CN104111591B - Multiple movable lens share zero resetting device and the control method of grating scale - Google Patents
Multiple movable lens share zero resetting device and the control method of grating scale Download PDFInfo
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Abstract
A kind of zero resetting device and control method sharing grating scale for the multiple movable lens in lithographic equipment, this device includes: base, N number of movable lens, motor control main control module, signal processing module, driving module, grating scale feedback module, N number of limit induction block and N number of motor, and wherein N 3 is above positive integer.The present invention can realize multiple movable lens at respective movement locus range of motion；Multiple movable lens back to zero accurately and rapidly can be realized, and do not bump against in back to zero process.This invention had both met the requirement that dimensional structure is compact, maintainability is strong, also meets high-precision requirement, has versatility.
Description
Technical field
The present invention relates to lithographic equipment, particularly a kind of multiple movable lens for lithographic equipment shares the zero resetting device of grating scale and control method.
Background technology
Being subject to the traction of social informatization process, integrated circuit obtains and develops rapidly, and optical lithography equipment is the core driver promoting integrated circuit development.In optical lithography equipment, the light that light source sends is via on lithography illuminating system uniform irradiation to mask, and the graphic projection on mask is imaged onto on the photoresist of silicon chip surface by the object lens again through reduction magnification, can realize the duplication of figure.
Illuminator provides Uniform Illumination for mask plane, controls exposure dose and realize light illumination mode, is improve the whole vital ingredient of litho machine performance.For making different mask arrangements obtain more excellent lithography performance in a photolithographic process, different light illumination modes need to be adopted to strengthen photolithography resolution, increasing depth of focus, improve image contrast.In the illumination system, light illumination mode be provided by what the distance changed between multiple movable lens realized, and the movement locus of movable lens exist overlap.Therefore, how to prevent from multiple movable lens from bumping against in initial back to zero process to be particularly important.And prior art does not have multiple movable lens anti-collision technique in back to zero process, therefore, it is necessary to provide zero resetting device and control method that a kind of multiple movable lens do not bump against in back to zero process.
Summary of the invention
It is an object of the invention to provide a kind of multiple movable lens for lithographic equipment and share zero resetting device and the control method of grating scale, described back to zero controls device can realize multiple movable lens at respective movement locus range of motion；Described back to zero control method can realize multiple movable lens back to zero accurately and rapidly, and does not bump against in back to zero process.This invention had both met the requirement that dimensional structure is compact, maintainability is strong, also meets high-precision requirement, has versatility.
The technical solution of the present invention is as follows:
A kind of zero resetting device sharing grating scale for the multiple movable lens in lithographic equipment, it is characterized in that this device includes: base, N number of movable lens, motor control main control module, signal processing module, driving module, grating scale feedback module, N number of limit induction block and N number of motor, and wherein N 3 is above positive integer；
Described base, including N rhizoid bar, is used for bearing N number of movable lens, grating scale feedback module and N number of motor；
Described grating scale feedback module is made up of 1 grating scale, N number of grating ruler reading head, and N number of grating ruler reading head links with N number of movable lens, is respectively used to the detection of N number of movable lens displacement, and the zero-bit of described grating scale is positioned at the centre position of grating scale；Described motor control main control module is connected with N number of motor through described signal processing module, driving module, under the instruction of described motor control main control module, the described corresponding motor of driving module drive drives corresponding screw mandrel to drive the motion of corresponding movable lens, and the described movable lens described in corresponding grating ruler reading head record is in the position of grating scale and inputs described signal processing module.
