CN104096931B - Method for electrochemically machining micro-pit array - Google Patents
Method for electrochemically machining micro-pit array Download PDFInfo
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- CN104096931B CN104096931B CN201410303580.1A CN201410303580A CN104096931B CN 104096931 B CN104096931 B CN 104096931B CN 201410303580 A CN201410303580 A CN 201410303580A CN 104096931 B CN104096931 B CN 104096931B
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Abstract
The invention discloses a method for electrochemically machining a micro-pit array and belongs to the technical field of chemical machining. The method mainly comprises the following steps of (a) coating microparticles (6) by using electrically isolated porous cloth (3) to prepare a mask (4); (b) gluing the mask (4) on the surface of a workpiece (8) to be machined; (c) pressing a tool cathode (2) on the other surface of the mask (4), and allowing the thickness distribution of the mask (4) to be uniform; (d) introducing electrolyte (1) in a pole clearance (5) which is formed between the tool cathode (2) and the workpiece (8) to be machined and is filled with the mask (4); (e) connecting the workpiece (8) to be machined with the positive pole of a power supply (9), connecting the tool cathode (2) with the negative pole of the power supply (9), and electrifying for performing electrochemical machining; (f) after the machining requirement is met, switching off the power supply (9), stopping the electrolyte (1), removing the mask (4), and taking the workpiece (8) to be machined out to finish machining. The method has the characteristics of simple mask manufacture, wide application range, low process cost and the like, and is suitable for machining micro-pit arrays on planar or curved surface metal parts.
Description
Technical field
The present invention relates to a kind of method of Electrolyzed Processing micro-pit array, belongs to electro-chemical machining technical field.
Background technology
In many dynamic friction pairs, working surface is in the state of relative motion and interaction, therefore, certainly exist
Friction and wear phenomenon, they be work mechanism energy loss, efficiency reduce, friction pair failure, the lost of life it is important because
One of element.Research shows that the surface texture with micro-pit array can effectively reduce friction and wear.Additionally, in device table
Face processes certain dimple structure can increase device surface area, and this has certain to improving surface radiating and liquid flowing state
Effect.
Electrolyzed Processing because there is instrument and workpiece in the course of processing to be not directly contacted with, without tool electrode loss, plus work efficiency
The advantages of rate height, surface of the work will not produce machining stress, deformation and heat affected area, is the fine structures such as the micro- hole of processing, micropore
One of important technical, it is very promising.Wherein mask Electrolyzed Processing is the most commonly used in the micro- hole of Electrolyzed Processing adding
Work method.The manufacture of mask in the method is crucial, usually does mask with photoresist, need through gluing, front baking, exposure, after
The series of complex operations such as baking, development, cumbersome, process costs are high, and implement above-mentioned steps and its difficulty on curved surface.Cause
It is low and can process the new mask of micro-pit array on curved surface that this is necessary to research and develop a kind of simple to operate, process costs
The method of Electrolyzed Processing micro-pit array.
The content of the invention
The present invention for the mask fabrication complex process of generally existing in existing mask Electrolyzed Processing micro-pit array method, into
This high and extremely difficult deficiency implemented on curved surface, propose it is a kind of based on simple the simple to operate of flexible mask, process costs it is low and
The method of the mask Electrolyzed Processing micro-pit array not limited by workpiece to be machined surface configuration.
The technical scheme is that：
A kind of method of Electrolyzed Processing micro-pit array, mainly comprises the following steps：
（a）Mask is prepared with electric insulation porous cloth parcel microparticle；
（b）Mask is fitted on workpiece to be machined surface；
（c）Tool cathode is pressed on the another side of mask, and makes the thickness distribution of mask uniform；
（d）Electrolysis is passed through in by pole clearance formed between tool cathode and workpiece to be machined and filled with mask
Liquid；
（e）Workpiece to be machined connects positive source, tool cathode and connects after power cathode, and energization carries out Electrolyzed Processing；
（f）After reaching processing request, power cutoff closes down electrolyte, removes mask, takes out workpiece to be machined, completes to add
Work.
In above-mentioned technical proposal, described electric insulation porous cloth is that the swellabilities such as nylon, terylene are low and acid-alkali-corrosive-resisting
Porous cloth.So, when micro- hole is processed, reduce porous cloth and cause aperture diminution, electrical insulating property attenuating etc. negative because of adsorptive liquid
Face rings.
Described electric insulation porous cloth hole is shaped as square, circular, rhombus etc..Can select as needed in reality processing
Select hole shape.In general, prioritizing selection circular port.
The size of described pole clearance is 0.1mm ~ 2mm.The size of pole clearance is adjusted by the thickness of mask.Mask
Thickness crosses conference causes electric current density little, and working (machining) efficiency and machining accuracy are low；The discharge of the too small then electrolysate of mask thicknesses is stranded
Difficulty, affects the stability of processing technique.In general, the micro- hole for intending being formed is less, the pole clearance of selection should be less.
The microparticle of described electric insulation porous cloth parcel is the corrosion-resistant hard particles such as silicon dioxide, aluminium sesquioxide.
