CN104046980B - Vacuum power precipitation equipment - Google Patents
Vacuum power precipitation equipment Download PDFInfo
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- CN104046980B CN104046980B CN201310464725.1A CN201310464725A CN104046980B CN 104046980 B CN104046980 B CN 104046980B CN 201310464725 A CN201310464725 A CN 201310464725A CN 104046980 B CN104046980 B CN 104046980B
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- unit
- linear movement
- vacuum power
- precipitation equipment
- guide portion
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18056—Rotary to or from reciprocating or oscillating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T74/00—Machine element or mechanism
- Y10T74/18—Mechanical movements
- Y10T74/18056—Rotary to or from reciprocating or oscillating
- Y10T74/18088—Rack and pinion type
- Y10T74/18096—Shifting rack
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- General Engineering & Computer Science (AREA)
- Electroluminescent Light Sources (AREA)
- Motorcycle And Bicycle Frame (AREA)
Abstract
Provide a kind of vacuum power precipitation equipment comprising: driving unit；Linear movement unit is attached to the driving unit and is configured as according to the operation of the driving unit and linear movement；And angle restricting unit, it is attached to the linear movement unit and is configured as being moved upwards according to the movement of the linear movement unit in the side vertical with the direction of motion of the linear movement unit.
Description
Cross reference to related applications
This application claims the 10-2013-0027488 South Korea submitted on March 14th, 2013 to Koran Office is special
The priority and right of benefit application, the full content of the South Korea patent application are incorporated herein by reference.
Technical field
Embodiments of the present invention are related to vacuum power precipitation equipment.
Background technique
Moving electron equipment is widely used, and some embodiments of moving electron equipment include tablet device and such as move
The miniaturized electronics of phone.This moving electron equipment includes for providing a user visual information (such as, static or movement
Image) to support the display units of various functions.Recently, increasingly with the size of the component for operating display unit
Small, the opposite segments that the display unit of electronic equipment occupies in the electronic device gradually increase.It is used for moreover, also developed one kind
Display unit is bent to have the structure of certain angle in flat condition.
This display unit can have organic light emitting apparatus, therefore when organic luminous layer is issued using the external electric current applied
Light time, various image/texts can be shown.Organic light emitting apparatus can be formed in various ways.For example, organic light emitting apparatus can lead to
It crosses and is formed such as organic substance deposition method, laser thermal transfer method, method for printing screen.Organic substance deposition method is by frequency
Numerous use, because organic light emitting apparatus can be formed by relatively simple process with relatively cheap cost.
Summary of the invention
Embodiments of the present invention provide a kind of vacuum power deposition dress for controlling the spray angle of deposition materials
It sets.
According to an aspect of the invention, there is provided a kind of vacuum power precipitation equipment comprising: driving unit；Linearly
Moving cell is attached to the driving unit and is configured as according to the operation of the driving unit and linear movement；And
Angle restricting unit, be attached to the linear movement unit and be configured as according to the movement of the linear movement unit and
The direction movement vertical with the direction of motion of the linear movement unit.
The driving unit includes: driving force generation unit, is configurable to generate driving force；And rotary unit, connection
To the driving force generation unit and it is configured as rotating.
The rotary unit may include spur gear.
The linear movement unit may include moving mass, and the moving mass is attached to the rotary unit and is configured as
The linear movement in rotary unit rotation.
The linear movement unit may include guidance unit, and the guidance unit is configured as in the angle restricting unit
A part of the angle restricting unit is guided when movement.
The guidance unit can include: the first guide portion；Second guide portion is connected in the first end of first guide portion
And diagonally extend from first guide portion；And third guide portion, it is attached to the second end of second guide portion.
First guide portion and the third guide portion can vertical shifts.
The guidance unit can limit the hole of ellipse.
The angle restricting unit can include: angle restriction plate between the source unit and is configured as upwards
With downward linear movement；And sliding unit, it is attached to the angle restriction plate and the linear movement unit, and be configured
To be slided in the linear movement unit motion along the direction vertical with the direction of motion of the linear movement unit.