Utilizing the control method that above-mentioned zero resetting device back to zero is moved, it is characterized in that the method comprises the steps:
1) initial position of N number of movable lens and relative zero-bit are determined:
The initial position of described N number of movable lens is determined by the position of corresponding hardware limit sensor block, the relative zero-bit of described N number of movable lens by the position of zero-bit of the deviation grating scale set in advance,
2) motor control main control module sends limit signal in an orderly manner, and described driving module drives the 1st screw mandrel to drive the 1st movable lens by the 1st motor, and when the 1st movable lens arrives the 1st limit induction block position, the 1st movable lens arrives initial position；Driving the 2nd screw mandrel to drive the 2nd movable lens by the 2nd motor, when the 2nd movable lens arrives the position of the 2nd limit induction block, the 2nd movable lens arrives initial position；..., N motor drives N screw mandrel to drive N movable lens, and when N movable lens arrives the position of N limit induction block, N movable lens arrives initial position N movable lens and arrives initial position；
3) motor control main control module sends back to zero signal in an orderly manner, and described driving module drives N screw mandrel to drive N movable lens by N motor, and N movable lens is found after grating scale zero-bit and arrives the relative zero-bit of N movable lens；..., described driving module drives the 2nd screw mandrel to drive the 2nd movable lens by the 2nd motor, when the 2nd movable lens arrives the relative zero-bit of the 2nd movable lens；Described driving module by the 1st motor drive the 1st screw mandrel drive the 1st movable lens, when the 1st movable lens arrive the 1st movable lens) relative zero-bit；
4) so far all multiple movable lens all arrive respective zero-bit, and the back to zero motion of each movable lens terminates.
Compared with prior art, the technique effect of the present invention is as follows:
Thering is provided a kind of multiple movable lens for lithographic equipment to share grating scale zero resetting device, multiple movable lens share the feedback carrying out movable lens positional information with 1 grating scale, and described control apparatus structure is compact, maintainable by force；
Signal processing module is utilized to make the grating ruler reading head of each movable lens only each self-corresponding hardware limit block be responded, it is thus possible to make multiple movable lens can find the hardware limit position of correspondence in back to zero process, complete the back to zero of multiple movable lens in order and do not bump against；
1 kind of multiple movable lens for lithographic equipment is provided to share grating scale back to zero control method, utilize grating scale zero signal and in conjunction with positive and negative hardware limit signal, can make multiple movable lens in the uncertain situation of initial position, it is achieved multiple movable lens back to zero fast and accurately.
Accompanying drawing explanation
Fig. 1 is that the multiple movable lens of the present invention shares 3 shared grating scale zero resetting device schematic diagrams of movable lens in grating scale zero resetting device preferred embodiment.
Fig. 2 is that the multiple movable lens of the present invention shares signal processing module circuit diagram in grating scale zero resetting device preferred embodiment.
Fig. 3 is the flow chart that the multiple movable lens of the present invention shares grating scale back to zero control method preferred embodiment.
Detailed description of the invention
The zero resetting device of the multiple movable lens of present invention grating scale altogether and control method, can be used in lithographic equipment illuminator, and this illuminator includes at least 3 movable lens, and the movement locus of 3 movable lens exists overlapping region.The zero resetting device of the multiple movable lens present invention proposed below in conjunction with accompanying drawing and specific embodiments grating scale altogether and control method are entered 1 step and are described in detail.
Consult shown in Fig. 1, be that the multiple movable lens of the present invention shares the shared grating scale zero resetting device schematic diagram of multiple movable lens in grating scale zero resetting device preferred embodiment.Described multiple movable lens share grating scale zero resetting device and include base, 3 movable lens, motor control main control module 1, signal processing module 2, drive module 3, grating scale feedback module, 3 hardware limit sensor blocks and 3 motors.
