CN104035088A - Multi-frequency aliasing prevention traceable synchronous measuring tape double-light-source laser ranging device and method - Google Patents
Multi-frequency aliasing prevention traceable synchronous measuring tape double-light-source laser ranging device and method Download PDFInfo
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- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
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Abstract
A multi-frequency aliasing prevention traceable synchronous measuring tape double-light-source laser ranging device and method belongs to the phase laser ranging technology. The device comprises a measuring tape generating unit, a laser frequency shift unit, a beam expanding collimation lens group, a measuring light path and a circuit unit. The method comprises the steps of, firstly, starting a frequency reference laser device, a double-longitudinal-mode frequency stabilization He-Ne laser device and a semiconductor laser device; secondly, taking one beam as a reference laser beam and taking the other beam as a measuring laser beam; thirdly, taking c/Iv2-v3I as a fine measurement tape; fourthly, taking c/Iv1-v2I as a rough measurement tape; fifthly, moving a measuring pyramid prism to a target end to obtain the phase differences (i) phi (/i) 1 and (i) phi (/i) 2 of the fine measurement tape and the rough measurement tape; lastly, obtaining a measured distance value through formulas. The multi-frequency aliasing prevention traceable synchronous measuring tape double-light-source laser ranging device and method solves the problems that superlong wavelengths and ultrashort wavelengths cannot be generated synchronously and laser tapes are incapable of performing direct tracing and have nonlinear periodic errors and frequency aliasing, and has the advantages of being high in measuring efficiency, precision, stability and practicality.
Description
Technical field
The invention belongs to phase place laser measuring technique, relate generally to a kind of phase laser distance apparatus and method.
Background technology
Large-scale metrology receives much concern in the large-scale optical, mechanical and electronic integration equipment processing and manufacturings such as the machine-building of development large-scale precision, great scientific and technological engineering, aerospace industry, shipping industry and microelectronics equipment industry, wherein several meters of large-scale metrologies to hundreds of rice scope are large parts processing and the whole important foundations of assembling in aerospace vehicle and jumbo ship, the quality of its measuring method and equipment performance directly affects workpiece quality and assembly precision, and then running quality, performance and the life-span of a whole set of equipment of impact.The chi phase ranging methods of surveying utilize one group of survey chi wavelength from big to small to the measurement of refining step by step of tested distance more, solve conflicting between measurement range and measuring accuracy, can in hundreds of meters of overlength operating distances, reach submillimeter to micron-sized static measurement precision.
, survey in chi phase laser distance technology more, although the mode that many survey chis are measured has step by step been taken into account the demand of measurement range and measuring accuracy, but the restriction due to light source technology, bigness scale chi and accurate measurement chi can not produce the line phase of going forward side by side simultaneously and measure, caused Measuring Time long, the problem that measurement result real-time is poor, on the other hand due to take in surveying chi phase laser distance technology survey chi wavelength size and measure as benchmark, the stability of surveying chi wavelength directly affects the precision of laser ranging, therefore how to obtain bigness scale chi and the accurate measurement chi wavelength of high stability, and make it to participate in measuring is to improve at present the subject matter of surveying chi phase laser distance precision and real-time more simultaneously.
The stability of surveying chi is relevant with light source technology with synchronous generating technique, and by known to the analysis of phase laser distance method LASER Light Source technology, the modulation means of phasic difference method has directly modulation of electric current, optical modulation and intermode beat frequency modulation system etc. both at home and abroad at present.
Direct current modulation method is utilized semiconductor laser, and the feature of light intensity curent change comes the output intensity of noise spectra of semiconductor lasers to modulate, and has the advantages such as the modulation of being simple and easy to.Document [Siyuan Liu, Jiubin Tan and Binke Hou. Multicycle Synchronous Digital Phase Measurement Used to Further Improve Phase-Shift Laser Range Finding. Meas. Sci. Technol. 2007, 18:1756 – 1762] and patent [the large range high precision fast laser ranging apparatus and method of multiple frequency synchronous modulation, publication number: CN1825138] all set forth a kind of current modulating method of based semiconductor laser instrument, it adopts the synthetic composite signal of multiple frequency synchronous to carry out synchronous modulation to laser output power, realized at synchronization and obtained in multifrequency modulation range finding each modulation frequency for the measurement result of tested distance, but in order to obtain linear modulation, make the straight line portion of working point in output characteristic curve, must when adding modulation signal electric current, add a suitable bias current makes its output signal undistorted, the introducing of direct current biasing has strengthened power consumption, when working long hours, temperature raises, can affect the stability of Output optical power, cause modulation waveform distortion, and the increase along with modulating frequency, depth of modulation can reduce, cause modulation waveform distortion, can not carry out high frequency modulated, size and the degree of stability of accurate measurement chi wavelength have been limited, on the other hand in the actual application of large-scale metrology, laser easily causes the loss of laser power in long Distance Transmission process, cause the impact on modulation waveform, and then accuracy and the degree of stability of impact survey chi, its frequency stability of surveying chi is generally less than 10
-7.
Utilize light modulating method to be mainly acoustooptic modulation method and electro-optic modulation method, its modulation band-width is subject to the multifactorial impact of laser beam diameter etc., also can bring waveform distortion, particularly just even more serious when high frequency (Gigahertz), therefore it forms large survey chi, and measuring accuracy is difficult to improve owing to being subject to the restriction of maximum modulation frequency.
