CN104035229B - Liquid crystal grating and manufacture method thereof - Google Patents
Liquid crystal grating and manufacture method thereof Download PDFInfo
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- CN104035229B CN104035229B CN201410243264.XA CN201410243264A CN104035229B CN 104035229 B CN104035229 B CN 104035229B CN 201410243264 A CN201410243264 A CN 201410243264A CN 104035229 B CN104035229 B CN 104035229B
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- 239000011521 glass Substances 0.000 claims abstract description 28
- 239000010408 film Substances 0.000 claims description 11
- 238000011161 development Methods 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims description 9
- LCJRHAPPMIUHLH-UHFFFAOYSA-N 1-$l^{1}-azanylhexan-1-one Chemical compound [CH]CCCCC([N])=O LCJRHAPPMIUHLH-UHFFFAOYSA-N 0.000 claims description 8
- 229920002292 Nylon 6 Polymers 0.000 claims description 8
- 229950001919 policapram Drugs 0.000 claims description 8
- 239000003795 chemical substances by application Substances 0.000 claims description 6
- 238000004528 spin coating Methods 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 5
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- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
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- 229910001887 tin oxide Inorganic materials 0.000 description 1
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Abstract
The invention discloses a kind of liquid crystal grating structure, comprising: upper substrate, it sets transparent conductive film; Infrabasal plate, it is lithographically formed ground electrode layer successively under strip, described lower ground electrode deposits the first dielectric layer, form staggered addressing electrode parallel with described lower ground electrode on said dielectric layer, described addressing electrode deposits the second dielectric layer again, then forms ground electrode on the strip overlapping with lower ground electrode in described second dielectric layer deposition; Liquid crystal, is folded between described upper substrate and described infrabasal plate. The present invention is by the upper ground electrode in lower glass substrate and the shielding action to addressing electrode electric lines of force of the lower ground electrode, effectively inhibit the transverse electric field between addressing electrode and top glass substrate ground electrode in traditional liquid crystal grating, thus suppressing to expand to the fringe field of non-addressed electrode district. The present invention can be used for designing the liquid crystal grating device of high-resolution, large deflection angle.
Description
Technical field
The present invention relates to a kind of optics, especially relate to a kind of liquid crystal grating suppressing fringe field.
Background technology
Liquid crystal grating (liquidcrystalgrating) has the various advantages such as volume is little, driving voltage is low, power consumption is little, resolution is high, diffraction characteristic change is convenient compared with traditional mechanical devices, it is possible to be widely used for the every field such as diffraction optics, spectral measurement, light beam steering control, optical information processing, optical oomputing, optical communication field.
The basic device architecture of liquid crystal phase grating is as shown in Figure 1: is filled with the nematic liquid crystal 14 with dielectric constant anisotropy between top glass substrate 16 and lower glass substrate 11, forms a liquid crystal cell. Lower glass substrate 11 is shaped with transparent addressing electrode 12 and liquid crystal orientation film 13a, top glass substrate 16 is shaped with transparent ground electrode 15 and liquid crystal orientation film 13b.
Have optical anisotropy and dielectric anisotropy due to liquid crystal, therefore liquid crystal grating is under the effect of external electric field, and its optical characteristics can be conditioned. If the liquid crystal cell making liquid crystal molecule evenly distributed is applied periodic electric field, liquid crystal molecule will be caused periodically to rearrange, so that the change of the refractive index generating period of liquid crystal layer. Now incident illumination is when permeate crystal layer, produces the cyclically-varying of optical path length, forms phase grating. In liquid crystal grating, refractive index produces consecutive variations, namely by sinusoidal rule, incident illumination is carried out phase-modulation, and sinusoidal phase can pass through to make the optical thickness (geometric thickness or refractive index) of grating change in sinusoidal pattern and realize. For sine phase grating, it is possible to control the intensity of primary maximum at different levels by regulating phase-modulation degree, thus realizing energy redistributing on not at the same level time.
The liquid crystal grating various application in diffraction optics are required for obtaining the big angle of diffraction (deflection angle). And the angle of diffraction is by liquid crystal grating constant, namely determined by the spacing of addressing electrode. This is accomplished by the electrode that the high photo etched mask of resolution goes lithographic pitch less.
