CN104131261B - A kind of vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s - Google Patents
A kind of vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s Download PDFInfo
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- CN104131261B CN104131261B CN201410322904.6A CN201410322904A CN104131261B CN 104131261 B CN104131261 B CN 104131261B CN 201410322904 A CN201410322904 A CN 201410322904A CN 104131261 B CN104131261 B CN 104131261B
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Abstract
A kind of vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s, it is installed above in rotating shaft upper end that the film-thickness monitoring main frame of the present invention is positioned at body of heater top board, crystal oscillator probe is arranged on workpiece rotating frame, electric lead and the holding wire of crystal oscillator probe seal from the cavity of the hollow on the top of rotating shaft and pass body of heater, chilled(cooling) water return (CWR) seals from the cavity of the hollow of the bottom of rotating shaft and passes body of heater, i.e. present invention achieves separately transmitting of crystal oscillator probe water power.Chilled(cooling) water return (CWR) and electric lead and holding wire that the present invention pops one's head in crystal oscillator separate respectively from the bottom of body of heater power transmission shaft and top transmission, change and prior art concentrates on the mode that power transmission shaft top is transmitted, electricity separation transmission, the above-mentioned numerous and jumbled structure of front propeller shaft simplified, be conducive to the reliability of raising equipment, reduce fault rate.
Description
Technical field
The present invention relates to the vacuum optical coating system of a kind of dynamically Thickness Monitoring in place, have with workpiece particularly to one
The full-automatic optical coater of the Thickness Monitoring device in real time in place of motion.
Background technology
Optical coating system coating process many employings quartz crystal film thickness gauge (abbreviation film thickness gauge) monitoring Thickness Variation is the most traditional
Using method be the plating material in earthenware heated evaporate from bottom to top, be deposited on above workpiece on, now film thickness gauge
Quartz crystal probe (being called for short probe) is typically mounted at one, furnace roof central authorities not with on the fixed position of workpiece motion s, by transmission
Wire is delivered to thickness signal on the film thickness gauge main frame outside stove.
The most traditional this method above stove that probe is fixed on, installs, transmits and uses the easiest, but only fit
The type of furnace plated for evaporating film from bottom to top, and represent the film thickness value of whole stove each point with the film thickness value of this stove furnace roof central point, by mistake
Difference is bigger.
Occurred in that workpiece hung by vertical dress, the vertical layout of earthenware is from side oblique evaporation direction later, or used vertical sputtering target
Carrying out sputtering sedimentation, probe in stretching into stove at close workpiece the most instead, and side is contained on a motionless fixed position, carries out thickness
Monitoring, represents whole stove with the thickness information of this fixed point and moves the thickness of workpiece, and this mode equally exists big the asking of error
Topic.
Recently, vertical dress hang workpiece optics plating mould machine on occurring in that crystal oscillator probe be fixed on by workpiece, along with work
The method of the dynamically thickness measuring in place that part pivoted frame moves together, although be also the thickness representing whole furnaceman's part with the thickness measuring value of a bit,
But as long as thickness measuring point is selected in uniform coated district, the thickness on moving probe is basically identical with workpiece thickness, this mode
The precision of monitoring is greatly improved.The difficulty that this method realizes is its probe electric lead and the extraction of holding wire and its cooling
The process of water loop turnover body of heater.
A kind of existing method is by installing a set of vacuum-packed rotating shaft system in position, furnace roof axis, by furnace roof outside
The actuating unit drive shaft put rotates, and film thickness gauge main frame is fixed on rotating shaft by pallet and passes on the upper surface of furnace roof, in stove
Workpiece rotating frame be fixed on the bottom of rotating shaft, workpiece rotating frame and calibrator main frame are with rotating shaft synchronous axial system.The electric lead of probe
Being turned by axle with holding wire in the sealing structure at middle part and draw, probe is with pivot, but relative to workpiece rotating frame and calibrator
Main frame is motionless.
Probe chilled(cooling) water return (CWR) must configure the swivel rotated with rotating shaft, with particular design process allow into,
Return pipe is sealed by vacuum from the axis of rotating shaft and passes body of heater, then by the outer motionless water supply and return system of swivel and stove
It is connected.
Calibrator main frame uses battery to power, but timing must change battery.The test result of calibrator main frame is passed through
WiFi is wirelessly transmitted to the other computer system of stove and carries out showing, process and receiving the feedback control of computer system.