Utilize laser instrument different mode to export formed beat signal as the method for surveying chi, be called intermode modulation.The chamber long correlation of the modulation band-width of the method and laser instrument, He-Ne laser frequency stabilization technology is ripe, its frequency stability is high, the degree of stability of the survey chi being obtained by it is high, patent [high precision multiple frequency synchronous phase laser distance apparatus and method, publication number: CN 102419166] and patent [the multiple frequency synchronous phase laser distance apparatus and method based on dual-acousto-optic shift, publication number: CN 102305591A] all utilized the intermode modulation of He-Ne laser instrument and in conjunction with acousto-optic frequency translation technology, high-precision accurate measurement chi and bigness scale chi have been obtained, but the survey chi that the method produces does not possess tractability, when it is measured, absolute measuring chi length needs another detection system to provide, increased the complicacy of measuring, on the other hand, this method of utilizing process of heterodyning to obtain accurate measurement chi phase place, the frequency of its processing signals is higher, can follow-up phase measurement difficulty and measuring accuracy be affected, and supposes that phase-measurement accuracy is 0.05
o, range measurement accuracy will reach 1um-10um, and signal frequency is at least 2GHz-20GHz, far exceeds the bandwidth of signal processing circuit.
Patent [superheterodyne device and method of reseptance and receiving trap SIC (semiconductor integrated circuit), publication number: CN102484492A] all introduced a kind of superhet interference signal treatment technology, Zhang Cunman [the Zhang Cunman etc. of Tsing-Hua University, superhet is interfered absolute distance measurement Review Study, optical technology 1998, (1): 7-9.] introduced superhet absolute distance measurement method, the method has reduced the processing frequency of signal, more easily reaches higher measuring accuracy.But this technology has three improved aspects of needs: the first, and this technology can only obtain one and survey chi, and does not possess tractability, can not carry out the chis of surveying more and measure, let alone survey the synchronism of chi more; The second, it is less that superhet obtains surveying chi wavelength, generally in micron dimension, and can only be for the measurement of the micro-shape in surface.The 3rd, owing to using multi-frequency measurement and traditional anti-aliasing optical path with polarization spectroscope, inevitably produce non-linear cycle error and frequency alias, the measuring accuracy of phase place is impacted.
Nowadays, the laser instrument of 633nm and 543nm wavelength coverage has been successfully applied in the magnitude tracing system of various precision measurement systems and geometry parameter, and the Allan variance of one sampling second has reached 2 * 10
-13below, therefore in order to improve the stability of laser instrument output frequency, occurred usining that the Output of laser frequency of iodine saturated absorption frequency stabilization laser instrument, as the frequency-stabilizing method of frequency stabilization benchmark, utilizes the saturated absorption spectra of iodine to carry out rrequency-offset-lock control to He-Ne laser instrument and semiconductor laser.China is also studied, such as patent ZL200910072518.5 and patent ZL200910072519.X etc., a kind of rrequency-offset-lock device that utilizes iodine saturated absorption He-Ne frequency stabilized laser has all been described, make the laser output frequency after rrequency-offset-lock there is very high frequency stability, have advantages of that output frequency can trace to the source, but the output frequency of laser reaches 10
14hz, corresponding survey chi is between 400-700nm, and measurement range, in nm rank, can not be found range for long distance laser, needs badly a kind ofly high frequency stability laser frequency is converted to the laser ranging on a large scale that can trace to the source surveys chi, and synchronizes them the technology of generation.
In sum, in laser ranging field, existing three problems needs to solve, and first, the synchronous generation of overlength wavelength and ultrashort wavelength, make it to take into account measuring accuracy and measurement range, the second, high precision can be traced to the source and be surveyed the generation of chi, to improve the accuracy of surveying chi wavelength, and reduce and measure the step that wavelength needs other system to provide, the 3rd, reduce the impact on measuring accuracy of non-linear cycle error and frequency alias.The present invention is directed to these three problems proposes a solution.
Summary of the invention
The object of the invention is in order to solve can not synchronously producing of the overlength wavelength that exists and ultrashort wavelength in existing phase laser distance technology, Laser Measuring chi is not directly traced to the source and the problem of non-linear cycle error and frequency alias, a kind of superhet and heterodyne convolution anti-optics aliasing laser ranging system and method are provided, reach the object of increase range finding dirigibility, simplification range finding step, raising measurement efficiency, precision and real-time.
