CN104097145A - Grinding pad trimmer - Google Patents
Grinding pad trimmer Download PDFInfo
- Publication number
- CN104097145A CN104097145A CN201310113130.1A CN201310113130A CN104097145A CN 104097145 A CN104097145 A CN 104097145A CN 201310113130 A CN201310113130 A CN 201310113130A CN 104097145 A CN104097145 A CN 104097145A
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- Prior art keywords
- driven pulley
- controller
- sensor
- receiving sensor
- sent
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a grinding pad trimmer which comprises a driving motor, a driver, a driving wheel, a belt, a driven wheel, a trimming head and a detecting device, the output shaft of the driving motor is connected with the driving wheel, the driving motor drives the driving wheel to rotate, the driver is connected with the driving motor, the driver controls the starting and the closing of the driving motor, the driving wheel drives the driven wheel to rotate around the stator of the driven wheel through a belt, the trimming head is mounted on the driven wheel and driven to rotate by the driven wheel, the detecting device detects whether the belt is fractured. Due to the arrangement of the detecting device, whether the belt is fractured or not can be detected during the process of trimming a grinding pad, therefore whether the trimming head carries out trimming to the grinding pad or not can be judged, the grinding performance of the grinding pad is improved, the service life of the grinding pad is prolonged, and the wafer flattening yield is ensured.
Description
Technical field
The present invention relates to chemical mechanical polishing device technical field, relate in particular to a kind of for repairing the trimmer of grinding pad.
Background technology
Cmp technology is widely used in the production process of semiconductor devices, for wafer is carried out to overall planarization.Cmp is that wafer is clamped by the grinding head rotating, then to grinding head, apply downward pressure, wafer is pressed on the grinding pad of rotation equidirectional with it, and to grinding pad supply ground slurry, ground slurry flows between wafer and grinding pad, under chemical attack and mechanical grinding synergy, wafer obtains planarization.
Chemical mechanical planarization process depends primarily on the surface appearance of grinding pad, when carrying out grinding wafer, the surface of grinding pad is polished very soon chip and fills up, surface grinding is skidded, form glaze, the surface that this means grinding pad is not coarse, cannot to wafer, grind again, and may make crystal column surface produce trickle cut.In order to prevent the appearance of the situation of planting here, and extend the service life of grinding pad, need to utilize trimmer to repair grinding pad.
Existing grinding mat trimmer, as shown in Figure 4, comprises motor 21, driving wheel 22, belt 23, driven pulley 24, driver 25 and finishing head 26.Motor 21 is connected with driver 25, and under the driving of driver 25, drives 22 rotations of coupled driving wheel.Driving wheel 22 drives driven pulley 24 rotations by belt 23, and finishing head 26 is installed on driven pulley 24.Finishing head 26 rotates under the drive of driven pulley 24 on grinding pad 10, thereby realizes the finishing to grinding pad 10.While using this grinding mat trimmer to repair grinding pad 10, once belt 23 fractures, driven pulley 24 will stop the rotation, and coupled finishing head 26 also stops operating, no longer grinding pad 10 is repaired, but motor 21 is still driving driving wheel 22 rotations, allow work-table of chemicomechanical grinding mill think that finishing head 26 repairing grinding pad 10 always by mistake.Because cannot detecting belt 23 in dressing process, this grinding mat trimmer whether ruptures, thereby can not guarantee that finishing head 26 repairs grinding pad 10 always, once finishing head 26 stops the finishing to grinding pad 10, the nonferromagnetic substance of grinding pad 10 will decline, and then cause the grinding yield of wafer to reduce, when serious, even can cause scrapping of wafer.
Summary of the invention
The defect that the object of the invention is to exist for above-mentioned background technology provides a kind of and can detect the grinding mat trimmer whether belt ruptures.
For achieving the above object, a kind of grinding mat trimmer provided by the invention, comprising: drive motors, driver, driving wheel, belt, driven pulley, finishing head and checkout gear.The output shaft of drive motors is connected with driving wheel, drive motors drives driving wheel to rotate, driver is connected with drive motors, the startup of driver control drive motors and closing, driving wheel drives driven pulley around the stator rotation of driven pulley by belt, finishing head is arranged on driven pulley and by driven pulley and drives and rotate, and whether checkout gear detects belt and rupture.
