CN104077186A - Operating system with embedded real-time kernel and embedding method - Google Patents
Operating system with embedded real-time kernel and embedding method Download PDFInfo
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Abstract
The invention provides an operating system with an embedded real-time kernel and an embedding method. The operating system is used for controlling semiconductor technology processing equipment. The embedding method is characterized by comprising the following steps: embedding a real-time kernel in an operating system; distributing system resource for the kernel of the operating system and the real-time kernel to use; and dividing control software for controlling the kernel of the operating system and the real-time kernel.
Description
Technical field
Relate to operating system, in particular for controlling the operating system of semiconductor technology treatment facility.
Background technology
Because we are when manufacturing and process wafer, trend towards less geometric configuration and larger wafer size, the timing demand of system becomes particularly harsh.On the other hand, user is at FDC(Facility Design Criteria) need how automatic control and more data on FDC and processing procedure.Process/tool data file on equipment needs regular and irregular feedback simultaneously.
These all need to control software independently speed and more deterministic timing.This also needs the control of operating system and not affected by other factors outside equipment is controlled.
Windows is the operating system being most widely used, and it has maximum techniques available talents and the technological accumulation and inheritance of Erecting and improving.It starts to be used to monitoring and controls semiconductor technology treatment facility.Yet Windows is a general operating system, it is not designed to hard real time and controls.That is to say, it is not a real-time operating system, and sometimes, its timing error and uncertainty can not meet more demand for control.As shown in Figure 1, it is 1000ms that the timing that wireless radio frequency power opens is set to timing error particularly, and while utilizing communication switcher to carry out Communication Control, timing error is 50%.Utilize RS232 serial ports to carry out Communication Control, timing error is 20%.RS-232 is called standard serial port, is current the most frequently used a kind of serial communication interface.Conventionally RS-232 interface occurs with 9 pins (DB-9) or the kenel of 25 pins (DB-25), on general personal computer, has two groups of RS-232 interface, is called COM1 and COM2.When RS232 serial ports (RS232-38400) serial ports that utilization has gathered way carries out Communication Control, timing error is 10%.During Direct Communication, timing error is also 10%.And in the control of semiconductor technology treatment facility, in the time of can making semiconductor prepare due to these timing errors, producing burr, the defect such as smooth not, therefore requires more harsh to the timing of operating system.。
And linux system is supported kinds of platform, support multi-user, multitask.Yet Linux is also a general operating system, it is not designed to hard real time and controls.That is to say, it is not a real-time operating system, and sometimes, its timing error and uncertainty can not meet more demand for control.
In order to overcome these defects, certain operations system is used two computing machines, a script-based operating system, and for controlling non real-time software function, for example, and User Interface, another stylobate is used for true-time operation in real time operating system.But this method obviously can increase the complexity of system, also can increase the cost of system.
Summary of the invention
For technological deficiency of the prior art, the invention provides a kind of in operating system the method for embedded real-time kernel, described operating system is used for controlling semiconductor technology treatment facility, it is characterized in that, comprising: an embedded real-time kernel in described operating system; Distributing system resource is used for kernel and the described real-time kernel of described operating system; And divide and control software for kernel and the control of described real-time kernel of described operating system.
Preferably, described distributing system resource comprises for kernel and the use of described real-time kernel of described operating system: the physics kernel that distributes the processor of described semiconductor equipment; The port that distributes described semiconductor equipment.
Preferably, the physics kernel of the processor of the described semiconductor equipment of described distribution comprises: the number for the described physics kernel of the kernel of described operating system is set; Number for the described physics kernel of described real-time kernel is set.
Preferably, the number of the physics kernel of described processor is a kind of in following number: 2; 4; And 8.
Preferably, described port comprises: hardware port; The network port and protocol port.
Preferably, described division control software comprises for kernel and the control of described real-time kernel of described operating system: by described control software demarcation, be first kind process and Equations of The Second Kind process, wherein, described first kind process is by the interior nuclear control of described operating system, and described Equations of The Second Kind process is controlled by described real-time kernel.
Preferably, described first kind process comprises: non-real-time process; Weak real-time process; And non-important interprocess communication.
Preferably, described non-real-time process comprises one or more of following process: man-machine interaction; Or system management.
Preferably, described Equations of The Second Kind process comprises: real-time process; And important interprocess communication.
Preferably, described real-time process comprises as one or more of lower module: the I/O of digital signal in hardware controls; The I/O of simulating signal in hardware controls; Or hardware interrupts.
Preferably, described operating system comprises a kind of in following operating system: Windows operating system; Or (SuSE) Linux OS.