The object of the present invention is achieved like this:
A kind of two light source laser ranging systems of the same pacing chi of tracing to the source of anti-multifrequency aliasing, it is characterized in that: described device forms by surveying chi generation unit, laser shift frequency unit, anti-aliasing optical path and phase measurement unit, wherein survey Laser output that chi generation unit sends to the input end of laser shift frequency unit, output reference laser light beam and the measuring laser beam of laser shift frequency unit output to anti-aliasing optical path, the output signal I of anti-aliasing optical path
3, I
4, I
5, I
6be input to respectively phase measurement unit;
The structure of described survey chi generation unit is: the laser beam of frequency reference laser instrument transmitting arrives the input end of optical splitter, first output terminal of optical splitter connects He-Ne laser instrument input end, He-Ne laser output connects the input end of a polarization spectroscope, a direct Output of laser of output terminal of a polarization spectroscope, another output terminal connects a catoptron, second output terminal of described optical splitter connects semiconductor laser input end, and the output terminal of semiconductor laser connects the input end of a polaroid;
The structure of described laser shift frequency unit is: the input end of a half-wave plate connects the output terminal of a polarization spectroscope, the output terminal of a half-wave plate connects the input end of No. two polarization spectroscopes, an output terminal of No. two polarization spectroscopes connects the input end of No. two catoptrons, another output terminal of No. two polarization spectroscopes connects an input end of laser splicer, the output terminal of No. two catoptrons connects an input end of a laser frequency shifter, the output terminal of a DDS signal source connects another input end of a laser frequency shifter, the output terminal of a laser frequency shifter connects an input end of laser splicer, spectroscopical input end connects the output terminal of a catoptron, a spectroscopical output terminal connects the input end of No. three catoptrons, spectroscopical another output terminal connects an input end of laser splicer, the output terminal of No. three catoptrons connects an input end of No. two laser frequency shifters, another input end of No. two laser frequency shifters connects the output terminal of No. two DDS signal sources, the output terminal of No. two laser frequency shifters connects an input end of laser splicer.An input end of described laser splicer connects the output terminal of a polaroid;
The structure of described anti-aliasing optical path is: No. two spectroscopes of reference laser light beam directive, through No. two spectroscope reflections, enter prism of corner cube and form laser beam a, through No. two spectroscope transmissions, enter reference prism and form laser beam b, laser beam a reflects back into spectroscope No. two by prism of corner cube, through No. two spectroscope transmissions, form laser beam c again, reflect to form laser beam d, laser beam b reflects back into spectroscope No. two by reference prism, through No. two spectroscope transmissions, form laser beam e again, reflect to form laser beam f, described No. two spectroscopes of measuring laser beam directive, through No. two spectroscope transmissions, enter measuring prism and form laser beam g, reflection enters a bugle cone prism and forms laser beam h, laser beam f enters spectroscope No. two through measuring prism reflection, through No. two spectroscope transmissions, form laser beam j again, reflect to form laser beam i, laser beam h enters spectroscope No. two through prism of corner cube reflection, through No. two spectroscope transmissions, form laser beam l again, reflect to form laser beam k, described laser beam c overlaps with laser beam i, and through No. two polaroids, enter the input end of a photelectric receiver, described laser beam d overlaps with laser beam j, and through No. three polaroids, enter the input end of No. two photelectric receivers, described laser beam e overlaps with laser beam k, and through No. four polaroids, enter the input end of No. three photelectric receivers, described laser beam f overlaps with laser beam l, and through No. five polaroids, enter the input end of No. four photelectric receivers,
The structure of described phase measurement unit is: the output terminal of a photelectric receiver and No. four photelectric receivers is connected with the input end of No. two low-pass filters with a low-pass filter respectively, the defeated output terminal of a low-pass filter and No. two low-pass filters is connected with the input end that is connected frequency mixer, the output terminal of frequency mixer connects the input end of phase measurement meter, No. two photelectric receiver is connected with the input end of No. four low-pass filters with No. three low-pass filters respectively with No. four photelectric receivers, the output terminal of No. three low-pass filters and No. four low-pass filters is connected with the input end of phase measurement meter.
A kind of two light source laser distance measurement method concrete steps of the same pacing chi of tracing to the source of anti-multifrequency aliasing are as follows:
Step 1, open frequency benchmark laser, He-Ne laser instrument, semiconductor laser, after through preheating and frequency stabilization, within semiconductor laser and He-Ne laser instrument are locked in the certain frequency scope of frequency reference laser instrument by FEEDBACK CONTROL by output frequency, the laser sending from He-Ne laser instrument is divided into frequency and is after polarization spectroscope
v 2horizontal polarization direction laser and frequency are
v 3vertical polarization laser, the rrequency-offset-lock laser sending from semiconductor laser after polaroid only surplus frequency be
v 1vertical polarization laser;
Step 2, by the formed three beams of laser of step 1, enter laser shift frequency unit, its medium frequency is
v 2laser beam, after half-wave plate and No. two polarization spectroscopes, separate the two mutually perpendicular laser in bundle polarization direction, wherein a road is through laser frequency shifter, by DDS signal source driving laser frequency shifter, shift frequency frequency is
f 1, another road is shift frequency not, and frequency is
v 3laser after spectroscope, be also divided into two-way one tunnel through laser frequency shifter, shift frequency frequency is
f 2, frequency is
v 1laser straight tap into into laser splicer, the laser of last various frequencies has five kinds of frequencies, is respectively
v 2,
v 3,
v 1,
v 2+
f 1with
v 3+
f 2, through the part of laser splicer, close light, by frequency, be
v 2+
f 1with
v 3+
f 2laser synthetic a branch of, form reference laser light beam, frequency is
v 2,
v 3,
v 1the synthetic measuring laser beam of laser, and shine respectively anti-aliasing optical path;
Step 3, reference laser light beam are divided into laser beam a and laser beam b through No. two spectroscopes, measuring laser beam is divided into laser beam g and laser beam h through No. two spectroscopes, laser beam b and laser beam h are respectively after prism of corner cube and reference prism reflection, a bit joining on No. two spectroscope light splitting surfaces forms two beam interferometer light beams, wherein light beam through polarization direction with
v 1become 45 No. four polaroids of spending to enter No. three photodetectors and carry out opto-electronic conversion, then by the electric signal that obtains after No. four low-pass filters comprising accurate measurement chi signal phase information, its frequency is
f 1-
f 2, corresponding survey chi length is
, another light beam through polarization direction with
v 1after No. five identical polaroids, obtain frequency and be
v 1,
v 2the laser of horizontal polarization direction, then enter into No. four photodetectors and carry out opto-electronic conversion, the frequency of the electric signal obtaining its output electrical signals after No. two low-pass filters is
v 1-
v 2, corresponding survey chi length is
;
When step 4, measurement start, reference prism maintains static, traverse measurement prism is to destination end, measuring distance is L, laser beam g is after measuring prism reflection, at No. two spectroscopical another some places, converge formation interfering beam with laser beam a, then form two beam interferometer laser through spectroscope light splitting, wherein a branch of through polarization direction with
v 1become 45 No. three polaroids of spending to enter No. two photodetectors and carry out opto-electronic conversion, then by the electric signal that obtains after No. three low-pass filters comprising accurate measurement chi signal phase information, its frequency is
f 1-
f 2, corresponding survey chi length is
, another light beam through polarization direction with
v 1after No. two identical polaroids, obtain frequency and be
v 1,
v 2the laser of horizontal polarization direction, then enter into a photelectric receiver and carry out opto-electronic conversion, the frequency of the electric signal obtaining its output electrical signals after a low-pass filter is
v 1-
v 2, corresponding survey chi length is
;
Step 5, by frequency, be
v 1-
v 2two signals access frequency mixer, reduce the frequency of two signals, then send into phase measurement meter, obtain the phase differential of two frequencies
Φ 1, by frequency, be
f 1-
f 2electric signal send into phase measurement meter and survey phase, obtain the phase differential of two signals
Φ 2, according to formula
try to achieve the distance measure of bigness scale chi
l c , and its substitution formula is tried to achieve to the phase place round values of accurate measurement chi
;
floor(
x) function returns
xthe integral part of value, finally according to formula, try to achieve tested distance value:
, in formula: c is the light velocity, the air refraction that n is environment.
