CN104091745B - The integrated structure of a kind of integrated TEM window of tube and STEM detector - Google Patents
The integrated structure of a kind of integrated TEM window of tube and STEM detector Download PDFInfo
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- CN104091745B CN104091745B CN201410345490.9A CN201410345490A CN104091745B CN 104091745 B CN104091745 B CN 104091745B CN 201410345490 A CN201410345490 A CN 201410345490A CN 104091745 B CN104091745 B CN 104091745B
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Abstract
The present invention discloses the integrated structure of a kind of integrated TEM window of tube and STEM detector, belong to the accessory structure design field of transmission electron microscope, the integrated structure of this integrated TEM window of tube and STEM detector is by mounting and adjusting parts on the sidepiece interface of lens barrel, and in the adjustment component being positioned at lens barrel inside integrated installation TEM window of tube and STEM detector, make only to need to change the position of adjustment component in transmission electron microscope lens barrel, just TEM window of tube or STEM detector can be realized to receive electron beam, thus the sidepiece interface meeting lens barrel installs the object of CCD camera window of tube (TEM window of tube) and STEM detector simultaneously, and then meet the function maximized demand of user for transmission electron microscope, realize the cost performance overflowed.
Description
Technical field
The present invention relates to the design of the accessory structure of transmission electron microscope, particularly relate to the integrated structure of a kind of integrated TEM window of tube and STEM detector.
Background technology
Transmission electron microscope TransmissionElectronMicroscope, is called for short TEM, and transmission electron microscope is using the extremely short electron beam of wavelength as illumination source, with the electronic optical instrument of a kind of high resolving power of electromagnetism transmission focusing imaging, high-amplification-factor.
For transmission electron microscope use procedure is taken high-resolution electronic micro-image, taking electron diffraction and sample carries out the different application objects such as in-situ study makes the CCD camera type used all different, so, a transmission electron microscope is equipped with the configuration of single CCD camera and is difficult to satisfy the demand. For solving the problem, existing scheme installs the end on transmission electron microscope to insert formula CCD camera and side-plug-in CCD camera, the end insert formula CCD camera and side-plug-in CCD camera be arranged on respectively transmission electron microscope egative film room bottom and lens barrel sidepiece.
Scanning transmission electron microscope ScanningTransmissionElectronMicroscope, is called for short STEM, and it utilizes magnetic lens electron beam is focused on sample surfaces and to scan fast at sample surfaces, penetrates sample imaging by electronics. In scanning-mode it, electron source launches electronics, and beam convergence is become the bundle spot of small scale by magnetic lens before sample, after beam spot focuses on specimen surface, is controlled a region of pointwise scanning samples by coil. While often scanning a bit, the STEM detector below sample synchronously receives electronics. The signal received corresponding to the detector of each scanning position converts strength of current to and is displayed on window of tube or graphoscope. Use STEM bright field detector or STEM dark field detector then can obtain STEM bright field image and STEM dark-field image respectively. STEM bright field detector and STEM dark field detector need to be arranged on transmission electron microscope lens barrel sidepiece interface.
The expense of a transmission electron microscope reaches several hundred ten thousand Renminbi usually, therefore, for a transmission electron microscope, people need to install additional various annex usually, so that function maximumization, under prior art conditions, transmission electron microscope sidepiece interface quantity is subject to installing the restriction of position, after STEM bright field detector and dark field detector have been installed, side-plug-in CCD camera cannot be installed; After having installed side-plug-in CCD camera, then STEM light/dark field detector can only select and fill one, and then causes transmission electron microscope can not reach the maximized demand of function.
Summary of the invention
For above-mentioned Problems existing, the present invention provides the integrated structure of a kind of integrated TEM window of tube and STEM detector, to overcome the restriction that transmission electron microscope sidepiece interface of the prior art is subject to installing position, causing can not the problem of the maximized demand of practical function, thus side-plug-in CCD camera can either be installed, STEM light and shade detector can be installed again, also at sidepiece, CCD camera window of tube is installed simultaneously, and then meet the function maximized demand of user for transmission electron microscope, it is achieved the cost performance overflowed.