The angle restricting unit may also include connector, and the connector is for coupling the angle restriction plate and described
Sliding unit.
The angle restricting unit may also include blocking unit, the blocking unit be located at the angle restriction plate with it is described
Between sliding unit and it is configured as closing the slot at side guard plate.
The vacuum power precipitation equipment may also include fixed cell, and the fixed cell is configured as limiting the angle
Unit processed can slide.
The vacuum power precipitation equipment may also include linear guiding unit, and the linear guiding unit is located at the fixation
Between unit and the sliding unit and it is configured as guiding the sliding unit.
The vacuum power precipitation equipment may also include auxiliary guidance unit, and the auxiliary guidance unit is towards described linear
It moving cell and is configured as guiding the linear movement unit.
The auxiliary guidance unit can include: fixed bracket；And guide portion, it is located at the support bracket fastened outer surface simultaneously
And it is configured as guiding the linear movement unit.
The vacuum power precipitation equipment may also include the reinforcing rib positioned at the support bracket fastened outer surface.
The linear movement unit may include the protrusion unit being inserted into the guide portion.
The vacuum power precipitation equipment may also include indicating unit, and the indicating unit is configured as indicating the angle
The position of limiting unit.
The indicating unit can include: moving cell, at the angle restricting unit and be configured as with it is described
Angle restricting unit moves together；And position display unit, it is fixed on outside and is configured as indicating that the movement is single
The position of member.
The vacuum power precipitation equipment may also include cap unit, and the cap unit is for covering the driving unit and institute
State a part of linear movement unit.
Detailed description of the invention
By reference to attached drawing detailed description of the present invention illustrative embodiments, the upper surface of embodiments of the present invention and its
Its aspect will become apparent, in the accompanying drawings:
Fig. 1 is to show the three-dimensional view of vacuum power precipitation equipment according to an illustrative embodiment of the invention；
Fig. 2 is to show the amagnified partial perspective view of the region A of Fig. 1；And
Fig. 3 is to show the amagnified partial perspective view of the region B of Fig. 1.
Specific embodiment
Embodiments of the present invention are described in more detail below referring now to the drawings, the invention is shown in the accompanying drawings exemplary
Embodiment.Implement and should not be construed as being limited to set forth herein however, the present invention can be embodied in many different forms
Embodiment, and these embodiments are provided so that the disclosure is full and complete, and transmit this hair to those skilled in the art
Bright concept.In the present specification, singular further includes plural form.Such as " comprising ", " having " or " by ... constitute "
Word may be used to indicate multiple components, unless these words are used together with word " only ".Such as word of " first " and " second "
Language can be used for describing various parts, but these words are only used for distinguishing a component and another, and component is not by these
Word limitation.
Fig. 1 is to show the three-dimensional view of vacuum power precipitation equipment 100 according to an illustrative embodiment of the invention.
Fig. 2 is to show the amagnified partial perspective view of the region A of Fig. 1.Fig. 3 is to show the amagnified partial perspective view of the region B of Fig. 1
Figure.
Referring to figs. 1 to Fig. 3, vacuum power precipitation equipment 100 may include the chamber for being formed with space.Moreover, vacuum power
Precipitation equipment 100 may be mounted to that in chamber, and may include source unit with deposition materials (such as, organic substance).Moreover, true
Lost motion power precipitation equipment 100 may include the source unit fixed frame for being mounted to fixed source unit.
Moreover, vacuum power precipitation equipment 100 may include driving unit 110 and linear movement unit 120, line with reference to Fig. 2
Property moving cell 120 is attached to driving unit 110 and is configured as according to the operation of driving unit 110 and linear movement.And
And vacuum power precipitation equipment 100 may include angle restricting unit 130, angle restricting unit 130 is attached to linear movement unit
It 120 and is configured as being moved vertically according to the movement of linear movement unit 120.In this respect, vacuum power precipitation equipment
100 may also include fixed cell 140, and fixed cell 140 is installed such that angle restricting unit 130 slidably.Vacuum power
Precipitation equipment 100 may also include side guard plate 160.
