CN104037610A - Single longitudinal mode laser interlocking method and device based on thermal frequency stabilization and acousto-optic frequency shift - Google Patents
Single longitudinal mode laser interlocking method and device based on thermal frequency stabilization and acousto-optic frequency shift Download PDFInfo
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- CN104037610A CN104037610A CN201410308375.4A CN201410308375A CN104037610A CN 104037610 A CN104037610 A CN 104037610A CN 201410308375 A CN201410308375 A CN 201410308375A CN 104037610 A CN104037610 A CN 104037610A
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Abstract
The invention provides a single longitudinal mode laser interlocking method and device based on thermal frequency stabilization and acousto-optic frequency shift, and belongs to the technical field of laser application. An acousto-optic frequency shift technology is used for locking the output laser frequency of a plurality of single longitudinal mode lasers based on thermal frequency stabilization onto the output laser frequency of the same reference single longitudinal mode frequency stabilization laser, and therefore lasers output by all the lasers have the unified frequency value. In order to solve the problem that the frequency consistency between traditional frequency stabilization lasers is low, a novel laser source is provided for ultraprecise laser laser interferometry.
Description
Technical field
The invention belongs to laser application technique field, particularly a kind of single longitudinal mode laser interlock method and device thereof based on hot frequency stabilization and acousto-optic frequency translation.
Background technology
In recent years, ultra precise measurement taking mask aligner and Digit Control Machine Tool as representative and process technology are towards large scale, high accuracy, many spatial degrees of freedom synchro measure future development, total laser power consumption to laser interferometry system sharply increases, far exceed the Output of laser power of separate unit frequency stabilized carbon dioxide laser, therefore need to adopt many frequency stabilized carbon dioxide lasers to carry out measurement in a closed series simultaneously.But, different frequency stabilized carbon dioxide lasers there are differences at aspects such as frequency traeea-bility, laser wave long value, wave length shift directions, this will bring the inconsistent problem of certainty of measurement, wavelength standard and space coordinates of the laser interferometry system different spaces degree of freedom, thereby affects the integrated measurement accuracy of whole multi-dimension laser interferometer measuration system.In order to ensure the integrated measurement accuracy of laser interferometry system, require the frequency invariance of many frequency stabilized carbon dioxide lasers that are used in combination will reach 10
-8, therefore the frequency invariance between frequency stabilized carbon dioxide laser has become ultra precise measurement and Processing Technology Development is needed one of key issue of solution badly.
The Frequency Stabilized Lasers light source that is applied at present laser interferometry system mainly contains dual vertical mode stable frequency laser, transverse zeeman frequency stabilized carbon dioxide laser and Zeeman Laser laser etc., this class laser is the reference frequency using the centre frequency of Laser gain curve as frequency stabilization control on frequency stabilization benchmark, and the centre frequency of Laser gain curve changes with working gas air pressure and discharging condition, and many frequency stabilized carbon dioxide lasers cannot be accomplished highly consistent in physical parameter, therefore the reference frequency of its frequency stabilization control there are differences, thereby cause the frequency invariance of many frequency stabilized carbon dioxide laser Output of lasers lower, can only arrive 10
-6～10
-7.
In order to solve the poor problem of frequency invariance between frequency stabilized carbon dioxide laser, Harbin Institute of Technology proposes a kind of double-longitudinal-mode laser frequency-offset-lock method (Chinese Patent Application No. CN200910072517, CN200910072518, CN200910072519 and CN200910072523), the method is using the frequency of an iodine stabilizd laser or double-longitudinal-mode laser Output of laser as benchmark, all the other many double-longitudinal-mode lasers are offset certain numerical value with respect to reference frequency and lock, thereby the Output of laser that makes many double-longitudinal-mode lasers has identical wavelength (frequency), but the method is in the locking process of laser frequency, need to adjust the internal running parameter of laser, on the one hand because the mode of adjusting belongs to Indirect method, the response speed of system is relatively slow, due to the characterisitic parameter of each laser, there is some difference on the other hand, the change of laser internal running parameter may produce harmful effect to the frequency stability of laser, serious situation even can cause laser losing lock.