Described base is made up of 3 rhizoid bars.3 described rhizoid bars comprise screw mandrel the 1st screw mandrel 41, screw mandrel the 2nd screw mandrel 42, screw mandrel the 3rd screw mandrel 43；
3 described movable lens comprise the 1st movable lens the 51, the 2nd movable lens the 52 and the 3rd movable lens 53.Wherein the movement locus scope of the 1st movable lens 51 is positioned at b～b ' region, and the movement locus scope of the 2nd movable lens 52 is positioned at c～c ' region, and the movement locus scope of the 3rd movable lens 53 is positioned at d～d ' region；Visible, the 1st movable lens 51 exists overlapping with the 2nd movable lens 52 at c～b ' regional movement track, and the 2nd movable lens 52 exists overlapping with the 3rd movable lens 53 at d～c ' regional movement track.For guaranteeing that the 1st movable lens 51,52 and 53 does not bump against in back to zero process, the 1st movable lens 51,52 and 53 needs to briefly return to the restraining position of correspondence before performing back to zero instruction.1st movable lens the 51, the 2nd movable lens the 52 and the 3rd movable lens 53 is respectively by screw mandrel the 1st screw mandrel 41, screw mandrel the 2nd screw mandrel 42, screw mandrel the 3rd screw mandrel 43 actuation movement.
Described grating scale feedback module is made up of 1 grating scale 61,1 grating scale zero-bit 63, multiple grating ruler reading head.Described grating scale 61 is positioned at grating scale installed surface, and range ability is positioned at a～a ' region, and only 1 zero-bit 63, is positioned at the centre position of grating scale 61；Described multiple 1st movable lens 51,52,53 are corresponding respectively grating ruler reading head 6201, grating ruler reading head 6202 and grating ruler reading head 6203, the 1st movable lens 51,52,53 all utilizes the zero-bit 63 of grating scale 61 to complete back to zero.
3 described hardware limit sensor blocks are made up of 1 positive limit induction block 71 of hardware and two negative limit induction blocks 72,73 of hardware.For guaranteeing the 1st movable lens 51, 52 and 53 do not bump against in back to zero process, at the 1st movable lens 51, 52, before 53 execution back to zero instructions, 1st movable lens 51 need to move to hardware positive limit induction block 71 place, 2nd movable lens 52 need to move to negative limit induction block 72 place of hardware, 3rd movable lens 53 need to move to negative limit induction block 73 place of hardware, therefore, the positive limit induction block 71 of hardware is arranged close to a end of grating scale 61, the negative limit induction block 73 of hardware is arranged close to the b end of grating scale 61, and the negative limit induction block 72 of hardware is arranged close to the c end of the 2nd movable lens 52.
3 described motors are made up of the 1st motor the 81, the 2nd motor the 82 and the 3rd motor 83.1st motor the 81, the 2nd motor the 82 and the 3rd motor 83 couples with the 1st screw mandrel 41, screw mandrel the 2nd screw mandrel 42, screw mandrel the 3rd screw mandrel 43 respectively.1st motor 81 rotates and drives the 1st screw mandrel 41 to rotate, thus driving the 1st movable lens 51 to move；2nd motor 82 rotates and drives screw mandrel the 2nd screw mandrel 42 to rotate, thus driving the 2nd movable lens 52 to move；3rd motor 83 rotates and drives screw mandrel the 3rd screw mandrel 43 to rotate, thus driving the 3rd movable lens 53 to move；
It is from motor control main control module 1 toward driving module 3 to send instruction that described back to zero controls device, drives module 3 to drive the 1st motor the 81, the 2nd motor the 82 and the 3rd motor 83 to move, thus driving the 1st movable lens 51,52,53.
The present invention utilizes 1 positive limit induction block of hardware 71 and two negative limit induction blocks 72,73 of hardware to realize the 1st orderly back to zero of movable lens 51,52,53, but within the scope of the movement locus of the 1st movable lens 51, there are 71 and 72 two hardware limit sensor blocks, in order to make the 1st movable lens 51 will not sense when moving in hardware positive limit induction block 71 process, limit induction block 72 born by hardware, therefore, the negative limit signal of grating ruler reading head 6201 need to be processed.Consulting shown in Fig. 2, Fig. 2 is signal processing module circuit diagram in the multiple grating scale zero resetting device preferred embodiment altogether of the present invention, including the input interface of grating ruler reading head 6201, output interface and signal processing circuit.
