CN104070518A - Three freedom precision control apparatus based on eccentric structure - Google Patents
Three freedom precision control apparatus based on eccentric structure Download PDFInfo
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- CN104070518A CN104070518A CN201410277880.7A CN201410277880A CN104070518A CN 104070518 A CN104070518 A CN 104070518A CN 201410277880 A CN201410277880 A CN 201410277880A CN 104070518 A CN104070518 A CN 104070518A
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Abstract
The invention discloses a three freedom precision control apparatus based on an eccentric structure. Three supporting arms are extended along the radial direction of a motion platform uniformly arranged along a peripheral face, eccentric circular holes are respectively arranged on ends of the three supporting arms, and the eccentric holes of the three supporting arms are connected to a mounting substrate through motion branch chains with the same structure; preloading and locating components for locating the mounting substrate are mounted under the surface of a main board, the locating components and three preloading components are surrounded around the sides of the mounting substrate among the motion branch chains, three horizontal displacement measuring components are fixedly mounted under the surface of the main board on the side of the locating component. Through the three freedom precision control apparatus, submerged units of a submerged photo-etching machine are mounted and their spatial positions are adjusted so as to realize submicron location of the submerged units; the three freedom precision control apparatus is characterized by high rigidity, wide regulation range, quick motion response, modular design, compact structure, and simple assembly and adjustment, thus the control apparatus can be applied to three freedom precision control under other occasions excluding the submerged photo-etching machine.
Description
Technical field
The present invention relates to a kind of three degree of freedom regulating device, especially relate to a kind of three-freedom degree precision adjusting device based on eccentric structure.
Background technology
In immersed photoetching machine, in the end between a slice projection objective and silicon chip, there is one deck immersion flow field.Immersion flow field is produced by submergence unit, and in order to prevent that immersion flow field from leaking, requires gap between submergence unit and silicon chip in 1mm, there is to strict depth of parallelism requirement in this gap simultaneously; In liquid immersion lithography process, need submergence unit to carry out a series of motion controls, and in the control of submergence unit motion, require immersion flow field still to meet condition of work requirement.This just need to have a kind of accurate pose adjusting device to regulate the pose of submergence unit to meet the requirement of immersed photoetching machine.
In addition, for the pose governor motion of submergence unit, requirements of installation space harshness.Because litho machine is a kind of integrated equipment mechanism of height that complicated optical system and corresponding match mechanism will be grouped together in limited space, wherein all parts has strict installing space restriction.
Conventional pose governor motion has much now, divides substantially and can be divided into tandem, parallel and hybrid three classes by frame for movement.Parallel pose governor motion compared with other two kinds of governor motions have that rigidity is high, working space is little, load capacity is strong, inertia is little, Dynamics, low cost and other advantages.Traditional pose adjustment structure in parallel adopts the side chain of the secondary composition of general motion parallel institution, and such governor motion has three shortcomings, that is: traditional parallel-connection structure takes up space greatly, and kinematic pair exists gap, and within the scope of micrometric displacement, mechanism exists creeping phenomenon.
Summary of the invention
In order to realize the fine adjustment of submergence unit pose in immersed photoetching machine, the object of the present invention is to provide a kind of three-freedom degree precision adjusting device based on eccentric structure, have that installing space is little, rigidity is high, response is fast, kinematic accuracy advantages of higher, can realize motion platform [TZ, RX, RY] fine adjustment of Three Degree Of Freedom, Z axis is along installation base plate centre hole axis line upward direction, X, Y, Z axis meets Descartes's rectangular coordinate system, free degree TZ represents the translation along Z-direction, and free degree RX and RY represent respectively the rotation around X and Y-axis.
Technical scheme of the present invention is as follows:
Adjusting device of the present invention is arranged between motherboard and submergence unit, this adjusting device comprises that three preload components, positioning component, three levels are to displacement measurement assembly, installation base plate, motion platform and three movement branched chain, motion platform is extended with three along motion platform support arm radially along side face is uniform, the arm end of three support arms all has eccentric orfice, and the eccentric orfice of three support arms is respectively connected on installation base plate by the identical movement branched chain of structure; Preload component, positioning component for location and installation substrate are arranged on motherboard bottom surface, positioning component and three preload components are looped around the installation base plate side between movement branched chain, and three levels are fixedly mounted on the motherboard bottom surface of positioning component side to displacement measurement assembly.