Moreover, driving unit 110 may include driving force generation unit 111, driving force generation unit 111 generates or provides drive
Power.Specifically, driving force generation unit 111 may include motor, but driving force generation unit 111 is without being limited thereto, but can wrap
Include the other equipment for generating driving force.
Driving unit 110 may include rotary unit 112, and rotary unit 112 is attached to driving force generation unit 111 and can
Rotation.In this respect, rotary unit 112 can be spur gear, but rotary unit 112 is without being limited thereto, but may include according to drive
The operation of power generation units 111 and the other equipment for transmitting driving force.
Moreover, linear movement unit 120 may include source backplate 121, source backplate 121 according to the movement of driving unit 110 and
Linear movement.Moreover, linear movement unit 120 may be coupled to rotary unit 112 and may include moving mass 122, moving mass 122
The linear movement according to the movement of rotary unit 112.In this respect, when rotary unit 112 is spur gear, moving mass 122 can
To be the rack gear for engaging with spur gear and being moved in spur gear rotation.However, moving mass 122 is without being limited thereto, it may include revolving
Turn the other equipment and structure of linear movement when 112 rotary motion of unit.
Linear movement unit 120 may include guidance unit 123, and when angle restricting unit 130 moves, guidance unit 123 draws
Lead a part of angle restricting unit 130.In this respect, guidance unit 123 may include guide body 123d.Specifically, guide body
123d can be plate, and a part of guide body 123d can be it is curved.
Moreover, guidance unit 123 may include first, second for being formed or being limited at guide body 123d and the second guide portion
123a, 123b and 123c.First guide portion 123a may be coupled to the second guide portion 123b, and the first and second guide portion 123a
Certain angle can be formed with 123b.Similarly, third guide portion 123c may be coupled to the second guide portion 123b.
Various forms can be used in first, second, and third guide portion 123a, 123b and 123c.For example, first, second and
Three guide portion 123a, 123b and 123c can be slot or hole.Moreover, first, second, and third guide portion 123a, 123b and 123c
It can be formed protrusion corresponding with hole or slot.However, in the present embodiment, the first, second, and third guide portion 123a,
123b and 123c is poroid/channel-shaped.
Slot can be ellipse.In this respect, the first guide portion 123a and third guide portion 123c, which can be formed in, has not
At level position, the second guide portion 123b can extend in diagonal direction to couple the first guide portion 123a and third guide portion
123c。
In addition, linear movement unit 120 may include the protrusion list being mounted at guidance unit 123 or in guidance unit 123
Member 124.In this respect, protrusion unit 124 is from guide body 123d protrusion, and can maintain guide body when guide body 123d is moved
The path of 123d.Specifically, protrusion unit 124 may include multiple protrusions, i.e. the first protrusion 124a and the second protrusion 124b.First
Protrusion 124a and the second protrusion 124b can be formed bearing configuration, and can be when guide body 123d is moved by drawing with auxiliary
It leads the contact of unit 170 (see Fig. 1 and Fig. 3) and frictional force is reduced or minimized.
It moreover, angle restricting unit 130 may be mounted to that between corresponding source unit, and may include in perpendicular directional line
Property movement angle restriction plate 132.Moreover, angle restricting unit 130 can be with angle restriction plate 132 and linear movement unit 120
Connection, and may include the sliding unit 131 perpendicular to the direction of motion sliding of linear movement unit 120.In this respect, it slides
Unit 131 can be attached to angle restriction plate 132 by connector.
