CN104089613A - Capacitor-type gyroscope sensitive-end capacitor configuration device and configuration method - Google Patents
Capacitor-type gyroscope sensitive-end capacitor configuration device and configuration method Download PDFInfo
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- CN104089613A CN104089613A CN201410345610.5A CN201410345610A CN104089613A CN 104089613 A CN104089613 A CN 104089613A CN 201410345610 A CN201410345610 A CN 201410345610A CN 104089613 A CN104089613 A CN 104089613A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
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- Signal Processing (AREA)
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Abstract
The invention discloses a capacitor-type gyroscope sensitive-end capacitor configuration device and a configuration method. The configuration device comprises a sensitive-end capacitor group and a crossbeam which is used for dividing the sensitive capacitor group into two. The configuration method of the configuration device comprises the following steps: (1) adding a crossbeam in the middle of the sensitive capacitor group so as to divide the sensitive capacitor group into two, and the quantity of the capacitor group is doubled; (2) transferring the rotation of a mass block under the driving of Coriolis force to the crossbeam, i.e. a movable beam of the sensitive capacitor group through an elastic beam; (3) supporting two ends of each crossbeam through two elastic beams; (4) connecting and conducting the capacitor groups with identical variation trend together when the elastic beam is displaced. The capacitor-type gyroscope sensitive-end capacitor configuration device and the configuration method have the beneficial effects: the non-sensitivity of the device performance on the technology can be increased, and the interference resistance of the device on the linear acceleration can be improved. Meanwhile, through the isolation of the movable beam of the capacitor group, the pull-in voltage of the device can be increased.
Description
Technical field
The present invention relates to a kind of condenser type gyroscope responsive end capacitance arrangement device and collocation method thereof.
Background technology
MEMS (Micro Electro Mechanical System, MEMS (micro electro mechanical system)) gyroscope volume is little, cost is low, integration is good, be able to apply more and more widely, in the products such as, game paddle anti-shake at mobile terminal, camera, toy airplane, navigation.Due to the difference of applied environment, in some occasion, need MEMS gyroscope to have better shielding to outside environmental interference, such as the linear oscillator coming from the outside.The gyrostatic design of MEMS is symmetrical often, and ideally, the interference meeting of extraneous linear acceleration is masked completely, but due to fabrication error, the device after processing is not full symmetric, and then can not well shield linear acceleration.For above situation, we further cut apart the gyrostatic responsive end of the MEMS of condenser type sensitivity, and responsive end capacitance group number is doubled, and then cross interconnected, so as to increasing the insensitivity of device performance to technique, thereby improve the resistivity of device to linear acceleration., by the isolation of capacitance group movable beam, realizing under the prerequisite of same capacitance variable quantity, the length of single capacitor plate will shorten meanwhile, and this will improve the pick-up voltage of device.
Summary of the invention
The object of the invention is to improve the antijamming capability of device to linear acceleration, improve device pick-up voltage.
The technical solution used in the present invention is 1, the responsive end of a kind of condenser type gyroscope capacitance arrangement device, comprises responsive end capacitance group, it is characterized in that: have the crossbeam of cutting apart sensitization capacitance group, sensitization capacitance group is divided into two.
Preferably, sensitization capacitance group movable end is connected with mass by elastic beam, to transmit coriolis force.
Preferably, the two ends of every sensitization capacitance group movable end have respectively two elastic beams to provide support.
Preferably, described crossbeam is connected with anchor point by elastic beam.
Preferably, the capacitance group after divided is cross interconnected, and when mass rotates under coriolis force effect and drive the motion of sensitization capacitance group movable end, the capacitance group with Similar trend is connected as a single entity.
The collocation method of the responsive end of condenser type gyroscope of the present invention capacitance arrangement device, comprises the steps:
(1) in the middle of sensitization capacitance group, increase by one crossbeam, capacitance group is divided into two, the number of capacitance group is doubled;
(2) when mass rotates under coriolis force drives, rotate and be delivered to crossbeam by elastic beam, namely the movable beam of sensitization capacitance group;
(3) two ends of every crossbeam are provided support by two elastic beams;
(4), when elastic beam is subjected to displacement, there is the capacitance group of Similar trend to link together and conducting.
Beneficial effect of the present invention is: increase the insensitivity of device performance to technique, thereby improve the resistivity of device to linear acceleration., by the isolation of capacitance group movable beam, realizing under the prerequisite of same capacitance variable quantity, the length of single capacitor plate will shorten meanwhile, and this will improve the pick-up voltage of device.
Accompanying drawing explanation
Fig. 1 is 2 conventional sensitization capacitance group collocation methods of prior art;
Fig. 2 is 4 conventional sensitization capacitance group collocation methods of prior art;
Fig. 3 is 8 sensitization capacitance group collocation methods that the present invention proposes.
Embodiment
Below in conjunction with accompanying drawing and specific implementation method, the present invention will be further described in detail:
Figure 1 shows that the sensitization capacitance group collocation method that prior art is conventional, it has two sensitization capacitance groups to lay respectively at the two ends of mass, and forms the two poles of the earth of sensitive circuit.
Figure 2 shows that the sensitization capacitance group collocation method that prior art is conventional, each capacitance group in figure mono-is divided into two, and cross connection forms the two poles of the earth of sensitive circuit.
Figure 3 shows that the solution of the present invention, have 8 sensitization capacitance groups.At mass, when Z rotates, the capacitance group capacitance variations trend that label is 1a is identical, and the capacitance group capacitance variations trend that label is 1b is identical.1a is connected conducting and as the two poles of the earth of sensitive circuit with 1b 4 capacitance group separately.With respect to Fig. 2, crossbeam 3 is cut apart capacitance group, and the number of capacitance group doubles.Crossbeam 3 is connected with anchor point 2 by elastic beam 4, and mass 6 is connected with crossbeam 3 by elastic beam 5, the motion producing to transmit coriolis force.