The method of this dynamically thickness measuring in place has the most progressive, but following not ideal enough part: (1) calibrator
Main frame and probe electric lead and holding wire are drawn, the turnover of the chilled(cooling) water return (CWR) of probe, the drive connection of workpiece rotating frame, stove in stove
The drive mechanism of outer power, vacuum dynamic seal etc. all concentrate on rotating shaft and are positioned in the structure of furnace roof section, cause the top of rotating shaft to be tied
Structure crowded numerous and jumbled, reliability is low, easily break down；(2) vibration of workpiece rotating frame kinetic stability difference is big, affects film thickness measuring
Precision and repeatability；(3) calibrator main frame needs to regularly replace supplying cell.
Summary of the invention
The technical problem to be solved be to provide a kind of simple and reliable for structure can dynamic Thickness Monitoring in place
Vacuum optical coating system.
The above-mentioned technical problem of the present invention solves by following technical solution: a kind of dynamically monitoring in place with workpiece motion s
The vacuum optical coating system of thickness, including body of heater, rotating shaft, workpiece rotating frame, rotating shaft drive mechanism, crystal oscillator probe and film-thickness monitoring
Main frame, described body of heater is made up of furnace wall, furnace body chassis and body of heater top board, and rotating shaft is mounted vertically in the middle part of body of heater, and upper and lower end is respectively
Sealing with described body of heater top board, furnace body chassis and install, rotating shaft upper end passes described body of heater top board, and film-thickness monitoring main frame is positioned at institute
Stating body of heater top board installed above in described rotating shaft upper end, workpiece rotating frame is arranged in described rotating shaft and is positioned at furnace interior, and crystal oscillator is visited
Head is arranged on described workpiece rotating frame, and its electric lead and holding wire seal and pass described body of heater and described film-thickness monitoring main frame phase
Even, its chilled(cooling) water return (CWR) seals the swivel joint passing described body of heater and be connected outside water supply and return system and is connected, and rotating shaft drives machine
Structure be connected with described rotating shaft outside body of heater drive shaft rotate, described workpiece rotating frame, film-thickness monitoring main frame and crystal oscillator probe
With described rotating shaft synchronous axial system；
All have the cavity of hollow inside the upper and lower of described rotating shaft, the electric lead of described crystal oscillator probe and holding wire from
Sealing in the cavity of the described hollow on the top of described rotating shaft and pass described body of heater, described chilled(cooling) water return (CWR) is from described rotating shaft
The cavity of the described hollow in portion seals and passes described body of heater, i.e. realize separately transmitting of water power, be conducive to simplifying prior art
Middle circuit, water route exist together to pass in and out and mix intensive structure, in order to improve reliability and reduce fault rate.
Described rotating shaft is by the lower drive shaft being sequentially connected from bottom to top, upwards transmission connection piece, Hooks coupling universal coupling, upper extension
Rotating shaft and upper power transmission shaft composition, the cavity of described hollow is positioned at inside described lower drive shaft and upper power transmission shaft, described workpiece rotating frame
Being arranged on described lower drive shaft, described rotating shaft drive mechanism and described lower drive shaft pass the lower end phase of described furnace body chassis
Even, rotating shaft drive mechanism directly drives lower drive shaft and workpiece rotating frame to rotate, and is conducive to improving the kinetic stability of workpiece rotating frame
And vibrate little, utilize Hooks coupling universal coupling upwards transmission, while Hooks coupling universal coupling ensures upper and lower power transmission shaft synchronous axial system simultaneously
Can automatically adapt to the deviation of upper and lower power transmission shaft centering.
The cavity of the hollow within described lower drive shaft one section of diameter near its upper surface increases, for enlarged cavity, described
Upwards it is fixed on the upper surface of described lower drive shaft, the end of described upwards transmission connection piece the sealing bottom surface of transmission connection piece
Mask has the stripper loop stretching into described enlarged cavity, is provided with a water inlet pipe in the cavity of the hollow within described lower drive shaft,
Annular backwater road, described water inlet is formed between the inwall of the cavity of the hollow within described water inlet pipe outer wall and described lower drive shaft
The upper end of pipe is stretched into inside described stripper loop, is connected by movable sealing structure, makes between its outer wall and the inwall of described stripper loop
Be internally formed intake antrum at described stripper loop, and between described enlarged cavity and described stripper loop, form backwater cavity, described upwards
Two passages connected respectively are also had with described intake antrum and described backwater cavity on transmission connection piece, and by the two passage
Inlet pipeline and the water return pipeline popped one's head in described crystal oscillator respectively are connected, inside the lower end of described water inlet pipe and described lower drive shaft
The lower port of cavity of hollow be connected with described swivel joint.