Moreover, sliding unit 131 may be coupled to guidance unit 123 and can be perpendicular to the direction of motion of guidance unit 123
Sliding, as described above.Particularly, sliding unit 131 may include insertion protrusion 131a, and insertion protrusion 131a can be inserted into as the
One, second and third guide portion 123a, 123b and 123c slot in.In the present embodiment, insertion protrusion 131a can be formed
For bearing configuration.
Sliding unit 131 can be slided relative to fixed cell 140.In other embodiments of the present invention, it is possible to provide more
A fixed cell, and multiple fixed cells can be arranged and fix at regular intervals.
Moreover, linear guiding unit 150 (see Fig. 2) may be mounted to that between sliding unit 131 and fixed cell 140 to draw
The movement of slide guide moving cell 131.In the present embodiment, linear guiding unit 150 may include that general linear movement (LM) is drawn
Lead portion.In other embodiments, it is possible to provide multiple linear guiding units 150, and multiple linear guiding units 150 can be distinguished
It is mounted at fixed cell 140 so that each fixed cell 140 is attached to sliding unit 131.
Above-mentioned side guard plate 160 may be mounted to that in fixed cell 140.In this respect, side guard plate 160 can be formed with slot,
And connector can be inserted into slot.Specifically, angle restricting unit 130 may include blocking unit 133,133 quilt of blocking unit
It is mounted between angle restriction plate 132 and side guard plate 160 to close the slot being formed in side guard plate 160.In this respect, obstruction is single
Member 133 can be upwardly extended in the side vertical with the longitudinal direction of connector.
It moreover, vacuum power precipitation equipment 100 can be installed to be towards linear movement unit 120, and may include guidance
The auxiliary guidance unit 170 of the movement of linear movement unit 120.Specifically, it is single can be disposed in guidance for auxiliary guidance unit 170
The movement of guidance unit 123 is guided on the outside of member 123.
In this respect, auxiliary guidance unit 170 may include being fixed on external fixation bracket 171.Moreover, auxiliary guidance is single
Member 170 can be formed at fixed bracket 171, and may include the guide portion 172 for guiding the movement of guidance unit 123.
Specifically, the outer surface that guide portion 172 can be formed in fixed bracket 171 makes a part of guidance unit 123 can
It is inserted into.Particularly, guide portion 172 can be slot or hole, so that a part of linear movement unit 120 can be inserted into guide portion
In 172.Moreover, guide portion 172 can be protrusion, so that a part of linear movement unit 120 can be inserted into guide portion 172
In.Specifically, when guide portion 172 is protrusion, guide portion 172 can be formed a pair of of protrusion and make linear movement unit 120
A part can be inserted into the space between a pair of of protrusion of guide portion 172.In this respect, guide portion 172 is without being limited thereto, can
Including the various structures and equipment for guiding linear moving cell 120 to move.However, the guide portion 172 of present embodiment is formed
For a pair of of protrusion.
In this respect, the first protrusion 124a and the second protrusion 124b (see Fig. 2) can be inserted into guide portion 172, and can
Linear movement.Moreover, the first protrusion 124a and the second protrusion 124b can maintain guidance unit while moving along guide portion 172
123 linear path.
Assisting guidance unit 170 may include reinforcing rib 173, and reinforcing rib 173 is formed in the outer surface of fixed bracket 171.?
This respect, can form multiple reinforcing ribs 173, and multiple reinforcing ribs 173 can be formed in the appearance of fixed bracket 171 at regular intervals
On face.
Moreover, when angle restricting unit 130 is when vertical direction linearly moves, vacuum power precipitation equipment 100 may include
Indicating unit 180, indicating unit 180 indicate the position (for example, upright position or height) of angle restricting unit 130.Instruction is single
Member 180 may be mounted to that at angle restricting unit 130 and may include moving cell 181, when angle restricting unit 130 is vertical
Moving cell 181 moves together with angle restricting unit 130 when dimension linear moves.Moreover, indicating unit 180 may include position
Display unit 182, position display unit 182 are fixed on outside and show the position of moving cell 181.