Described positioning component comprises that X is to positioning component and Y-direction positioning component, and X is positioned at installation base plate side to positioning component and Y-direction positioning component along orthogonal orientation and positions; Three levels are arranged on the motherboard bottom surface of Y-direction positioning component side to one of them of displacement measurement assembly, two other is arranged on respectively the motherboard bottom surface of X to positioning component both sides.
Described level comprises proximity transducer, proximity transducer fixture to displacement measurement assembly, and proximity transducer is fixedly connected on motherboard bottom surface by proximity transducer fixture, and proximity transducer is towards installation base plate side.
Described movement branched chain comprises linear motion component, spherical bearing assembly and eccentric shaft thin-wall bearing assembly; Linear motion component top is arranged on installation base plate side, and linear motion component bottom is connected with spherical bearing assembly, and spherical bearing assembly is enclosed within eccentric shaft thin-wall bearing assembly, and eccentric shaft thin-wall bearing assembly is contained in the eccentric orfice of motion platform support arm.
Described linear motion component: comprise rectilinear motion pair, connecting rod and connecting rod securing member, rectilinear motion pair comprises the secondary slide block of rectilinear motion, the secondary fixture of rectilinear motion, crossed roller guide rail, drive motors and balanced adjustment assembly, the secondary slide block of rectilinear motion both sides are slidably connected at the secondary fixture of rectilinear motion outside by crossed roller guide rail, crossed roller guide rail is along motion platform end face normal direction, the secondary fixture of rectilinear motion inner side is fixed on installation base plate side, the secondary slide block of rectilinear motion middle part has through hole along glide direction, in through hole, be provided with balanced adjustment assembly, drive motors is arranged on the secondary slide block of rectilinear motion side, drive motors drives the secondary slide block of rectilinear motion to move along crossed roller guide rail direction, connecting rod upper end is fixedly connected on the secondary slider bottom of rectilinear motion, and connecting rod lower end cover has the spherical bearing of spherical bearing assembly and fixes by connecting rod securing member,
Described spherical bearing assembly: comprise spherical bearing and spherical bearing end cap; Spherical bearing is enclosed within connecting rod lower end, and spherical bearing is enclosed within eccentric shaft, and spherical bearing upper surface is fixedly connected with the eccentric shaft upper surface of eccentric shaft thin-wall bearing assembly vertically by spherical bearing end cap;
Described eccentric shaft thin-wall bearing assembly: comprise eccentric shaft, two thin-wall bearings and two thin-wall bearing end caps; Eccentric shaft side face is contained in eccentric orfice through two thin-wall bearings, two thin-wall bearings respectively by two thin-wall bearing end caps vertically location and installation in eccentric orfice.
Described balanced adjustment assembly comprises spring stop, ball, Compress Spring, spring cushion block and caging bolt; The through hole at the secondary slide block of rectilinear motion middle part is equipped with spring stop, ball, Compress Spring and spring cushion block downwards successively from end face, caging bolt is fixedly connected with the secondary fixture of rectilinear motion through the kidney slot on the secondary slide block of rectilinear motion, and spring cushion block lower end is pressed on caging bolt by Compress Spring.
Described drive motors is ultrasound piezoelectric pottery motor.
Near the secondary bottom surface of each described rectilinear motion and installation base plate junction, be provided with the electric limiting assembly for straight limit kinematic pair slide block movement stroke, electric limiting assembly comprises electric limiting baffle plate and electric switch; Electric limiting baffle plate one end is fixedly mounted on the secondary slide block of rectilinear motion, and the electric limiting baffle plate other end is positioned at electric switch groove, and electric switch is fixedly mounted on installation base plate.
Two described thin-wall bearings are clamped on the both sides of eccentric shaft intermediate flange.
The beneficial effect that the present invention has is:
1. in the present invention, three groups of movement branched chain move up and down, drive the corresponding support arm of motion platform in Z-direction in diverse location, determine a plane at 3, therefore after three groups of movement branched chain motions stop, just can determine the spatial pose of motion platform, the motion of three groups of movement branched chain can realize motion platform [TZ, RX, RY] fine adjustment of Three Degree Of Freedom, can realize like this [the TZ that is fixed on submergence unit on motion platform, RX, RY] three-freedom degree precision adjusting, can realize the submicron order precision positioning of submergence unit.
