CN104019764A - Calibration method for scanning type surface shape measurement optical system of 2*2 array light source - Google Patents
Calibration method for scanning type surface shape measurement optical system of 2*2 array light source Download PDFInfo
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- CN104019764A CN104019764A CN201410279851.4A CN201410279851A CN104019764A CN 104019764 A CN104019764 A CN 104019764A CN 201410279851 A CN201410279851 A CN 201410279851A CN 104019764 A CN104019764 A CN 104019764A
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Abstract
The invention discloses a calibration device and method for a scanning type surface shape measurement optical system of a 2*2 array light source. The calibration method is characterized by comprising the following steps that the scanning type surface shape measurement optical system and a calibration platform are assembled; a laser (1) is started, and four beams of parallel light are projected to the calibration platform; the calibration platform is adjusted; the single drive step number of the laser (1) is set according to the total drive step number; CCD data-in-line collection is finished; CCD imaging all-region line and column data collection is finished; calibration of an angle within a dynamic test range of the optical system is finished. The calibration method has the remarkable advantages that the measurement efficiency of an original system can be improved while a system structure is simplified, and the capacity of surface shape on-line detection is further improved.
Description
Technical field
The invention belongs to machine vision technique detection field, be specifically related to a kind of 2 * 2 array light source scan-type surface shape measurement optical system scaling methods.
Background technology
Improving at present 2 * 2 scan-type surface shape measurement optical system measuring method methods has: Light path correction method and system calibrating method.Light path correction method, by add light beam fine adjustment stage in light path, is revised incident angle of light skew in scanning process, and reference light Neng Yanyuan road is returned, and the method has formed patent of invention.
But these class methods all increase micro-adjusting mechanism, in use, the error of micro-adjusting mechanism itself and use, also easily cause measuring error, reduced optical system and counted surface shape measurement and fitting precision.
Summary of the invention
This object of the present invention relates generally to a kind of array light source scan-type surface shape measurement optical system scaling method, its design utilizes 2 * 2 array image-forming points mutually with reference to demarcating and obtain the nonlinearity erron that optical system tested object partial face shape graded is introduced with self-reference principle, to the correction of full field range measurement data, thereby improve optical system, count surface shape measurement and fitting precision.
For achieving the above object, the present invention explains a kind of 2 * 2 array light source scan-type surface shape measurement optical system scaling methods, it is characterized in that comprising the following steps:
Step 1, after assembling scan-type surface shape measurement optical system, on the emitting light path of scan-type surface shape measurement optical system, arrange calibrating platform, the directional light Yan Yuan road reflected in parallel that this calibrating platform can penetrate scan-type surface shape measurement optical system is returned described scan-type surface shape measurement optical system;
Step 2, start the laser instrument (1) in described scan-type surface shape measurement optical system, preheating 30 minutes, the light that laser instrument (1) sends collimates through colimated light system (2) successively, then by spectroscope (3), entering beam-expanding system (4) expands, wedge mirror group (5) is divided into four bundle directional lights by the light beam after expanding and penetrates from scan-type surface shape measurement optical system, and invests described calibrating platform;
Step 3, adjust the precise 2-D beat platform (8) on described calibrating platform, the fixture (7) being fixed on precise 2-D beat platform (8) moves thereupon, make the catoptron (6) of fixture (7) clamping vertical with scan-type surface shape measurement optical system, catoptron (6) reflection four bundle directional lights are successively by after wedge mirror group (5) and beam-expanding system (4), after spectroscope (3) is refracted to pentaprism (9), again by imaging len (10) in the upper imaging of CCD (11), in the image of observing at CCD (11), four hot spots are positioned at the center of image;
Step 4, according to the field angle scope of scan-type surface shape measurement optical system, set the driving step number of calibrating platform; According to driving the needed fine degree of step number, set the single actuations step number of laser instrument (1) in scan-type surface shape measurement optical system;
Drive step number to refer to that CCD gathers the step number of the required driving of a row or column data, single actuations step number can be set as 1～3 pixel, the pixel of single actuations step number is fewer, and fine degree is higher, and fine degree correspondence the single actuations step number of a pixel.