Summary of the invention
The deficiency existing for prior art, the present invention proposes a kind of single longitudinal mode laser interlock method based on based on hot frequency stabilization and acousto-optic frequency translation, its objective is the advantage in conjunction with the shift frequency characteristic of acousto-optic frequency shifters and the single longitudinal mode frequency stabilized carbon dioxide laser of hot frequency stabilization, for ultraprecise processing provides with measuring technique the LASER Light Source that a kind of consistent wavelength is good.The present invention also provides a kind of single longitudinal mode laser interlock based on hot frequency stabilization and acousto-optic frequency translation.
Object of the present invention is achieved through the following technical solutions:
A single longitudinal mode laser interlock method based on hot frequency stabilization and acousto-optic frequency translation, the method comprises the following steps:
(1) open the power supply with reference to single longitudinal mode frequency stabilized carbon dioxide laser, after preheating and frequency stabilization process, laser is exported single longitudinal mode laser, and its frequency of light wave is designated as ν
r, this output light is separated into n>=1 tunnel by fiber optic splitter, is designated as light beam X
i(i=1,2 ..., n), respectively as single longitudinal mode laser L
i(i=1,2 ..., the n) reference beam of Frequency Locking;
(2) open single longitudinal mode laser L
i(i=1,2 ..., power supply n), all single longitudinal mode lasers enter warm simultaneously, measure the temperature value of current environment, set accordingly the target temperature T of preheating
set, and T
sethigher than ambient temperature, utilize electric heater to heat the laser tube of laser inside, make the temperature of laser tube be tending towards predefined temperature value T
setand reach thermal equilibrium state, utilize polarization spectroscope that the horizontal polarization in secondary laser tube output laser is separated with vertical polarization laser component, its luminous power P
i 1(i=1,2 ..., n) and P
i 2(i=1,2 ..., n) being measured by two identical photodetectors, frequency stabilization control module is adjusted the working current value of electric heater according to preheating algorithm, make the performance number P of horizontal polarization laser component
i 1(i=1,2 ..., n)=0, the single longitudinal mode laser that now laser of the main output of laser tube and secondary output is vertical polarization;
(3) after warm finishes, single longitudinal mode laser L
i(i=1,2 ..., n) entering frequency stabilization control procedure, frequency stabilization control module is further finely tuned the size of the working current value of electric heater, makes the performance number P of vertical polarization laser component
i 2(i=1,2 ..., n) be tending towards maximum, and according to the working current value of frequency stabilization control algolithm control electric heater, make P
i 2(i=1,2 ..., n) remain maximum, and then make to swash the light frequency numerical value that tends towards stability;
(4) laser of the main output of laser tube is designated as to light beam T
i(i=1,2 ..., n), its frequency is designated as ν
i(i=1,2 ..., n), light beam T
i(i=1,2 ..., n) enter driving frequency and be
f i(i=1,2 ..., acousto-optic frequency shifters S n)
i(i=1,2 ..., n) carry out shift frequency, the frequency of its corresponding Output of laser is designated as ν
i+
f i(i=1,2 ..., n), this laser is divided into by spectroscope two parts light that strength ratio is 9:1 again, and wherein the relatively large part light of intensity is designated as light beam Z
i(i=1,2 ..., n), as single longitudinal mode laser L
i(i=1,2 ..., Output of laser n), the part light that intensity is relatively little is designated as light beam Y
i(i=1,2 ..., n);
(5) by light beam X
i(i=1,2 ..., n) respectively with light beam Y
i(i=1,2 ..., n) carry out optical frequency mixing and form optical beat signal, utilize photodetector that optical beat signal is converted to the signal of telecommunication, its frequency values Δ ν
i=ν
i+
f i– ν
r(i=1,2 ..., n) being recorded by frequency measurement module, frequency regulation block is according to the frequency values Δ ν of the optical beat signal measuring
i(i=1,2 ..., n), calculate light beam X
i(i=1,2 ..., n) and Y
i(i=1,2 ..., frequency-splitting ν n)
r– ν
i=
f i– Δ ν
i(i=1,2 ..., n), and by acousto-optic frequency shifters S
i(i=1,2 ..., driving frequency n)
f i(i=1,2 ..., n) be adjusted into ν
r– ν
i(i=1,2 ..., n), thereby make single longitudinal mode laser L
i(i=1,2 ..., n) output beam Z
i(i=1,2 ..., frequency n) equals reference beam X
i(i=1,2 ..., frequency n), i.e. ν
i+
f i=ν
r(i=1,2 ..., n);
(6) be cycled to repeat step (4) to (5), by adjusting acousto-optic frequency shifters S
i(i=1,2 ..., operating frequency n)
f i(i=1,2 ..., n), make single longitudinal mode laser L
i(i=1,2 ..., Output of laser Z n)
i(i=1,2 ..., frequency n) is locked in same frequency values ν all the time
r.