Moving cell 181, which can be installed to be, to be fixed at sliding unit 131.Moreover, for showing 181 height of moving cell
Scale can be formed at position display unit 182, therefore the height of moving cell 181 can be shown via it close to position it is single
Member 182 scale and be determined.
Vacuum power precipitation equipment 100 may include cap unit 190, and cap unit 190 is formed 110 He of cover driving unit
A part of linear movement unit 120.For example, cap unit 190 can cover source backplate 121, driving force generation unit 111 and rotation
Unit 112, and source backplate 121, driving force generation unit 111 and rotary unit 112 can be prevented to be deposited material contamination/flaw
It is dirty.
Moreover, the deposition materials from source unit can be heated and sink when vacuum power precipitation equipment 100 is operated
Product, therefore deposition procedures can be executed on substrate.In this respect, it is possible to provide multiple source units, and angle restriction plate 132 can quilt
It is mounted between multiple source units as described above.
The preset height of angle restriction plate 132 can be conditioned according to stage/progress of deposition procedures.Particularly, it drives
Unit 110 can be operated according to preset height.In this respect, rotary unit 112 can pass through the behaviour of driving force generation unit 111
Make and rotates.
By rotating rotary unit 112, the controllable moving mass 122 coupled with rotary unit 112 of rotary unit 112 exists
One dimension linear movement.Similarly, when moving mass 122 moves, the source backplate 121 that couples with moving mass 122 can also with
The identical direction movement of 122 direction of motion of moving mass.
In detail, if rotary unit 112 is rotated in the counterclockwise direction, it can make moving mass 122 travel forward, and
Source backplate 121 can also travel forward together with moving mass 122.Similarly, when source backplate 121 travels forward, guidance unit 123
It can also travel forward together with source backplate 121.
Moreover, the first protrusion 124a and the second protrusion 124b can be along guide portions 172 when guidance unit 123 travels forward
Movement.That is, the movement of the first protrusion 124a and the second protrusion 124b can be guided the limitation in portion 172, therefore can prevent
Only guidance unit 123 deviates expected path.
Similarly, when guidance unit 123 moves, insertion protrusion 131a can move to third from the first guide portion 123a and draw
Lead portion 123c.In detail, insertion protrusion 131a can move to the second guide portion 123b from the first guide portion 123a, then can be along the
Three guide portion 123c movement.In the present embodiment, during moving to third guide portion 123c, insertion protrusion 131a's
Height increases.That is, the height of insertion protrusion 131a from the first guide portion 123a can move to the with insertion protrusion 131
Three guide portion 123c and gradually increase.
Similarly, when insertion protrusion 131a is in the slot limited by first, second, and third guide portion 123a, 123b and 123c
When middle movement, sliding unit 131 can also be to linear motion.In this respect, the bootable sliding unit of linear guiding unit 150
131 movement, and can prevent sliding unit 131 from deviateing expected motion path.
Similarly, when sliding unit 131 moves, connector, blocking unit 133 and angle restriction plate 132 can also be with cunnings
Moving cell 131 moves together.Therefore, angle restriction plate 132 can move upwards, and the deposition materials sprayed from source unit is heavy
Product angle can reduce because substrate is close to source unit.
Similarly, when angle restriction plate 132 moves upwards, the slot in side guard plate 160 can be opened.In this respect, when
When blocking unit 133 and angle restriction plate 132 move upwardly together, blocking unit 133 can enclosed slot.Specifically, blocking unit
133 height can be higher than angle restriction plate 132, and therefore, even if angle restriction plate 132 moves upwards, slot can be completely enclosed.
Moreover, the inverse operation of aforesaid operations can be performed when angle restriction plate 132 moves downward.In detail, if driven
Power generation units 111 operate on the contrary with aforesaid operations, and rotary unit 112 can be rotated in a clockwise direction.
