CN104064577A - Image sensor achieving automatic focusing - Google Patents

Image sensor achieving automatic focusing Download PDF

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Publication number
CN104064577A
CN104064577A CN201410339099.8A CN201410339099A CN104064577A CN 104064577 A CN104064577 A CN 104064577A CN 201410339099 A CN201410339099 A CN 201410339099A CN 104064577 A CN104064577 A CN 104064577A
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Prior art keywords
color filter
photosensitive unit
pixel
layer
pixel cell
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CN201410339099.8A
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Chinese (zh)
Inventor
陈嘉胤
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Shanghai IC R&D Center Co Ltd
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Shanghai Integrated Circuit Research and Development Center Co Ltd
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Priority to CN201410339099.8A priority Critical patent/CN104064577A/en
Publication of CN104064577A publication Critical patent/CN104064577A/en
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Abstract

The invention discloses an image sensor achieving automatic focusing. Each pixel unit of the image sensor comprises a substrate, a metal layer, a color filter layer and a micro lens layer from bottom to top, four or more light channels are arranged between the corresponding substrate and the corresponding color filter layer of each pixel unit, the bottoms of different light channels are respectively and correspondingly provided with a light sensing unit, light sensing units of each pixel unit share the same micro lens of the corresponding micro lens layer, pixel values of any one set of light sensing units on each pixel diagonal are selectively output for phase detection, and therefore automatic focusing is achieved; the metal layer is used for transmitting the output of the light sensing units to a periphery circuit for process; the color filter layer is used for restoring colors to generate colorful images; the micro lens layer is used for converging incident light entering each light channel. The image sensor can achieve automatic focusing and does not need auxiliary of a complex focusing unit, a focusing process is performed back and forth, focuses are controllable, and speed is higher.