Feature of the present invention and beneficial effect are:
The first, the present invention proposes, accurate measurement chi production method thick based on tracing to the source of mixing laser and device, these apparatus and method are utilized frequency reference type frequency stabilized laser, and frequency stability reaches 10-
12magnitude, a semiconductor laser and a He-Ne laser instrument are carried out to rrequency-offset-lock control, and utilize semiconductor laser after frequency stabilization and He-Ne laser to form required thick of range finding, accurate measurement chi, make Output of laser frequency and formed laser ranging survey chi wavelength and can directly be traceable to frequency/wavelength benchmark, and can adjust according to actual needs lock point, and then regulate surveying chi wavelength, increased the dirigibility of range finding, overcome and in existing distance measuring equipment, surveyed the shortcoming that chi is not directly traced to the source, simplify general distance measuring equipment and when absolute measuring is long, surveyed the link that chi wavelength needs another detection system to detect, improved measurement efficiency and precision, this is that the present invention distinguishes one of innovative point of existing apparatus.
The second, the present invention proposes a kind of many surveys chi phase-locking acquisition methods and device of being combined with superhet based on heterodyne.These apparatus and method utilize laser frequency shifter to carry out shift frequency to the laser of component frequency, produce the laser of multi-frequency, and utilize heterodyne approach and superhet method to obtain respectively bigness scale chi and accurate measurement chi simultaneously, and then make it to participate in to measure simultaneously, realized the synchro measure of thick accurate measurement chi phase place, shorten Measuring Time, improved the real-time of measurement result.The laser interferometry combining with superhet by heterodyne obtains test phase signal, eliminate common mode interference, improved the degree of stability of surveying chi, reduced the frequency of phase measuring circuit reception signal simultaneously, reduce the difficulty of circuit design, this is two of the present invention's innovative point of distinguishing existing apparatus.
The 3rd, the present invention adopts He-Ne laser instrument and semiconductor laser to form thick accurate measurement chi generation hybrid light source, ensureing the complexity of having simplified light source under the prerequisite that survey chi can be traced to the source, and can make full use of semiconductor laser light resource and He-Ne laser instrument advantage separately, first utilize the large feature of semiconductor Output of laser energy, can guarantee light echo energy, improve signal to noise ratio (S/N ratio), next utilizes He-Ne laser instrument frequency stabilization process feature simply rapidly, can quick adjustment Output of laser frequency, and then regulate surveying chi, this is three of the present invention's innovative point of distinguishing existing apparatus.
The 4th, the present invention the anti-aliasing interference technique of a kind of multi-frequency and device proposed.In these apparatus and method, reference light and measurement light reach anti-aliasing optical path through different paths, in interference mirror group in anti-aliasing optical path, reference light and measurement light carry out the measurement of twice interference realization to tested distance through different paths, because two light beams are without aliasing, elimination is due to optical device or light source polarization direction is undesirable produces that polarized light is revealed and aliasing, thereby in principle, has avoided non-linear cycle error and frequency alias error.This is four of the present invention's innovative point of distinguishing existing apparatus.
Accompanying drawing explanation
Fig. 1 is the general structure schematic diagram of laser ranging system of the present invention;
Fig. 2 is for surveying the structural representation of chi generation unit;
Fig. 3 is the structural representation of laser shift frequency unit;
Fig. 4 is reference signal beam interference schematic diagram;
Fig. 5 is measuring-signal beam interference schematic diagram;
Fig. 6 is anti-aliasing optical path structural representation;
Fig. 7 is phase measurement cellular construction schematic diagram
Piece number explanation in figure: 1, survey chi generation unit, 2, laser shift frequency unit, 3, anti-aliasing optical path, 4, phase measurement unit, 5, frequency reference laser instrument, 6, optical splitter, 7, He-Ne laser instrument, 8, a polarization spectroscope, 9, a catoptron, 10, semiconductor laser, 11, a polaroid, 12, a half-wave plate, 13, No. two polarization spectroscopes, 14, No. two catoptrons, 15, a laser frequency shifter, 16, a DDS signal source, 17, spectroscope, 18, No. three catoptrons, 19, No. two laser frequency shifters, 20, No. two DDS signal sources, 21, laser splicer, 22, reference laser light beam, 23, measuring laser beam, 24, No. two spectroscopes, 25, prism of corner cube, 26, measuring prism, 27, reference prism, 28, a photelectric receiver, 29, No. two polaroids, 30, No. three polaroids, 31, No. two photelectric receivers, 32, No. four polaroids, 33, No. three photelectric receivers, 34, No. five polaroids, 35, No. four photelectric receivers, 36, a low-pass filter, 37, No. two low-pass filters, 38, No. three low-pass filters, 39, No. four low-pass filters, 40, frequency mixer, 41, phase measurement meter.