Moving mass 122 can moving backward due to rotating clockwise because of rotary unit 112, moving mass 122 can be with source backplate 121
It moves backward together, and source backplate 121 can be such that guidance unit 123 moves backward.
When guidance unit 123 moves backward, the first protrusion 124a and the second protrusion 124b can linearly be transported along guide portion 172
It is dynamic.Moreover, insertion protrusion 131a can move to the first guide portion 123a from third guide portion 123c.That is, insertion protrusion
131a can be moved downward sequentially from third guide portion 123c along the second guide portion 123b, then from the second guide portion 123b along
One guide portion 123a is moved downward.
If insertion protrusion 131a move downward as described above, sliding unit 131 will with insertion protrusion 131a together with to
Lower movement.In this respect, linear guiding unit 150 can prevent sliding unit 131 while guiding the movement of sliding unit 131
It is separated with fixed cell 140.When sliding unit 131 moves as described above, connector, blocking unit 133 and angle restriction plate
132 can move downwardly together with sliding unit 131.In this respect, blocking unit 133 can be by completely enclosing side shield as described above
The slot of plate 160 and prevent deposition materials from outflowing.
Moreover, the height of angle restriction plate 132 can be by indicating unit when angle restriction plate 132 is moved upwardly or downwardly
180 measurements, indicating unit 180 can be installed to be by people through the window of chamber from external observation.
Specifically, when sliding unit 131 is moved upwardly or downwardly as described above, moving cell 181 can be with sliding unit
131 move together.In this respect, moving cell 181 can be disposed in the side of position display unit 182, it will thus be seen that with
The measured value of the corresponding position display unit 182 in the position of moving cell 181.For example, staff etc. can be by according to angle
The predeterminated position of restriction plate 132 checks whether the position of moving cell 181, the position to determine angle restriction plate 132 are accurate.
It according to an illustrative embodiment of the invention, can be by changing the height of the angle restriction plate between source unit automatically
Degree reduces time relevant to the replacement of angle restriction plate of different processes is used for and cost.According to the present invention embodiment party
Formula does not need to open chamber to replace angle restriction plate, therefore can continuously keep the vacuum state of chamber.Moreover, according to this hair
Bright illustrative embodiments can be performed continuous deposition, therefore can enhance the working efficiency of facility.
Although particularly shown and describe the present invention, this field by reference to exemplary embodiments of the present invention
The skilled person will understand that the various changes of form and details can be carried out without departing from this hair by claim and its equally limited
Bright spirit and scope.
Claims (18)
1. a kind of vacuum power precipitation equipment, comprising:
Driving unit；
Linear movement unit is attached to the driving unit and is configured as linearly being transported according to the operation of the driving unit
It is dynamic；And
Angle restricting unit is attached to the linear movement unit and is configured as the movement according to the linear movement unit
And moved upwards in the side vertical with the direction of motion of the linear movement unit,
Wherein the linear movement unit includes guidance unit, and the guidance unit is configured as transporting in the angle restricting unit
A part of the angle restricting unit is guided when dynamic,
Wherein the angle restricting unit includes:
Angle restriction plate between corresponding source unit and is configured as linear movement up and down；And
Sliding unit is attached to the angle restriction plate and the linear movement unit, and is configured as in the linear fortune
In the square upward sliding vertical with the direction of motion of the linear movement unit when moving cell moves.
2. vacuum power precipitation equipment as described in claim 1, wherein the driving unit includes:
Driving force generation unit, is configurable to generate driving force；And
Rotary unit is attached to the driving force generation unit and is configured as rotating.
3. vacuum power precipitation equipment as claimed in claim 2, wherein the rotary unit includes spur gear.
4. vacuum power precipitation equipment as claimed in claim 2, wherein the linear movement unit includes moving mass, the fortune
Motion block is attached to the rotary unit and is configured as the linear movement when the rotary unit rotates.
5. vacuum power precipitation equipment as described in claim 1, wherein the guidance unit includes:
First guide portion；
Second guide portion couples with first guide portion in first end, and diagonally extends from first guide portion；And
Third guide portion is attached to the second end of second guide portion.
