CN104048643B - A kind of accurate operation system and the method for range measurement thereof - Google Patents
A kind of accurate operation system and the method for range measurement thereof Download PDFInfo
- Publication number
- CN104048643B CN104048643B CN201410276124.2A CN201410276124A CN104048643B CN 104048643 B CN104048643 B CN 104048643B CN 201410276124 A CN201410276124 A CN 201410276124A CN 104048643 B CN104048643 B CN 104048643B
- Authority
- CN
- China
- Prior art keywords
- lens
- distance
- range unit
- image
- range
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 41
- 238000005259 measurement Methods 0.000 title claims abstract description 20
- 238000003384 imaging method Methods 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims description 30
- 238000006073 displacement reaction Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 description 13
- 239000000758 substrate Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 8
- 238000000691 measurement method Methods 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000003292 glue Substances 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S13/00—Systems using the reflection or reradiation of radio waves, e.g. radar systems; Analogous systems using reflection or reradiation of waves whose nature or wavelength is irrelevant or unspecified
- G01S13/02—Systems using reflection of radio waves, e.g. primary radar systems; Analogous systems
- G01S13/06—Systems determining position data of a target
- G01S13/08—Systems for measuring distance only
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/02—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S13/00
- G01S7/40—Means for monitoring or calibrating
Landscapes
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of accurate operation system and distance-finding method thereof, and described system includes mobile device, operating platform, range unit, position control;Described range unit, for detecting the distance between described mobile device and described pending article surface;Wherein, described range unit includes picture receiver and the lens with an image-receptive plane;Described position control is for adjusting the distance between described range unit and described operating platform, making the imaging size of described pending article in described image-receptive plane, it is identical with the image size along the light axial projection of lens of described pending article.Described range unit is used in the range measurement in display floater processing procedure by the present invention, to solve that existing range accuracy is the highest, calibration inaccuracy and the low technical problem of work efficiency.
Description
[technical field]
The present invention relates to Display Technique field, particularly relate to a kind of accurate operation system and
Use its method carrying out range measurement.
[background technology]
The distance measured between certain object is one of most commonly used application, and aobvious
Show in field, such as liquid crystal display, Organic Light Emitting Diode (OLED) display,
In the manufacture field of low temperature polycrystalline silicon display, measure apart from even more important the most smart
Carefully.
In TFT liquid crystal display (TFT-LCD) production process,
Many operations are such as: the judgement of array detection distance, liquid crystal panel alignment film (Cell PI)
Coating, liquid crystal panel dripping process (Cell ODF) frame glue coating, liquid crystal panel
Cutting (Cell Cut), the para-position etc. of module, be required at distance glass substrate the highest
The place of degree, uses mobile device glass substrate carries out operation or carries out para-position.
At present manufacturing process is used for detecting between mobile device 11 and glass substrate 13
Distance method has two kinds, the first be by known data calculate mobile device 11 with
Distance H between glass substrate 13.As it is shown in figure 1, due to mobile device 11 and behaviour
Make to have between platform 12 bigger space, and the thickness D of glass substrate 13 has one
Fixed specification, D is usually 0.3mm 0.7mm.The H numerical value that this method obtains is (i.e.
Mobile device 11 and the distance of glass substrate 12) relatively coarse, and H-number is to pass through
Calculate, i.e. measured between mobile device 11 and operating platform 12 by regular calibration
Height L, deduct the thickness D of glass substrate 13.The method of this computed range is used
In the range finding of the highest equipment of some required precisions of adjusting the distance, and it also requires by fixed
Phase adjusts detection and corrects, inefficiency.
The method of the second range finding is through more accurate model and calculates, system of such as dripping
The frame glue coating of journey operation, principle is as shown in Figure 2.
Reflective, then by equipment by the reflective of operating platform and glass substrate
Light eyeglass receives reflective, by calculating luminous beam and launching the angle between light light beam
Calculating the distance between operating platform and glass substrate, concrete schematic diagram refer to Fig. 2
Shown in.This method is to receive reflection light by adjustment light eyeglass 21, then leads to
Cross adjust light eyeglass 21 angle to calculate between mobile device and glass substrate away from
From.This method subject matter has to be by receiving reflection light and carrys out computed range, and anti-
Penetrate the poly-property that dissipates of the intensity after light reflects on the glass substrate significantly to weaken, thus can be big
The big precision measured that reduces, simultaneously by the way of adjusting light eyeglass 21 computed range,
Also bigger error it is commonly present time.In this way cannot be used for the finest equipment to survey
Away from upper.
