CN104073768A - Ionizing coating shower nozzle - Google Patents
Ionizing coating shower nozzle Download PDFInfo
- Publication number
- CN104073768A CN104073768A CN201410316327.XA CN201410316327A CN104073768A CN 104073768 A CN104073768 A CN 104073768A CN 201410316327 A CN201410316327 A CN 201410316327A CN 104073768 A CN104073768 A CN 104073768A
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- support
- shower nozzle
- high pressure
- charging line
- plating film
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Abstract
The invention discloses an ionizing coating shower nozzle which comprises a bracket, feeding pipelines, a feeding wheel, an air injection pipeline, mixing spray pipes, a high pressure unit and a high pressure joint, wherein the feeding pipelines are symmetrically arranged on two sides of the bracket, the feeding wheel is arranged below the feeding pipelines, the air injection pipeline is arranged in the center of the bracket and is coaxial with the bracket, the mixing spray pipes are arranged on two sides of the bracket, the plane of a connecting line of the mixing spray pipes is intersected with the plane formed by the feeding pipelines, the high pressure unit is arranged behind the bracket, the high pressure joint is arranged on the bracket, and the high pressure joint is connected with the feeding pipelines. By virtue of the manner, the ionizing coating shower nozzle disclosed by the invention has the advantages of high reliability, good ionizing effect, excellent mixing performance, fast ion spraying speed, good diffusivity, stable arc generation and the like and can be widely applied to coating equipment.
Description
Technical field
The present invention relates to field of vacuum coating, particularly relate to a kind of ion plating film shower nozzle.
Background technology
Vacuum plating is a kind of working method that modern industry is conventional, emanates out get to the surface of plated object at the atom of vacuum indoor material from heating source.Technique is at first for the production of optical mirror slip, after extend to other function films, disc is aluminized, decoration film coating and material surface modifying etc., conventional method has evaporation, sputter and ion film plating, and existing equipment plated film efficiency is lower, and the dispersiveness of ion is not good, the evaporation source of originating as Coating Materials or sputtering source etc. all have comparatively high temps, make temperature in whole working cavity increase, easily cause plated film quality variation and need cooling apparatus, be unfavorable for energy-saving and emission-reduction.
Summary of the invention
The technical problem that the present invention mainly solves is to provide a kind of ion plating film shower nozzle, and the mode ionizing by high-voltage arc makes material ionization, and speed is fast, and efficiency is high, and energy consumption is lower; By gear unit, realize feeding, feeding is reliable and stable; Utilize the point discharge of two conduction Coating Materials front ends to realize ionization, protection head body, not by arc erosion, has been avoided impurity to enter and has been improved plated film quality, and maintainable good; Adopt the not coplanar oblique air blowing of meeting and discussing, realize gas flow of ions and mix, accelerate the dispersion of ion, and improve dispersion efficiency; Have unfailing performance high, ionize that effective, mixed performance is outstanding, ion jet velocity is fast, diffustivity good, electric arc produces the advantages such as stable, can be widely used in filming equipment.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: a kind of ion plating film shower nozzle is provided, comprise: support, charging line, drawing-inroller, jet pipe, mixing jet tube, high voltage unit and high pressure connection, described support zygomorphy is provided with charging line, charging line below is provided with drawing-inroller, jet pipe is arranged on support central authorities, coaxially arranged with support, mixing jet tube is arranged on support both sides, and mixing jet tube line formed plane and charging line formed plane intersect, high voltage unit is arranged on support rear, described high pressure connection is arranged on support, and high pressure connection is connected with charging line.
In a preferred embodiment of the present invention, described charging line is copper, and charging line front end bends to support axle center.
In a preferred embodiment of the present invention, described drawing-inroller is provided with two groups, and every group of drawing-inroller consists of two symmetrical gears.
In a preferred embodiment of the present invention, described gear central plane place is provided with semicircle annular groove.
In a preferred embodiment of the present invention, described mixing jet tube is plastics, and pipeline the place ahead bends to the inside, and described two mixing jet tube place planes stagger mutually, and interplanar spacing is half internal diameter of the pipeline and symmetrical with the central plane of crossing support axle center.
In a preferred embodiment of the present invention, described jet pipe and mixing jet tube jet flow stream are argon gas or nitrogen.
The invention has the beneficial effects as follows: the mode that ion plating film shower nozzle of the present invention ionizes by high-voltage arc makes material ionization, and speed is fast, and efficiency is high, and energy consumption is lower; By gear unit, realize feeding, feeding is reliable and stable; Utilize the point discharge of two conduction Coating Materials front ends to realize ionization, protection head body, not by arc erosion, has been avoided impurity to enter and has been improved plated film quality, and maintainable good; Adopt the not coplanar oblique air blowing of meeting and discussing, realize gas flow of ions and mix, accelerate the dispersion of ion, and improve dispersion efficiency; Have unfailing performance high, ionize that effective, mixed performance is outstanding, ion jet velocity is fast, diffustivity good, electric arc produces the advantages such as stable, can be widely used in filming equipment.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme in the embodiment of the present invention, below the accompanying drawing of required use during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skills, do not paying under the prerequisite of creative work, can also according to these accompanying drawings, obtain other accompanying drawing, wherein:
Fig. 1 is the structural representation of ion plating film shower nozzle one preferred embodiment of the present invention;
In accompanying drawing, the mark of each parts is as follows: 1, support, 2, charging line, 3, drawing-inroller, 4, jet pipe, 5, mixing jet tube, 6, high voltage unit, 7, high pressure connection, 8, ring groove.
Embodiment
Below the technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is only a part of embodiment of the present invention, rather than whole embodiment.Embodiment based in the present invention, those of ordinary skills, not making all other embodiment that obtain under creative work prerequisite, belong to the scope of protection of the invention.