A kind of single longitudinal mode laser interlock based on hot frequency stabilization and acousto-optic frequency translation, comprise laser power supply A, frequency stabilization status indicator lamp, with reference to single longitudinal mode frequency stabilized carbon dioxide laser, fiber optic splitter, in this device, also comprise the single longitudinal mode laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), wherein each single longitudinal mode laser (L
1, L
2..., L
n) assembly structure be: laser power supply B is connected with laser tube, electric heater is wrapped on laser tube outer wall, its input termination frequency stabilization control module, laser tube temperature transducer sticks on laser tube outer wall, its output termination frequency stabilization control module, environment temperature sensor is connected with frequency stabilization control module, polarization spectroscope is placed on after the secondary output of laser tube, side by side place photodetector A and photodetector B thereafter, the output of the two is all connected with frequency stabilization control module, acousto-optic frequency shifters is placed on before the main output of laser tube, spectroscope is placed between an input of acousto-optic frequency shifters and optical-fiber bundling device, another input of optical-fiber bundling device is connected with one of output of fiber optic splitter, analyzer is placed between the output and photodetector C of optical-fiber bundling device, photodetector C, frequency measurement module, frequency regulation block, acousto-optic frequency shifters connects successively, frequency locking status indicator lamp is connected with frequency regulation block.
The present invention has following characteristics and good result:
(1) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to multiple double-longitudinal-mode lasers, all single longitudinal mode frequency stabilized carbon dioxide laser Output of lasers have unified frequency values, due to the high frequency adjustment resolving power of acousto-optic frequency shifters, the frequency invariance of multiple lasers can be up to 10
-9, improving one to two order of magnitude than existing method, this is one of innovative point being different from prior art.
(2) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to multiple single longitudinal mode lasers, because the frequency that acousto-optic frequency shifters is higher is adjusted response speed, can effectively suppress optical maser wavelength drift and transition that external interference factor causes, thereby improved stability and the ambient adaptability of light source, this be different from prior art innovative point two.
(3) the present invention adopts acousto-optic frequency shifters to carry out Frequency Locking in parallel to multiple single longitudinal mode lasers, because the frequency of the final Output of laser of laser is adjusted mode for laser inner laser Guan Eryan, belong to a kind of outside method of adjustment, therefore can not produce harmful effect to the frequency stabilization controlling mechanism of laser tube, be conducive to improve stability and the frequency stabilization precision of system, this be different from prior art innovative point three.
Brief description of the drawings
Fig. 1 is the principle schematic of apparatus of the present invention
Fig. 2 is the schematic diagram of single longitudinal mode laser frequency stabilization structure in apparatus of the present invention
Fig. 3 is the closed loop control function block diagram of single longitudinal mode laser warm in apparatus of the present invention
Fig. 4 is the closed loop control function block diagram of single longitudinal mode laser frequency stabilization process in apparatus of the present invention
Fig. 5 is the closed loop control function block diagram of single longitudinal mode laser Frequency Locking process in apparatus of the present invention
In figure, 1 laser power supply A, 2 frequency stabilization status indicator lamps, 3 are with reference to single longitudinal mode frequency stabilized carbon dioxide laser, 4 fiber optic splitters, 5 laser tubes, 6 polarization spectroscopes, 7 photodetector A, 8 photodetector B, 9 frequency stabilization control modules, 10 laser tube temperature transducers, 11 electric heaters, 12 environment temperature sensors, 13 laser power supply B, 14 acousto-optic frequency shifters, 15 spectroscopes, 16 optical-fiber bundling devices, 17 analyzers, 18 photodetector C, 19 frequency measurement modules, 20 frequency regulation block, 21 frequency locking status indicator lamps.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
As depicted in figs. 1 and 2, single longitudinal mode laser interlock based on hot frequency stabilization and acousto-optic frequency translation in apparatus of the present invention, comprise laser power supply A1, frequency stabilization status indicator lamp 2, with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3,, fiber optic splitter 4, in this device, also comprise the single longitudinal mode laser L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n, wherein each single longitudinal mode laser L