As in figure 2 it is shown, in liquid crystal grating, when spacing (liquid crystal cell thickness d) the sizable occasion of spacing p and the upper and lower base plate of addressing electrode 21, at the edge of addressing electrode 21, electric field will be leaked to non-addressed region 22.The existence of this fringe field so that the electric field in addressed areas 21 and non-addressed region 22 is no longer discrete, but is connected. The liquid crystal in non-addressed region can be subject to the impact of fringe field and unnecessary deflection occurs, and this phenomenon is referred to as fringing field effect. It can cause the phase-modulation ability degradation of liquid crystal grating, and then makes the diffraction efficiency of incident illumination significantly reduce. Meanwhile, because liquid crystal grating is based on transmission-type, in order to obtain bigger phase modulation depth, need bigger liquid crystal cell thick under the premise that liquid crystal material characteristic is certain. If it is thick it is necessary to select the liquid crystal material with high index-contrast to reduce liquid crystal cell, the appearance of such fringing field effect is just inevitable.
The existence of fringing field effect so that while the liquid crystal molecule 31 of addressed areas deflects, the liquid crystal molecule 32 in non-addressed region there occurs unnecessary deflection, as shown in Figure 3. And this can cause the broadening reduction with phase modulation depth of phase-modulation curve, as shown in Figure 4. Being finally reflected the reduction in diffraction efficiency, as it is shown in figure 5, the diffraction efficiency of positive and negative one-level is less than 10%, and the diffraction efficiency of zero level is more than 80%, it was shown that most incident illumination all cannot be carried out effective deflection.
In order to overcome the fringing field effect of available liquid crystal grating, the present invention proposes a kind of novel liquid crystal grating structure, it is possible to effectively suppress fringe field. Based on the scheme that the present invention proposes, it is possible to effectively suppress the fringe field in non-addressed region, thus for realizing high-resolution, the making of large deflection angle liquid crystal grating device creates condition.
Summary of the invention
In view of this, in order to solve one or more deficiencies of prior art, the present invention proposes a kind of liquid crystal grating and manufacture method thereof, and it solves the fringing field effect of high-resolution, large deflection angle liquid crystal grating device.
The present invention proposes a kind of liquid crystal grating, comprising: upper substrate, it sets transparent conductive film; Infrabasal plate, it is lithographically formed ground electrode layer successively under strip, described lower ground electrode deposits the first dielectric layer, form staggered addressing electrode parallel with described lower ground electrode on said dielectric layer, described addressing electrode deposits the second dielectric layer again, then forms ground electrode on the strip overlapping with lower ground electrode in described second dielectric layer deposition; Liquid crystal, is folded between described upper substrate and described infrabasal plate.
Preferably, described first and second dielectric layer is transparent insulation dielectric, and good insulating and transparency are high.
Preferably, described upper ground electrode, described addressing electrode or described lower ground electrode are all transparent ITO electrode, in order to make incident illumination pass through.
Preferably, described addressing electrode is applied addressing voltage, the described transparent conductive film layer ground connection of described lower ground electrode, described upper ground electrode and described top glass substrate.
Wherein, lower ground electrode is consistent with upper ground electrode pattern and overlapping up and down, and upper and lower ground electrode is staggered with addressing electrode position. When liquid crystal grating works, lower ground electrode and upper ground electrode all ground voltages, addressing electrode applies addressing voltage. After upper and lower ground electrode is applied with stable voltage, owing to forming transverse electric field between existence meeting and the addressing electrode of coupling electric capacity, thus resisting the fringe field being positioned at non-addressed region between the transparent conductive film layer of earthing potential in addressing electrode and top glass substrate.
Wherein, in top glass substrate, the transparent conductive film layer of earthing potential is as third layer ground electrode, is also the reference voltage electrode of addressing electrode.When liquid crystal grating works, and between addressing electrode, form voltage difference, produce electric field, order about liquid crystal molecule deflection.
Preferably, described upper and lower substrate is the glass substrate being coated with ITO conductive film.