Refer to Fig. 1, the embodiment of the present invention comprises:
A kind of ion plating film shower nozzle, comprise: support 1, charging line 2, drawing-inroller 3, jet pipe 4, mixing jet tube 5, high voltage unit 6 and high pressure connection 7, described support 1 zygomorphy is provided with charging line 2, feeding tube 2 belows, road are provided with drawing-inroller 3, jet pipe 4 is arranged on support 1 central authorities, coaxially arranged with support 1, mixing jet tube 5 is arranged on support both sides, and mixing jet tube 5 line formed planes and charging line 2 formed planes intersect, high pressure list, 6 are arranged on support 1 rear, described high pressure connection 7 is arranged on support 1, and high pressure connection 7 is connected with charging line 2.
Described charging line 2 is copper, and charging line 2 front ends, to support 1 axle center bending, facilitate material contact, realize and pull out electric arc.
Described drawing-inroller 3 is provided with two groups, and every group of drawing-inroller 3 consists of two symmetrical gears, effectively realize feeding, and feeding speed precision is controlled.
Described gear central plane place is provided with semicircle annular groove 8, adaptation material radian, convenient clamping.
Described mixing jet tube 5 is plastics, pipeline the place ahead bends to the inside, described two mixing jet tubes, 5 place planes stagger mutually, interplanar spacing is half internal diameter of the pipeline and symmetrical with the central plane of crossing support axle center, can utilize air-flow, realize short mix and the diffusion of ion, improve plated film homogeneity.
Described jet pipe 4 and mixing jet tube 5 jet flow stream are argon gas or nitrogen, and center or rare gas element are avoided and material reflection, improve plated film quality.
The beneficial effect of ion plating film shower nozzle of the present invention is:
One, the mode ionizing by high-voltage arc makes material ionization, and speed is fast, and efficiency is high, and energy consumption is lower;
Two, by gear unit, realize feeding, feeding is reliable and stable;
Three, utilize the point discharge of two conduction Coating Materials front ends to realize ionization, protection head body, not by arc erosion, has been avoided impurity to enter and has been improved plated film quality, and maintainable good;
Four, adopt the not coplanar oblique air blowing of meeting and discussing, realize gas flow of ions and mix, accelerate the dispersion of ion, and improve dispersion efficiency;
Five, have unfailing performance high, ionize that effective, mixed performance is outstanding, ion jet velocity is fast, diffustivity good, electric arc produces the advantages such as stable, can be widely used in filming equipment.
The foregoing is only embodiments of the invention; not thereby limit the scope of the claims of the present invention; every equivalent structure or conversion of equivalent flow process that utilizes description of the present invention to do; or be directly or indirectly used in other relevant technical field, be all in like manner included in scope of patent protection of the present invention.
Claims (6)
1. an ion plating film shower nozzle, it is characterized in that, comprise: support, charging line, drawing-inroller, jet pipe, mixing jet tube, high voltage unit and high pressure connection, described support zygomorphy is provided with charging line, charging line below is provided with drawing-inroller, jet pipe is arranged on support central authorities, coaxially arranged with support, mixing jet tube is arranged on support both sides, and mixing jet tube line formed plane and charging line formed plane intersect, high voltage unit is arranged on support rear, and described high pressure connection is arranged on support, and high pressure connection is connected with charging line.
2. ion plating film shower nozzle according to claim 1, is characterized in that, described charging line is copper, and charging line front end bends to support axle center.
3. ion plating film shower nozzle according to claim 1, is characterized in that, described drawing-inroller is provided with two groups, and every group of drawing-inroller consists of two symmetrical gears.
4. ion plating film shower nozzle according to claim 3, is characterized in that, described gear central plane place is provided with semicircle annular groove.
5. ion plating film shower nozzle according to claim 1, it is characterized in that, described mixing jet tube is plastics, and pipeline the place ahead bends to the inside, described two mixing jet tube place planes stagger mutually, and interplanar spacing is half internal diameter of the pipeline and symmetrical with the central plane of crossing support axle center.
6. ion plating film shower nozzle according to claim 1, is characterized in that, described jet pipe and mixing jet tube jet flow stream are argon gas or nitrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410316327.XA CN104073768A (en) | 2014-07-04 | 2014-07-04 | Ionizing coating shower nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410316327.XA CN104073768A (en) | 2014-07-04 | 2014-07-04 | Ionizing coating shower nozzle |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104073768A true CN104073768A (en) | 2014-10-01 |
Family
ID=51595363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410316327.XA Pending CN104073768A (en) | 2014-07-04 | 2014-07-04 | Ionizing coating shower nozzle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104073768A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6398125B1 (en) * | 2001-02-10 | 2002-06-04 | Nanotek Instruments, Inc. | Process and apparatus for the production of nanometer-sized powders |
| CN1658980A (en) * | 2002-04-12 | 2005-08-24 | 诺德森公司 | Module, nozzle and method for dispensing controlled patterns of liquid material |
| EP2343395A1 (en) * | 2010-01-12 | 2011-07-13 | General Electric Company | Wire arc spray system using composite wire for porous coating, and related method |
-
2014
- 2014-07-04 CN CN201410316327.XA patent/CN104073768A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6398125B1 (en) * | 2001-02-10 | 2002-06-04 | Nanotek Instruments, Inc. | Process and apparatus for the production of nanometer-sized powders |
| CN1658980A (en) * | 2002-04-12 | 2005-08-24 | 诺德森公司 | Module, nozzle and method for dispensing controlled patterns of liquid material |
| EP2343395A1 (en) * | 2010-01-12 | 2011-07-13 | General Electric Company | Wire arc spray system using composite wire for porous coating, and related method |
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| PB01 | Publication | ||
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Application publication date: 20141001 |