1, L
2..., L
nassembly structure be: laser power supply B13 is connected with laser tube 5, electric heater 11 is wrapped on laser tube 5 outer walls, its input termination frequency stabilization control module 9, laser tube temperature transducer 10 sticks on laser tube 5 outer walls, its output termination frequency stabilization control module 9, environment temperature sensor 12 is connected with frequency stabilization control module 9, polarization spectroscope 6 is placed on after the secondary output of laser tube 5, side by side place photodetector A7 and photodetector B8 thereafter, the output of the two is all connected with frequency stabilization control module 9, acousto-optic frequency shifters 14 is placed on before the main output of laser tube 5, spectroscope 15 is placed between an input of acousto-optic frequency shifters 14 and optical-fiber bundling device 16, another input of optical-fiber bundling device 16 is connected with one of output of fiber optic splitter 4, analyzer 17 is placed between the output and photodetector C18 of optical-fiber bundling device 16, photodetector C18, frequency measurement module 19, frequency regulation block 20, acousto-optic frequency shifters 14 connects successively, frequency locking status indicator lamp 21 is connected with frequency regulation block 20.
In view of device comprises the single longitudinal mode frequency stabilized carbon dioxide laser L that multiple structures are identical
1, L
2..., L
n, the course of work of these single longitudinal mode frequency stabilized carbon dioxide lasers is in full accord, below only to one of them single longitudinal mode frequency stabilized carbon dioxide laser L
1carry out course of work description, these descriptive texts are equally applicable to other the similar single longitudinal mode frequency stabilized carbon dioxide laser in device.
While starting working, open laser power supply A1, enter preheating and frequency stabilization process with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3, in the time that said process completes, enable frequency stabilization status indicator lamp 2, represent to enter steady-working state with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3, its Output of laser is single longitudinal mode light, and be coupled into fiber optic splitter 4, and be separated into n road frequency reference light beam, be designated as light beam X
1, X
2..., X
n, its frequency is designated as ν
r, as single longitudinal mode laser L
1, L
2..., L
nthe reference frequency of Frequency Locking.
When frequency stabilization status indicator lamp 2 enables, open laser tube power supply B13, single longitudinal mode frequency stabilized carbon dioxide laser L
1enter warm.The ambient temperature value that frequency stabilization control module 9 measures according to environment temperature sensor 11 is set the target temperature T of preheating
set, and T
sethigher than ambient temperature, by T
setas the reference input of preheating closed-loop control system as shown in Figure 3, measure the actual temperature T of laser tube 5 with laser tube temperature transducer 10 simultaneously
realas feedback signal, frequency stabilization control module 9 is calculated the difference of the two, and adjusts the size of the operating current of electric heater 11 according to frequency stabilization control algolithm, and laser tube 5 is heated, and makes its temperature be tending towards default target temperature T
set, utilize polarization spectroscope 6 that the horizontal polarization in secondary laser tube 5 output laser is separated with vertical polarization laser component, its luminous power P
1 1and P
1 2measured by photodetector A7 and photodetector B8 respectively, frequency stabilization control module 9 is adjusted the working current value of electric heater 11 according to preheating algorithm, makes the performance number P of horizontal polarization laser component
1 1=0, the single longitudinal mode laser that now laser of the main output of laser tube 5 and secondary output is vertical polarization.
After warm finishes, frequency stabilization control module 9 is switched single longitudinal mode laser L
1enter frequency stabilization control procedure, frequency stabilization control module 9 is the size of the working current value of fine setting electric heater 11 further, makes the performance number P of vertical polarization laser component
1 2be tending towards maximum, this maximum is designated as P
1 2max, and by P
1 2maxas the reference quantity of frequency stabilization closed-loop control system as shown in Figure 4, the performance number P of the vertical polarization laser component simultaneously photodetector B8 being measured
1 2as feedback quantity, frequency stabilization control module 9 calculates the difference of the two, and according to the working current value of frequency stabilization control algolithm control electrothermal device 11, makes P
1 2remain maximum P
1 2max, and then make to swash the light frequency numerical value that tends towards stability.