2. the present invention adopts parallel-connection structure, and kinematic pair adopts Classical Motion pair, and mechanism kinematic resistance is little, and motor direct-drive has reduced the add up error of moving, and speed responsive is fast.
3. kinematic pair structure interference fit of the present invention, utilizes the gravity unbalance loading of motion platform, reduces pair clearance, increases kinematic accuracy.
4. in the present invention, use eccentric shaft structure, taking thin-wall bearing rotating shaft as revolute pair center, taking the spherical bearing center in eccentric shaft as typed ball bearing pair center, realize the motion mode of typed ball bearing pair and revolute pair, utilize eccentric structure to realize the motion structure of typed ball bearing pair, revolute pair, make system architecture simply compact, dwindled device installation dimension, make device be easy to equipment adjustment.
5. the present invention adopts modular mentality of designing, in three-freedom degree precision adjusting device based on eccentric structure and immersed photoetching machine, other device does not have the coupling in function, except the pose that can be used for immersed photoetching machine submergence unit regulates, also can be used for having other pose of identical requirement to regulate occasion.
Brief description of the drawings
Fig. 1 is the schematic diagram of the present invention installation site in immersed photoetching machine.
Fig. 2 is three-dimensional view of the present invention.
Fig. 3 is explosive view of the present invention.
Fig. 4 is the cutaway view of movement branched chain of the present invention.
Fig. 5 is the eccentric structure view in the present invention.
In figure: S1, optical system, S2, the present invention, S3, submergence unit, 1, motherboard, 2, immersion flow field, 3, silicon chip, 4, installation base plate, 4A, installation base plate installing hole, 4B, installation base plate side, 4C, construction bolt, 5, linear motion component, 5A, rectilinear motion pair, 5A1, the secondary slide block of rectilinear motion, 5A2, the secondary fixture of rectilinear motion, 5A3, crossed roller guide rail, 5A4, drive motors, 5B, connecting rod, 5C, connecting rod securing member, 5A5, balanced adjustment assembly, 5A5a, spring stop, 5A5b, ball, 5A5c, Compress Spring, 5A5d, spring cushion block, 5A5e, caging bolt, 6, spherical bearing assembly, 6A, spherical bearing, 6B, spherical bearing end cap, 7, eccentric shaft thin-wall bearing assembly, 7A, eccentric shaft, 7B, thin-wall bearing, 7C, thin-wall bearing end cap, 8, motion platform, 8A, submergence cellular installation hole, 8B, eccentric orfice, 9, electric limiting assembly, 9A, electric limiting baffle plate, 9B, electric switch, 10, positioning component, 10A, X be to positioning component, 10B, Y-direction positioning component, 11, level is to displacement measurement assembly, 11A, proximity transducer, 11B, proximity transducer fixture, 12, preload component.
Detailed description of the invention
Below in conjunction with drawings and Examples, the present invention is described further.
As shown in Figure 1 and Figure 2, S2 of the present invention is arranged between motherboard 1 and submergence cell S 3, and optical system S1 runs through motherboard 1, S2 of the present invention and submergence cell S 3, sees through immersion flow field 2 to exposing in the silicon chip 3 of below.S2 of the present invention uses construction bolt 4C to be installed on motherboard 1 by installation base plate installing hole 4A, adjusts, locates and monitor the position of installation base plate 4, and submergence cell S 3 is installed on motion platform 8 lower surfaces by submergence cellular installation hole 8A.
As shown in Figure 2 and Figure 3, S2 of the present invention comprises that three preload components 12, positioning component 10, three levels are to displacement measurement assembly 11, installation base plate 4, motion platform 8 and three movement branched chain, motion platform 8 is extended with three along motion platform 8 support arm radially along side face is uniform, the arm end of three support arms all has eccentric orfice 8B, the eccentric orfice 8B of three support arms is respectively connected on installation base plate 4 by the identical movement branched chain of structure, three uniform installation base plate side 4B that are arranged on of movement branched chain; Preload component 12, positioning component 10 for location and installation substrate 4 are arranged on motherboard 1 bottom surface, positioning component 10 and three preload components 12 are looped around the installation base plate side 4B between movement branched chain, and three levels are fixedly mounted on motherboard 1 bottom surface of positioning component 10 sides to displacement measurement assembly 11.