Described input interface is to include the positive limit signal input interface 9101 of grating ruler reading head 6201 and the negative limit signal input interface 9102 of grating ruler reading head 6201；
Described output interface is to include the positive limit signal output interface 9201 of grating ruler reading head 6201 and the negative limit signal output interface 9202 of grating ruler reading head 6201；It addition, GND represents ground wire, VCC is the power input of circuit, and 93 represent pull-up resistor；
Described signal processing circuit is mainly used in the just spacing and negative limit signal of grating ruler reading head 6201 is processed, and is additionally operable to the conversion of grating ruler reading head 6201 and the interface of motor control main control module 1.For playing interface conversion effect, corresponding input and output pin is connected, namely the positive limit signal input interface 9101 of grating ruler reading head 6201 connects with the positive limit signal output interface 9201 of grating ruler reading head 6201, and grating ruler reading head 6201 negative limit signal input interface 9102 connects with the negative limit signal output interface 9202 of grating ruler reading head 6201.As shown in Figure 1, there are 71 and 72 two hardware limit sensor blocks within the scope of 1st movable lens 51 movement locus, therefore, for guaranteeing that the 1st movable lens 51 is not born the impact of limit induction block 72 in moving to positive limit induction block 71 process by hardware, the negative limit signal of grating ruler reading head 6201 need to be shielded, namely need to connect negative for grating ruler reading head 6201 limit signal input interface 9102 and output interface 9202 with GND, and positive for grating ruler reading head 6201 limit signal input interface 9101 need to be connected with pull-up resistor 93 with positive limit signal output interface 9201.
Consult the flow chart that Fig. 3, Fig. 3 are the multiple shared grating scale back to zero control methods of the present invention.As shown in Figure 1, there is overlapping region in the movement locus of the 1st movable lens the 51, the 2nd movable lens the 52 and the 3rd movable lens 53, and therefore, this back to zero control method need to prevent each movable lens from colliding in back to zero process.Please refer to Fig. 1,2, back to zero control method of the present invention includes:
1) initial position of the 1st movable lens 51 is determined
The initial position of the 1st movable lens 51 is the position of positive limit induction block 71, and therefore, at the beginning of back to zero, the 1st movable lens 51 need to move to hardware positive limit induction block 71 position.The positive limit induction block 71 of hardware is positioned at a end regions of grating scale zero-bit 63 and grating scale, therefore, 1st movable lens 51 needs a end toward grating scale 61 to find the positive limit induction block 71 of hardware, as consulted shown in Fig. 1, at the movement locus b～b ' region memory of the 1st movable lens 51 71, 72 two hardware limit sensor blocks, owing to the negative limit signal input interface 9102 of the grating ruler reading head 6201 of the 1st movable lens 51 correspondence is connected with GND, shield the negative limit signal of grating ruler reading head 6201, therefore, 1st movable lens 51 moves in hardware positive limit induction block 71 process, negative limit induction block 72 position of hardware will not be stopped at.When motor control main control module 1 receives the positive limit signal of grating ruler reading head 6201, the 1st movable lens 51 is motion hardware positive limit induction block 71 place.
2) initial position of the 2nd movable lens 52 is determined
The initial position of the 2nd movable lens 52 is the negative limit induction block 72 of hardware, and therefore, at the beginning of back to zero, the 2nd movable lens 52 need to move to negative limit induction block 72 position of hardware.The negative limit induction block 72 of hardware is positioned at grating scale zero-bit 63 and grating scale a end regions, therefore, 2nd movable lens 52 needs a end toward grating scale 61 to find the positive limit induction block 72 of hardware, the negative limit induction block 72 of hardware is only existed in the movement locus c～c ' region of movable lens 72, when motor control main control module 1 receives the negative limit signal of grating ruler reading head 6202, limit induction block 72 place born by the 2nd movable lens 52 motion hardware.