Described movable sealing structure is by the pressure pad set gradually from top to bottom, movable sealing, transmission spacer ring, deep groove ball bearing, biography
Dynamic spacer ring, movable sealing, pressure pad composition, this movable sealing structure upper end is by the annular flange flange being positioned on described stripper loop inwall, lower end
It is pressed on inside described stripper loop by the compaction plug being arranged on described stripper loop opening inwall.
Described rotating shaft drive mechanism is made up of motor and synchronization wheel drive mechanism, and this kind of drive stable drive is shockproof, has
It is beneficial to improve accuracy and the repeatability of monitoring.
The power end of described film-thickness monitoring main frame passes through copper ring-carbon brush mechanism and is electrically connected outward, described copper ring-carbon brush machine
Structure has three copper rings and three carbon brush, and three described copper rings are arranged concentrically around described upper power transmission shaft, three described carbon brush with
Three described copper rings are relative one by one, and the elastic force effect lower front end of carbon brush spring in its back-end is against on described copper ring；
Described copper ring is arranged on described upper power transmission shaft with upper power transmission shaft synchronous axial system, and described carbon brush position is fixedly mounted
Above described body of heater top board, the power end of described film-thickness monitoring main frame is connected with described copper ring, by described carbon brush with outer
It is electrically connected；
Or described carbon brush is arranged on described upper power transmission shaft with upper power transmission shaft synchronous axial system, described copper ring position is pacified regularly
Being contained in described body of heater top board over and insulated, the power end of described film-thickness monitoring main frame is connected with described carbon brush, passes through
Described copper ring be electrically connected outward.
Film-thickness monitoring main frame is powered by copper ring-carbon brush mechanism, instead of battery powered mode, nothing in prior art
Battery need to be regularly replaced, make the film-thickness monitoring main frame can long time continuous working.
Described copper ring and carbon brush are covered by a protective cover being arranged on described body of heater top board.
Described film-thickness monitoring main frame passes through WiFi wireless transport module and the computer communication being positioned near body of heater.
Described lower drive shaft is arranged on described furnace body chassis by underdrive axle bed, and described underdrive axle bed is that two ends are opened
The tubular of mouth, is sleeved on described lower drive shaft, outer wall has the annular flange flange extended radially outwardly, and by this convex annular
In the middle part of edge and described furnace body chassis, the edge seal of perforate is fixed, and described underdrive axle bed inwall has at its upper end open
One annular flange flange, this annular flange flange has a thrust bearing, and described thrust bearing is convex by described lower drive shaft outer wall
Going out in the described annular flange flange that structure is fitted in below, the lower section of described underdrive axle bed inner annular flange depends on from top to bottom
The secondary packing ring, movable sealing, underdrive spacer ring, deep groove ball bearing, bearing sleeve, deep groove ball bearing, underdrive spacer ring, dynamic close of being provided with
Envelope, and by underdrive axle bed gland, above-mentioned each compressing parts is passed under described at the lower ending opening of described underdrive axle bed
In the inner chamber of moving axis seat, it is ensured that can also realize light and handy while of realizing vacuum-packed between lower drive shaft and described underdrive axle bed
Rotate neatly.
Described upper power transmission shaft is arranged on described body of heater top board by upper drive axle seat, and described upper drive axle seat is tubular,
Having perforate, upper power transmission shaft is arranged on inside drive axle seat, and lower end is from the perforate at the bottom of described upper drive axle seat cylinder at cylinder the end
In pass, there is at upper drive axle seat upper end open the flanging of level, upper drive axle seat is by described flanging and described stove
In the middle part of body top board, the edge seal of perforate is fixed, between inwall and the outer wall of described upper power transmission shaft of upper drive axle seat from bottom to up
Being sequentially provided with deep groove ball bearing, transmission spacer ring, movable sealing, transmission spacer ring, deep groove ball bearing, these lower are bearing in described
On at the bottom of the cylinder of upper drive axle seat, inside and outside both sides, upper end respectively by the annular, outer structure being positioned on described upper power transmission shaft outer wall and
It is arranged on the bearing trim ring at described upper drive axle seat upper end open to compress.