According to a further aspect of the invention, a kind of operating system of embedded real-time kernel is also provided, described operating system is used for controlling semiconductor technology treatment facility, it is characterized in that, described real-time kernel is connected with described semiconductor technology treatment facility by hardware port, and described hardware port is for the data interaction between described real-time kernel and described semiconductor technology treatment facility and signal conversion.
Preferably, described real-time kernel is controlled the I/O of digital signal and simulating signal in described semiconductor technology treatment facility by described hardware port.
Preferably, described hardware port connects a timing device, and described timing device is controlled by described real-time kernel, and it carries out timing for the process that described real-time kernel is controlled.
The present invention is by an embedded real-time kernel in the operating system controlling semiconductor technology treatment facility, and system resource is distributed, the different processes of the software of division control are simultaneously used and control for kernel and the real-time kernel of operating system effect and the advantage that operating system can partly be realized to real time operating system that realize, namely avoid extraneous factor on the true impact of bad timing, realize accuracy timing faster to meet the demand for control to semiconductor manufacturing equipment.
Accompanying drawing explanation
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 illustrates the timing error schematic diagram of opening according to wireless radio frequency power in each situation based on existing operating system;
Fig. 2 illustrates according to first embodiment of the invention, a kind of in operating system the process flow diagram of the method for embedded real-time kernel; And
Fig. 3 illustrates according to second embodiment of the invention, a kind of schematic diagram of operating system of embedded real-time kernel.
Embodiment
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 2 illustrates according to first embodiment of the invention, a kind of in operating system the process flow diagram of the method for embedded real-time kernel.Aforesaid operations system is used for controlling semiconductor processes equipment.Particularly, originally illustrate three steps.First be step S101, an embedded real-time kernel in described operating system.Step S102, distributing system resource is used for kernel and the described real-time kernel of described operating system.Described distributing system resource comprises for kernel and the use of described real-time kernel of described operating system: the physics kernel that distributes the processor of described semiconductor equipment.Particularly, the physics kernel that it will be appreciated by those skilled in the art that existing central processing unit (CPU) has 4 or 8.In the process of normal operation, conventionally there is general physics kernel not used.Therefore, preferably, utilize these physics kernels that do not used by the kernel of origin operation system to use for embedded real-time kernel.For example, when central processing unit has 8 physics kernels, when computing machine normal operation, there are four physics kernels not used, therefore, when distributing system resource, four physics kernels that do not used distributed to real-time kernel and use.Particularly, when distributing the physics kernel of processor of described semiconductor equipment, according to different demands, to distributing to check figure in the kernel of origin operation system and the physics of real-time kernel, arrange.First number for the described physics kernel of the kernel of described operating system is set.Number for the described physics kernel of described real-time kernel is set afterwards.Setting up procedure is not limited in said sequence.For example, first the number for the described physics kernel of described real-time kernel is set.Number for the described physics kernel of the kernel of described operating system is set afterwards.Particularly, those skilled in the art understand, when the semiconductor processes equipment controlled when operating system is higher to timing accuracy requirement, distribute to the central processing unit that real-time kernel uses physics kernel number preferably, the number of the physics kernel of the central processing unit using more than the kernel of distributing to origin operation system.When if the semiconductor processes equipment that operating system is controlled is not high to timing accuracy requirement, the number of distributing to the physics kernel that the kernel of origin operation system uses will be more than the number of distributing to the physics kernel of real-time kernel.In addition, described distributing system resource also comprises for kernel and the use of described real-time kernel of described operating system: the port that distributes described semiconductor equipment.Preferably, described port comprises: hardware port, the network port and protocol port.Wherein, hardware port is the data-interface of operating system place computing machine.Data-interface comprises, parallel port and serial port.Then parallel port due to speed and compatible aspect comparatively backward, now less applicable in computing machine.And existing computing machine great majority have dual serial port (Serial Port), preferably, distributing serial port namely during serial ports, make the kernel of origin operation system and real-time kernel respectively use a serial port.The existing network port is generally ethernet port (Ethernet card).Ethernet (Ethernet) refers to baseband LAN standard, is the most general communication protocol standard that current existing LAN (Local Area Network) adopts.Existing computing machine great majority have two ethernet ports (Ethernet).Preferably, distributing ethernet port namely during Ethernet card, make the kernel of origin operation system and real-time kernel respectively use an ethernet port.And protocol port basis provides the difference of COS, protocol port is divided into two kinds, and a kind of is Transmission Control Protocol port, and a kind of is udp protocol port.TCP(Transmission Control Protocol) transmission control protocol TCP is a kind of towards connecting (connecting guiding), transport layer (Transport layer) communication protocol reliably, based on byte stream.UDP(User Datagram Protocol) User Datagram Protocol is a kind of connectionless transport layer protocol in ISO reference model, and the simple unreliable information transfer service towards affairs is provided.Protocol port is mainly controlled to software according to difference to be distributed for the demand of timing accuracy.Step S103, divides and controls software for kernel and the control of described real-time kernel of described operating system.Described division control software comprises for kernel and the control of described real-time kernel of described operating system: by described control software demarcation, be first kind process and Equations of The Second Kind process, wherein, described first kind process is by the interior nuclear control of described operating system, and described Equations of The Second Kind process is controlled by described real-time kernel.Described first kind process comprises: non-real-time process; Weak real-time process; And non-important interprocess communication.Described non-real-time process comprises one or more of following process: man-machine interaction; Or system management.Corresponding, described Equations of The Second Kind process comprises: real-time process; And important interprocess communication.Described real-time process comprises as one or more of lower module: the I/O of digital signal in hardware controls; The I/O of simulating signal in hardware controls; Or hardware interrupts.