The collocation method of the responsive end of the condenser type gyroscope capacitance arrangement device in the present invention, comprises the steps:
(1) in the middle of sensitization capacitance group, increase by one crossbeam, capacitance group is divided into two, the number of capacitance group is doubled;
(2) when mass rotates under coriolis force drives, rotate and be delivered to crossbeam by elastic beam, namely the movable beam of sensitization capacitance group;
(3) two ends of every crossbeam are provided support by two elastic beams;
(4), when elastic beam is subjected to displacement, there is the capacitance group of Similar trend to link together and conducting.
Be only preferred embodiment of the present invention in sum, be not used for limiting practical range of the present invention.Be that all equivalences of doing according to the content of the present patent application the scope of the claims change and modify, all should belong to technology category of the present invention.
Claims (6)
1. the responsive end of a condenser type gyroscope capacitance arrangement device, comprises responsive end capacitance group, it is characterized in that: have the crossbeam of cutting apart sensitization capacitance group, sensitization capacitance group is divided into two.
2. the responsive end of condenser type gyroscope according to claim 1 capacitance arrangement device, is characterized in that: sensitization capacitance group movable end is connected with mass by elastic beam, to transmit coriolis force.
3. the responsive end of condenser type gyroscope according to claim 2 capacitance arrangement device, is characterized in that: the two ends of every sensitization capacitance group movable end have respectively two elastic beams to provide support.
4. according to the responsive end of the condenser type gyroscope described in claim 2 or 3 capacitance arrangement device, it is characterized in that: described crossbeam is connected with anchor point by elastic beam.
5. condenser type gyroscope sensitivity according to claim 2 is held capacitance arrangement device, it is characterized in that: the sensitization capacitance group after divided is cross interconnected, when mass rotates under coriolis force effect and drive the motion of sensitization capacitance group movable end, the capacitance group with Similar trend is connected as a single entity.
6. a collocation method for the responsive end of condenser type gyroscope capacitance arrangement device, comprises the steps:
(1) in the middle of sensitization capacitance group, increase by one crossbeam, capacitance group is divided into two, the number of capacitance group is doubled;
(2) when mass rotates under coriolis force drives, rotate and be delivered to crossbeam by elastic beam, namely the movable beam of sensitization capacitance group;
(3) two ends of every crossbeam are provided support by two elastic beams;
(4), when elastic beam is subjected to displacement, there is the capacitance group of Similar trend to link together and conducting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410345610.5A CN104089613B (en) | 2014-07-18 | 2014-07-18 | Capacitive gyroscope sensitivity end electric capacity configuration device and its collocation method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410345610.5A CN104089613B (en) | 2014-07-18 | 2014-07-18 | Capacitive gyroscope sensitivity end electric capacity configuration device and its collocation method |
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| Publication Number | Publication Date |
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| CN104089613A true CN104089613A (en) | 2014-10-08 |
| CN104089613B CN104089613B (en) | 2017-07-07 |
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| CN201410345610.5A Active CN104089613B (en) | 2014-07-18 | 2014-07-18 | Capacitive gyroscope sensitivity end electric capacity configuration device and its collocation method |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10300476A (en) * | 1997-04-23 | 1998-11-13 | Murata Mfg Co Ltd | Angular velocity detecting device |
| CN1605871A (en) * | 2004-10-18 | 2005-04-13 | 北京大学 | Comb capacitance type Z axis accelerometer and preparation method thereof |
| CN103278149A (en) * | 2013-06-19 | 2013-09-04 | 江苏物联网研究发展中心 | Interdigital capacitor accelerometer with uniaxial folding spring beams |
| CN103411595A (en) * | 2013-06-18 | 2013-11-27 | 深迪半导体(上海)有限公司 | Gyroscope of single-shaft micro electro mechanical system |
| CN203704940U (en) * | 2013-09-24 | 2014-07-09 | 深迪半导体(上海)有限公司 | Uniaxial micro electro mechanical system (MEMS) capacitive gyroscope |
-
2014
- 2014-07-18 CN CN201410345610.5A patent/CN104089613B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10300476A (en) * | 1997-04-23 | 1998-11-13 | Murata Mfg Co Ltd | Angular velocity detecting device |
| CN1605871A (en) * | 2004-10-18 | 2005-04-13 | 北京大学 | Comb capacitance type Z axis accelerometer and preparation method thereof |
| CN103411595A (en) * | 2013-06-18 | 2013-11-27 | 深迪半导体(上海)有限公司 | Gyroscope of single-shaft micro electro mechanical system |
| CN103278149A (en) * | 2013-06-19 | 2013-09-04 | 江苏物联网研究发展中心 | Interdigital capacitor accelerometer with uniaxial folding spring beams |
| CN203704940U (en) * | 2013-09-24 | 2014-07-09 | 深迪半导体(上海)有限公司 | Uniaxial micro electro mechanical system (MEMS) capacitive gyroscope |
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| CN104089613B (en) | 2017-07-07 |
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Address after: 312030 Building 5, intelligent innovation center, 487 Kebei Avenue, Keqiao Economic and Technological Development Zone, Keqiao District, Shaoxing City, Zhejiang Province Patentee after: Shendi semiconductor (Shaoxing) Co.,Ltd. Address before: Room 306, block a, building 1, Zhangjiang jidiangang, 3000 Longdong Avenue, Pudong New Area, Shanghai 201203 Patentee before: Senodia Technologies (Shanghai) Co.,Ltd. |