Relative to prior art, there is advantages that 1) present invention chilled(cooling) water return (CWR) that crystal oscillator is popped one's head in
And electric lead and holding wire separate respectively from lower drive shaft and the upper power transmission shaft transmission of body of heater, change in prior art and concentrate
In the mode that upper power transmission shaft transmits, electricity separation transmission, simplify and go up the structure that power transmission shaft is numerous and jumbled before, be conducive to improving equipment
Reliability, reduce fault rate；
2) using Hooks coupling universal coupling to connect between upper and lower power transmission shaft, Hooks coupling universal coupling can adapt to upper and lower power transmission shaft pair automatically
In deviation, it is ensured that upper and lower power transmission shaft synchronous axial system；
3) driving of rotating shaft have employed motor and synchronizes wheel drive mechanism, taken turns by synchronization and synchronize between wheel belt teeth and
The shockproof feature of kind of drive stable drive of teeth groove precision engagement, improves accuracy and the repeatability of monitoring；
4) inventive film apparatus for controlling thickness main frame passes through copper ring-carbon brush mechanism and is electrically connected outward, replaces electricity of the prior art
Pond power supply mode, make film-thickness monitoring main frame can long time continuous working, need not periodically shut down replacing battery.
Accompanying drawing explanation
Fig. 1 is the primary structure schematic diagram of the vacuum optical coating system of present pre-ferred embodiments；
Fig. 2 is the enlarged drawing of vacuum optical coating system part A in Fig. 1；
Fig. 3 is the enlarged drawing of vacuum optical coating system C portion in Fig. 1；
Fig. 4 is the enlarged drawing of vacuum optical coating system part B in Fig. 1.
Detailed description of the invention
The primary structure schematic diagram of the vacuum optical coating system of Fig. 1 the present embodiment.As it is shown in figure 1, vacuum optical coating system,
Including body of heater, rotating shaft, workpiece rotating frame 5, rotating shaft drive mechanism, crystal oscillator probe 6 and film-thickness monitoring main frame 73.Body of heater by furnace wall 3,
Furnace body chassis 2 and body of heater top board 7 form, supported by furnace body support 1 below body of heater, and furnace wall 3 is provided with and is connected with vacuum pump set
Bleeding point 4, in order to when plated film by body of heater in be evacuated.Rotating shaft is mounted vertically in the middle part of body of heater, by phase the most successively
Lower drive shaft 21 even, upwards transmission connection piece 37, Hooks coupling universal coupling 11, upper extension rotating shaft 9 and upper power transmission shaft 52 form, and are positioned at
The upper end of the upper power transmission shaft 52 on rotating shaft top passes body of heater top board 7 and is sealingly mounted on body of heater top board 7, is positioned at rotating shaft bottom
The lower end of lower drive shaft 21 passes furnace body chassis 2 and is sealingly mounted on furnace body chassis 2.Film-thickness monitoring main frame 73 is positioned at body of heater
Top board 7 upper end at upper power transmission shaft 52 installed above, workpiece rotating frame 5 is arranged on lower drive shaft 21 and is positioned at furnace interior, to be plated
The workpiece dress of film hangs on the side of workpiece rotating frame 5, and workpiece surfacing, towards furnace wall 3, accepts the sudden plating material in furnace body inside face and sinks
Long-pending.Crystal oscillator probe 6 is fixed on the side of workpiece rotating frame 5, and the crystal-vibration-chip surface of crystal oscillator probe 6 need to be in same with the surfacing of workpiece
In plane.The internal cavity being hollow of upper power transmission shaft 52 and lower drive shaft 21, the electric lead of crystal oscillator probe 6 and holding wire 8 from
The cavity of the hollow within upper power transmission shaft 52 passes body of heater hermetically be connected with film-thickness monitoring main frame 73.10 is magnetron sputtering
Target (can also select the earthenware of vertical layout in other embodiments as plating material evaporation source), and it is typically mounted at furnace interior
At furnace wall 3, for orienting sputtering target material to stove central axis direction, in order at surface of the work deposited plating layer to be plated.12 is crystal oscillator
The inlet pipeline of probe 6 and water return pipeline.Rotating shaft drive mechanism is positioned at below body of heater, by motor 14 and synchronization wheel drive mechanism group
Becoming, motor 14 is arranged on furnace body support 1, and it drives lower drive shaft 21 to rotate by synchronizing wheel drive mechanism, and 13 for synchronizing wheel
The synchronization wheel belt of drive mechanism.