In one embodiment, described checkout gear comprises proximity transducer, detection bodies and controller.Proximity transducer is arranged on the stator of driven pulley, and proximity transducer is connected with controller, and detection bodies is arranged on driven pulley, and detection bodies is rotated with driven pulley.Driven pulley often circles, and proximity transducer detects detection bodies once and detection information is sent to controller.If the number of times that proximity transducer can't detect detection bodies or detection bodies detected in the unit interval surpasses all numbers that driven pulley rotates, think belt fracture, controller output alarm signal, drive motors is closed.
In one embodiment, described checkout gear comprises proximity transducer, detection bodies and controller.Proximity transducer is arranged on driven pulley, and proximity transducer rotates with driven pulley, and proximity transducer is connected with controller.Detection bodies is arranged on the stator of driven pulley.Driven pulley often circles, proximity transducer detects detection bodies once and detection information is sent to controller, if in the unit interval, proximity transducer can't detect detection bodies or the number of times of detection bodies detected over all numbers of driven pulley rotation, think belt fracture, controller output alarm signal, drive motors is closed.
In one embodiment, described checkout gear comprises a pair of electro-optical pickoff, baffle element and controller.This pair of electro-optical pickoff has emission sensor and receiving sensor, and emission sensor is arranged between driving wheel and driven pulley, emission sensor utilizing emitted light signal.Receiving sensor is arranged on the stator of driven pulley, and receiving sensor is connected with controller, and receiving sensor receiving optical signals is also sent to controller by reception information.Baffle element is arranged on driven pulley, and baffle element rotates with driven pulley, and when baffle element turns between emission sensor and receiving sensor, baffle element stops receiving sensor receiving optical signals.Driven pulley often circles, and receiving sensor once cannot receive the optical signal that emission sensor is sent.If receiving sensor can receive the optical signal that emission sensor is sent in the unit interval, or cannot receive the optical signal that emission sensor is sent always always, think belt fracture, controller output alarm signal, drive motors is closed.
In one embodiment, described checkout gear comprises a pair of electro-optical pickoff, baffle element and controller.This pair of electro-optical pickoff has emission sensor and receiving sensor, and emission sensor is arranged on the stator of driven pulley, emission sensor utilizing emitted light signal.Receiving sensor is arranged between driving wheel and driven pulley, and receiving sensor is connected with controller, and receiving sensor receiving optical signals is also sent to controller by reception information.Baffle element is arranged on driven pulley, and baffle element rotates with driven pulley, and when baffle element turns between emission sensor and receiving sensor, baffle element stops receiving sensor receiving optical signals.Driven pulley often circles, and receiving sensor once cannot receive the optical signal that emission sensor is sent.If receiving sensor can receive the optical signal that emission sensor is sent in the unit interval, or cannot receive the optical signal that emission sensor is sent always always, think belt fracture, controller output alarm signal, drive motors is closed.
In sum, grinding mat trimmer of the present invention is by arranging checkout gear, in the process that grinding pad is repaired, whether can detect belt ruptures, thereby judge whether finishing head is being repaired grinding pad, nonferromagnetic substance and the service life of having improved grinding pad, guaranteed wafer planarization yield.
Accompanying drawing explanation
Fig. 1 is the structural representation of one embodiment of grinding mat trimmer according to the present invention.
Fig. 2 is the structural representation of checkout gear in an embodiment of the grinding mat trimmer according to the present invention.
Fig. 3 is the structural representation of checkout gear in another embodiment of the grinding mat trimmer according to the present invention.
Fig. 4 is the structural representation of grinding mat trimmer of the prior art.
The specific embodiment
By describing technology contents of the present invention, structural feature in detail, being reached object and effect, below in conjunction with embodiment and coordinate graphic detailed description in detail.
Consult Fig. 1, Fig. 1 has disclosed according to the structural representation of an embodiment of grinding mat trimmer of the present invention.This grinding mat trimmer 200 has drive motors 201, driver 202, driving wheel 203, belt 204, driven pulley 205, finishing head 209 and checkout gear.Drive motors 201 is connected with driver 202, and driver 202 is controlled the startup of drive motors 201 and closes.The output shaft of drive motors 201 is connected with driving wheel 203, and drive motors 201 drives driving wheel 203 to rotate.Driving wheel 203 drives driven pulleys 205 around the stator 210(of driven pulley 205 as shown in Figure 2 by belt 204) rotate, finishing head 209 is installed on driven pulley 205, driven pulley 205 drives finishing head 209 to rotate on grinding pad 100 when rotating, to repair grinding pad 100.