6. vacuum power precipitation equipment as claimed in claim 5, wherein first guide portion and the third guide portion are hung down
Straight offset.
7. vacuum power precipitation equipment as described in claim 1, wherein the guidance unit limits the hole of ellipse.
8. vacuum power precipitation equipment as described in claim 1, wherein the angle restricting unit further includes connector, it is described
Connector is for coupling the angle restriction plate with the sliding unit.
9. vacuum power precipitation equipment as described in claim 1, wherein the angle restricting unit further includes blocking unit, institute
The slot that blocking unit is stated between the angle restriction plate and the sliding unit and is configured as at closing side guard plate.
10. vacuum power precipitation equipment as described in claim 1, further includes fixed cell, the fixed cell is configured as
The angle restricting unit is set to slide.
11. vacuum power precipitation equipment as claimed in claim 10, further includes linear guiding unit, the linear guiding unit
Between the fixed cell and the sliding unit and it is configured as guiding the sliding unit.
12. vacuum power precipitation equipment as described in claim 1 further includes auxiliary guidance unit, the auxiliary guidance unit
Towards the linear movement unit and it is configured as guiding the linear movement unit.
13. vacuum power precipitation equipment as claimed in claim 12, wherein the auxiliary guidance unit includes:
Fixed bracket；And
Guide portion positioned at the support bracket fastened outer surface and is configured as guiding the linear movement unit.
14. vacuum power precipitation equipment as claimed in claim 13 further includes adding at the fixed rack outer surface
Gu rib.
15. vacuum power precipitation equipment as claimed in claim 13, wherein the linear movement unit is described including being inserted into
Protrusion unit in guide portion.
16. vacuum power precipitation equipment as described in claim 1, further includes indicating unit, the indicating unit is configured as
Indicate the position of the angle restricting unit.
17. vacuum power precipitation equipment as claimed in claim 16, wherein the indicating unit includes:
Moving cell at the angle restricting unit and is configured as moving together with the angle restricting unit；With
And
Position display unit is fixed on outside and is configured as indicating the position of the moving cell.
18. vacuum power precipitation equipment as described in claim 1, further includes cap unit, the cap unit is described for covering
A part of driving unit and the linear movement unit.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0027488 | 2013-03-14 | ||
| KR1020130027488A KR102136787B1 (en) | 2013-03-14 | 2013-03-14 | Vacuum evaporating appartus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104046980A CN104046980A (en) | 2014-09-17 |
| CN104046980B true CN104046980B (en) | 2019-03-26 |
Family
ID=51500365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310464725.1A Active CN104046980B (en) | 2013-03-14 | 2013-10-08 | Vacuum power precipitation equipment |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9816172B2 (en) |
| JP (1) | JP6348735B2 (en) |
| KR (1) | KR102136787B1 (en) |
| CN (1) | CN104046980B (en) |
| TW (1) | TWI617682B (en) |
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- 2013-08-26 US US14/010,407 patent/US9816172B2/en active Active
- 2013-09-05 TW TW102131938A patent/TWI617682B/en active
- 2013-10-08 CN CN201310464725.1A patent/CN104046980B/en active Active
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| JP2004225058A (en) * | 2002-11-29 | 2004-08-12 | Sony Corp | Film deposition apparatus, display panel manufacturing apparatus, and method for the same |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI617682B (en) | 2018-03-11 |
| US9816172B2 (en) | 2017-11-14 |
| JP6348735B2 (en) | 2018-06-27 |
| KR102136787B1 (en) | 2020-07-23 |
| JP2014177701A (en) | 2014-09-25 |
| CN104046980A (en) | 2014-09-17 |
| KR20140112862A (en) | 2014-09-24 |
| US20140260718A1 (en) | 2014-09-18 |
| TW201435108A (en) | 2014-09-16 |
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