Embodiment
Below in conjunction with accompanying drawing, embodiment of the present invention is described in detail.
A kind of two light source laser ranging systems of the same pacing chi of tracing to the source of anti-multifrequency aliasing, it is characterized in that: described device forms by surveying chi generation unit 1, laser shift frequency unit 2, anti-aliasing optical path 3 and phase measurement unit 4, wherein survey Laser output that chi generation unit 1 sends to the input end of laser shift frequency unit 2, output reference laser light beam 22 and the measuring laser beam 23 of laser shift frequency unit 2 output to anti-aliasing optical path 3, the output signal I of anti-aliasing optical path 3
3, I
4, I
5, I
6be input to respectively phase measurement unit 4;
The structure of described survey chi generation unit 1 is: the laser beam of frequency reference laser instrument 5 transmittings arrives the input end of optical splitter 6, first output terminal of optical splitter 6 connects He-Ne laser instrument 7 input ends, He-Ne laser instrument 7 output terminals connect the input end of a polarization spectroscope 8, a direct Output of laser of output terminal of a polarization spectroscope 8, another output terminal connects a catoptron 9, second output terminal of described optical splitter 6 connects semiconductor laser 10 input ends, and the output terminal of semiconductor laser 10 connects the input end of a polaroid 11;
The structure of described laser shift frequency unit 2 is: the input end of a half-wave plate 12 connects the output terminal of a polarization spectroscope 8, the output terminal of a half-wave plate 12 connects the input end of No. two polarization spectroscopes 13, an output terminal of No. two polarization spectroscopes 13 connects the input end of No. two catoptrons 14, another output terminal of No. two polarization spectroscopes 13 connects an input end of laser splicer 21, the output terminal of No. two catoptrons 14 connects an input end of a laser frequency shifter 15, the output terminal of a DDS signal source 16 connects another input end of a laser frequency shifter 15, the output terminal of a laser frequency shifter 15 connects an input end of laser splicer 21, the input end of spectroscope 17 connects the output terminal of a catoptron 9, an output terminal of spectroscope 17 connects the input end of No. three catoptrons 18, another output terminal of spectroscope 17 connects an input end of laser splicer 21, the output terminal of No. three catoptrons 18 connects an input end of No. two laser frequency shifters 19, another input end of No. two laser frequency shifters 19 connects the output terminal of No. two DDS signal sources 20, the output terminal of No. two laser frequency shifters 19 connects an input end of laser splicer 21.An input end of described laser splicer 21 connects the output terminal of a polaroid 11;
The structure of described anti-aliasing optical path 3 is: No. two spectroscopes 24 of reference laser light beam 22 directive, through No. two spectroscope 24 reflections, enter prism of corner cube 25 and form laser beam a 22-1, through No. two spectroscope 24 transmissions, enter reference prism 27 and form laser beam b 22-2, laser beam a 22-1 reflects back into spectroscope 24 No. two by prism of corner cube 25, through No. two spectroscope 24 transmissions, form laser beam c 22-3 again, reflect to form laser beam d 22-4, laser beam b 22-2 reflects back into spectroscope 24 No. two by reference prism 27, through No. two spectroscope 24 transmissions, form laser beam e 22-5 again, reflect to form laser beam f 22-6, described No. two spectroscopes 24 of measuring laser beam 23 directive, through No. two spectroscope 24 transmissions, enter measuring prism 26 and form laser beam g 23-1, reflection enters a bugle cone prism 25 and forms laser beam h23-2, laser beam f23-1 enters spectroscope 24 No. two through measuring prism 26 reflections, through No. two spectroscope 24 transmissions, form laser beam j 23-4 again, reflect to form laser beam i 23-3, laser beam h 23-2 enters spectroscope 24 No. two through prism of corner cube 25 reflections, through No. two spectroscope 24 transmissions, form laser beam l 23-6 again, reflect to form laser beam k 23-5, described laser beam c 22-3 overlaps with laser beam i 23-3, and through No. two polaroids 29, enter the input end of a photelectric receiver 28, described laser beam d 22-4 overlaps with laser beam j 23-4, and through No. three polaroids 30, enter the input end of No. two photelectric receivers 31, described laser beam e 22-5 overlaps with laser beam k 23-5, and through No. four polaroids 32, enter the input end of No. three photelectric receivers 33, described laser beam f 22-6 overlaps with laser beam l 23-6, and through No. five polaroids 34, enter the input end of No. four photelectric receivers 35,
The structure of described phase measurement unit 4 is: the output terminal of a photelectric receiver 28 and No. four photelectric receivers 35 is connected with the input end of No. two low-pass filters 37 with a low-pass filter 36 respectively, the defeated output terminal of a low-pass filter 36 and No. two low-pass filters 37 is connected with the input end that is connected frequency mixer 40, the output terminal of frequency mixer 40 connects the input end of phase measurement meter 41, No. two photelectric receiver 31 is connected with the input end of No. four low-pass filters 39 with No. three low-pass filters 38 respectively with No. four photelectric receivers 35, the output terminal of No. three low-pass filters 38 and No. four low-pass filters 39 is connected with the input end of phase measurement meter 41.