Between three support arms of installation base plate 4 and motion platform 8, be connected with parallel way by three groups of identical movement branched chain of structure, three groups of movement branched chain circle distribution centered by installation base plate 4 centre bores, is arranged on the installation base plate side 4B of installation base plate 4.
As shown in Figure 2 and Figure 3, positioning component 10 comprises that X is to positioning component 10A and Y-direction positioning component 10B, and X is positioned at installation base plate side 4B to positioning component 10A and Y-direction positioning component 10B along orthogonal orientation and positions; Preload component 12 is arranged on all the other positions of 4B, installation base plate side, and positioning component 10 preload components 12 are looped around around installation base plate 4; Three levels are arranged on motherboard 1 bottom surface of Y-direction positioning component 10B side to one of them of displacement measurement assembly 11, two other is arranged on respectively motherboard 1 bottom surface of X to positioning component 10A both sides.
As shown in Figure 3, level comprises proximity transducer 11A, proximity transducer fixture 11B to displacement measurement assembly 11, proximity transducer 11A is fixedly connected on motherboard 1 bottom surface by proximity transducer fixture 11B, and proximity transducer 11A is towards installation base plate side 4B.
As shown in Figure 3, Figure 4, three groups of movement branched chain structures are identical, and every group of movement branched chain comprises linear motion component 5, spherical bearing assembly 6 and eccentric shaft thin-wall bearing assembly 7; Linear motion component 5 tops are arranged on installation base plate side 4B, linear motion component 5 bottoms are connected with spherical bearing assembly 6, spherical bearing assembly 6 is enclosed within eccentric shaft thin-wall bearing assembly 7, and eccentric shaft thin-wall bearing assembly 7 is contained in the eccentric orfice 8B of motion platform 8 support arms.
As shown in Figure 4, linear motion component 5: comprise secondary 5A of rectilinear motion, connecting rod 5B and connecting rod securing member 5C, secondary 5A of rectilinear motion comprises the secondary slide block 5A1 of rectilinear motion, the secondary fixture 5A2 of rectilinear motion, crossed roller guide rail 5A3, drive motors 5A4 and balanced adjustment assembly 5A5, the secondary slide block 5A1 of rectilinear motion both sides are slidably connected at the secondary fixture 5A2 of rectilinear motion outside by crossed roller guide rail 5A3, crossed roller guide rail 5A3 is along motion platform 8 end face normal direction, the secondary fixture 5A2 of rectilinear motion inner side is fixed on installation base plate side 4B, the secondary slide block 5A1 of rectilinear motion middle part has through hole along glide direction, in through hole, be provided with balanced adjustment assembly 5A5, drive motors 5A4 is arranged on the secondary slide block 5A1 of rectilinear motion side, drive motors 5A4 drives the secondary slide block 5A1 of rectilinear motion to move along crossed roller guide rail 5A3 direction, connecting rod 5B upper end is fixedly connected on the secondary slide block 5A1 of rectilinear motion bottom, and connecting rod 5B lower end cover has the spherical bearing 6A of spherical bearing assembly 6 and fixes by connecting rod securing member 5C.
As shown in Figure 4, spherical bearing assembly 6: comprise spherical bearing 6A and spherical bearing end cap 6B; Spherical bearing 6A is enclosed within connecting rod 5B lower end and fixes by connecting rod securing member 5C, spherical bearing 6A is enclosed within eccentric shaft 7A, and spherical bearing 6A upper surface is fixedly connected with the eccentric shaft 7A upper surface of eccentric shaft thin-wall bearing assembly 7 vertically by spherical bearing end cap 6B.
As shown in Figure 4, eccentric shaft thin-wall bearing assembly 7: comprise eccentric shaft 7A, two thin-wall bearing 7B and two thin-wall bearing end cap 7C; Eccentric shaft 7A is enclosed within outside spherical bearing 6A, and eccentric shaft 7A side face is contained in eccentric orfice 8B through two thin-wall bearing 7B, two thin-wall bearing 7B respectively by two thin-wall bearing end cap 7C vertically location and installation in eccentric orfice 8B.