Step 5, determine that any one in four hot spots is for reference to hot spot, drive the piezoelectric ceramics mechanism on precise 2-D beat platform (8), make to change with reference to facula position, record, with reference to facula position and four facula position relative variations, completes the collection of CCD data line;
Step 6, repeating step three, to step 5, complete the region-wide row, column data acquisition of CCD imaging, according to imaging facula position and relativeness, can realize the angle calibration in scan-type surface shape measurement optical system test dynamic range.
Described angle calibration is the result according to image imaging, and take the center of that hot spot of the left side on every width image is reference, calculates the center of other three hot spots and relation with reference to hot spot center, can use formula (1a) and (1b) expression:
Δx
ni＝x
ni-x
n1-Δx
i0-----------------------------(1a)
Δy
ni＝y
ni-y
n1-Δy
i0-----------------------------(1b)
I=2,3,4 in formula, in presentation video except other three hot spots with reference to hot spot, Δ x
i0represent under perfect condition i hot spot x coordinate and with reference to hot spot x coordinate difference, Δ y
i0represent under perfect condition i hot spot y coordinate with reference to hot spot y coordinate difference, n=1,2,3..., expression n width image, x
n1represent in n width image the x coordinate with reference to hot spot, y
n1represent in n width image the y coordinate with reference to hot spot, x
nirepresent in n width image except the x coordinate with reference to other hot spots hot spot, y
nirepresent in n width image except the y coordinate with reference to other hot spots hot spot Δ x
nirepresent in n width image i hot spot x coordinate and poor modified value with reference to hot spot x coordinate, Δ y
nirepresent in n width image i hot spot y coordinate and poor modified value with reference to hot spot y coordinate;
After handling, with the x coordinate of every width image reference hot spot, be transverse axis, y coordinate is the longitudinal axis, and the modified value that processing is obtained is made correction card, for table look-up when measuring correction or interpolation calculation correction.
Remarkable result of the present invention is: the reason that system calibrating method produces by error in analysis scan formula face shape test process, show that system accuracy becomes the conclusion of nonlinear function with tested object partial face shape gradient, for 2 * 2 array scanning formula scan modes, mutual reference and self-reference scaling method have been proposed, and design its special calibrating device, realized optical system test specification overall situation Accurate Calibration.Therefore can when measuring, to test data, revise, improve the precision of systematic survey.
The method, in simplied system structure, can improve the measurement efficiency of original system, further improves the online ability detecting of surperficial face shape.
Accompanying drawing explanation
Fig. 1 is demarcation schematic diagram of the present invention;
Fig. 2 is imaging facula distribution schematic diagram;
Fig. 3 is method step figure of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail.
As shown in Figure 3: a kind of 2 * 2 array light source scan-type surface shape measurement optical system scaling methods, is characterized in that comprising the following steps:
Step 1, after assembling scan-type surface shape measurement optical system, on the emitting light path of scan-type surface shape measurement optical system, arrange calibrating platform, the directional light Yan Yuan road reflected in parallel that this calibrating platform can penetrate scan-type surface shape measurement optical system is returned described scan-type surface shape measurement optical system;
Step 2, start the laser instrument 1 in described scan-type surface shape measurement optical system, preheating 30 minutes, the light that laser instrument 1 sends is successively through colimated light system 2 collimations, then by spectroscope 3, entering beam-expanding system 4 expands, wedge mirror group 5 is divided into four bundle directional lights by the light beam after expanding and penetrates from scan-type surface shape measurement optical system, and invests described calibrating platform;
Step 3, adjust the precise 2-D beat platform 8 on described calibrating platform, the fixture 7 being fixed on precise 2-D beat platform 8 moves thereupon, make the catoptron 6 of fixture 7 clampings vertical with scan-type surface shape measurement optical system, catoptron 6 reflection four bundle directional lights are successively by after wedge mirror group 5 and beam-expanding system 4, after spectroscope 3 is refracted to pentaprism 9, again by imaging len 10 imaging on CCD11, in the image of observing at CCD11, four hot spots are positioned at the center of image;
Step 4, according to the field angle scope of scan-type surface shape measurement optical system, set the driving step number of calibrating platform; According to driving the needed fine degree of step number, set the single actuations step number of laser instrument 1 in scan-type surface shape measurement optical system;
Step 5, determine that any one in four hot spots is for reference to hot spot, drive the piezoelectric ceramics mechanism on precise 2-D beat platform 8, make to change with reference to facula position, record, with reference to facula position and four facula position relative variations, completes the collection of CCD data line;
Step 6, repeating step three, to step 5, complete the region-wide row, column data acquisition of CCD imaging, realize the angle calibration in scan-type surface shape measurement optical system test dynamic range.