This grinding mat trimmer 200 also has checkout gear, and in the process of finishing grinding pad 100, whether checkout gear detects belt 204 and rupture, thereby judges whether finishing head 209 is being repaired grinding pad 100.As shown in Figure 2, Fig. 2 has disclosed according to the structural representation of the checkout gear in an embodiment of grinding mat trimmer of the present invention.In the embodiment shown in Figure 2, checkout gear comprises sensor 206, detection bodies 207 and controller 208.Sensor 206 is arranged on the stator 210 of driven pulley 205, and sensor 206 is connected with controller 208.Detection bodies 207 is arranged on driven pulley 205, and detection bodies 207 is rotated with driven pulley 205.Particularly, sensor 206 is proximity transducer, and when belt 204 drives driven pulley 205 to rotate, detection bodies 207 is rotated with driven pulley 205, driven pulley 205 often circles, and sensor 206 detects detection bodies 207 and once and by detection information is sent to controller 208.Set driven pulley 205 in the unit interval and rotate N week, so correspondingly, in unit interval, the number of times that sensor 206 need detect detection bodies 207 is N time, if in the unit interval, the number of times that sensor 206 can't detect detection bodies 207 or detection bodies 207 detected is over N time, think that belt 204 ruptures, finishing head 209 has stopped the finishing to grinding pad 100, controller 208 output alarm signals, and drive motors 201 is closed and is quit work.
Obviously, the position of sensor 206 and detection bodies 207 can exchange, and sensor 206 can be arranged on driven pulley 205 and with driven pulley 205 and rotate, and detection bodies 207 can be arranged on the stator 210 of driven pulley 205.Sensor 206 is still connected with controller 208.The course of work of sensor 206, detection bodies 207 and controller 208 and operation principle are identical with the configuration mode that the preceding paragraph is described.Driven pulley 205 often circles, and sensor 206 detects detection bodies 207 and once and by detection information is sent to controller 208.Set driven pulley 205 in the unit interval and rotate N week, so correspondingly, in unit interval, the number of times that sensor 206 need detect detection bodies 207 is N time, if in the unit interval, the number of times that sensor 206 can't detect detection bodies 207 or detection bodies 207 detected is over N time, think that belt 204 ruptures, finishing head 209 has stopped the finishing to grinding pad 100, controller 208 output alarm signals, and drive motors 201 is closed and is quit work.
As shown in Figure 3, disclosed according to the structural representation of checkout gear in another embodiment of grinding mat trimmer of the present invention.In the present embodiment, checkout gear comprises sensor, baffle element 303 and controller 304.Sensor in this embodiment is a pair of electro-optical pickoff, comprise emission sensor 301 and receiving sensor 302, emission sensor 301 is arranged between driving wheel 203 and driven pulley 205, emission sensor 301 utilizing emitted light signals, receiving sensor 302 is arranged on the stator 210 of driven pulley 205, receiving sensor 302 is connected with controller 304, and receiving sensor 302 receiving optical signals are also sent to controller 304 by reception information.Baffle element 303 is arranged on driven pulley 205, and baffle element 303 rotates with driven pulley 205.When belt 204 drives driven pulley 205 to rotate, baffle element 303 rotates with driven pulley 205, when baffle element 303 turns between emission sensor 301 and receiving sensor 302, baffle element 303 stops receiving sensor 302 receiving optical signals, receiving sensor 302 cannot receive the optical signal that emission sensor 301 is sent, therefore, driven pulley 205 often circles, and receiving sensor 302 once cannot receive the optical signal that emission sensor 301 is sent.Set driven pulley 205 in the unit interval and rotate N week, so correspondingly, in the unit interval, receiving sensor 302 has cannot receive the optical signal that emission sensor 301 is sent N time.If receiving sensor 302 can receive the optical signal that emission sensor 301 is sent in the unit interval always, or cannot receive the optical signal that emission sensor 301 is sent always, think that belt 204 ruptures, finishing head 209 has stopped the finishing to grinding pad 100, controller 304 output alarm signals, drive motors 201 is closed and is quit work.