One, No. two laser frequency shifter 15,19 of described laser shift frequency unit 2 comprises acousto-optic frequency shifters, electro-optic frequency translation device, and travel frequency can regulate.
In described survey chi generation unit 1, He-Ne laser instrument 7 and semiconductor laser 10 are the rrequency-offset-lock laser instrument based on frequency reference laser instrument.
Described survey chi generation unit 1 medium frequency benchmark laser 5 comprises iodine stabilized laser, femtosecond laser frequency comb laser instrument, and frequency stability is better than 10
-12.
A kind of two light source laser distance measurement method concrete steps of the same pacing chi of tracing to the source of anti-multifrequency aliasing are as follows:
Step 1, open frequency benchmark laser 5, He-Ne laser instrument 7, semiconductor laser 10, after through preheating and frequency stabilization, within semiconductor laser 10 and He-Ne laser instrument 7 are locked in the certain frequency scope of frequency reference laser instrument 5 by FEEDBACK CONTROL by output frequency, the laser sending from He-Ne laser instrument 7 is divided into frequency and is after polarization spectroscope
v 2horizontal polarization direction laser and frequency are
v 3vertical polarization laser, the rrequency-offset-lock laser sending from semiconductor laser 10 after polaroid only surplus frequency be
v 1vertical polarization laser;
Step 2, by the formed three beams of laser of step 1, enter laser shift frequency unit 2, its medium frequency is
v 2laser beam, after half-wave plate and No. two polarization spectroscopes 13, separate the two mutually perpendicular laser in bundle polarization direction, wherein a road is through laser frequency shifter, by DDS signal source driving laser frequency shifter, shift frequency frequency is
f 1, another road is shift frequency not, and frequency is
v 3laser after spectroscope, be also divided into two-way one tunnel through laser frequency shifter, shift frequency frequency is
f 2, frequency is
v 1laser straight tap into into laser splicer 21, the laser of last various frequencies has five kinds of frequencies, is respectively
v 2,
v 3,
v 1,
v 2+
f 1with
v 3+
f 2, through the part of laser splicer 21, close light, by frequency, be
v 2+
f 1with
v 3+
f 2laser synthetic a branch of, form reference laser light beam 22, frequency is
v 2,
v 3,
v 1the synthetic measuring laser beam 23 of laser, and shine respectively anti-aliasing optical path;
Step 3, reference laser light beam 22 are divided into laser beam a 22-1 and laser beam b 22-2 through No. two spectroscopes 24, measuring laser beam 23 is divided into laser beam g 23-1 and laser beam h 23-2 through No. two spectroscopes 24, laser beam b 22-2 and laser beam h 23-2 are respectively after prism of corner cube 25 and reference prism 27 reflections, a bit joining on No. two spectroscope 24 light splitting surfaces forms two beam interferometer light beams, wherein light beam through polarization direction with
v 1become 45 No. four polaroids 32 of spending to enter No. three photodetectors 33 and carry out opto-electronic conversion, then by the electric signal that obtains after No. four low-pass filters 39 comprising accurate measurement chi signal phase information, its frequency is
f 1-
f 2, corresponding survey chi length is
, another light beam through polarization direction with
v 1after identical No. five polaroids (34), obtain frequency and be
v 1,
v 2the laser of horizontal polarization direction, then enter into No. four photodetectors (35) and carry out opto-electronic conversion, the frequency of the electric signal obtaining its output electrical signals after No. two low-pass filters is
v 1-
v 2, corresponding survey chi length is
;
When step 4, measurement start, reference prism 27 maintains static, traverse measurement prism 26 is to destination end, measuring distance is L, laser beam g 23-1 is after measuring prism 26 reflections, at another some place of No. two spectroscopes 24, converge formation interfering beam with laser beam a 22-1, then form two beam interferometer laser through spectroscope light splitting, wherein a branch of through polarization direction with
v 1become 45 No. three polaroids 30 of spending to enter No. two photodetectors 31 and carry out opto-electronic conversion, then by the electric signal that obtains after No. three low-pass filters 38 comprising accurate measurement chi signal phase information, its frequency is
f 1-
f 2, corresponding survey chi length is
, another light beam through polarization direction with
v 1after No. two identical polaroids 29, obtain frequency and be
v 1,
v 2the laser of horizontal polarization direction, then enter into a photelectric receiver 28 and carry out opto-electronic conversion, the frequency of the electric signal obtaining its output electrical signals after a low-pass filter 26 is
v 1-
v 2, corresponding survey chi length is
;
Step 5, by frequency, be
v 1-
v 2two signals access frequency mixer 40, reduce the frequency of two signals, then send into phase measurement meter 41, obtain the phase differential of two frequencies
Φ 1, by frequency, be
f 1-
f 2electric signal send into phase measurement meter 41 and survey phase, obtain the phase differential of two signals
Φ 2, according to formula
try to achieve the distance measure of bigness scale chi
l c , and its substitution formula is tried to achieve to the phase place round values of accurate measurement chi
;
floor(
x) function returns
xthe integral part of value, finally according to formula, try to achieve tested distance value:
, in formula: c is the light velocity, the air refraction that n is environment.
Described two path signal phase differential
Φ 1with phase differential
Φ 2measurement at synchronization, carry out.
Described laser frequency
v 1,
v 2,
v 3can trace to the source to iodine frequency stabilization frequency reference source.