Fig. 2 is mainly the enlarged drawing of part A in Fig. 1, and 21 is lower drive shaft, and 26 is underdrive axle bed, and lower drive shaft 21 leads to
Cross that underdrive axle bed 26 is rotating to be sealingly mounted on furnace body chassis 2.The underdrive axle bed 26 tubular in both ends open, suit
On lower drive shaft 21, outer wall has the annular flange flange extended radially outwardly, and by this annular flange flange and furnace body chassis 2
The edge of portion's perforate seals fixing by vaccum seal ring 29, screw.Underdrive axle bed 26 inwall has at its upper end open
Having an annular flange flange, this annular flange flange has a thrust bearing 34, thrust bearing 34 is convex by lower drive shaft 21 outer wall
Go out structure press-fit below in described annular flange flange.The lower section of underdrive axle bed 26 inner annular flange is the most successively
It is provided with packing ring 33, movable sealing 32, underdrive spacer ring 31, deep groove ball bearing 30, bearing sleeve 28, deep groove ball bearing 27, passes down
Dynamic spacer ring 25, movable sealing 24, and load onto underdrive axle bed gland 23 general by screw at the lower ending opening of underdrive axle bed 26
Above-mentioned each compressing parts is in the inner chamber of underdrive axle bed 26.Above-mentioned bearing, movable sealing are ensureing lower drive shaft 21 and underdrive
Can also realize the while of realizing vacuum-packed between axle bed 26 lightly rotating neatly.
Synchronize that wheel drive mechanism includes being arranged on lower drive shaft 21 synchronizes wheel 22, is arranged on the outfan of motor 14
Rotating shaft wheel (not shown) and the synchronization wheel belt 13 being wrapped on synchronization wheel 22 and described rotating shaft wheel, synchronize wheel belt 13 and synchronization wheel 22
And described rotating shaft wheel is engaged by accurate teeth and tooth slot structure, stable drive and there is shockproof effect.
The chilled(cooling) water return (CWR) composition structure of crystal oscillator probe 6 is as follows: the cavity of the hollow within lower drive shaft 21 is on it
One section of diameter of end face increases, for enlarged cavity.Upwards the underrun vaccum seal ring 36 of transmission connection piece 37 is fixed hermetically
On the upper surface of lower drive shaft 21, upper end is connected with telescopic Hooks coupling universal coupling 11, the rotation of lower drive shaft 21 upwards
Extend rotating shaft 9 to transmit.Telescopic Hooks coupling universal coupling 11 can be automatically adjusted the alignment deviation adapting to upper and lower power transmission shaft 52,21.Under
The edge of power transmission shaft 21 upper surface fixedly mounts with the chassis 35 of workpiece rotating frame 5.Upwards the bottom surface of transmission connection piece 37 has and stretches
Enter the stripper loop of described enlarged cavity, the cavity of the hollow within lower drive shaft 21 is provided with a water inlet pipe 18, water inlet pipe 18
Between the inwall of the cavity of the hollow within outer wall and lower drive shaft 21 formed annular backwater road 20, water inlet pipe 18 be internally formed into
Water channel 19, the upper end of water inlet pipe 18 stretches into inside described stripper loop, as it is shown on figure 3, the inwall of its outer wall and described stripper loop it
Between by by the pressure pad 42 being sleeved on the most successively on lower drive shaft 21, movable sealing 43, transmission spacer ring 44, deep groove ball bearing
45, transmission spacer ring 46, movable sealing 47, the movable sealing structure of pressure pad 48 composition are connected, and this movable sealing structure upper end is described by being positioned at
Annular flange flange, lower end on stripper loop inwall are pressed on described point by the compaction plug 49 being arranged on described stripper loop opening inwall
Inside spacer ring, make to be internally formed intake antrum 41 at described stripper loop, and formed back between described enlarged cavity and described stripper loop
Water cavity 50, upwards also has two passages connected respectively with described intake antrum 41 and described backwater cavity 50 on transmission connection piece 37
40,38, and be connected with inlet pipeline and the water return pipeline 12 of crystal oscillator probe 6 respectively by the two passage 40,38, water inlet pipe 18
Lower end and lower drive shaft 21 within the lower port of cavity of hollow be connected with swivel joint 17.In within lower drive shaft 21
The muzzle that goes out in the i.e. annular backwater road 20 of the lower port of empty cavity is ined succession swivel joint 17, make this part of swivel joint 17 with under
Power transmission shaft 21 rotates, and by motionless cooling water faucet 16 side joint of swivel joint 17 and outside water supply and return system, water inlet
It is internal that pipe 18 stretches into swivel joint 17, by swivel joint 17 and the outside water supply and return system being connected with swivel joint 17 by lower section
Elbow water inlet tap 15 be connected.