3) initial position of the 3rd movable lens 53 is determined
The initial position of the 3rd movable lens 53 is the negative limit induction block 73 of hardware, and therefore, at the beginning of back to zero, the 3rd movable lens 53 need to move to negative limit induction block 73 position of hardware.The negative limit induction block 73 of hardware is positioned at grating scale zero-bit 63 and grating scale a ' end regions, therefore, 3rd movable lens 53 needs a ' end toward grating scale 61 to find the negative limit induction block 73 of hardware, the negative limit induction block 73 of hardware is only existed in the movement locus d～d ' region of movable lens 73, when motor control main control module 1 receives the negative limit signal of grating ruler reading head 6203, limit induction block 73 place born by the 3rd movable lens 53 motion hardware.
4) the 3rd movable lens 53 returns to the zero-bit 63 of grating scale 61, and determines the relative zero-bit of the 3rd movable lens 53
The initial position of the 3rd movable lens 53 is positioned at negative limit induction block 73 place of hardware, for making the 3rd movable lens 53 can return to the zero-bit 63 of grating scale 61, need to arrange the 3rd movable lens 53 a end back to zero toward grating scale 61.When motor control main control module 1 receives the zero signal of grating ruler reading head 6203, the 3rd movable lens 53 has returned to zero-bit 63 place of grating scale 61.Completing back to zero process for not interfering with the 1st movable lens the 51, the 2nd movable lens 52, the 3rd movable lens 53, after returning to grating scale 61 zero-bit 63 place, need to rest on the L3 place, position deviating from grating scale 61 zero-bit 63, and position L3 is treated as relative zero-bit by the 3rd movable lens 53.
5) the 2nd movable lens 52 returns to grating scale zero-bit, and determines the relative zero-bit of the 2nd movable lens 52
The initial position of the 2nd movable lens 52 is positioned at negative limit induction block 72 place of hardware, for making the 2nd movable lens 52 can return to the zero-bit 63 of grating scale 61, need to arrange the 2nd movable lens 52 and hold back to zero toward a ' of grating scale 61.When motor control main control module 1 receives the zero signal of grating ruler reading head 6202, now, the 2nd movable lens 52 has returned to zero-bit 63 place of grating scale 61.Completing back to zero process for not interfering with the 1st movable lens 51, the 2nd movable lens 52, after returning to grating scale 61 zero-bit 63 place, need to rest on the L2 place, position deviating from grating scale 61 zero-bit 63.In order to prevent the 3rd movable lens the 53 and the 2nd movable lens 52 from mutually colliding, L3 should be greater than L2, and position L2 is treated as relative zero-bit by the 2nd movable lens 52.
6) the 1st movable lens 51 returns to grating scale zero-bit, and determines the relative zero-bit of the 1st movable lens 51
The initial position of the 1st movable lens 51 is positioned at hardware positive limit induction block 71 place, for making the 1st movable lens 51 can return to the zero-bit 63 of grating scale 61, need to arrange the 1st movable lens 51 and hold back to zero toward a ' of grating scale 61.When motor control main control module 1 receives the zero signal of grating ruler reading head 6201, now, the 1st movable lens 51 has returned to zero-bit 63 place of grating scale 61.1st movable lens 51, after returning to grating scale 61 zero-bit 63 place, need to rest on the L1 place, position deviating from grating scale 61 zero-bit 63, and position L1 is treated as relative zero-bit by the 1st movable lens 51.
7), when the 1st movable lens the 51, the 2nd movable lens the 52, the 3rd movable lens 53 returns to the relative zero of correspondence, the back to zero motion of the 1st movable lens the 51, the 2nd movable lens the 52, the 3rd movable lens 53 terminates.