So, plus man-hour, on the one hand using microparticle transmit from negative electrode pressure to muscle or line in porous cloth, make it and work
Part intimate surface contact, reaches protection workpiece and is not required to working position and defines the purpose of microcellular structure figure；On the other hand micro-
Gap between grain provides passage for the circulation of electrolyte, is beneficial to being smoothed out for electrolytic processing process.Microparticle is hard
Matter granule, on the one hand prevents the granule when anode and cathode is compressed excessive to the seal face of cloth because of excessive deformation, so as to hinder electrolysis
Liquid reaches machined surface；On the other hand prevent microparticle excessive deformation and closely knit, cause pole clearance to circulate electrolyte.
Described microparticle particle diameter is less than the size for wrapping up its electric insulation porous cloth hole, and microparticle particle diameter is 0.01mm
~0.3mm.The size for being smaller in size than porous cloth hole of microparticle, in case microparticle flows out porous cloth during electrolyte circulation.If micro-
Granule is excessive, then it possibly cannot well be compacted the muscle or line of porous cloth, so that cloth loses selectivity electric insulation shielding
The effect in non-processing region；Conversely, microparticle probably due to too little, cannot form good electrolyte circulation road, shadow between granule
Ring the enforcement of technique.
Plus man-hour, first wrap up appropriate microparticle with electric insulation porous cloth and prepare mask and be fitted in workpiece to be machined table
On face.Again tool cathode is pressed on the another side of mask, and makes mask thicknesses be evenly distributed.Porous cloth is must assure that during compression
It is brought into close contact with workpiece to be machined, does not otherwise have the purpose of selective protection workpiece to be machined.Electrolyte is then turn on, is electrolysed
The topping up mode of liquid can adopt lateral topping up（Electrolyte is introduced parallel to workpiece to be machined surface）Or positive topping up（From instrument
Cathode internal introduces electrolyte）Two ways.Need to open one or several equally distributed on tool cathode during positive topping up
Inlet.Processing power source is opened, the part corresponding to the hole of the porous cloth that is electrically insulated on workpiece to be machined surface is because there is electrolyte
Circulation and there is cell reaction and be dissolved to remove, form dimple structure, and be electrically insulated the muscle or line of porous cloth close over
Part because few electrolyte flow and be electrically insulated shielding and be not chemically dissolved with the help of a suitable solvent, so, through the Electrolyzed Processing of certain hour,
The micro-pit array of certain depth and size can be formed on workpiece to be machined surface.
Compared to other techniques, beneficial effects of the present invention are：
1. mask is simple to manufacture.It is of the invention directly mask to be done using flexible electric insulation porous cloth parcel microparticle, it is not necessary to
The complex techniques process of the traditional fabrication mask such as gluing, front baking, exposure, after bake, development.Link is few, easily implements.
2. applied range.The present invention is to do mask with flexible electric insulation porous cloth parcel microparticle, and this mask can be flexible
Be fixed in plane and curved surface, not by processing workpiece shapes limited.
3. processing cost is low.The present invention only need to wrap up appropriate microparticle and cover with the electric insulation porous cloth of dimension
Film, electric insulation porous cloth, microparticle are bargain goods, and process costs are low.
Description of the drawings
Fig. 1 is the schematic diagram for carrying out micro-pits machining using lateral topping up mode using the inventive method.
Fig. 2 is the schematic diagram for carrying out micro-pits machining using positive topping up mode using the inventive method.
Label title in figure：1st, electrolyte, 2, tool cathode, 3, electric insulation porous cloth, 4, mask, 5, pole clearance, 6,
Microparticle, 7, Wei Keng, 8, workpiece to be machined, 9, power supply, 10, inlet.
Specific embodiment
Embodiment one
With reference to Fig. 1 to the present invention --- the specific implementation process of " a kind of method of Electrolyzed Processing micro-pit array " make into
The detailed description of one step.
1）The solid dioxy of appropriate a diameter of 80 m is wrapped up with 400 mesh square net shape terylene electric insulation porous cloth 3
SiClx microballon 6 prepares mask 4；
2）Mask 4 is fitted in into 201 stainless steel wafers of a diameter of 17mm（Workpiece to be machined）On 8 surfaces；
3）The copper of a diameter of 17mm（Tool cathode）2 are pressed on the another side of mask 4, and make the thickness distribution of mask 4
Uniformly, mask thicknesses are 1mm；
4）From parallel to the surface of workpiece to be machined 8 to being formed between tool cathode 2 and workpiece to be machined 8 and filled with covering
The pole clearance 5 of film 4 introduces the NaNo that concentration is 15%3Electrolyte 1；
5）Workpiece to be machined 8 connects the positive pole of power supply 9, tool-electrode 2 and connects after the negative pole of power supply 9, and energization carries out Electrolyzed Processing；
6）After Electrolyzed Processing 10s, power cutoff 9 closes down electrolyte 1, removes mask 4, takes out workpiece to be machined 8, completes
Processing.
Embodiment two
With reference to Fig. 2 to the present invention --- the specific implementation process of " a kind of method of Electrolyzed Processing micro-pit array " make into
The detailed description of one step.