Description

The imageing sensor of automatically focusing
Technical field
The invention belongs to image sensor technologies field, specifically, relate to a kind of imageing sensor of automatic focusing.
Background technology
Imageing sensor is widely used in civilian and business category.At present, imageing sensor comprises cmos image sensor (CMOS IMAGE SENSOR, hereinafter to be referred as CIS) and charge-coupled image sensor (Charge-coupled Device, C/C for short D).
At professional scientific research and industrial circle, the CCD with high s/n ratio becomes first-selection; In high-end photography and vedio recording field, can provide the CCD of high image quality also quite to be favored.CCD is widely applied at IP Camera and mobile phone photograph module.
CCD compares with CIS, and higher, the integrated difficulty of the former power consumption is larger, and the latter is low in energy consumption, easy of integration and resolution is higher.Although CCD may be better than CIS aspect picture quality, still, along with improving constantly of CIS technology, the picture quality of a part of CIS is close to the CCD of same specification.
In prior art, the pel array in CIS adopts active pixel detecting structure (Active PixelSensor is called for short APS).An APS detecting structure APS comprises a light sensitive diode (Photo Diode is called for short PD).
State in the use in the digital camera of CIS, Autofocus Technology mainly contains two kinds of active and passive types.The principle of active focusing is to utilize signal emitting-source as infrared ray or sonar, but cannot be combined and use among general digital image system with CIS.Passive type focusing is divided into again phase-detection focusing and Contrast Detection focusing two large classes; Wherein, phase-detection speed is fast, precision is high, but needs more complicated focusing unit to assist; Contrast Detection only needs digital module to assist to calculate, yet focus process often comes and goes, focus is neighbouring, speed is relatively slow.
Therefore, a kind of imageing sensor of automatic focusing is urgently provided.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of imageing sensor of automatic focusing, overcomes near the defect such as need in prior art that more complicated focusing unit is assisted, focus process often comes and goes focus, speed is relatively slow.
In order to solve the problems of the technologies described above, the invention provides a kind of imageing sensor of automatic focusing, it comprises several pixel cells, each pixel cell comprises substrate from top to bottom, metal level, the color filter layer and microlens layer, between the substrate that each pixel cell is corresponding and the color filter layer, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, metal level is processed for the output of photosensitive unit is transferred to peripheral circuit, the reduction that the color filter layer is used for carrying out color is to generate coloured image, microlens layer is for carrying out convergence processing to entering the incident light of every optical channel.
In order to solve the problems of the technologies described above, the invention provides a kind of imageing sensor of automatic focusing, it comprises several pixel cells, each pixel cell comprises metal level from top to bottom, substrate, the color filter layer and microlens layer, in substrate corresponding to each pixel cell, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, metal level is processed for the output of photosensitive unit is transferred to peripheral circuit, the reduction that the color filter layer is used for carrying out color is to generate coloured image, microlens layer is for carrying out convergence processing to entering the incident light of every optical channel.
Preferably, in one embodiment of this invention, same the color filter in the photosensitive unit shared-color filter layer that each pixel cell comprises.
Preferably, in one embodiment of this invention, the color filter layer that each pixel cell is corresponding comprises different colours filter, the corresponding photosensitive unit setting of each the color filter.
Preferably, in one embodiment of this invention, the color filter layer that each pixel cell is corresponding comprises in red filter, green filter, blue filter the combination of any one and white filter.
Compare with existing scheme, in the present invention, between the substrate that each pixel cell is corresponding and the color filter layer, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, without complicated focusing unit assist, focus process often comes and goes that focus is controlled, speed is relatively very fast.
Accompanying drawing explanation
Fig. 1-Fig. 4 is respectively the principle schematic one to four of embodiment of the present invention image sensor for automatic focusing;
Fig. 5 is the floor map of the embodiment of the present invention one imageing sensor;
Fig. 6 is the cutaway view of the embodiment of the present invention one imageing sensor;
Fig. 7 is the floor map of the embodiment of the present invention two imageing sensors;
Fig. 8 is the cutaway view of the embodiment of the present invention two imageing sensors.
Embodiment
Below in conjunction with accompanying drawing and preferred embodiment, technical scheme of the present invention is at length set forth.Should be appreciated that, the embodiment below enumerating is only for description and interpretation the present invention, and do not form the restriction to technical solution of the present invention.
one of core concept of the present invention
For front illuminated formula FSI imageing sensor, core concept of the present invention is, it comprises several pixel cells, each pixel cell comprises substrate from top to bottom, metal level, the color filter layer and microlens layer, between the substrate that each pixel cell is corresponding and the color filter layer, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, metal level is processed for the output of photosensitive unit is transferred to peripheral circuit, the reduction that the color filter layer is used for carrying out color is to generate coloured image, microlens layer is for carrying out convergence processing to entering the incident light of every optical channel.
two of core concept of the present invention
For back illumination formula BSI imageing sensor, two of core concept of the present invention is, it comprises several pixel cells, each pixel cell comprises metal level from top to bottom, substrate, the color filter layer and microlens layer, in substrate corresponding to each pixel cell, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, metal level is processed for the output of photosensitive unit is transferred to peripheral circuit, the reduction that the color filter layer is used for carrying out color is to generate coloured image, microlens layer is for carrying out convergence processing to entering the incident light of every optical channel.
It should be noted that, in the following embodiment of the present invention, take based on the trichromatic BAYER pattern of RGB RGB front illuminated formula FIS imageing sensor is example, and above-mentioned core concept of the present invention is described.It should be noted that, above-mentioned core concept of the present invention also can be applied to the imageing sensor based on cyan Cyan, magenta Magenta, yellow Yellow (CMYK), or the imageing sensor of other patterns, will repeat in detail in the following embodiments no longer separately.
For based on the trichromatic BAYER pattern of RGB RGB back illumination formula BIS imageing sensor, as long as the description of following embodiment according to the present invention, need not creative work, metal level is positioned under metal level can be realized, therefore, the following embodiment of the present invention will no longer specifically repeat.
Fig. 1-Fig. 4 is respectively the principle schematic one to four of embodiment of the present invention image sensor for automatic focusing; As Figure 1-Figure 4, Fig. 1 represents to project in phase-detection plane after the separation by two circular holes of the image that converges through main lens, obtains eyeL and eyeR two width subimages.EyeL and eyeR are symmetrical about the perpendicular bisector am of center of circular hole line.Fig. 2 represents the focus state of phase-detection, when subimage eyeL and eyeR are positioned on its corresponding circle centerline hole al and ar separately.Fig. 3 represents one of out-of-focus appearance of phase-detection, and subimage eyeL and eyeR are between al and ar.Fig. 1 represent phase-detection out-of-focus appearance two, subimage eyeL and eyeR are positioned at outside al and ar.