After frequency stabilization process finishes, laser L
1enter Frequency Locking process, the single longitudinal mode laser of laser tube 5 main outputs is as the input light of acousto-optic frequency shifters 14, and its frequency is designated as ν
1, the operating frequency of acousto-optic frequency shifters 14 is designated as
f 1, due to acousto-optic interaction, the frequency of acousto-optic frequency shifters 14 Output of lasers is ν
1+ f 1, it is 9:1 two parts light that this light beam is separated into intensity by spectroscope 15 again, wherein the relatively large part light of intensity is designated as light beam Z
1, as single longitudinal mode laser L
1output of laser, the part light that intensity is relatively little is designated as light beam Y
1, this light beam and light beam X
1be coupled into optical fiber by optical-fiber bundling device 16 and synthesize a branch of coaxial beam, this coaxial beam is passed through the rear formation optical beat signal of analyzer 17, after photodetector C18 carries out opto-electronic conversion, and its frequency values Δ ν
1=ν
1+
f 1– ν
rmeasured by frequency measurement module 19, and the feed back input amount of conduct Frequency Locking closed-loop control system as shown in Figure 5, reference input is set to zero, and frequency regulation block 20 is according to the difference DELTA ν of the two
1, calculate light beam X
1with light beam Y
1frequency-splitting be ν
r– ν
1=
f 1– Δ ν
1, and by the driving frequency of acousto-optic frequency shifters 14
f 1be adjusted into ν
r– ν
1thereby, make laser L
1output beam Z
1frequency (light beam Z
1with light beam Y
1same frequency) equal reference beam X
1frequency ν
r.After said frequencies locking process completes, frequency regulation block 20 enables frequency locking status indicator lamp 21.
When external environment change or other factors cause with reference to single longitudinal mode frequency stabilized carbon dioxide laser 3 or single longitudinal mode laser L
1when the frequency of Output of laser changes, the above-mentioned frequency stabilization locking process of automatic cycle, by adjusting the operating frequency of acousto-optic frequency shifters 14
f 1, make single longitudinal mode laser L
1the frequency ν of Output of laser
1all the time be locked in reference frequency ν
r.In like manner, single-mode laser L
2, L
3..., L
nthe frequency ν of Output of laser
2, ν
3..., ν
nalso be locked in all the time reference frequency ν
ron.
Claims (2)
1. the single longitudinal mode laser interlock method based on hot frequency stabilization and acousto-optic frequency translation, is characterized in that the method comprises the following steps:
(1) open the power supply with reference to single longitudinal mode frequency stabilized carbon dioxide laser, after preheating and frequency stabilization process, laser is exported single longitudinal mode laser, and its frequency of light wave is designated as ν
r, this output light is separated into n>=1 tunnel by fiber optic splitter, is designated as light beam X
i(i=1,2 ..., n), respectively as single longitudinal mode laser L
i(i=1,2 ..., the n) reference beam of Frequency Locking;
(2) open single longitudinal mode laser L
i(i=1,2 ..., power supply n), all single longitudinal mode lasers enter warm simultaneously, measure the temperature value of current environment, set accordingly the target temperature T of preheating
set, and T
sethigher than ambient temperature, utilize electric heater to heat the laser tube of laser inside, make the temperature of laser tube be tending towards predefined temperature value T
setand reach thermal equilibrium state, utilize polarization spectroscope that the horizontal polarization in secondary laser tube output laser is separated with vertical polarization laser component, its luminous power P
i 1(i=1,2 ..., n) and P
i 2(i=1,2 ..., n) being measured by two identical photodetectors, frequency stabilization control module is adjusted the working current value of electric heater according to preheating algorithm, make the performance number P of horizontal polarization laser component
i 1(i=1,2 ..., n)=0, the single longitudinal mode laser that now laser of the main output of laser tube and secondary output is vertical polarization;
(3) after warm finishes, single longitudinal mode laser L
i(i=1,2 ..., n) entering frequency stabilization control procedure, frequency stabilization control module is further finely tuned the size of the working current value of electric heater, makes the performance number P of vertical polarization laser component