The invention allows for the manufacture method of a kind of grating device, it comprises the following steps:
A, on infrabasal plate, form the pattern of ground electrode under strip by photoresist coating, exposure, development, etching technics;
B, at first dielectric layer applied over of described lower ground electrode, then deposit ito thin film, be coated with then through photoresist, exposure, development, etching technics form the pattern of staggered strip addressing electrode parallel with described lower ground electrode;
C, at second dielectric layer applied over of described addressing electrode, then deposit ito thin film, be coated with then through photoresist, exposure, development, etching technics form the pattern of ground electrode on the strip overlapping with lower ground electrode;
D, described infrabasal plate described on spin coating alignment agent policapram carry out friction orientation with rubbing machine on ground electrode, differently-oriented directivity is parallel-oriented, spin coating alignment agent policapram carry out friction orientation with rubbing machine in the ITO ground electrode layer of top glass substrate, differently-oriented directivity is parallel-oriented;
E, described infrabasal plate triple electrode peripheral space spray separaant;
F, with point gum machine, top glass substrate carried out a glue envelope frame, confine liquid crystal region, and stay an opening to irrigate liquid crystal. By upper substrate and infrabasal plate para-position laminating;
G, utilize impregnation method from after jacket opening part irrigate liquid crystal, after having irrigated, seal.
The present invention compared with prior art, has an advantage in that:
Liquid crystal grating provided by the invention, the electric lines of force of addressing electrode is played shielding action by upper ground electrode and lower ground electrode in lower glass substrate, and above-mentioned ground electrode forms the equivalent of two series capacitances with the ground electrode in top glass substrate simultaneously. Fringe field can produce equivalent voltage in non-addressed region. And this equivalent voltage can be carried out dividing potential drop by the series equivalent capacitance that triple electrode is constituted. So, the voltage on the liquid crystal layer being applied to non-addressed region is further reduced.
Irrigating liquid crystal in above-mentioned liquid crystal grating device, the liquid crystal near upper and lower base plate does orientation arranged in parallel. The preferred E7 liquid crystal of the present invention, because it has higher birefringence rate variance so that it is thick that device can have less box; And there is higher D-value of dielectric constant, it is possible to drive with relatively low voltage. At upper and lower base plate, liquid crystal molecule is carried out orientation arranged in parallel so that only had the change of phase shift by the light of liquid crystal molecule, without the change of degree of polarization, thus ensureing the phase-only modulation duty of device.
Adopt liquid crystal grating provided by the invention and manufacture method thereof, at the formation transverse electric field between ground electrode and addressing electrode up and down of non-addressed electrode zone, resist the addressing electrode fringe field at non-addressed electrode zone. This two-layer ground electrode together form equivalent series capacitance with the ground electrode of upper substrate simultaneously. The equivalent capacity equivalent voltage in non-addressed region to producing due to fringe field carries out dividing potential drop, reduce further the voltage on the liquid crystal layer being applied to non-addressed region. Thus effectively inhibiting fringe field, for realizing high-resolution, large deflection angle liquid crystal grating device provides foundation.
Accompanying drawing explanation
Fig. 1 is the cross-sectional view of traditional liquid crystal grating device;
Fig. 2 is traditional liquid crystal grating Electric Field Distribution simulation result figure;
Fig. 3 is the liquid crystal molecule director distribution analogous diagram of traditional liquid crystal grating;
Fig. 4 is the PHASE DISTRIBUTION figure of traditional liquid crystal grating;
Fig. 5 is traditional liquid crystal grating diffration performance plot;
Fig. 6 is the cross-sectional view of the liquid crystal grating of the present invention;
Fig. 7 is the infrabasal plate perspective view of the liquid crystal grating of the present invention;
Fig. 8 is the Electric Field Distribution simulation result figure of the liquid crystal grating of the present invention;
Fig. 9 is the liquid crystal molecule director distribution analogous diagram of the liquid crystal grating of the present invention;
Figure 10 is the PHASE DISTRIBUTION figure of the liquid crystal grating of the present invention;
Figure 11 is the diffraction characteristic figure of the liquid crystal grating of the present invention;
Figure 12 is the phase modulation depth curve chart of traditional liquid crystal grating and the liquid crystal grating of the present invention;
Figure 13 is the diffraction efficiency curve figure of traditional liquid crystal grating and the liquid crystal grating of the present invention.