Step 4 is removed in this specific embodiment）Outward, remaining each step step phase corresponding and in specific embodiment 1
Together, step 4 in this specific embodiment）Topping up mode is to introduce electrolyte from tool cathode.
What above example was described processes in the plane micro- just with 400 mesh square net shape terylene electric insulation porous cloth
The technical process in hole, can also carry out the electricity in micro- hole using the electric insulation porous cloth of other specifications in practice on curved surface
Solution processing, the fixed form of the porous cloth that is electrically insulated also needs to do corresponding adjustment.
Claims (6)
1. a kind of method of Electrolyzed Processing micro-pit array, it is characterised in that：Comprise the following steps：
（a）With electric insulation porous cloth（3）Parcel microparticle（6）Prepare mask（4）；
（b）By mask（4）It is fitted in workpiece to be machined（8）On surface；
（c）Tool cathode（2）It is pressed in mask（4）Another side on, and make mask（4）Thickness distribution it is uniform；
（d）By tool cathode（2）With workpiece to be machined（8）Between formed and filled with mask（4）Pole clearance（5）It is interior
It is passed through electrolyte（1）；
（e）Workpiece to be machined（8）Connect power supply（9）Positive pole, tool cathode（2）Connect power supply（9）After negative pole, energization carries out electrolysis and adds
Work；
（f）After reaching processing request, power cutoff（9）, close down electrolyte（1）, remove mask（4）, take out workpiece to be machined
（8）, complete processing.
2. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, it is characterised in that：Described electric insulation is more
Kong Bu（3）For nylon or terylene swellability is low and porous cloth of acid-alkali-corrosive-resisting.
3. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, it is characterised in that：Described electric insulation is more
Kong Bu（3）Being shaped as hole is square, circular, rhombus.
4. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, it is characterised in that：Described pole clearance
（5）Size be 0.1mm ~ 2mm.
5. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, it is characterised in that：Described electric insulation is more
Kong Bu（3）The microparticle of parcel（6）For silicon dioxide or the corrosion-resistant hard particles of aluminium sesquioxide.
6. the method for a kind of Electrolyzed Processing micro-pit array according to claim 1, it is characterised in that：Described microparticle
（6）Particle diameter is greater than and wraps up its electric insulation porous cloth（3）The size in hole, microparticle size is 0.01mm ~ 0.3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410303580.1A CN104096931B (en) | 2014-06-30 | 2014-06-30 | Method for electrochemically machining micro-pit array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201410303580.1A CN104096931B (en) | 2014-06-30 | 2014-06-30 | Method for electrochemically machining micro-pit array |
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| Publication Number | Publication Date |
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| CN104096931A CN104096931A (en) | 2014-10-15 |
| CN104096931B true CN104096931B (en) | 2017-05-17 |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104668675B (en) * | 2015-03-05 | 2017-01-04 | 华南理工大学 | A kind of electrode with micro cone tower array end face and processing method thereof and application |
| CN105364237B (en) * | 2015-11-20 | 2018-01-23 | 沈阳黎明航空发动机(集团)有限责任公司 | A kind of thin-walled honeycomb class part cell dimensions control method |
| CN105648491B (en) * | 2016-03-24 | 2017-11-10 | 河南理工大学 | A kind of System and method for of electrical-chemistry method 3-dimensional metal micro-structural |
| CN106064261B (en) * | 2016-06-12 | 2017-12-26 | 南京航空航天大学 | The System and method for of micro-pit array Electrolyzed Processing based on magnetic PDMS masks |
| CN106270853A (en) * | 2016-09-21 | 2017-01-04 | 河南理工大学 | A kind of processing method of micro structure array |
| CN106435656B (en) * | 2016-09-29 | 2018-06-26 | 河南理工大学 | A kind of production method for piece of spraying |
| CN109014462B (en) * | 2018-10-09 | 2019-07-30 | 河南理工大学 | A kind of metal surface micro-structure electrolytic machining device |
| CN109811342B (en) * | 2019-02-21 | 2021-02-19 | 清华大学 | Method for preparing micro-pit structure and super-hydrophobic metal surface in large area by using mesh mask |
| CN110369815A (en) * | 2019-08-02 | 2019-10-25 | 河南理工大学 | A kind of method of the micro- texture of Electrolyzed Processing |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100371119C (en) * | 2005-06-01 | 2008-02-27 | 清华大学 | Electrochemical machining process for array micro type hole |
| CN101862870A (en) * | 2010-06-21 | 2010-10-20 | 南京航空航天大学 | Array micro-pit electrolytic machining method and system |
| CN103084682B (en) * | 2013-01-16 | 2015-04-22 | 河南理工大学 | Method of liquid beam jet flows electrolyzing and processing dimples |
| CN103526266B (en) * | 2013-10-22 | 2016-01-20 | 河南理工大学 | A kind of method of processing micro-pit array on the metal surface |
| CN103600144B (en) * | 2013-11-18 | 2016-02-24 | 南京航空航天大学 | The method of cuniform channel Electrolyzed Processing massive array unevenness and device |
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