As shown in Figure 4, upper power transmission shaft 52 is arranged on body of heater top board 7 by upper drive axle seat 53.Upper power transmission shaft 52 is in two
The tubular of end opening, nozzle position, upper end has the flanging of level, and upper extension rotating shaft 9 is welded on by screw and upper power transmission shaft
52 bottom surfaces are fixed on the end plate 51 of connection, end plate 51 upper shed hole, and electric lead and the holding wire 8 of crystal oscillator probe 6 are entered by this hole
In the cavity of upper power transmission shaft 52 inner hollow.
Upper drive axle seat 53 also in tubular, at the bottom of cylinder in the middle part of there is perforate, upper power transmission shaft 52 is arranged in drive axle seat 53
Portion, lower end passes from the perforate at the bottom of upper drive axle seat 53, also has turning up of level at upper drive axle seat 53 upper end open
Limit, upper drive axle seat 53 seals solid by the edge of perforate in the middle part of this flanging and body of heater top board 7 by vaccum seal ring 59
Fixed, between inwall and the outer wall of upper power transmission shaft 52 of upper drive axle seat 53, closed assembly has deep groove ball bearing 54, passes the most successively
Dynamic spacer ring 55, movable sealing 56, transmission spacer ring 57, deep groove ball bearing 58, these lower are bearing in the cylinder of drive axle seat 53
, inside and outside both sides, upper end are respectively by the annular outer structure being positioned on upper power transmission shaft 52 outer wall and be arranged on upper drive axle seat at the end
Bearing trim ring 60 at 53 upper end open compresses.It is provided with adjacent with the inwall of upper drive axle seat 53 at the bottom of the cylinder of upper drive axle seat 53
One circle projection, deep groove ball bearing 58 is bearing in this circle projection, in order to the inner side making deep groove ball bearing 58 is unsettled, it is to avoid rotating
Time rub at the bottom of the cylinder of upper drive axle seat 53.
The upper power transmission shaft side pressure lid 69 edge method by vaccum seal ring 68 with the upper surface upper end open of upper power transmission shaft 52
Blue connection, crystal oscillator probe lead wire seat 70 is sealingly mounted at the middle part of power transmission shaft side pressure lid 69, and crystal oscillator probe lead wire seat 70 is film
The special spare unit of apparatus for controlling thickness main frame 73, have sealing function, and the electric lead of crystal oscillator probe 6 and holding wire 8 are by passing through this seat in body of heater
Outside extraction stove, it is connected with holding wire terminal 74 with the probe electric wire of film-thickness monitoring main frame 73.
Connect electrolytic copper ring insulating base 61 to be arranged on the flanging at nozzle position, power transmission shaft 52 upper end by standing screw 72.
Standing screw 72 is longer, and upper end passes and connects electrolytic copper ring insulating base 61, connects being horizontally disposed with above electrolytic copper ring insulating base 61 with being positioned at
Instrument fixed plate 71 be connected, SQC310 film-thickness monitoring main frame 73 is fixed in instrument fixed plate 71.3 insulated from each other around upper
The copper ring 62 that power transmission shaft 52 is arranged concentrically is horizontally mounted at and connects on electrolytic copper ring insulating base 61, and 3 carbon brush 66 are with copper ring 62 one by one
Being oppositely disposed at above copper ring 62, the elastic force effect lower front end of spring 67 is against on copper ring 62 in its back-end, 3 carbon brush 66 points
Not being connected with dispatch from foreign news agency ground wire 64 and power line 65, spring 67 and carbon brush 66 are inlaid on the bottom surface of carbon brush insulating base 63.Protective cover
76 are fixed on body of heater top board 7, and carbon brush insulating base 63 is fixed on protective cover 76, copper ring 62 and carbon brush 66 are covered.Protective cover
76 tops have perforate, and standing screw 72 passes from this perforate.3 copper ring lead terminals 77 are arranged on and connect electrolytic copper ring insulating base
In 61, upper end is connected with 3 copper ring 62 one_to_one corresponding, and power end 75 phase of wire and film-thickness monitoring main frame 73 is drawn in lower end
Even, make the power end of film-thickness monitoring main frame 73 be joined directly together with dispatch from foreign news agency by copper ring 62, carbon brush 66, save battery structure, can
Long time continuous working.Owing to above-mentioned each parts rotate with upper power transmission shaft 52, so being geo-stationary between each parts, do not deposit
In the problem that circuit is wound around.Further it is evident that the position of copper ring and carbon brush can also exchange here.