As shown in Figure 4, balanced adjustment assembly 5A5: comprise spring stop 5A5a, ball 5A5b, Compress Spring 5A5c, spring cushion block 5A5d and caging bolt 5A5e; The through hole at the secondary slide block 5A1 of rectilinear motion middle part is equipped with spring stop 5A5a, ball 5A5b, Compress Spring 5A5c and spring cushion block 5A5d downwards successively from end face, caging bolt 5A5e is fixedly connected with the secondary fixture 5A2 of rectilinear motion through the kidney slot on the secondary slide block 5A1 of rectilinear motion, and spring cushion block 5A5d lower end is pressed on caging bolt 5A5e by spring 5A5c; By regulating Compress Spring 5A5c, make spring force equal motion platform gravity, reach initial equilibrium conditions.
Drive motors 5A4 is ultrasound piezoelectric pottery motor.
Near secondary 5A of each rectilinear motion bottom surface and installation base plate 4 junctions, be provided with the electric limiting assembly 9 for straight limit kinematic pair slide block 5A3 movement travel.
Electric limiting assembly 9: comprise electric limiting baffle plate 9A and electric switch 9B; Electric limiting baffle plate 9A one end is fixedly mounted on the secondary slide block 5A3's of rectilinear motion, and the electric limiting baffle plate 9A other end is positioned at electric switch 9B groove, and electric switch 9B is fixedly mounted on installation base plate 4.
Two thin-wall bearing 7B are clamped on the both sides of eccentric shaft 7A intermediate flange.The present invention utilizes the eccentric structure at thin-wall bearing center and spherical bearing center to realize kinematic pair, makes more compact structure, has saved installing space, and gravity unbalance loading has greatly reduced pair clearance.
In every group of movement branched chain, drive motors 5A4 directly drives the secondary slide block 5A1 of rectilinear motion to move along crossed roller guide rail 5A3 direction, the connecting rod 5B being connected with the secondary slide block 5A1 of rectilinear motion transmits and moves to spherical bearing 6A and thin-wall bearing 7B, it is rotated, and then drive the support arm motion of the corresponding respective straight motion of motion platform 8 assembly 5; In range of movement, every group of movement branched chain can independently drive the motion of motion platform 8 correspondences perpendicular to support arm, three groups of movement branched chain are three motion platforms 8 of capable of regulating vertical positions separately, every group of movement branched chain can independently drive motion platform motion, determine a plane at 3, determined the pose of motion platform 8 by this principle.
As shown in Figure 5, in the concrete enforcement of the present invention, on motion platform 8, there is an eccentric orfice 8B three support arm stretching out positions corresponding with every group of linear motion component 5, eccentric throw is 2.5mm, hole eccentric throw in eccentric shaft 7A is also 2.5mm, and thin-wall bearing 7B spindle central (being revolute pair position) and the spherical bearing 6A centre of gyration (being typed ball bearing pair position) eccentric throw are 2.5mm.
The specific embodiment of the invention course of work is as follows:
As shown in Figure 1, Figure 2, Figure 3 shows, between motion platform 8 and installation base plate 4, be connected by three groups of identical movement branched chain of structure, in every group of movement branched chain, use drive motors 5A4 as direct drive source, two thin-wall bearing 7B fixed eccentric shaft 7A are in the eccentric orfice 8B of motion platform 8, and connecting rod 5B is through the spherical bearing 6A being fixed in eccentric shaft 7A hole; Utilize eccentric shaft structure; the distance of thin-wall bearing 7B spindle central (being revolute pair position) and the spherical bearing 6A centre of gyration (being typed ball bearing pair position) is the eccentric throw 2.5mm of eccentric shaft; utilize eccentric shaft structure to realize the parallel institution of S pair and R pair; to make more compact structure, reduce system installing space; Each kinematic pair adopts Classical Motion pair, and the resistance of motion is less; Thin-wall bearing interference fit, motion platform gravity unbalance loading, eliminates the minim gap between bearing, reduces kinematic error; Adjust the Compress Spring 5A5c in assembly 5A5 by adjustment, make spring force equal motion platform gravity, reach initial equilibrium conditions; Drive motors 5A4 directly drives the secondary slide block 5A1 of rectilinear motion along moving along crossed roller guide rail 5A3 direction, the connecting rod 5B being connected with the secondary slide block 5A1 of rectilinear motion transmits and moves to spherical bearing 6A and thin-wall bearing 7B rotation, and then drives the support arm motion of motion platform 8 line correspondence motion assemblies 5; Like this in range of movement, every group of movement branched chain can independently drive the corresponding support arm motion of motion platform 8, three groups of movement branched chain are the position of the support arm of three motion platforms 8 of capable of regulating, determine a plane at 3, determine the pose of motion platform 8 by this principle, and then determined the pose of the submergence cell S 3 being connected on motion platform 8; Regulate the motion of three groups of movement branched chain can realize the fine adjustment of motion platform 8 at [TZ, RX, RY] Three Degree Of Freedom, the positioning precision of every group of movement branched chain can reach submicron order, therefore whole device can be realized motion platform 8 [TZ, RX, RY] three submicron order pose adjusting freely.