embodiment mono-
Fig. 5 is the floor map of the embodiment of the present invention one imageing sensor; As shown in Figure 5, each pixel cell is actual comprises four sub-pixels, these four sub-pixels are provided with independently optical channel, i.e. actual four optical channels, the same the color filter in the shared the color filter layer of these four sub-pixels and the same lenticule in microlens layer of comprising of each pixel cell.Each optical channel degree correspondence is provided with a photosensitive unit 501, and each photosensitive unit 106 is that the length of side is the square of 3a/5 and 3a/5, and its position is symmetrical about the foursquare geometric center in each pixel cell place.Phase-detection is divided on two cornerwise axis directions and is carried out.When being positioned at the pixel value of photosensitive unit 106 output in the upper left corner and forming eyeL, the pixel value that is positioned at photosensitive unit 501 outputs in the lower right corner forms eyeR; When the pixel value of photosensitive unit 106 output in the lower left corner forms eyeL, the pixel value that is positioned at photosensitive unit 106 outputs in the upper right corner forms eyeR.
Fig. 6 is the cutaway view of the embodiment of the present invention one imageing sensor; As shown in Figure 6, the present embodiment is that a certain specific pixel is analysed and observe, with four sub-pixels that show that it comprises simultaneously.A certain specific pixel comprises substrate 101, metal level 102, the color filter layer 103 and microlens layer 104 from top to bottom, between the substrate 101 that each pixel cell is corresponding and the color filter layer 103, be provided with four optical channels 105, and be provided with a photosensitive unit 106 as light sensitive diode PD in different optical channel 105 bottom correspondences, the photosensitive unit 106 that each pixel cell comprises is at least shared same lenticule in microlens layer 104, the pixel value that optionally output is positioned at any one group of photosensitive unit 106 on pixel diagonal carries out phase-detection, automatically to focus; Metal level 102 is processed for the output of photosensitive unit 106 is transferred to peripheral circuit, and concrete metal level 102 can comprise multi-layer metal wiring (not shown), and this metal line can be arranged in one silica layer 100.The color filter layer 103 for the reduction of carrying out color to generate coloured image, the concrete the color filter in a pixel corresponding color filter layer 103, four shared these concrete the color filters of sub-pixels.Microlens layer 104 is for carrying out convergence processing to entering the incident light of every optical channel 105, the concrete lenticule in a corresponding microlens layer 104 of pixel, four shared these concrete lenticules of sub-pixels.
In the present embodiment, specification size and the lightsensitivity of corresponding four photosensitive units 106 that arrange of each pixel cell are all identical.
embodiment bis-
Fig. 7 is the floor map of the embodiment of the present invention two imageing sensors; As shown in Figure 7, each pixel cell is actual comprises four sub-pixels, these four sub-pixels are provided with independently optical channel, being that each pixel cell is actual comprises four optical channels, these four sub-pixels have separately the color filter accordingly separately in the color filter layer, but same lenticule in these four sub-pixel sharing microlens layers.Each optical channel degree correspondence is provided with a photosensitive unit 501, photosensitive unit 106 in the upper left corner is that the length of side is the square of a, photosensitive unit 106 in the lower right corner is that the length of side is the square of 7a/10, the photosensitive unit 106 that is positioned at the upper right corner and the lower left corner is all rectangles of a*a/2, and difference is different in the direction arranging.Phase-detection is divided on two cornerwise axis directions and is carried out.When being positioned at the pixel value of photosensitive unit 106 output in the upper left corner and forming eyeL, the pixel value that is positioned at photosensitive unit 501 outputs in the lower right corner forms eyeR; When the pixel value of photosensitive unit 106 output in the lower left corner forms eyeL, the pixel value that is positioned at photosensitive unit 106 outputs in the upper right corner forms eyeR.The sensitization susceptibility size of these four photosensitive units 501 is identical.
In the present embodiment, except RGB filter, increased white filter in each pixel, with regard to certain red pixel unit, the filter that the larger photosensitive unit of specification is corresponding is red filter, and other three filters corresponding to photosensitive unit are white filter.White filter add the incident light efficiency that can improve compared with small pixel, guarantee the efficiency of focusing and the quality of imaging.Such as giving an example, when the photosensitive unit 106 in the upper left corner and the lower right corner carries out phase-detection, the photosensitive unit area in the upper left corner is large but its corresponding filter is that coloured filter is such as redness, the photosensitive unit area in the lower right corner is little but filter is white filter, should keep incident light to pass through after the color filter both light intensity identical during specific implementation.The photosensitive unit in the upper right corner and the lower left corner is similar, repeats no more in detail.
8 is the cutaway view of the embodiment of the present invention two imageing sensors, as shown in Figure 8, imageing sensor comprises several pixel cells, each pixel cell comprises substrate 101 from top to bottom, metal level 102, the color filter layer 103 and microlens layer 104, between the substrate 101 that each pixel cell is corresponding and the color filter layer 103, be provided with four optical channels 105, and be provided with a photosensitive unit 106 as light sensitive diode PD in different optical channel 105 bottom correspondences, the photosensitive unit 106 that each pixel cell comprises is shared same lenticule in microlens layer 104, the pixel value that optionally output is positioned at any one group of photosensitive unit 106 on pixel diagonal carries out phase-detection, automatically to focus, metal level 102 is processed for the output of photosensitive unit 106 is transferred to peripheral circuit, and concrete metal level 102 can comprise multi-layer metal wiring (not shown), and this metal line can be arranged in one silica layer 100.The color filter layer 103 for the reduction of carrying out color to generate coloured image, four the color filters in a pixel corresponding color filter layer 103, four sub-pixels have independently concrete the color filter, such as red pixel is example, comprise a red filter and three white filters.Microlens layer 104 is for carrying out convergence processing to entering the incident light of every optical channel 105, the concrete lenticule in a corresponding microlens layer 104 of pixel, four shared these concrete lenticules of sub-pixels.
It should be noted that, if above-mentioned core concept of the present invention is applied to gray level image transducer, as long as remove the color filter layer.
In the above embodiment of the present invention, between the substrate that each pixel cell is corresponding and the color filter layer, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, without complicated focusing unit assist, focus process often comes and goes that focus is controlled, speed is relatively very fast.
Above-mentioned explanation illustrates and has described some preferred embodiments of the present invention, but as previously mentioned, be to be understood that the present invention is not limited to disclosed form herein, should not regard the eliminating to other embodiment as, and can be used for various other combinations, modification and environment, and can, in invention contemplated scope described herein, by technology or the knowledge of above-mentioned instruction or association area, change.And the change that those skilled in the art carry out and variation do not depart from the spirit and scope of the present invention, all should be in the protection range of claims of the present invention.