Fig. 3 illustrates according to second embodiment of the invention, a kind of schematic diagram of operating system of embedded real-time kernel.Particularly, originally illustrate three parts.Operating system 1, real-time kernel 2 and hardware connect bayonet socket 3.Described operating system 1 is for controlling semiconductor technology treatment facility, described real-time kernel 2 connects bayonet socket 3(hardware port by hardware) be connected with described semiconductor technology treatment facility, described hardware connects bayonet socket 3(hardware port) for the data interaction between described real-time kernel 2 and described semiconductor technology treatment facility and signal conversion.Described real-time kernel 2 connects bayonet socket 3(hardware port by described hardware) control the I/O of digital signal and simulating signal in described semiconductor technology treatment facility.Described hardware connects bayonet socket 3(hardware port) connect a timing device, described timing device is controlled by described real-time kernel 2, its carrying out timing for described real-time kernel 2 is controlled.Particularly, hardware connects bayonet socket 3(hardware port) comprise two Ethernet cards (Ethernet interface) and dual serial port.As shown in Figure 3, respectively an Ethernet card (Ethernet interface) and a serial port are distributed to real-time kernel 2, and another Ethernet card (Ethernet interface) and a serial port are distributed to 1 use of origin operation system.More specifically, origin operation system is controlled non-real-time process, weak real-time process and non-important interprocess communication.Wherein, non-real-time process, weak real-time process and non-important interprocess communication are lower to the demand of timing accuracy, therefore by original operating system nucleus, are controlled.Real-time kernel is controlled real-time process and important interprocess communication.Real-time process and important interprocess communication are higher to the demand of timing accuracy, therefore by real-time kernel 2, are controlled.Described real-time process comprises as one or more of lower module: the I/O of simulating signal or hardware interrupts in the I/O of digital signal, hardware controls in hardware controls.Particularly, the namely control to semiconductor PROCESS FOR TREATMENT equipment of above-mentioned hardware controls.In a preference, this semiconductor technology treatment facility is a plasma etching apparatus, real-time kernel 2 is by connecing bayonet socket 3(hardware port by hardware) be connected with a plasma etching apparatus, described hardware connects bayonet socket 3(hardware port) for the data interaction between described real-time kernel 2 and plasma etching apparatus and signal conversion.Described real-time kernel 2 connects bayonet socket 3(hardware port by described hardware) control the I/O of digital signal and simulating signal in described plasma etching apparatus.Described hardware connects bayonet socket 3(hardware port) connect a timing device, described timing device is controlled by described real-time kernel 2, its carrying out timing for described real-time kernel 2 is controlled.Particularly, described real-time kernel 2 is by also having the regularly part of demand to carry out timing controlled by above-mentioned timing device to wireless radio frequency power source switch and other in above-mentioned timing device plasma etching device.Meanwhile, described real-time kernel 2 by and plasma etching apparatus between data interaction control the electron energy in plasma etching apparatus.Plasma density and reactant density etc.Finally meet the timing accuracy demand of plasma etching apparatus, and realize semi-conductive accurate etching.
