y (en) * | 2008-10-21 | 2009-08-05 | 上海华虹Nec电子有限公司 | Grinding pad |
| CN102341215A (en) * | 2009-03-24 | 2012-02-01 | 圣戈班磨料磨具有限公司 | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3049921U (en) * | 1997-12-18 | 1998-06-30 | 旭ダイヤモンド工業株式会社 | Super abrasive wheel |
| JP2003220563A (en) * | 2002-01-28 | 2003-08-05 | Noritake Super Abrasive:Kk | Vitrified bonded wheel |
-
2013
- 2013-05-10 JP JP2013100084A patent/JP2014217935A/en active Pending
-
2014
- 2014-05-05 CN CN201410186905.2A patent/CN104139336A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01222863A (en) * | 1988-02-29 | 1989-09-06 | Honda Motor Co Ltd | Method for forming grinding wheel in thread groove grinding |
| JPH11239976A (en) * | 1998-02-24 | 1999-09-07 | Nissan Motor Co Ltd | Vitrified super abrasive grain grinding wheel |
| JP2009142906A (en) * | 2007-12-11 | 2009-07-02 | Disco Abrasive Syst Ltd | Dresser board and dressing method |
| CN201283536Y (en) * | 2008-10-21 | 2009-08-05 | 上海华虹Nec电子有限公司 | Grinding pad |
| CN102341215A (en) * | 2009-03-24 | 2012-02-01 | 圣戈班磨料磨具有限公司 | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111823140A (en) * | 2019-04-15 | 2020-10-27 | 株式会社迪思科 | Dressing tool |
| CN111823140B (en) * | 2019-04-15 | 2024-02-20 | 株式会社迪思科 | Dressing tool |
| TWI834863B (en) * | 2019-04-15 | 2024-03-11 | 日商迪思科股份有限公司 | Dressing tools |
| CN112589676A (en) * | 2019-10-02 | 2021-04-02 | 株式会社迪思科 | Dressing tool |
| CN112589676B (en) * | 2019-10-02 | 2024-02-06 | 株式会社迪思科 | Dressing tool |
| CN111633479A (en) * | 2020-06-15 | 2020-09-08 | 郑州磨料磨具磨削研究所有限公司 | Method for repairing scribing cutter for gallium arsenide wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2014217935A (en) | 2014-11-20 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141112 |