In order to realize above-mentioned purpose, the technical scheme that the present invention takes is:
The integrated structure of a kind of integrated TEM window of tube and STEM detector, wherein, comprise: the lens barrel with sidepiece interface and the adjustment component being arranged on described lens barrel by described sidepiece interface, it is inner that a part for described adjustment component is positioned at described lens barrel, and another part of described adjustment component is positioned at the outside of described lens barrel;
Wherein, it is positioned in the adjustment component of described lens barrel inside and it is integrated with TEM window of tube and STEM detector.
Above-mentioned integrated TEM window of tube and the integrated structure of STEM detector, wherein, described adjustment component is slip mechanism, and face of the facing shape of described slip mechanism is a right-angled trapezium;
Wherein, the face of facing of described slip mechanism is the outside that the one end at right angle is positioned at described lens barrel.
Above-mentioned integrated TEM window of tube and the integrated structure of STEM detector, wherein, the upper base in the face of facing of described slip mechanism and the angle between the waist in the face of facing of the described slip mechanism of described lens barrel inside are 135 ��.
Above-mentioned integrated TEM window of tube and the integrated structure of STEM detector, wherein, described TEM window of tube is installed on the central plane facing face of the described slip mechanism being positioned at described lens barrel inside, and described STEM detector is installed on the upper bottom surface facing face of the described slip mechanism being positioned at described lens barrel inside.
Above-mentioned integrated TEM window of tube and the integrated structure of STEM detector, wherein, described adjustment component is switching mechanism, and face of the facing shape of described switching mechanism is a right-angled trapezium;
Wherein, the face of facing of described switching mechanism is the outside that the one end at right angle is positioned at described lens barrel.
Above-mentioned integrated TEM window of tube and the integrated structure of STEM detector, wherein, the angle between the waist in the face of facing of the upper base in the face of facing of described switching mechanism and the described switching mechanism in described lens barrel inside is 135 ��.
Above-mentioned integrated TEM window of tube and the integrated structure of STEM detector, wherein, described TEM window of tube is installed on the central plane facing face of the described switching mechanism being positioned at described lens barrel inside, and described STEM detector is installed on the bottom surface facing face of the described switching mechanism being positioned at described lens barrel inside.
Technique scheme tool has the following advantages or useful effect:
The integrated structure of a kind of integrated TEM window of tube provided by the invention and STEM detector, by mounting and adjusting parts on the sidepiece interface of lens barrel, and in the adjustment component being positioned at lens barrel inside integrated installation TEM window of tube and STEM detector, make only to need to change the position of adjustment component in transmission electron microscope lens barrel, just TEM window of tube or STEM detector can be realized to receive electron beam, thus the sidepiece interface meeting lens barrel installs the object of CCD camera window of tube (TEM window of tube) and STEM detector simultaneously, and then meet the function maximized demand of user for transmission electron microscope, realize the cost performance overflowed.
Accompanying drawing explanation
By reading with reference to the detailed description that non-limiting example is done by the following drawings, the present invention and feature, profile and advantage will become more apparent. Mark identical in whole accompanying drawing indicates identical part. Deliberately proportionally do not draw accompanying drawing, focus on illustrating the purport of the present invention.
Fig. 1 be the integrated TEM window of tube that provides of the embodiment of the present invention 1 and the integrated structure of STEM detector standby time structural representation;
Fig. 2 is the integrated TEM window of tube that provides of the embodiment of the present invention 1 and the integrated structure of STEM detector structural representation when being in position A;
Fig. 3 is the integrated TEM window of tube that provides of the embodiment of the present invention 1 and the integrated structure of STEM detector structural representation when being in position B;
Fig. 4 be the integrated TEM window of tube that provides of the embodiment of the present invention 2 and the integrated structure of STEM detector standby time structural representation;
Fig. 5 is the integrated TEM window of tube that provides of the embodiment of the present invention 2 and the integrated structure of STEM detector structural representation when being in position A;
Fig. 6 is the integrated TEM window of tube that provides of the embodiment of the present invention 2 and the integrated structure of STEM detector structural representation when being in position B.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment, the present invention is further illustrated, but not as limiting to the invention.