i 2(i=1,2 ..., n) be tending towards maximum, and according to the working current value of frequency stabilization control algolithm control electric heater, make P
i 2(i=1,2 ..., n) remain maximum, and then make to swash the light frequency numerical value that tends towards stability;
(4) laser of the main output of laser tube is designated as to light beam T
i(i=1,2 ..., n), its frequency is designated as ν
i(i=1,2 ..., n), light beam T
i(i=1,2 ..., n) enter driving frequency and be
f i(i=1,2 ..., acousto-optic frequency shifters S n)
i(i=1,2 ..., n) carry out shift frequency, the frequency of its corresponding Output of laser is designated as ν
i+
f i(i=1,2 ..., n), this laser is divided into by spectroscope two parts light that strength ratio is 9:1 again, and wherein the relatively large part light of intensity is designated as light beam Z
i(i=1,2 ..., n), as single longitudinal mode laser L
i(i=1,2 ..., Output of laser n), the part light that intensity is relatively little is designated as light beam Y
i(i=1,2 ..., n);
(5) by light beam X
i(i=1,2 ..., n) respectively with light beam Y
i(i=1,2 ..., n) carry out optical frequency mixing and form optical beat signal, utilize photodetector that optical beat signal is converted to the signal of telecommunication, its frequency values Δ ν
i=ν
i+
f i– ν
r(i=1,2 ..., n) being recorded by frequency measurement module, frequency regulation block is according to the frequency values Δ ν of the optical beat signal measuring
i(i=1,2 ..., n), calculate light beam X
i(i=1,2 ..., n) and Y
i(i=1,2 ..., frequency-splitting ν n)
r– ν
i=
f i– Δ ν
i(i=1,2 ..., n), and by acousto-optic frequency shifters S
i(i=1,2 ..., driving frequency n)
f i(i=1,2 ..., n) be adjusted into ν
r– ν
i(i=1,2 ..., n), thereby make single longitudinal mode laser L
i(i=1,2 ..., n) output beam Z
i(i=1,2 ..., frequency n) equals reference beam X
i(i=1,2 ..., frequency n), i.e. ν
i+
f i=ν
r(i=1,2 ..., n);
(6) be cycled to repeat step (4) to (5), by adjusting acousto-optic frequency shifters S
i(i=1,2 ..., operating frequency n)
f i(i=1,2 ..., n), make single longitudinal mode laser L
i(i=1,2 ..., Output of laser Z n)
i(i=1,2 ..., frequency n) is locked in same frequency values ν all the time
r.
2. the single longitudinal mode laser interlock based on hot frequency stabilization and acousto-optic frequency translation, comprise laser power supply A(1), frequency stabilization status indicator lamp (2), with reference to single longitudinal mode frequency stabilized carbon dioxide laser (3), fiber optic splitter (4), it is characterized in that also comprising in device the single longitudinal mode laser (L that n>=1 structure is identical, be relation in parallel
1, L
2..., L
n), wherein each single longitudinal mode laser (L
1, L
2..., L
n) assembly structure be: laser power supply B(13) be connected with laser tube (5), electric heater (11) is wrapped on laser tube (5) outer wall, its input termination frequency stabilization control module (9), laser tube temperature transducer (10) sticks on laser tube (5) outer wall, its output termination frequency stabilization control module (9), environment temperature sensor (12) is connected with frequency stabilization control module (9), polarization spectroscope (6) is placed on after the secondary output of laser tube (5), side by side place photodetector A(7 thereafter) and photodetector B(8), the output of the two is all connected with frequency stabilization control module (9), acousto-optic frequency shifters (14) is placed on before the main output of laser tube (5), spectroscope (15) is placed between acousto-optic frequency shifters (14) and an input of optical-fiber bundling device (16), one of output of another input of optical-fiber bundling device (16) and fiber optic splitter (4) is connected, analyzer (17) is placed on output and the photodetector C(18 of optical-fiber bundling device (16)) between, photodetector C(18), frequency measurement module (19), frequency regulation block (20), acousto-optic frequency shifters (14) connects successively, frequency locking status indicator lamp (21) is connected with frequency regulation block (20).
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| CN115313138A (en) * | 2022-10-11 | 2022-11-08 | 武汉中科锐择光电科技有限公司 | System and method for actively inhibiting instability of fiber laser mode |
| CN115313138B (en) * | 2022-10-11 | 2022-12-27 | 武汉中科锐择光电科技有限公司 | System and method for actively inhibiting instability of fiber laser mode |
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