[summary of the invention]
It is an object of the invention to provide a kind of accurate operation system and use its carry out away from
From the method measured, to improve precision and the work efficiency of range measurement.
For solving above-mentioned technical problem, the present invention constructs a kind of accurate operation system, institute
State accurate operation system to include:
Mobile device, is used for treating process article and carries out accurate operation or finely detect;
Operating platform, is used for carrying described pending article;
Range unit, be used for detecting described mobile device and described pending article surface it
Between distance, comprising:
Picture receiver, it has an image-receptive plane, and described image-receptive is put down
Face is parallel with the loading end of described operating platform;And
Lens, the primary optical axis of described lens is vertical with described image-receptive plane, institute
Stating the photocentre of lens with the distance of described image-receptive plane is a predeterminable range;With
And
Position control, for adjusting between described range unit and described operating platform
Distance so that the imaging size of the described pending article in described image-receptive plane,
It is identical with the image size along the light axial projection of lens of described pending article.
In the accurate operation system of the present invention, wherein, described range unit has at the beginning of one
Beginning position;
The initial position of described range unit is: along the described lens of the first rectilinear direction
The plane at the place, bottom of cross section and described mobile device is in same reference plane;Its
In, described first straight line is: and the described lens of process vertical with described lens primary optical axis
The straight line of photocentre;
Described position control is additionally operable to position adjustment institute on the basis of described reference plane
State the distance between range unit and described operating platform.
In the accurate operation system of the present invention, described range unit is along the light of described lens
Direction of principal axis is near described operating platform or away from described operating platform.
In the accurate operation system of the present invention, described predeterminable range is Jiao of described lens
Away from 2 times.
In the accurate operation system of the present invention, described lens are convex lens.
Further object is that offer one uses accurate operation system to carry out
The method of range measurement, described accurate operation system includes:
Mobile device, is used for treating process article and carries out accurate operation or finely detect;
Operating platform, is used for carrying described pending article;
Range unit, be used for detecting described mobile device and described pending article surface it
Between distance, comprising:
Picture receiver, it has an image-receptive plane, and described image-receptive is put down
Face is parallel with the loading end of described operating platform;And
Lens, the primary optical axis of described lens is vertical with described image-receptive plane, institute
Stating the photocentre of lens with the distance of described image-receptive plane is a predeterminable range;With
And
Position control, for adjusting between described range unit and described operating platform
Distance so that the imaging size of the described pending article in described image-receptive plane,
It is identical with the image size along the light axial projection of lens of described pending article;
It is characterized in that, the method for described range measurement includes:
Described position control, by mobile described range unit, adjusts described range unit
And the distance between described operating platform, so that described in described image-receptive plane
The imaging size of pending article, it is and the optical axis along lens of described pending article
The image size of projection is identical;
Obtain the displacement of described range unit, and using described displacement as first
Distance;
According to described first distance and the focal length of described lens, it is thus achieved that second distance, its
Described in second distance be the distance between described mobile device and described pending article;
And
According to described second distance, calibrate described mobile device, with carry out accurate operation or
Fine detection.
In the method for the range measurement of the present invention, wherein, described range unit has one
Initial position;
The initial position of described range unit is: along the described lens of the first rectilinear direction
The plane at the place, bottom of cross section and described mobile device is in same reference plane;Institute
Stating the first straight line is vertical with described lens primary optical axis and the photocentre of the described lens of process
Straight line;
Described position control is additionally operable to position adjustment institute on the basis of described reference plane
State the first distance between range unit and described operating platform.
In the method for the range measurement of the present invention, described according to described first distance and
The focal length of described lens obtains the step of second distance, also includes:
When the optical axis direction along described lens, mobile described range unit is near described operation
During platform, described second distance is equal to described first distance and the two of the focal length of described lens
Times sum;
When the optical axis direction along described lens, mobile described range unit is away from described operation
During platform, described second distance deducts described first equal to the twice of the focal length of described lens
Distance.
In the method for the range measurement of the present invention, described predeterminable range is described lens
2 times of focal length.
In the method for the range measurement of the present invention, described lens are convex lens.