Obviously, the position of emission sensor 301 and receiving sensor 302 can exchange, and emission sensor 301 can be arranged on the stator 210 of driven pulley 205, and receiving sensor 302 can be arranged between driving wheel 203 and driven pulley 205.The course of work of emission sensor 301, receiving sensor 302, baffle element 303 and controller 304 is still identical with the configuration mode of describing the last period with operation principle.Driven pulley 205 often circles, and receiving sensor 302 once cannot receive the optical signal that emission sensor 301 is sent.Set driven pulley 205 in the unit interval and rotate N week, so correspondingly, in the unit interval, receiving sensor 302 has cannot receive the optical signal that emission sensor 301 is sent N time.If receiving sensor 302 can receive the optical signal that emission sensor 301 is sent in the unit interval always, or cannot receive the optical signal that emission sensor 301 is sent always, think that belt 204 ruptures, finishing head 209 has stopped the finishing to grinding pad 100, controller 304 output alarm signals, drive motors 201 is closed and is quit work.
Grinding mat trimmer 200 of the present invention is by arranging checkout gear, in the process that grinding pad 100 is repaired, whether can detect belt 204 ruptures, thereby judge whether finishing head 209 is being repaired grinding pad 100, nonferromagnetic substance and the service life of having improved grinding pad 100, guaranteed wafer planarization yield.
In sum, grinding mat trimmer of the present invention illustrates by above-mentioned embodiment and correlative type, the exposure that oneself is concrete, full and accurate correlation technique, those skilled in the art can be implemented according to this.And the above embodiment is just used for illustrating the present invention, rather than be used for limiting of the present invention, interest field of the present invention, should be defined by claim of the present invention.As for the change of described component number or the replacement of equivalence element etc. herein, still all should belong to interest field of the present invention.
Claims (5)
1. a grinding mat trimmer, is characterized in that, comprising: drive motors, driver, driving wheel, belt, driven pulley, finishing head and checkout gear;
The output shaft of described drive motors is connected with driving wheel, drive motors drives driving wheel to rotate, described driver is connected with drive motors, the startup of driver control drive motors and closing, described driving wheel drives driven pulley around the stator rotation of driven pulley by belt, described finishing head is arranged on driven pulley and by driven pulley and drives and rotate, and whether described checkout gear detects belt and rupture.
2. grinding mat trimmer according to claim 1, is characterized in that, described checkout gear comprises proximity transducer, detection bodies and controller;
Described proximity transducer is arranged on the stator of driven pulley, proximity transducer is connected with controller, described detection bodies is arranged on driven pulley, detection bodies is rotated with driven pulley, described driven pulley often circles, proximity transducer detects detection bodies once and detection information is sent to controller, if described proximity transducer can't detect detection bodies or the number of times of detection bodies detected over all numbers of driven pulley rotation in the unit interval, think belt fracture, controller output alarm signal, drive motors is closed.
3. grinding mat trimmer according to claim 1, is characterized in that, described checkout gear comprises proximity transducer, detection bodies and controller;
Described proximity transducer is arranged on driven pulley, proximity transducer rotates with driven pulley, proximity transducer is connected with controller, described detection bodies is arranged on the stator of driven pulley, described driven pulley often circles, proximity transducer detects detection bodies once and detection information is sent to controller, if described proximity transducer can't detect detection bodies or the number of times of detection bodies detected over all numbers of driven pulley rotation in the unit interval, think belt fracture, controller output alarm signal, drive motors is closed.
4. grinding mat trimmer according to claim 1, is characterized in that, described checkout gear comprises a pair of electro-optical pickoff, baffle element and controller;
Described a pair of electro-optical pickoff has emission sensor and receiving sensor, described emission sensor is arranged between driving wheel and driven pulley, emission sensor utilizing emitted light signal, described receiving sensor is arranged on the stator of driven pulley, receiving sensor is connected with controller, receiving sensor receiving optical signals is also sent to controller by reception information, described baffle element is arranged on driven pulley, baffle element rotates with driven pulley, when described baffle element turns between emission sensor and receiving sensor, baffle element stops receiving sensor receiving optical signals, driven pulley often circles, receiving sensor once cannot receive the optical signal that emission sensor is sent, if receiving sensor can receive the optical signal that emission sensor is sent in the unit interval always, or cannot receive the optical signal that emission sensor is sent always, think belt fracture, controller output alarm signal, drive motors is closed.