Claims (7)
1. the two light source laser ranging systems of the same pacing chi of tracing to the source of an anti-multifrequency aliasing, it is characterized in that: described device forms by surveying chi generation unit (1), laser shift frequency unit (2), anti-aliasing optical path (3) and phase measurement unit (4), wherein survey Laser output that chi generation unit (1) sends to the input end of laser shift frequency unit (2), output reference laser light beam (22) and the measuring laser beam (23) of laser shift frequency unit (2) output to anti-aliasing optical path (3), the output signal I of anti-aliasing optical path (3)
3, I
4, I
5, I
6be input to respectively phase measurement unit (4);
The structure of described survey chi generation unit (1) is: the laser beam of frequency reference laser instrument (5) transmitting arrives the input end of optical splitter (6), first output terminal of optical splitter (6) connects He-Ne laser instrument (7) input end, He-Ne laser instrument (7) output terminal connects the input end of a polarization spectroscope (8), a direct Output of laser of output terminal of a polarization spectroscope (8), another output terminal connects a catoptron (9), second output terminal of described optical splitter (6) connects semiconductor laser (10) input end, the output terminal of semiconductor laser (10) connects the input end of a polaroid (11),
The structure of described laser shift frequency unit (2) is: the input end of a half-wave plate (12) connects the output terminal of a polarization spectroscope (8), the output terminal of a half-wave plate (12) connects the input end of No. two polarization spectroscopes (13), an output terminal of No. two polarization spectroscopes (13) connects the input end of No. two catoptrons (14), another output terminal of No. two polarization spectroscopes (13) connects an input end of laser splicer (21), the output terminal of No. two catoptrons (14) connects an input end of a laser frequency shifter (15), the output terminal of a DDS signal source (16) connects another input end of a laser frequency shifter (15), the output terminal of a laser frequency shifter (15) connects an input end of laser splicer (21), the input end of spectroscope (17) connects the output terminal of a catoptron (9), an output terminal of spectroscope (17) connects the input end of No. three catoptrons (18), another output terminal of spectroscope (17) connects an input end of laser splicer (21), the output terminal of No. three catoptrons (18) connects an input end of No. two laser frequency shifters (19), another input end of No. two laser frequency shifters (19) connects the output terminal of No. two DDS signal sources (20), the output terminal of No. two laser frequency shifters (19) connects an input end of laser splicer (21), an input end of laser splicer (21) connects the output terminal of a polaroid (11),
The structure of described anti-aliasing optical path (3) is: reference laser light beam (22) No. two spectroscopes of directive (24), through No. two spectroscopes (24) reflection, enter prism of corner cube (25) and form laser beam a(22-1), through No. two spectroscopes (24) transmission, enter reference prism (27) and form laser beam b(22-2), laser beam a(22-1) by prism of corner cube (25), reflect back into No. two spectroscopes (24), through No. two spectroscopes (24) transmission, form laser beam c(22-3 again), reflect to form laser beam d(22-4), laser beam b(22-2) by reference prism (27), reflect back into No. two spectroscopes (24), through No. two spectroscopes (24) transmission, form laser beam e(22-5 again), reflect to form laser beam f(22-6), described measuring laser beam (23) No. two spectroscopes of directive (24), through No. two spectroscopes (24) transmission, enter measuring prism (26) and form laser beam g(23-1), reflection enters a bugle cone prism (25) and forms laser beam h(23-2), laser beam f(23-1) through measuring prism (26) reflection, enter No. two spectroscopes (24), through No. two spectroscopes (24) transmission, form laser beam j(23-4 again), reflect to form laser beam i(23-3), laser beam h(23-2) through prism of corner cube (25) reflection, enter No. two spectroscopes (24), through No. two spectroscopes (24) transmission, form laser beam l(23-6 again), reflect to form laser beam k(23-5), described laser beam c(22-3) with laser beam i(23-3) overlap, and enter the input end of a photelectric receiver (28) through No. two polaroids (29), described laser beam d(22-4) with laser beam j(23-4) overlap, and enter the input end of No. two photelectric receivers (31) through No. three polaroids (30), described laser beam e(22-5) with laser beam k(23-5) overlap, and enter the input end of No. three photelectric receivers (33) through No. four polaroids (32), described laser beam f(22-6) with laser beam l(23-6) overlap, and enter the input end of No. four photelectric receivers (35) through No. five polaroids (34),
The structure of described phase measurement unit (4) is: the output terminal of a photelectric receiver (28) and No. four photelectric receivers (35) is connected with the input end of No. two low-pass filters (37) with a low-pass filter (36) respectively, the defeated output terminal of a low-pass filter (36) and No. two low-pass filters (37) is connected with the input end that is connected frequency mixer (40), the output terminal of frequency mixer (40) connects the input end of phase measurement meter (41), No. two photelectric receivers (31) are connected with the input end of No. four low-pass filters (39) with No. three low-pass filters (38) respectively with No. four photelectric receivers (35), the output terminal of No. three low-pass filters (38) and No. four low-pass filters (39) is connected with the input end of phase measurement meter (41).
2. the two light source laser ranging systems of the same pacing chi of tracing to the source of anti-multifrequency aliasing according to claim 1, it is characterized in that: one, No. two laser frequency shifter (15,19) of described laser shift frequency unit (2) comprises acousto-optic frequency shifters, electro-optic frequency translation device, and travel frequency can regulate.
3. the two light source laser ranging systems of the same pacing chi of tracing to the source of anti-multifrequency aliasing according to claim 1, is characterized in that: in described survey chi generation unit (1), He-Ne laser instrument (7) and semiconductor laser (10) are the rrequency-offset-lock laser instrument based on frequency reference laser instrument.