The present invention is by providing a kind of accurate operation system and using accurate operation system to enter
The method that row distance is measured, by providing range unit, is used for display surface by range unit
In range measurement in plate processing procedure, with solve existing range measurement accuracy the highest, calibration
Inaccuracy and the low technical problem of work efficiency.
[accompanying drawing explanation]
Fig. 1 is the first distance measurement method structural representation of the prior art.
Fig. 2 is the second distance measurement method structural representation of the prior art.
Fig. 3 is the schematic diagram of lens principle of the prior art.
Fig. 4 is the schematic diagram of the focal length of lens of the prior art.
Fig. 5 is the accurate operation system structure schematic diagram in the embodiment of the present invention.
Fig. 6 is the knot of the distance measurement method of the first situation in the embodiment of the present invention
Structure schematic diagram.
Fig. 7 is the knot of the distance measurement method of the second situation in the embodiment of the present invention
Structure schematic diagram.
[detailed description of the invention]
The explanation of following embodiment is graphic with reference to add, can in order to illustrate the present invention
In order to the specific embodiment implemented.The direction term that the present invention is previously mentioned, such as " on ",
D score, "front", "rear", "left", "right", " interior ", " outward ", " side " etc., only
It it is the direction with reference to annexed drawings.Therefore, the direction term of use is to illustrate and manage
Solve the present invention, and be not used to limit the present invention.In the drawings, the unit that structure is similar be with
Identical label represents.
Refer to the schematic diagram that Fig. 3, Fig. 3 are lens principle of the prior art.
As it is shown on figure 3, lens principle is when object (shown in the arrow on the left of zero)
Distance lens (zero) two focus length 2f when, can lens another
The big reality stood upside down such as present on the receptor of side (shown in the arrow on the right side of zero)
Picture.
Refer to the schematic diagram that Fig. 4, Fig. 4 are the focal length of lens of the prior art.
As shown in Figure 4, the focal distance f of lens 40 arrives lens equal to the photocentre 401 of lens
Distance between focus 402.
Table 1 is given when object and distance u of lens and the lens under focal distance f different situations
Imaging law:
Object is to distance u of lens | V (image distance) | The character of picture | Application example |
U > 2f (far field) | 2f > v > f (near region) | Stand upside down, reduce, real image | Photographing unit |
U=2f | V=2f | Stand upside down, etc. big, real image | Can be used to focus on |
2f > u > f (near region) | V > 2f (far field) | Handstand, amplification, real image | Optical lantern |
U=f | Not imaging | Searchlight | |
u<f | Upright, amplify, the virtual image | Magnifier |
Table 1
Refer to showing of the accurate operation system structure that Fig. 5, Fig. 5 are the embodiment of the present invention
It is intended to.
As it is shown in figure 5, described accurate operation system includes mobile device 50, for right
Pending article carry out accurate operation or finely detect;Such as produce during glass substrate used
Board parts.
Operating platform 54, is used for carrying described pending article 53, described pending thing
Product 53 are such as glass substrate;
Range unit 51, is used for detecting described mobile device 50 and described pending article
Distance H between 53 surfaces, described range unit 51 includes picture receiver 511 He
Lens 40:
Wherein, picture receiver 511 has an image-receptive plane, described image-receptive
Plane is parallel with the loading end of described operating platform;
The primary optical axis (vertical dotted line 70 in figure) of described lens 40 and described image-receptive
Plane is vertical, and the photocentre of described lens 40 is one with the distance of described image-receptive plane
Predeterminable range L;And
Position control 52, is used for adjusting described range unit 51 and described operating platform
Distance between 54 so that the described pending article in described image-receptive plane
Imaging size, it is big with the image along the light axial projection of lens of described pending article
Little identical.
Preferably, described range unit 51 has an initial position;Described range unit
The initial position of 51 is: along the cross section of described lens of the first rectilinear direction and described
The plane at the place, bottom of mobile device is in same reference plane.Certain described range finding dress
Put the cross section that the initial position of 51 can also be the described lens along the first rectilinear direction
Parallel with the plane at the place, bottom of described mobile device;Now range unit 51 detects
Described mobile device 50 is point and described pending article 53 table on the basis of this initial position
Distance H between face.Wherein, described first straight line (horizontal dotted line in figure) is: with
Described lens primary optical axis is vertical and the straight line of the photocentre of the described lens of process;
Described position control 52 is surveyed described in position adjustment on the basis of described reference plane
Distance between device and described operating platform.