Embodiment 1:
Fig. 1 be the integrated TEM window of tube that provides of the embodiment of the present invention 1 and the integrated structure of STEM detector standby time structural representation, Fig. 2 is the integrated TEM window of tube that provides of the embodiment of the present invention 1 and the integrated structure of STEM detector structural representation when being in position A, Fig. 3 is the integrated TEM window of tube that provides of the embodiment of the present invention 1 and the integrated structure of STEM detector structural representation when being in position B, as shown in the figure, the integrated structure of the integrated TEM window of tube that the embodiment of the present invention 1 provides and STEM detector comprises: the lens barrel 101 with sidepiece interface and the adjustment component being arranged on lens barrel 101 by sidepiece interface, in the embodiment of the present invention 1, this adjustment component is slip mechanism 102, face of the facing shape of slip mechanism 102 is a right-angled trapezium, it is inner that a part for slip mechanism 102 is positioned at lens barrel 101, another part of slip mechanism 102 is positioned at the outside of lens barrel 101, and one end that the face of facing of mechanism 102 of sliding is right angle is positioned at the outside of lens barrel 101, the other end of slip mechanism 102 is positioned at the inside of lens barrel 101, simultaneously, it is positioned in the slip mechanism 102 of lens barrel 101 inside and it is integrated with TEM window of tube 104 and STEM detector 103, concrete, TEM window of tube 104 is arranged on the central plane facing face of the slip mechanism 102 being positioned at lens barrel 101 inside, STEM detector 103 is arranged on the upper bottom surface facing face of the slip mechanism 102 being positioned at lens barrel 101 inside.
In the integrated TEM window of tube of the embodiment of the present invention 1 offer and the integrated structure of STEM detector, angle between the waist in the face of facing of the upper base in the face of facing of slip mechanism 102 and the slip mechanism 102 in lens barrel 101 inside is 135 ��, the face of facing of slip mechanism 102 go to the bottom and slip mechanism 102 in lens barrel 101 inside face of facing waist between angle be 45 ��, the slip mechanism 102 of this angle is set, it is possible to ensure that TEM window of tube 104 image keeps original scale after reflecting through reflecting prism.
In the integrated TEM window of tube of the embodiment of the present invention 1 offer and the integrated structure of STEM detector, also comprise a CCD camera 105, CCD camera 105 is arranged on the other side interface of lens barrel 101, and the position of CCD camera 105 is just corresponding with the position of slip mechanism 102.
When the integrated TEM window of tube using the embodiment of the present invention 1 to provide and the integrated structure of STEM detector, under ideal case, electron beam 11 reflects without any parts, thus can not form image; When slip mechanism 102 is pushed into position A, electron beam 11 reflexes in CCD camera 105 through TEM window of tube 104 such that it is able to realize the function of transmission electron microscope; Further, when slip mechanism 102 is pushed into position B, electron beam 11 is irradiated on STEM detector 103, thus converts strength of current to and be displayed on window of tube or graphoscope, completes the function of scanning transmission electron microscope.
So, the integrated structure of the integrated TEM window of tube that the embodiment of the present invention 1 provides and STEM detector, by installing slip mechanism on the sidepiece interface of lens barrel, and it is being positioned in the slip mechanism of lens barrel inside integrated installation TEM window of tube and STEM detector, make only to need to change the position of slip mechanism in transmission electron microscope lens barrel, just TEM window of tube or STEM detector can be realized to receive electron beam, thus the sidepiece interface meeting lens barrel installs the object of CCD camera window of tube (TEM window of tube) and STEM detector simultaneously, and then meet the function maximized demand of user for transmission electron microscope, realize the cost performance overflowed.