4. the two light source laser ranging systems of the same pacing chi of tracing to the source of anti-multifrequency aliasing according to claim 1, it is characterized in that: described survey chi generation unit (1) medium frequency benchmark laser (5) comprises iodine stabilized laser, femtosecond laser frequency comb laser instrument, and frequency stability is better than 10
-12.
5. two light source laser distance measurement methods of the same pacing chi of tracing to the source of anti-multifrequency aliasing as claimed in claim 1, is characterized in that: concrete steps are as follows:
Step 1, open frequency benchmark laser (5), He-Ne laser instrument (7), semiconductor laser (10), after through preheating and frequency stabilization, within semiconductor laser (10) and He-Ne laser instrument (7) are locked in the certain frequency scope of frequency reference laser instrument (5) by FEEDBACK CONTROL by output frequency, the laser sending from He-Ne laser instrument (7) is divided into frequency and is after polarization spectroscope
v 2horizontal polarization direction laser and frequency are
v 3vertical polarization laser, the rrequency-offset-lock laser sending from semiconductor laser (10) after polaroid only surplus frequency be
v 1vertical polarization laser;
Step 2, by the formed three beams of laser of step 1, enter laser shift frequency unit (2), its medium frequency is
v 2laser beam, after half-wave plate and No. two polarization spectroscopes (13), separate the two mutually perpendicular laser in bundle polarization direction, wherein a road is through laser frequency shifter, by DDS signal source driving laser frequency shifter, shift frequency frequency is
f 1, another road is shift frequency not, and frequency is
v 3laser after spectroscope, be also divided into two-way one tunnel through laser frequency shifter, shift frequency frequency is
f 2, frequency is
v 1laser straight tap into into laser splicer (21), the laser of last various frequencies has five kinds of frequencies, is respectively
v 2,
v 3,
v 1,
v 2+
f 1with
v 3+
f 2, through the part of laser splicer (21), close light, by frequency, be
v 2+
f 1with
v 3+
f 2laser synthetic a branch of, form reference laser light beam (22), frequency is
v 2,
v 3,
v 1the synthetic measuring laser beam (23) of laser, and shine respectively anti-aliasing optical path;
Step 3, reference laser light beam (22) are divided into laser beam a(22-1 through No. two spectroscopes (24)) and laser beam b(22-2), measuring laser beam (23) is divided into laser beam g(23-1 through No. two spectroscopes (24)) and laser beam h(23-2), laser beam b(22-2) with laser beam h(23-2) respectively after prism of corner cube (25) and reference prism (27) reflection, a bit joining on No. two spectroscopes (24) light splitting surface forms two beam interferometer light beams, wherein light beam through polarization direction with
v 1become 45 No. four polaroids (32) of spending to enter No. three photodetectors (33) and carry out opto-electronic conversion, then by the electric signal that obtains after No. four low-pass filters (39) comprising accurate measurement chi signal phase information, its frequency is
f 1-
f 2, corresponding survey chi length is
, another light beam through polarization direction with
v 1after identical No. five polaroids (34), obtain frequency and be
v 1,
v 2the laser of horizontal polarization direction, then enter into No. four photodetectors (35) and carry out opto-electronic conversion, the frequency of the electric signal obtaining its output electrical signals after No. two low-pass filters is
v 1-
v 2, corresponding survey chi length is
;
When step 4, measurement start, reference prism (27) maintains static, traverse measurement prism (26) is to destination end, measuring distance is L, laser beam g(23-1) after measuring prism (26) reflection, with laser beam a(22-1) at another some place of No. two spectroscopes (24), converge formation interfering beam, then form two beam interferometer laser through spectroscope light splitting, wherein a branch of through polarization direction with
v 1become 45 No. three polaroids (30) of spending to enter No. two photodetectors (31) and carry out opto-electronic conversion, then by the electric signal that obtains after No. three low-pass filters (38) comprising accurate measurement chi signal phase information, its frequency is
f 1-
f 2, corresponding survey chi length is
, another light beam through polarization direction with
v 1after identical No. two polaroids (29), obtain frequency and be
v 1,
v 2the laser of horizontal polarization direction, then enter into a photelectric receiver (28) and carry out opto-electronic conversion, the frequency of the electric signal obtaining its output electrical signals after a low-pass filter (26) is
v 1-
v 2, corresponding survey chi length is
;
Step 5, by frequency, be
v 1-
v 2two signals access frequency mixer (40), reduce the frequency of two signals, then send into phase measurement meter (41), obtain the phase differential of two frequencies
Φ 1, by frequency, be
f 1-
f 2electric signal send into phase measurement meter (41) and survey phase, obtain the phase differential of two signals
Φ 2, according to formula
try to achieve the distance measure of bigness scale chi
l c , and its substitution formula is tried to achieve to the phase place round values of accurate measurement chi
;
floor(
x) function returns
xthe integral part of value, finally according to formula, try to achieve tested distance value:
, in formula: c is the light velocity, the air refraction that n is environment.
6. the two light source laser distance measurement methods of the same pacing chi of tracing to the source of anti-multifrequency aliasing according to claim 5, is characterized in that: described two path signal phase differential
Φ 1with phase differential
Φ 2measurement at synchronization, carry out.
7. the two light source laser distance measurement methods of the same pacing chi of tracing to the source of anti-multifrequency aliasing according to claim 5, is characterized in that: described laser frequency
v 1,
v 2,
v 3can trace to the source to iodine frequency stabilization frequency reference source.
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