Detailed description of the invention
Fig. 6 is the cross-sectional view of the liquid crystal grating of the present invention, and as shown in Figure 6, the present invention proposes a kind of liquid crystal grating, is perfused with liquid crystal 66 between lower glass substrate 61 and top glass substrate 68. Lower glass substrate 61 is sequentially distributed ground electrode 62, insulating dielectric layer 69a, addressing electrode 63, insulating dielectric layer 69b, on ground electrode 64, liquid crystal aligning layer 65a, top glass substrate 68 is sequentially distributed ground electrode 67, liquid crystal aligning layer 65b. The preferred indium and tin oxide film of the present invention (ITO) as lower ground electrode 62, addressing electrode 63, upper ground electrode 64, ground electrode 67 material.
Fig. 7 is the infrabasal plate perspective view of the liquid crystal grating of the present invention, as shown in Figure 7, lower glass substrate 71 is sequentially distributed lower ground electrode 72, addressing electrode 73, on ground electrode 74, upper ground electrode 74 is consistent with lower ground electrode 72 pattern and overlapping up and down, is addressing electrode 73 between upper ground electrode 74 and lower ground electrode 72. In the present embodiment, lower ground electrode 72, addressing electrode 73, upper ground electrode 74 preferred electrode width are 3 ��m, length 2cm, and electrode spacing is 3 ��m, and thickness is 0.1 ��m. In the present embodiment, preferred dielectric layer gross thickness is 0.3 ��m.
As shown in Figure 6, the lower ground electrode 62 of described liquid crystal grating, upper ground electrode 64 and ground electrode 67 constitute series capacitance, according to series capacitance voltage divider principle, it is possible to be applied to the magnitude of voltage of non-addressed region liquid crystal layer by the spacing between control ground electrode and electrolyte regulation and control. Non-addressed electrode zone lower ground electrode 62, between ground electrode 64 and addressing electrode 63 formed transverse electric field, resisted the addressing electrode 63 fringe field at non-addressed electrode zone.
As shown in Figure 8, adopting the liquid crystal grating of the present invention, the electric field on addressing electrode is substantially converged in the top of addressing electrode. Owing to inhibiting the fringe field of non-addressed electrode zone, while the liquid crystal molecule of addressed areas deflects, there is not effective deflection in the liquid crystal molecule in non-addressed region, as shown in Figure 9. Corresponding phase modulation depth is greatly improved, as shown in Figure 10. Being finally reflected the raising in diffraction efficiency, as shown in figure 11, the diffraction efficiency of positive and negative one-level reaches theoretical boundary 33.86%, and the diffraction efficiency of zero level only has about 10%, it was shown that most incident illumination has all carried out effective deflection.
Figure 12 compares the variation relation between liquid crystal grating structure of the present invention and phase modulation depth and the applied voltage of traditional liquid crystal optical grating construction, and the phase modulation depth of liquid crystal grating of the present invention is bigger than the phase modulation depth of traditional liquid crystal optical grating construction.
Figure 13 compares the variation relation between liquid crystal grating structure of the present invention and diffraction efficiency and the applied voltage of traditional liquid crystal optical grating construction, and the diffraction efficiency of liquid crystal grating of the present invention is bigger than the diffraction efficiency of traditional liquid crystal optical grating construction.
Liquid crystal grating device of the present invention as shown in Figure 6, manufacture process is as follows:
A, use ito glass, directly form the pattern of lower ground electrode 62 in lower glass substrate 61 by techniques such as photoresist coating, exposure, development, etchings.
B, at the insulating dielectric layer 69a applied over of lower ground electrode 62, then adopt the method deposition ito thin film of magnetron sputtering, then through the pattern of the technique formation addressing electrodes 63 such as photoresist coating, exposure, development, etching.
C, at the insulating dielectric layer 69b applied over of addressing electrode 63, then adopt the method deposition ito thin film of magnetron sputtering, form the pattern of upper ground electrode 64 then through techniques such as photoresist coating, exposure, development, etchings. Upper ground electrode 64 uses same mask plate with lower ground electrode 62, and two layer patterns are directed at accurately when exposure.
D, on the upper ground electrode 64 of lower glass substrate 61 spin coating alignment agent policapram (PI) carry out friction orientation with rubbing machine, differently-oriented directivity is parallel-oriented. Spin coating alignment agent policapram (PI) carry out friction orientation with rubbing machine in the ITO ground electrode layer of top glass substrate 68, differently-oriented directivity is parallel-oriented.