Described angle calibration is the result according to image imaging, and take the center of that hot spot of the left side on every width image is reference, calculates the center of other three hot spots and relation with reference to hot spot center, can represent with formula 1a and 1b:
Δx
ni＝x
ni-x
n1-Δx
i0-----------------------------1a
Δy
ni＝y
ni-y
n1-Δy
i0-----------------------------1b
I=2,3,4 in formula, in presentation video except other three hot spots with reference to hot spot, Δ x
i0represent under perfect condition i hot spot x coordinate and with reference to hot spot x coordinate difference, Δ y
i0represent under perfect condition i hot spot y coordinate with reference to hot spot y coordinate difference, n=1,2,3..., expression n width image, x
n1represent in n width image the x coordinate with reference to hot spot, y
n1represent in n width image the y coordinate with reference to hot spot, x
nirepresent in n width image except the x coordinate with reference to other hot spots hot spot, y
nirepresent in n width image except the y coordinate with reference to other hot spots hot spot Δ x
nirepresent in n width image i hot spot x coordinate and poor modified value with reference to hot spot x coordinate, Δ y
nirepresent in n width image i hot spot y coordinate and poor modified value with reference to hot spot y coordinate;
After handling, with the x coordinate of every width image reference hot spot, be transverse axis, y coordinate is the longitudinal axis, and the modified value that processing is obtained is made correction card, for table look-up when measuring correction or interpolation calculation correction.
Correction card is as follows:
Error correction:
In the process of tested planar optical elements being measured in scan-type surface shape measurement optical system, according to the position enquiring correction card of first hot spot, if the center of first hot spot does not have at correction card, carry out interpolation calculation.Obtain the optical system error value in this width image and the center of other three hot spots is revised, with the center calculating measured point direction of normal of revised 4 hot spots and obtain the face shape of tested planar optical elements by the reconstruct of face shape.
Claims (2)
1. 2 * 2 array light source scan-type surface shape measurement optical system scaling methods, is characterized in that comprising the following steps:
Step 1, after assembling scan-type surface shape measurement optical system, on the emitting light path of scan-type surface shape measurement optical system, arrange calibrating platform, the directional light Yan Yuan road reflected in parallel that this calibrating platform can penetrate scan-type surface shape measurement optical system is returned described scan-type surface shape measurement optical system;
Step 2, start the laser instrument (1) in described scan-type surface shape measurement optical system, preheating 30 minutes, the light that laser instrument (1) sends collimates through colimated light system (2) successively, then by spectroscope (3), entering beam-expanding system (4) expands, wedge mirror group (5) is divided into four bundle directional lights by the light beam after expanding and penetrates from scan-type surface shape measurement optical system, and invests described calibrating platform;
Step 3, adjust the precise 2-D beat platform (8) on described calibrating platform, the fixture (7) being fixed on precise 2-D beat platform (8) moves thereupon, make the catoptron (6) of fixture (7) clamping vertical with scan-type surface shape measurement optical system, catoptron (6) reflection four bundle directional lights are successively by after wedge mirror group (5) and beam-expanding system (4), after spectroscope (3) is refracted to pentaprism (9), again by imaging len (10) in the upper imaging of CCD (11), in the image of observing at CCD (11), four hot spots are positioned at the center of image;
Step 4, according to the field angle scope of scan-type surface shape measurement optical system, set the driving step number of calibrating platform; According to driving the needed fine degree of step number, set the single actuations step number of laser instrument (1) in scan-type surface shape measurement optical system;
Step 5, determine that any one in four hot spots is for reference to hot spot, drive the piezoelectric ceramics mechanism on precise 2-D beat platform (8), make to change with reference to facula position, record, with reference to facula position and four facula position relative variations, completes the collection of CCD data line;
Step 6, repeating step three, to step 5, complete the region-wide row, column data acquisition of CCD imaging, realize the angle calibration in scan-type surface shape measurement optical system test dynamic range.