Above-mentioned detailed description of the invention is used for the present invention that explains, instead of limits the invention, and in the protection domain of spirit of the present invention and claim, any amendment and change that the present invention is made, all fall into protection scope of the present invention.
Claims (9)
1. the three-freedom degree precision adjusting device based on eccentric structure, this adjusting device (S2) is arranged between motherboard (1) and submergence unit (S3), it is characterized in that: this adjusting device (S2) comprises three preload components (12), positioning component (10), three levels are to displacement measurement assembly (11), installation base plate (4), motion platform (8) and three movement branched chain, motion platform (8) is extended with three along motion platform (8) support arm radially along side face is uniform, the arm end of three support arms all has eccentric orfice (8B), the eccentric orfice (8B) of three support arms is respectively connected on installation base plate (4) by the identical movement branched chain of structure, preload component (12), positioning component (10) for location and installation substrate (4) are arranged on motherboard (1) bottom surface, positioning component (10) and three preload components (12) are looped around the installation base plate side (4B) between movement branched chain, and three levels are fixedly mounted on motherboard (1) bottom surface of positioning component (10) side to displacement measurement assembly (11).
2. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 1, it is characterized in that: described positioning component (10) comprises that X is to positioning component (10A) and Y-direction positioning component (10B), X is positioned at installation base plate side (4B) to positioning component (10A) and Y-direction positioning component (10B) along orthogonal orientation and positions; Three levels are arranged on motherboard (1) bottom surface of Y-direction positioning component (10B) side to one of them of displacement measurement assembly (11), two other is arranged on respectively motherboard (1) bottom surface of X to positioning component (10A) both sides.
3. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 1, it is characterized in that: described level comprises proximity transducer (11A), proximity transducer fixture (11B) to displacement measurement assembly (11), proximity transducer (11A) is fixedly connected on motherboard (1) bottom surface by proximity transducer fixture (11B), and proximity transducer (11A) is towards installation base plate side (4B).
4. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 1, is characterized in that: described movement branched chain comprises linear motion component (5), spherical bearing assembly (6) and eccentric shaft thin-wall bearing assembly (7); Linear motion component (5) top is arranged on installation base plate side (4B), linear motion component (5) bottom is connected with spherical bearing assembly (6), spherical bearing assembly (6) is enclosed within eccentric shaft thin-wall bearing assembly (7), and eccentric shaft thin-wall bearing assembly (7) is contained in the eccentric orfice (8B) of motion platform (8) support arm.
5. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 4, is characterized in that: described linear motion component (5): comprise rectilinear motion pair (5A), connecting rod (5B) and connecting rod securing member (5C), rectilinear motion pair (5A) comprises the secondary slide block of rectilinear motion (5A1), the secondary fixture of rectilinear motion (5A2), crossed roller guide rail (5A3), drive motors (5A4) and balanced adjustment assembly (5A5), the secondary slide block (5A1) of rectilinear motion both sides are slidably connected at the secondary fixture of rectilinear motion (5A2) outside by crossed roller guide rail (5A3), crossed roller guide rail (5A3) is along motion platform (8) end face normal direction, the secondary fixture of rectilinear motion (5A2) inner side is fixed on installation base plate side (4B), the secondary slide block of rectilinear motion (5A1) middle part has through hole along glide direction, in through hole, be provided with balanced adjustment assembly (5A5), drive motors (5A4) is arranged on the secondary slide block (5A1) of rectilinear motion side, drive motors (5A4) drives the secondary slide block of rectilinear motion (5A1) to move along crossed roller guide rail (5A3) direction, connecting rod (5B) upper end is fixedly connected on the secondary slide block of rectilinear motion (5A1) bottom, and connecting rod (5B) lower end cover has the spherical bearing (6A) of spherical bearing assembly (6) fixing by connecting rod securing member (5C),
Described spherical bearing assembly (6): comprise spherical bearing (6A) and spherical bearing end cap (6B); Spherical bearing (6A) is enclosed within connecting rod (5B) lower end, spherical bearing (6A) is enclosed within eccentric shaft (7A), and spherical bearing (6A) upper surface is fixedly connected with eccentric shaft (7A) upper surface of eccentric shaft thin-wall bearing assembly (7) vertically by spherical bearing end cap (6B);
Described eccentric shaft thin-wall bearing assembly (7): comprise eccentric shaft (7A), two thin-wall bearings (7B) and two thin-wall bearing end caps (7C); Eccentric shaft (7A) side face in two thin-wall bearings (7B) are contained in eccentric orfice (8B), two thin-wall bearings (7B) respectively by two thin-wall bearing end caps (7C) vertically location and installation in eccentric orfice (8B).
6. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 5, is characterized in that: described balanced adjustment assembly (5A5) comprises spring stop (5A5a), ball (5A5b), Compress Spring (5A5c), spring cushion block (5A5d) and caging bolt (5A5e); The through hole at the secondary slide block of rectilinear motion (5A1) middle part is equipped with spring stop (5A5a), ball (5A5b), Compress Spring (5A5c) and spring cushion block (5A5d) downwards successively from end face, caging bolt (5A5e) is fixedly connected with the secondary fixture of rectilinear motion (5A2) through the kidney slot on the secondary slide block of rectilinear motion (5A1), and spring cushion block (5A5d) lower end is pressed on caging bolt (5A5e) by Compress Spring (5A5c).
7. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 5, is characterized in that: described drive motors (5A4) is ultrasound piezoelectric pottery motor.
8. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 5, it is characterized in that: near each described rectilinear motion pair (5A) bottom surface and installation base plate (4) junction, be provided with the electric limiting assembly (9) for straight limit kinematic pair slide block (5A3) movement travel, electric limiting assembly (9) comprises electric limiting baffle plate (9A) and electric switch (9B); Electric limiting baffle plate (9A) one end is fixedly mounted on the secondary slide block of rectilinear motion (5A3), and electric limiting baffle plate (9A) other end is positioned at electric switch (9B) groove, and electric switch (9B) is fixedly mounted on installation base plate (4).
9. a kind of three-freedom degree precision adjusting device based on eccentric structure according to claim 5, is characterized in that: described two thin-wall bearings (7B) are clamped on the both sides of eccentric shaft (7A) intermediate flange.
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| DE102013213254A1 (en) * | 2013-07-05 | 2014-05-22 | Carl Zeiss Smt Gmbh | Eccentric cam drive for use in tilting device for adjusting tilting angle of facet mirror of extreme UV-projection exposure system in e.g. electrical engineering, has driver element driving positioning unit relative to adjusting element |
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| CN1794091A (en) * | 2005-12-27 | 2006-06-28 | 上海微电子装备有限公司 | Precision positioning and regulating tool |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105301883A (en) * | 2015-11-06 | 2016-02-03 | 中国科学院长春光学精密机械与物理研究所 | XYZ TDOF hydraulic regulating device |
| CN109938694A (en) * | 2019-01-31 | 2019-06-28 | 华中科技大学苏州脑空间信息研究院 | Multi channel imaging system, image planes method for registering and regulating device |
| CN109938694B (en) * | 2019-01-31 | 2021-10-08 | 华中科技大学苏州脑空间信息研究院 | Multi-channel imaging system and image surface registration method |
| CN109849037A (en) * | 2019-04-11 | 2019-06-07 | 上海焕巍智能科技有限公司 | A kind of robot gripper |
| CN109849037B (en) * | 2019-04-11 | 2023-09-19 | 上海焕巍智能科技有限公司 | Robot gripper |
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| Publication number | Publication date |
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| CN104070518B (en) | 2015-09-02 |
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