The predeterminable range of described picture receiver 511 and described lens 40 is described lens
2 times of focal length.
Described range unit 51 along the optical axis direction of described lens near described operating platform
Or away from described operating platform 54.
Described lens 40 can be convex lens.
Above-mentioned accurate operation system is used for measuring distance, uses described accurate operation system
Measure the tool of distance between described mobile device 50 and described pending article surface 53
Body step is:
S100, described range unit 51 is fixed on initial position position as shown in Figure 5
Putting, the initial position of the most described range unit 51 is: along the first rectilinear direction
The plane at the cross section of described lens and the place, bottom of described mobile device is in same
Reference plane, certain described initial position can also be the first straight line and described mobile device
The parallel position of the plane at place, bottom;Wherein, described first straight line is (in figure laterally
Dotted line) be: the photocentre of the described lens of and process vertical with described lens primary optical axis straight
Line;
S102, described position control 52, by mobile described range unit 51, adjust
Distance between described range unit 51 and described operating platform 54, so that described figure
As the imaging size of the described pending article in receiving plane, it is pending with described
Identical (the most described optical center of lens of image size along the light axial projection of lens of article
With described pending article distance is focal length of lens f 2 times);Preferably institute's rheme
Put actuator 52 and be additionally operable to range finding dress described in position adjustment on the basis of described reference plane
Put the distance between described operating platform.
S103, obtain the displacement of described range unit 51, and by described movement away from
From as the first distance;
S104, according to described first distance and the focal length of described lens, it is thus achieved that second away from
From, wherein said second distance is described mobile device 50 and described pending article 53
Between distance;
S105, according to described second distance, calibrate described mobile device 50, to carry out
Accurate operation or finely detect.Owing to optical axis is parallel with primary optical axis, therefore optical axis direction and
Primary optical axis direction is identical.
Two kinds of situations are also included when performing described step S102: the first, institute's rheme
Putting the actuator 52 optical axis direction along described lens, mobile described range unit 51 is close
During described operating platform 54 so that the described pending thing in described image-receptive plane
The imaging size of product 53, it is that the optical axis along lens with described pending article 53 is thrown
The image size of shadow is identical, the most described range unit 51 be positioned at 61 positions in figure (as
Shown in Fig. 6);The second, described position control 52 along the optical axis direction of described lens,
Mobile described range unit 51 is away from described operating platform 54 so that described image-receptive
The imaging size of the described pending article in plane, it is and described pending article
The image size along the light axial projection of lens identical, the most described range unit 51
81 positions (as shown in Figure 7) in figure.The light of lens 40 described in Fig. 6 and Fig. 7
The heart has for signal distance, above-mentioned two situations with distance 2f of described image-receptive plane
Body is:
The first situation as shown in Figure 6, described distance measurement method particularly as follows:
Refer to the distance survey that Fig. 6, Fig. 6 are the first situations in the embodiment of the present invention
The structural representation of metering method.
S102 particularly as follows: described position control 52 is along the optical axis direction of described lens,
Mobile described range unit 51 is near described operating platform 54, (i.e. along initial position also
It is exactly that the position (in figure 6 for being reduced to 60 positions) in Fig. 5 moves down), make
The imaging size of described pending article 53 in described image-receptive plane, it is
Identical with the image size along the light axial projection of lens of described pending article 53.
S103 particularly as follows: now obtain described range unit moves down distance s1,
(distance of initial position 60 to final position 61), and described displacement s1 is made
It it is the first distance;
S104 is particularly as follows: described second distance H is equal to described first distance s1 with described
The twice sum of the focal distance f of lens.
The second situation as it is shown in fig. 7, described range measurement method particularly as follows:
Refer to the distance survey that Fig. 7, Fig. 7 are the second situations in the embodiment of the present invention
The structural representation of metering method.
S102 particularly as follows: described position control 52 is along the optical axis direction of described lens,
Mobile described range unit 51 is away from described operating platform 54, (i.e. along initial position also
It is exactly that the position (in the figure 7 for being reduced to 80 positions) in Fig. 5 moves up), make
The imaging size of described pending article 53 in described image-receptive plane, it is
Identical with the image size along the light axial projection of lens of described pending article 53.
S103 is particularly as follows: displacement s2 now obtaining described range unit is (initial
Position 80 is to the distance of final position 81), and using described displacement s2 as first
Distance;
S104 is specially the described second distance H twice equal to the focal distance f of described lens
Deduct described first distance s2.