Claims (2)
1. the zero resetting device sharing grating scale for the multiple movable lens in lithographic equipment, it is characterized in that this device includes: base, N number of movable lens, motor control main control module (1), signal processing module (2), driving module (3), grating scale feedback module, N number of limit induction block (71,72,73) and N number of motor (81,82,83), wherein N is the positive integer of more than 3；
Described base, including N rhizoid bar (41,42,43), is used for bearing N number of movable lens (51,52,53), grating scale feedback module and N number of motor (81,82,83)；
Described grating scale feedback module is made up of 1 grating scale (61), N number of grating ruler reading head (6201,6202,6203), N number of grating ruler reading head and the linkage of N number of movable lens, being respectively used to the detection of N number of movable lens displacement, the zero-bit (63) setting grating scale (61) is positioned at the centre position of grating scale；Described motor control main control module (1) is connected with N number of motor (81,82,83) through described signal processing module (2), driving module (3), under the instruction of described motor control main control module (1), described driving module (3) drive motor (81) drives corresponding screw mandrel (41) to drive corresponding movable lens (51) to move, and the movable lens (51) that described corresponding grating ruler reading head (6201) record is described in the position of grating scale (61) and inputs described signal processing module (2).
2. the back to zero motion control method of the zero resetting device utilized described in claim 1, it is characterised in that the method comprises the steps:
1) initial position and relative zero-bit (L1, L2, the L3) of N number of movable lens (51,52,53) are determined:
The initial position of described N number of movable lens (51,52,53) is determined by the position of corresponding hardware limit sensor block (71,72,73), relative zero-bit (the L1 of described N number of movable lens (51,52,53), L2, L3) by the position of the zero-bit (63) of the deviation grating scale (61) set in advance
2) motor control main control module sends limit signal in an orderly manner, module is driven to drive the 1st screw mandrel (41) to drive the 1st movable lens (51) by the 1st motor (81), when the 1st movable lens (51) arrives the 1st limit induction block (71) position, the 1st movable lens (51) arrives initial position；The 2nd screw mandrel (42) is driven to drive the 2nd movable lens (52) by the 2nd motor (82), when the 2nd movable lens (52) arrives the position of the 2nd limit induction block (72), the 2nd movable lens (51) arrives initial position；┄ ┄, N motor (83) drives N screw mandrel (42) to drive N movable lens (52), when N movable lens (53) arrives the position of N limit induction block (73), N movable lens (53) arrives initial position N movable lens (53) and arrives initial position；
3) motor control main control module sends back to zero signal in an orderly manner, described driving module drives N screw mandrel (43) to drive N movable lens (53) by N motor (83), and N movable lens (53) searches out grating scale (61) zero-bit (63) and afterwards and arrives the relative zero-bit (L3) of N movable lens (53)；┄ ┄, described driving module drives the 2nd screw mandrel (42) to drive the 2nd movable lens (52) by the 2nd motor (82), when the 2nd movable lens (52) arrives the relative zero-bit (L2) of the 2nd movable lens (52)；Described driving module drives the 1st screw mandrel (41) to drive the 1st movable lens (51) by the 1st motor (81), when the 1st movable lens (51) arrives the relative zero-bit (L1) of the 1st movable lens (51)；
4) so far all multiple movable lens all arrive respective zero-bit, and the back to zero motion of each movable lens terminates.
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| NL1036860A1 (en) * | 2008-04-23 | 2009-10-26 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
| JP2011210932A (en) * | 2010-03-30 | 2011-10-20 | Yaskawa Electric Corp | Stage device |
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| CN202275262U (en) * | 2011-10-13 | 2012-06-13 | 深圳市麦肯机电有限公司 | Automatic alignment machine |
| CN202330259U (en) * | 2011-12-07 | 2012-07-11 | 浙江欧威科技有限公司 | Film detection device |
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Effective date of registration: 20190926 Address after: Room 601-10, 6th floor, No. 2, Jingyuan Beijie, Beijing Economic and Technological Development Zone, Daxing District, Beijing, 100176 Patentee after: Beijing Guowang Optical Technology Co., Ltd. Address before: 800-211 201800 post office box, Shanghai, Jiading District Patentee before: Shanghai Optical Precision Machinery Inst., Chinese Academy of Sciences |
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