Claims (8)

1. the automatic imageing sensor of focusing, it is characterized in that, comprise several pixel cells, each pixel cell comprises substrate from top to bottom, metal level, the color filter layer and microlens layer, between the substrate that each pixel cell is corresponding and the color filter layer, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus, metal level is processed for the output of photosensitive unit is transferred to peripheral circuit, the reduction that the color filter layer is used for carrying out color is to generate coloured image, microlens layer is for carrying out convergence processing to entering the incident light of every optical channel.
2. imageing sensor according to claim 1, is characterized in that, same the color filter in the photosensitive unit shared-color filter layer that each pixel cell comprises.
3. imageing sensor according to claim 1, is characterized in that, the color filter layer that each pixel cell is corresponding comprises different colours filter, the corresponding photosensitive unit setting of each the color filter.
4. imageing sensor according to claim 3, is characterized in that, the color filter layer that each pixel cell is corresponding comprises in red filter, green filter, blue filter the combination of any one and white filter.
5. the automatic imageing sensor of focusing, it is characterized in that, comprise several pixel cells, each pixel cell comprises metal level, substrate, the color filter layer and microlens layer from top to bottom, in substrate corresponding to each pixel cell, be at least provided with four optical channels, and be provided with a photosensitive unit in different optical channels bottom correspondence, the photosensitive unit that each pixel cell comprises is at least shared same lenticule in microlens layer, the pixel value that optionally output is positioned at any one group of photosensitive unit on pixel diagonal carries out phase-detection, automatically to focus; Metal level is processed for the output of photosensitive unit is transferred to peripheral circuit; The reduction that the color filter layer is used for carrying out color is to generate coloured image; Microlens layer is for carrying out convergence processing to entering the incident light of every optical channel.
6. imageing sensor according to claim 5, is characterized in that, same the color filter in the photosensitive unit shared-color filter layer that each pixel cell comprises.
7. imageing sensor according to claim 5, is characterized in that, the different colours filter in each pixel cell corresponding color filter layer, the corresponding photosensitive unit of each the color filter.
8. imageing sensor according to claim 7, is characterized in that, the color filter layer that each pixel cell is corresponding comprises in red filter, green filter, blue filter the combination of any one and white filter.
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CN109167941A (en) * 2018-11-09 2019-01-08 德淮半导体有限公司 Imaging sensor and its manufacturing method
CN109887938A (en) * 2019-02-13 2019-06-14 德淮半导体有限公司 Imaging sensor and forming method thereof
CN110248095A (en) * 2019-06-26 2019-09-17 Oppo广东移动通信有限公司 A kind of focusing mechanism, focusing method and storage medium
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CN107205139A (en) * 2017-06-28 2017-09-26 重庆中科云丛科技有限公司 The imaging sensor and acquisition method of multichannel collecting
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CN109167941B (en) * 2018-11-09 2021-02-09 德淮半导体有限公司 Image sensor and method for manufacturing the same
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