Distance measurement method in the present invention can use convex lens to realize.
The present invention is by providing a kind of accurate operation system and using accurate operation system to enter
The method that row distance is measured, by providing range unit, is used for display surface by range unit
In range measurement in plate processing procedure, to solve, existing range accuracy is the highest, calibration is the most smart
Really and the low technical problem of work efficiency.
In sum, although the present invention is disclosed above with preferred embodiment, but above-mentioned excellent
Select embodiment and be not used to limit the present invention, those of ordinary skill in the art, not taking off
In the spirit and scope of the present invention, all can make various change and retouching, the therefore present invention
Protection domain define in the range of standard with claim.
Claims (10)
1. an accurate operation system, includes mobile device, is used for treating processed material
Product carry out accurate operation or finely detect;Operating platform, is used for carrying described pending thing
Product;It is characterized in that, described accurate operation system has farther included:
Range unit, be used for detecting described mobile device and described pending article surface it
Between distance, comprising:
Picture receiver, it has an image-receptive plane, and described image-receptive is put down
Face is parallel with the loading end of described operating platform;And
Lens, the primary optical axis of described lens is vertical with described image-receptive plane, institute
Stating the photocentre of lens with the distance of described image-receptive plane is a predeterminable range;With
And
Position control, for adjusting between described range unit and described operating platform
Distance so that the imaging size of the described pending article in described image-receptive plane,
It is identical with the image size along the light axial projection of lens of described pending article.
Accurate operation system the most according to claim 1, it is characterised in that: its
In, described range unit has an initial position;
The initial position of described range unit is: along the described lens of the first rectilinear direction
The plane at the place, bottom of cross section and described mobile device is in same reference plane;Its
In, described first straight line is: and the described lens of process vertical with described lens primary optical axis
The straight line of photocentre;
Described position control is additionally operable to position adjustment institute on the basis of described reference plane
State the distance between range unit and described operating platform.
Accurate operation system the most according to claim 2, it is characterised in that: institute
State range unit along described lens optical axis direction near described operating platform or away from
Described operating platform.
Accurate operation system the most according to claim 1, it is characterised in that: institute
State the focal length that predeterminable range is described lens 2 times.
Accurate operation system the most according to claim 1, it is characterised in that: institute
Stating lens is convex lens.
6. use the method that accurate operation system carries out range measurement, described fine behaviour
Include as system:
Mobile device, is used for treating process article and carries out accurate operation or finely detect;
Operating platform, is used for carrying described pending article;
Range unit, be used for detecting described mobile device and described pending article surface it
Between distance, comprising:
Picture receiver, it has an image-receptive plane, and described image-receptive is put down
Face is parallel with the loading end of described operating platform;And
Lens, the primary optical axis of described lens is vertical with described image-receptive plane, institute
Stating the photocentre of lens with the distance of described image-receptive plane is a predeterminable range;With
And
Position control, for adjusting between described range unit and described operating platform
Distance so that the imaging size of the described pending article in described image-receptive plane,
It is identical with the image size along the light axial projection of lens of described pending article;
It is characterized in that, the method for described range measurement includes:
Described position control, by mobile described range unit, adjusts described range unit
And the distance between described operating platform, so that described in described image-receptive plane
The imaging size of pending article, it is and the optical axis along lens of described pending article
The image size of projection is identical;
Obtain the displacement of described range unit, and using described displacement as first
Distance;
According to described first distance and the focal length of described lens, it is thus achieved that second distance, its
Described in second distance be the distance between described mobile device and described pending article;
And
According to described second distance, calibrate described mobile device, with carry out accurate operation or
Fine detection.
The method of range measurement the most according to claim 6, it is characterised in that:
Wherein, described range unit has an initial position;
The initial position of described range unit is: along the described lens of the first rectilinear direction
The plane at the place, bottom of cross section and described mobile device is in same reference plane;Institute
Stating the first straight line is vertical with described lens primary optical axis and the photocentre of the described lens of process
Straight line;
Described position control is additionally operable to position adjustment institute on the basis of described reference plane
State the first distance between range unit and described operating platform.