E, at the triple electrode periphery slot milling spraying separaant of lower glass substrate. The selection of separaant to consider that this thickness liquid crystal is capable of 2 more than �� phase shifts, relatively low driving voltage and the operability of technique. Preferred 3 ��m of separaants in the present embodiment, even application is in infrabasal plate surrounding.
F, with point gum machine, top glass substrate carried out a glue envelope frame, confine liquid crystal region, and stay an opening to irrigate liquid crystal. By upper substrate and infrabasal plate para-position laminating.
Preferred E7 liquid crystal in g, the present embodiment, utilizes impregnation method to irrigate liquid crystal from the opening part after jacket. After having irrigated, seal.
In the description of this specification, specific features, structure, material or feature that the description of reference term " embodiment ", " some embodiments ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example describe are contained at least one embodiment or the example of the present invention. In this manual, the schematic representation of above-mentioned term is not necessarily referring to identical embodiment or example. And, the specific features of description, structure, material or feature can combine in an appropriate manner in any one or more embodiments or example.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: these embodiments can being carried out multiple change, amendment, replacement and modification when without departing from principles of the invention and objective, the scope of the present invention is limited by claim and equivalent thereof.
Claims (6)
1. a liquid crystal grating, comprising:
Upper substrate, it sets transparent conductive film;
Infrabasal plate, it is formed ground electrode under strip, described lower ground electrode deposits the first dielectric layer, described first dielectric layer is formed staggered addressing electrode parallel with described lower ground electrode, described addressing electrode deposits the second dielectric layer again, then on described second dielectric layer, forms ground electrode on the strip overlapping with lower ground electrode;
Liquid crystal, is folded between described upper substrate and described infrabasal plate.
2. liquid crystal grating according to claim 1, it is characterised in that: described first and second dielectric layer is transparent insulation dielectric.
3. liquid crystal grating according to claim 1, it is characterised in that: described upper ground electrode, described addressing electrode and described lower ground electrode are all transparent ITO electrode.
4. liquid crystal grating according to claim 1, it is characterised in that: described addressing electrode is applied addressing voltage, the described transparent conductive film ground connection on described lower ground electrode, described upper ground electrode and described upper substrate.
5. liquid crystal grating according to claim 1, it is characterised in that: described upper and lower substrate is the glass substrate being coated with ITO conductive film.
6. a manufacture method for grating device, it comprises the following steps:
A, on infrabasal plate, form the pattern of ground electrode under strip by photoresist coating, exposure, development, etching technics;
B, at first dielectric layer applied over of described lower ground electrode, then deposit ito thin film, be coated with then through photoresist, exposure, development, etching technics form the pattern of staggered strip addressing electrode parallel with described lower ground electrode;
C, at second dielectric layer applied over of described addressing electrode, then deposit ito thin film, be coated with then through photoresist, exposure, development, etching technics form the pattern of ground electrode on the strip overlapping with lower ground electrode;
D, on described spin coating alignment agent policapram carry out friction orientation with rubbing machine on ground electrode, differently-oriented directivity is parallel-oriented, spin coating alignment agent policapram carry out friction orientation with rubbing machine in the ITO ground electrode layer of top glass substrate, differently-oriented directivity is parallel-oriented;
E, triple electrode on described infrabasal plate peripheral space spraying separaant;
F, with point gum machine, top glass substrate carried out a glue envelope frame, confine liquid crystal region, and stay an opening to irrigate liquid crystal, by upper substrate and infrabasal plate para-position laminating;
G, utilize impregnation method from after jacket opening part irrigate liquid crystal, after having irrigated, seal.
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| CN107942528B (en) * | 2018-01-02 | 2021-01-26 | 京东方科技集团股份有限公司 | Naked eye 3D display device and manufacturing method thereof |
| EP3841666B1 (en) * | 2018-08-21 | 2024-05-01 | Eastman Kodak Company | Double-sided electrodynamic screen films |
| US11110493B2 (en) | 2018-08-21 | 2021-09-07 | Eastman Kodak Company | Double-sided electrodynamic screen films |
| CN110441936B (en) * | 2019-08-14 | 2022-05-13 | 京东方科技集团股份有限公司 | Filter, filtering device, driving method of filter and preparation method of driving method |
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| CN103645591B (en) * | 2013-12-23 | 2017-01-18 | 东南大学 | Method for attenuating fringing field effect of silicon-based liquid crystal |
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