Equipped with WiFi wireless transport module on film-thickness monitoring main frame 73, host supervision to real-time being sent to of data
In the computer that stove is other.
The above embodiment of the present invention is not limiting the scope of the present invention, and embodiments of the present invention are not limited to
This, according to the foregoing of the present invention, according to ordinary technical knowledge and the customary means of this area, basic without departing from the present invention
Under technological thought premise, to the amendment of other various ways that said structure of the present invention is made, replace or change, all fall within this
Within bright protection domain.
Claims (10)
1., with the vacuum optical coating system of dynamically Thickness Monitoring in place for workpiece motion s, turn including body of heater, rotating shaft, workpiece
Frame, rotating shaft drive mechanism, crystal oscillator probe and film-thickness monitoring main frame, described body of heater is by furnace wall, furnace body chassis and body of heater top board group
Becoming, rotating shaft is mounted vertically in the middle part of body of heater, and upper and lower end seals with described body of heater top board, furnace body chassis respectively and installs, rotating shaft upper end
Passing described body of heater top board, it is installed above in described rotating shaft upper end that film-thickness monitoring main frame is positioned at described body of heater top board, and workpiece turns
Frame is arranged in described rotating shaft and is positioned at furnace interior, and crystal oscillator probe is arranged on described workpiece rotating frame, its electric lead and holding wire
Sealing passes described body of heater and is connected with described film-thickness monitoring main frame, and its chilled(cooling) water return (CWR) seals outside passing described body of heater and being connected
The swivel joint of portion's water supply and return system is connected, and rotating shaft drive mechanism is connected with described rotating shaft outside body of heater and drive shaft turns
Dynamic, described workpiece rotating frame, film-thickness monitoring main frame and crystal oscillator are popped one's head in described rotating shaft synchronous axial system；
It is characterized in that inside the upper and lower of described rotating shaft, all there is a cavity of hollow, the electric lead of described crystal oscillator probe and
Holding wire seals from the cavity of the described hollow on the top of described rotating shaft and passes described body of heater, and described chilled(cooling) water return (CWR) is from described
The cavity of the described hollow of the bottom of rotating shaft seals and passes described body of heater, i.e. realize separately transmitting of water power.
The vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 1, its feature
Being, described rotating shaft is turned by the lower drive shaft being sequentially connected from bottom to top, upwards transmission connection piece, Hooks coupling universal coupling, upper extension
Axle and upper power transmission shaft composition, the cavity of described hollow is positioned at inside described lower drive shaft and upper power transmission shaft, and described workpiece rotating frame is pacified
Being contained on described lower drive shaft, the lower end that described rotating shaft drive mechanism passes described furnace body chassis with described lower drive shaft is connected.
The vacuum optical coating system of the described dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 2, its feature
Being, the cavity of the hollow within described lower drive shaft one section of diameter near its upper surface increases, for enlarged cavity, described upwards
It is fixed on the upper surface of described lower drive shaft, the bottom surface tool of described upwards transmission connection piece the sealing bottom surface of transmission connection piece
There is the stripper loop stretching into described enlarged cavity, the cavity of the hollow within described lower drive shaft is provided with a water inlet pipe, described
Annular backwater road is formed between the inwall of the cavity of the hollow within water inlet pipe outer wall and described lower drive shaft, described water inlet pipe
Upper end is stretched into inside described stripper loop, is connected by movable sealing structure between its outer wall and the inwall of described stripper loop, makes in institute
State stripper loop and be internally formed intake antrum, and between described enlarged cavity and described stripper loop, form backwater cavity, described upwards transmission
Two passages connected respectively are also had with described intake antrum and described backwater cavity on connector, and by the two passage difference
Inlet pipeline and the water return pipeline popped one's head in described crystal oscillator are connected, within the lower end of described water inlet pipe and described lower drive shaft in
The lower port of empty cavity is connected with described swivel joint.
The vacuum optical coating system of the described dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 3, its feature
Be, described movable sealing structure by the pressure pad set gradually from top to bottom, movable sealing, transmission spacer ring, deep groove ball bearing, transmission every
Circle, movable sealing, pressure pad composition, this movable sealing structure upper end by the annular flange flange being positioned on described stripper loop inwall, lower end by pacifying
The compaction plug being contained in described stripper loop opening inwall is pressed on inside described stripper loop.
The vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 2, its feature
Being, described rotating shaft drive mechanism is made up of motor and synchronization wheel drive mechanism.
6. according to the vacuum of the dynamically Thickness Monitoring in place with workpiece motion s described in claim 2～5 any one claim
Optical coating system, it is characterised in that the power end of described film-thickness monitoring main frame passes through copper ring carbon brush mechanism and is electrically connected outward,
Described copper ring carbon brush mechanism has three copper rings and three carbon brush, and three described copper rings are arranged concentrically around described upper power transmission shaft,
Three described carbon brush and three described copper rings are relative one by one, and the elastic force effect lower front end of carbon brush spring in its back-end is against described copper
On ring；
Described copper ring is arranged on described upper power transmission shaft with upper power transmission shaft synchronous axial system, and described carbon brush position is fixedly mounted in institute
Stating above body of heater top board, the power end of described film-thickness monitoring main frame is connected with described copper ring, by described carbon brush and dispatch from foreign news agency phase
Even；
Or described carbon brush is arranged on described upper power transmission shaft with upper power transmission shaft synchronous axial system, described copper ring position is fixedly mounted in
Described body of heater top board is over and insulated, and the power end of described film-thickness monitoring main frame is connected with described carbon brush, by described
Copper ring be electrically connected outward.
The vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 6, its feature
Being, described copper ring and carbon brush are covered by a protective cover being arranged on described body of heater top board.
The vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 7, its feature
Being, described film-thickness monitoring main frame passes through WiFi wireless transport module and the computer communication being positioned near body of heater.
The vacuum optical coating system of the described dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 8, its feature
Being, described lower drive shaft is arranged on described furnace body chassis by underdrive axle bed, and described underdrive axle bed is both ends open
Tubular, be sleeved on described lower drive shaft, outer wall have the annular flange flange extended radially outwardly, and by this annular flange flange
Fixing with the edge seal of perforate in the middle part of described furnace body chassis, described underdrive axle bed inwall has one at its upper end open
Annular flange flange, this annular flange flange has a thrust bearing, and described thrust bearing is by the protrusion on described lower drive shaft outer wall
Structure is fitted in described annular flange flange below, and the lower section of described underdrive axle bed inner annular flange is the most successively
It is provided with packing ring, movable sealing, underdrive spacer ring, deep groove ball bearing, bearing sleeve, deep groove ball bearing, underdrive spacer ring, dynamic close
Envelope, and by underdrive axle bed gland, above-mentioned each compressing parts is passed under described at the lower ending opening of described underdrive axle bed
In the inner chamber of moving axis seat.
The vacuum optical coating system of the described dynamically Thickness Monitoring in place with workpiece motion s the most according to claim 9, its feature
Being, described upper power transmission shaft is arranged on described body of heater top board by upper drive axle seat, and described upper drive axle seat is tubular, at the bottom of cylinder
Middle part has perforate, and upper power transmission shaft is arranged on inside drive axle seat, and lower end is worn from the perforate at the bottom of described upper drive axle seat cylinder
Going out, have the flanging of level at upper drive axle seat upper end open, upper drive axle seat is by described flanging and described body of heater top
In the middle part of plate, the edge seal of perforate is fixed, between inwall and the outer wall of described upper power transmission shaft of upper drive axle seat the most successively
Be provided with deep groove ball bearing, transmission spacer ring, movable sealing, transmission spacer ring, deep groove ball bearing, these lower be bearing in described in upload
On at the bottom of the cylinder of moving axis seat, inside and outside both sides, upper end are respectively by the annular, outer structure being positioned on described upper power transmission shaft outer wall and installation
On described, the bearing trim ring at drive axle seat upper end open compresses.
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| CN201410322904.6A CN104131261B (en) | 2014-07-08 | 2014-07-08 | A kind of vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s |
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| CN201410322904.6A CN104131261B (en) | 2014-07-08 | 2014-07-08 | A kind of vacuum optical coating system of the dynamically Thickness Monitoring in place with workpiece motion s |
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| CN104131261B true CN104131261B (en) | 2016-09-14 |
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Address after: No.2, Longyuan Road, Yanwu, Dalingshan Town, Dongguan City, Guangdong Province 523000 Patentee after: Guangdong Huicheng Vacuum Technology Co.,Ltd. Address before: 523820 Guangdong Province, Dongguan City Dalingshan Town Village fourth industrial zone. Patentee before: DONGGUAN HUICHENG VACUUM TECHNOLOGY Co.,Ltd. |
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