2. 2 * 2 array light source scan-type surface shape measurement optical system scaling methods according to claim 1, it is characterized in that: described angle calibration is the result according to image imaging, take the center of that hot spot of the left side on every width image is reference, the center of calculating other three hot spots and relation with reference to hot spot center, can use formula (1a) and (1b) expression:
Δx
ni＝x
ni-x
n1-Δx
i0-----------------------------(1a)
Δy
ni＝y
ni-y
n1-Δy
i0-----------------------------(1b)
I=2,3,4 in formula, in presentation video except other three hot spots with reference to hot spot, Δ x
i0represent under perfect condition i hot spot x coordinate and with reference to hot spot x coordinate difference, Δ y
i0represent under perfect condition i hot spot y coordinate with reference to hot spot y coordinate difference, n=1,2,3..., expression n width image, x
n1represent in n width image the x coordinate with reference to hot spot, y
n1represent in n width image the y coordinate with reference to hot spot, x
nirepresent in n width image except the x coordinate with reference to other hot spots hot spot, y
nirepresent in n width image except the y coordinate with reference to other hot spots hot spot Δ x
nirepresent in n width image i hot spot x coordinate and poor modified value with reference to hot spot x coordinate, Δ y
nirepresent in n width image i hot spot y coordinate and poor modified value with reference to hot spot y coordinate;
After handling, with the x coordinate of every width image reference hot spot, be transverse axis, y coordinate is the longitudinal axis, and the modified value that processing is obtained is made correction card, for table look-up when measuring correction or interpolation calculation correction.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109696121A (en) * | 2019-02-25 | 2019-04-30 | 天津工业大学 | A kind of quick calibration method based on laser interferometer light path |
Citations (4)
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|---|---|---|---|---|
| EP1371939A1 (en) * | 2002-05-15 | 2003-12-17 | Icos Vision Systems N.V. | A device for measuring in three dimensions a topographical shape of an object |
| JP2008256464A (en) * | 2007-04-03 | 2008-10-23 | Nikon Corp | Measurement apparatus |
| CN102322820A (en) * | 2011-09-14 | 2012-01-18 | 西南科技大学 | Automatic separation method for front and rear surface reflected light spots in surface shape detection system |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
-
2014
- 2014-06-20 CN CN201410279851.4A patent/CN104019764B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1371939A1 (en) * | 2002-05-15 | 2003-12-17 | Icos Vision Systems N.V. | A device for measuring in three dimensions a topographical shape of an object |
| JP2008256464A (en) * | 2007-04-03 | 2008-10-23 | Nikon Corp | Measurement apparatus |
| CN102322820A (en) * | 2011-09-14 | 2012-01-18 | 西南科技大学 | Automatic separation method for front and rear surface reflected light spots in surface shape detection system |
| CN103245303A (en) * | 2013-05-17 | 2013-08-14 | 中国工程物理研究院激光聚变研究中心 | Multi-pose large-caliber plane optical element surface shape detecting device and method |
Non-Patent Citations (1)
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| 程晓锋等: "基于高分辨力CCD的大口径光学元件疵病检测", 《强激光与粒子束》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109696121A (en) * | 2019-02-25 | 2019-04-30 | 天津工业大学 | A kind of quick calibration method based on laser interferometer light path |
| CN109696121B (en) * | 2019-02-25 | 2020-07-17 | 天津工业大学 | Rapid calibration method based on laser interferometer detection light path |
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