Embodiment 2:
Fig. 4 be the integrated TEM window of tube that provides of the embodiment of the present invention 2 and the integrated structure of STEM detector standby time structural representation, Fig. 5 is the integrated TEM window of tube that provides of the embodiment of the present invention 2 and the integrated structure of STEM detector structural representation when being in position A, Fig. 6 is the integrated TEM window of tube that provides of the embodiment of the present invention 2 and the integrated structure of STEM detector structural representation when being in position B, as shown in the figure, the integrated structure of the integrated TEM window of tube that the embodiment of the present invention 2 provides and STEM detector comprises: the lens barrel 201 with sidepiece interface and the adjustment component being arranged on lens barrel 201 by sidepiece interface, in the embodiment of the present invention 2, this adjustment component is switching mechanism 202, face of the facing shape of switching mechanism 202 is a right-angled trapezium, it is inner that a part for switching mechanism 202 is positioned at lens barrel 201, another part of switching mechanism 202 is positioned at the outside of lens barrel 201, and one end that the face of facing of switching mechanism 202 is right angle is positioned at the outside of lens barrel 201, the other end of switching mechanism 202 is positioned at the inside of lens barrel 201, simultaneously, it is positioned on the switching mechanism 202 of lens barrel 201 inside and it is integrated with TEM window of tube 204 and STEM detector 203, concrete, TEM window of tube 204 is arranged on the central plane facing face of the switching mechanism 202 being positioned at lens barrel 201 inside, STEM detector 203 is arranged on the bottom surface facing face of the switching mechanism 202 being positioned at lens barrel 201 inside.
In the integrated TEM window of tube of the embodiment of the present invention 2 offer and the integrated structure of STEM detector, angle between the waist in the face of facing of the upper base in the face of facing of switching mechanism 202 and the switching mechanism 202 in lens barrel 201 inside is 135 ��, the face of facing of switching mechanism 202 go to the bottom and switching mechanism 202 in lens barrel 201 inside face of facing waist between angle be 45 ��, the switching mechanism 202 of this angle is set, it is possible to ensure that TEM window of tube 204 image keeps original scale after reflecting through reflecting prism.
In the integrated TEM window of tube of the embodiment of the present invention 2 offer and the integrated structure of STEM detector, also comprise a CCD camera 205, CCD camera 205 is arranged on the other side interface of lens barrel 201, and the position of CCD camera 205 is just corresponding with the position of switching mechanism 202.
When the integrated TEM window of tube using the embodiment of the present invention 2 to provide and the integrated structure of STEM detector, under ideal case, electron beam 22 reflects without any parts, thus can not form image; When switching mechanism 202 is pushed into position A, electron beam 22 reflexes in CCD camera 205 through TEM window of tube 204 such that it is able to realize the function of transmission electron microscope; Further, when switching mechanism 202 is turn to position B, electron beam 22 is irradiated on STEM detector 203, thus converts strength of current to and be displayed on window of tube or graphoscope, completes the function of scanning transmission electron microscope.
So, the integrated structure of the integrated TEM window of tube that the embodiment of the present invention 2 provides and STEM detector, by installing switching mechanism on the sidepiece interface of lens barrel, and on the switching mechanism being positioned at lens barrel inside integrated installation TEM window of tube and STEM detector, make only to need to change the position of switching mechanism in transmission electron microscope lens barrel, just TEM window of tube or STEM detector can be realized to receive electron beam, thus the sidepiece interface meeting lens barrel installs the object of CCD camera window of tube (TEM window of tube) and STEM detector simultaneously, and then meet the function maximized demand of user for transmission electron microscope, realize the cost performance overflowed.
In sum, the integrated structure of the integrated TEM window of tube that the embodiment of the present invention provides and STEM detector, by mounting and adjusting parts on the sidepiece interface of lens barrel, and in the adjustment component being positioned at lens barrel inside integrated installation TEM window of tube and STEM detector, make only to need to change the position of adjustment component in transmission electron microscope lens barrel, just TEM window of tube or STEM detector can be realized to receive electron beam, thus the sidepiece interface meeting lens barrel installs the object of CCD camera window of tube (TEM window of tube) and STEM detector simultaneously, and then meet the function maximized demand of user for transmission electron microscope, realize the cost performance overflowed.
Those skilled in the art should understand that, those skilled in the art can realize described change case in conjunction with prior art and above-described embodiment, does not repeat them here. Such change case does not affect the flesh and blood of the present invention, does not repeat them here.