The method of range measurement the most according to claim 7, it is characterised in that:
The described focal length according to described first distance and described lens obtains the step of second distance
Suddenly, also include:
When the optical axis direction along described lens, mobile described range unit is near described operation
During platform, described second distance is equal to described first distance and the two of the focal length of described lens
Times sum;
When the optical axis direction along described lens, mobile described range unit is away from described operation
During platform, described second distance deducts described first equal to the twice of the focal length of described lens
Distance.
The method of range measurement the most according to claim 6, it is characterised in that:
Described predeterminable range is 2 times of the focal length of described lens.
The method of range measurement the most according to claim 6, it is characterised in that:
Described lens are convex lens.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410276124.2A CN104048643B (en) | 2014-06-19 | 2014-06-19 | A kind of accurate operation system and the method for range measurement thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410276124.2A CN104048643B (en) | 2014-06-19 | 2014-06-19 | A kind of accurate operation system and the method for range measurement thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104048643A CN104048643A (en) | 2014-09-17 |
CN104048643B true CN104048643B (en) | 2016-08-24 |
Family
ID=51501807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410276124.2A Expired - Fee Related CN104048643B (en) | 2014-06-19 | 2014-06-19 | A kind of accurate operation system and the method for range measurement thereof |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104048643B (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6307636B1 (en) * | 1996-11-22 | 2001-10-23 | Leica Microsystems Ag | Method for telemeasuring and telemeter |
CN2833516Y (en) * | 2005-06-08 | 2006-11-01 | 杨玠 | Optical imaging distance measurer |
CN101576707B (en) * | 2008-05-06 | 2012-07-18 | 鸿富锦精密工业(深圳)有限公司 | Measurement system and measurement method for lens length |
CN102320753A (en) * | 2011-08-09 | 2012-01-18 | 深圳市华星光电技术有限公司 | The coating apparatus of glass substrate and coating process thereof |
CN102980561B (en) * | 2012-11-30 | 2015-10-07 | 广东欧珀移动通信有限公司 | A kind of mobile terminal distance-finding method and device |
-
2014
- 2014-06-19 CN CN201410276124.2A patent/CN104048643B/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN104048643A (en) | 2014-09-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7920257B2 (en) | Systems and methods for determining the shape of glass sheets | |
CN102183221B (en) | Measurement method for verticality of optical axis of microscope system | |
CN107132636A (en) | A kind of aspherical primary mirror reflecting surface debugs benchmark calibration method and its system | |
CN103430297B (en) | Utilize the wafer alignment system of optical coherence tomography | |
CN104391291B (en) | Fine particle laser radar system with adjustable focal position and self-calibration method | |
CN106526576B (en) | Satellite remote sensing instrument ground imaging test optical axis alignment methods | |
CN102566295A (en) | Lithography device and method for measuring multi-light spot zero offset | |
CN104316082B (en) | A kind of theodolite outfield infinity range correction method | |
CN107449590A (en) | A kind of laser beam pointing stability measurement apparatus | |
CN104375255B (en) | The Method of Adjustment of Off-axial optical system on a kind of thin-wall part | |
CN107817094A (en) | A kind of high accuracy double optical axises and more plain shaft parallelism adjusting process in the same direction | |
CN105674934B (en) | A kind of assay method for being used for the catadioptric system optical interval containing hollow primary mirror | |
CN107870445A (en) | Optical axis alignment device and optical axis alignment method based on camera imaging | |
CN103543610B (en) | A kind of focusing levelling light spot position calibration method | |
CN107817095A (en) | A kind of high accuracy double optical axises and more plain shaft parallelism adjusting process in the same direction | |
CN104048643B (en) | A kind of accurate operation system and the method for range measurement thereof | |
CN106247998A (en) | A kind of laser axis and the calibration method of reflecting mirror normal parallel | |
CN105203036B (en) | The device and method that eyes with non-contact method measures lens centre thickness | |
CN105572050B (en) | The detection method of spherical lens material homogeneity | |
CN110873558B (en) | Distance and attitude angle measuring device and method | |
WO2018201566A1 (en) | Laser detection device, and application method thereof | |
CN104280851A (en) | Adjusting device for focusing and leveling self zero plane and method thereof | |
US10016872B2 (en) | Method for producing a mirror substrate blank of titanium-doped silica glass for EUV lithography, and system for determining the position of defects in a blank | |
CN104516210B (en) | Telecentric measuring method for photoetching machine lens | |
TWI518300B (en) | Optical callibration device and optical callibration method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160824 |