In a preference, described operating system is Windows operating system, and real-time kernel 2 is embedded in Windows operating system 1, and Windows operating system 1 is for controlling semiconductor technology treatment facility.Preferably, real-time kernel 2 has perfect process/task management functions, scheduling mechanism and time management function.Real-time kernel 2 completes real-time process/task by the physics kernel directly using and operate central processing unit and switches, and the shielding of Windows operating system and quick-speed interruption response are realized to its hard real-time.Real-time kernel 2 and Windows operating system are substantially in separate running status.Described real-time kernel 2 connects bayonet socket 3(hardware port by hardware) be connected with described semiconductor technology treatment facility, described hardware connects bayonet socket 3(hardware port) for the data interaction between described real-time kernel 2 and described semiconductor technology treatment facility and signal conversion.Described real-time kernel 2 connects bayonet socket 3(hardware port by described hardware) control the I/O of digital signal and simulating signal in described semiconductor technology treatment facility.Described hardware connects bayonet socket 3(hardware port) connect a timing device, described timing device is controlled by described real-time kernel 2, its carrying out timing for described real-time kernel 2 is controlled.Preferably, this timing device is a high-accuracy high-resolution timing device.This timing device is the basis of real-time system real-time and stability.Particularly, hardware connects bayonet socket 3(hardware port) comprise two Ethernet cards (Ethernet interface) and dual serial port.As shown in Figure 3, respectively an Ethernet card (Ethernet interface) and a serial port are distributed to real-time kernel 2, and another Ethernet card (Ethernet interface) and a serial port are distributed to 1 use of Windows operating system.More specifically, Windows operating system is controlled non-real-time process, weak real-time process and non-important interprocess communication.Wherein, non-real-time process, weak real-time process and non-important interprocess communication are lower to the demand of timing accuracy, therefore by Windows operating system nucleus, are controlled.Described non-real-time process comprises one or more of following process: man-machine interaction or system management.For example, system interface, file management and parameter management etc.Real-time kernel is controlled real-time process and important interprocess communication.Real-time process and important interprocess communication are higher to the demand of timing accuracy, therefore by real-time kernel 2, are controlled.Described real-time process comprises as one or more of lower module: the I/O of simulating signal or hardware interrupts in the I/O of digital signal, hardware controls in hardware controls.Particularly, the namely control to semiconductor PROCESS FOR TREATMENT equipment of above-mentioned hardware controls.
According to above-described embodiment, by the different clocks in windows operating system to the Windows operating system of embedded real-time kernel and do not have the Windows operating system of embedded real-time kernel to carry out the comparison of timing accuracy.When using the fastest clock of Windows operating system, the maximum error of the timing of the Windows operating system of embedded real-time kernel is 47 delicate.And the maximum error of timing that there is no the Windows operating system of embedded real-time kernel is 691 delicate.When using the clock CLOCK-1 of Windows operating system, the maximum error of the timing of the Windows operating system of embedded real-time kernel is 54 delicate.And the maximum error of timing that there is no the Windows operating system of embedded real-time kernel is 5965 delicate.Can be clear and definite by above-mentioned data, the Windows operating system of embedded real-time kernel is compared does not have the Windows of embedded real-time kernel operating system can realize more accurately fixed timing.
At one, change in example, described operating system is (SuSE) Linux OS, and real-time kernel 2 is embedded in (SuSE) Linux OS 1, and (SuSE) Linux OS 1 is for controlling semiconductor technology treatment facility.Wherein, linux kernel is because POSIX real-time extension part is added gradually, and the concept as POSIX.1003.1b. has introduced real-time process, allows the attribute of a process to be defined as real-time process.Linux distinguishes real-time process and common process, and adopts different scheduling strategies.To real-time process, Linux provides two kinds of simple scheduling strategies, i.e. first service dispatch and event sheet robin scheduling first.To common process, Linux adopts the dynamic priority scheduling of class Unix, substantially there is no to consider the satisfied time-constrain of application in real time.Therefore, this has certain range of application in soft real-time aspect of coarseness again in effort of implementing to have done support aspect Linux, but far can not meet application when strong.Therefore, the present invention by an embedded real-time kernel in (SuSE) Linux OS to realize the support of (SuSE) Linux OS when strong.Preferably, this real-time kernel 2 have oneself according to the dispatching algorithm of priority.Described real-time kernel 2 connects bayonet socket 3(hardware port by hardware) be connected with described semiconductor technology treatment facility, described hardware connects bayonet socket 3(hardware port) for the data interaction between described real-time kernel 2 and described semiconductor technology treatment facility and signal conversion.Described real-time kernel 2 connects bayonet socket 3(hardware port by described hardware) control the I/O of digital signal and simulating signal in described semiconductor technology treatment facility.Described hardware connects bayonet socket 3(hardware port) connect a timing device, described timing device is controlled by described real-time kernel 2, its carrying out timing for described real-time kernel 2 is controlled.Preferably, this timing device is a high-accuracy high-resolution timing device.This timing device is real-time system real-time and stability.Particularly, hardware connects bayonet socket 3(hardware port) comprise two Ethernet cards (Ethernet interface) and dual serial port.As shown in Figure 3, respectively an Ethernet card (Ethernet interface) and a serial port are distributed to real-time kernel 2, and another Ethernet card (Ethernet interface) and a serial port are distributed to (SuSE) Linux OS 1 use.More specifically, (SuSE) Linux OS 1 is controlled non-real-time process, weak real-time process and non-important interprocess communication.Wherein, non-real-time process, weak real-time process and non-important interprocess communication are lower to the demand of timing accuracy, therefore by (SuSE) Linux OS 1 kernel, are controlled.Described non-real-time process comprises one or more of following process: man-machine interaction or system management.Real-time kernel is controlled real-time process and important interprocess communication.Real-time process and important interprocess communication are higher to the demand of timing accuracy, therefore by real-time kernel 2, are controlled.Described real-time process comprises as one or more of lower module: the I/O of simulating signal or hardware interrupts in the I/O of digital signal, hardware controls in hardware controls.Particularly, the namely control to semiconductor PROCESS FOR TREATMENT equipment of above-mentioned hardware controls.