5. grinding mat trimmer according to claim 1, is characterized in that, described checkout gear comprises a pair of electro-optical pickoff, baffle element and controller;
Described a pair of electro-optical pickoff has emission sensor and receiving sensor, described emission sensor is arranged on the stator of driven pulley, emission sensor utilizing emitted light signal, described receiving sensor is arranged between driving wheel and driven pulley, receiving sensor is connected with controller, receiving sensor receiving optical signals is also sent to controller by reception information, described baffle element is arranged on driven pulley, baffle element rotates with driven pulley, when described baffle element turns between emission sensor and receiving sensor, baffle element stops receiving sensor receiving optical signals, driven pulley often circles, receiving sensor once cannot receive the optical signal that emission sensor is sent, if receiving sensor can receive the optical signal that emission sensor is sent in the unit interval always, or cannot receive the optical signal that emission sensor is sent always, think belt fracture, controller output alarm signal, drive motors is closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310113130.1A CN104097145A (en) | 2013-04-02 | 2013-04-02 | Grinding pad trimmer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310113130.1A CN104097145A (en) | 2013-04-02 | 2013-04-02 | Grinding pad trimmer |
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| Publication Number | Publication Date |
|---|---|
| CN104097145A true CN104097145A (en) | 2014-10-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310113130.1A Pending CN104097145A (en) | 2013-04-02 | 2013-04-02 | Grinding pad trimmer |
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| CN (1) | CN104097145A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106597841A (en) * | 2016-12-14 | 2017-04-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Tracking scanning algorithm of trimmer motor in chemical mechanical planarization |
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| CN2357326Y (en) * | 1998-11-27 | 2000-01-05 | 林岱右 | Transmission leather belt breakage tester for grain drier |
| US20030013394A1 (en) * | 2001-06-29 | 2003-01-16 | Choi Jae Hoon | Polishing pad conditioner for semiconductor polishing apparatus and method of monitoring the same |
| CN2707701Y (en) * | 2004-06-25 | 2005-07-06 | 神华集团有限责任公司 | Fault protector for belt |
| CN2814342Y (en) * | 2005-04-01 | 2006-09-06 | 华为技术有限公司 | Apparatus for detecting vehicular equipment LCD screen position |
| CN101623849A (en) * | 2009-07-31 | 2010-01-13 | 清华大学 | Trimmer for trimming polishing pad |
| CN101813563A (en) * | 2009-12-15 | 2010-08-25 | 吉林大学 | Engine piston position and phase position full operation condition measurement system and method |
| CN202181092U (en) * | 2011-06-22 | 2012-04-04 | 深圳市广业电子科技有限公司 | Detection device for adhesive tape machine |
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2013
- 2013-04-02 CN CN201310113130.1A patent/CN104097145A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2357326Y (en) * | 1998-11-27 | 2000-01-05 | 林岱右 | Transmission leather belt breakage tester for grain drier |
| US20030013394A1 (en) * | 2001-06-29 | 2003-01-16 | Choi Jae Hoon | Polishing pad conditioner for semiconductor polishing apparatus and method of monitoring the same |
| CN2707701Y (en) * | 2004-06-25 | 2005-07-06 | 神华集团有限责任公司 | Fault protector for belt |
| CN2814342Y (en) * | 2005-04-01 | 2006-09-06 | 华为技术有限公司 | Apparatus for detecting vehicular equipment LCD screen position |
| CN101623849A (en) * | 2009-07-31 | 2010-01-13 | 清华大学 | Trimmer for trimming polishing pad |
| CN101813563A (en) * | 2009-12-15 | 2010-08-25 | 吉林大学 | Engine piston position and phase position full operation condition measurement system and method |
| CN202181092U (en) * | 2011-06-22 | 2012-04-04 | 深圳市广业电子科技有限公司 | Detection device for adhesive tape machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106597841A (en) * | 2016-12-14 | 2017-04-26 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Tracking scanning algorithm of trimmer motor in chemical mechanical planarization |
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Application publication date: 20141015 |