Above the better embodiment of the present invention is described. It is understood that the present invention is not limited to above-mentioned particular implementation, the equipment wherein not described to the greatest extent in detail and structure are construed as to be implemented with the usual manner in this area; Any those of ordinary skill in the art, make many possible variations and modification not departing from technical solution of the present invention, or are revised as the equivalent embodiment of equivalent variations, and this does not affect the flesh and blood of the present invention. Therefore, every content not departing from technical solution of the present invention, the technical spirit of foundation the present invention, to any simple modification made for any of the above embodiments, equivalent variations and modification, all still belongs in the scope of technical solution of the present invention protection.
Claims (5)
1. the integrated structure of an integrated TEM window of tube and STEM detector, it is characterized in that, comprise: the lens barrel with sidepiece interface and the adjustment component being arranged on described lens barrel by described sidepiece interface, it is inner that a part for described adjustment component is positioned at described lens barrel, and another part of described adjustment component is positioned at the outside of described lens barrel; Angle between the waist in the face of facing of the upper base in the face of facing of described adjustment mechanism and the described adjustment mechanism in described lens barrel inside is 135 ��;
Wherein, it is positioned in the adjustment component of described lens barrel inside and it is integrated with TEM window of tube and STEM detector; Described TEM window of tube is installed on the central plane facing face of the described adjustment mechanism being positioned at described lens barrel inside, and described STEM detector is installed on the facing on the upper bottom surface in face or on bottom surface of the described adjustment mechanism that is positioned at described lens barrel inside.
2. the integrated structure of integrated TEM window of tube as claimed in claim 1 and STEM detector, it is characterised in that, described adjustment component is slip mechanism, and face of the facing shape of described slip mechanism is a right-angled trapezium;
Wherein, the face of facing of described slip mechanism is the outside that the one end at right angle is positioned at described lens barrel.
3. the integrated structure of integrated TEM window of tube as claimed in claim 1 and STEM detector, it is characterized in that, described adjustment component is slip mechanism, described TEM window of tube is installed on the central plane facing face of the described slip mechanism being positioned at described lens barrel inside, and described STEM detector is installed on the upper bottom surface facing face of the described slip mechanism being positioned at described lens barrel inside.
4. the integrated structure of integrated TEM window of tube as claimed in claim 1 and STEM detector, it is characterised in that, described adjustment component is switching mechanism, and face of the facing shape of described switching mechanism is a right-angled trapezium;
Wherein, the face of facing of described switching mechanism is the outside that the one end at right angle is positioned at described lens barrel.
5. the integrated structure of integrated TEM window of tube as claimed in claim 1 and STEM detector, it is characterized in that, described adjustment component is switching mechanism, described TEM window of tube is installed on the central plane facing face of the described switching mechanism being positioned at described lens barrel inside, and described STEM detector is installed on the bottom surface facing face of the described switching mechanism being positioned at described lens barrel inside.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610187670.8A CN105742145B (en) | 2014-07-18 | 2014-07-18 | A kind of integral structure of integrated TEM fluorescent screens and STEM detectors |
| CN201410345490.9A CN104091745B (en) | 2014-07-18 | 2014-07-18 | The integrated structure of a kind of integrated TEM window of tube and STEM detector |
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| CN201410345490.9A CN104091745B (en) | 2014-07-18 | 2014-07-18 | The integrated structure of a kind of integrated TEM window of tube and STEM detector |
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| CN201610187670.8A Division CN105742145B (en) | 2014-07-18 | 2014-07-18 | A kind of integral structure of integrated TEM fluorescent screens and STEM detectors |
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| CN104091745B true CN104091745B (en) | 2016-06-01 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105742145A (en) * | 2014-07-18 | 2016-07-06 | 镇江乐华电子科技有限公司 | Integrated structure of TEM (transmission electron microscope) fluorescent screen and STEM (scanning transmission electron microscope) detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109884569B (en) * | 2019-01-31 | 2021-06-15 | 中国人民解放军63653部队 | Small-reflection broadband standard field generating device |
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| CN1820194A (en) * | 2003-07-30 | 2006-08-16 | 应用材料以色列公司 | Scanning electron microscope having multiple detectors and a method for multiple detector based imaging |
| CN103703537A (en) * | 2011-07-20 | 2014-04-02 | 株式会社日立高新技术 | Scanning electron microscope and scanning tunneling electron microscope |
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