Above specific embodiments of the invention are described.It will be appreciated that, the present invention is not limited to above-mentioned specific implementations, and those skilled in the art can make various distortion or modification within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (14)
1. a method for embedded real-time kernel in operating system, described operating system is used for controlling semiconductor technology treatment facility, it is characterized in that, comprising:
An embedded real-time kernel in described operating system;
Distributing system resource is used for kernel and the described real-time kernel of described operating system; And
Divide and control software for kernel and the control of described real-time kernel of described operating system.
2. method according to claim 1, is characterized in that, described distributing system resource comprises for kernel and the use of described real-time kernel of described operating system:
The physics kernel that distributes the processor of described semiconductor equipment;
The port that distributes described semiconductor equipment.
3. method according to claim 2, is characterized in that, the physics kernel of the processor of the described semiconductor equipment of described distribution comprises:
Number for the described physics kernel of the kernel of described operating system is set;
Number for the described physics kernel of described real-time kernel is set.
4. method according to claim 2, is characterized in that, the number of the physics kernel of described processor is a kind of in following number:
2;
4; And
8.
5. method according to claim 2, is characterized in that, described port comprises:
Hardware port;
The network port; And
Protocol port.
6. method according to claim 1, is characterized in that, described division control software comprises for kernel and the control of described real-time kernel of described operating system:
By described control software demarcation, be first kind process and Equations of The Second Kind process, wherein, described first kind process is by the interior nuclear control of described operating system, and described Equations of The Second Kind process is controlled by described real-time kernel.
7. method according to claim 6, is characterized in that, described first kind process comprises:
Non-real-time process;
Weak real-time process; And
Non-important interprocess communication.
8. method according to claim 7, is characterized in that, described non-real-time process comprises one or more of following process:
Man-machine interaction; Or
System management.
9. method according to claim 6, is characterized in that, described Equations of The Second Kind process comprises:
Real-time process; And
Important interprocess communication.
10. method according to claim 9, is characterized in that, described real-time process comprises as one or more of lower module:
The I/O of digital signal in hardware controls;
The I/O of simulating signal in hardware controls; Or
Hardware interrupts.
11. methods according to claim 1, is characterized in that, described operating system comprises a kind of in following operating system:
Windows operating system; Or
(SuSE) Linux OS.
The operating system of 12. 1 kinds of embedded real-time kernels, described operating system is used for controlling semiconductor technology treatment facility, it is characterized in that, described real-time kernel is connected with described semiconductor technology treatment facility by hardware port, and described hardware port is for the data interaction between described real-time kernel and described semiconductor technology treatment facility and signal conversion.
13. operating systems according to claim 12, is characterized in that, described real-time kernel is controlled the I/O of digital signal and simulating signal in described semiconductor technology treatment facility by described hardware port.
14. operating systems according to claim 12, is characterized in that, described hardware port connects a timing device, and described timing device is controlled by described real-time kernel, and it carries out timing for the process that described real-time kernel is controlled.
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1748203A (en) * | 2002-12-12 | 2006-03-15 | 有限状态机实验室公司 | Systems and methods for detecting a security breach in a computer system |
| CN101894045A (en) * | 2010-06-18 | 2010-11-24 | 阳坚 | Real-time Linux operating system |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1748203A (en) * | 2002-12-12 | 2006-03-15 | 有限状态机实验室公司 | Systems and methods for detecting a security breach in a computer system |
| CN101894045A (en) * | 2010-06-18 | 2010-11-24 | 阳坚 | Real-time Linux operating system |
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