CN103988290B - Work piece processing system and workpiece processing recipe - Google Patents
Work piece processing system and workpiece processing recipe Download PDFInfo
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- CN103988290B CN103988290B CN201280059757.7A CN201280059757A CN103988290B CN 103988290 B CN103988290 B CN 103988290B CN 201280059757 A CN201280059757 A CN 201280059757A CN 103988290 B CN103988290 B CN 103988290B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67213—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one ion or electron beam chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
- B65G47/918—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with at least two picking-up heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/04—Detection means
- B65G2203/041—Camera
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
One embodiment of this Work piece processing system includes conveyer belt and loading interlock region, and the first exchange mechanical arm is held and conveying work pieces between platform and loading interlock region building, and rack mechanical arm exchanges conveying work pieces between mechanical arm in each conveyer belt with first.In one example, using rack mechanical arm, finished work is sent to first conveyer belt from the first exchange mechanical arm, and unprocessed workpiece is sent to the first exchange mechanical arm from the second conveyer belt.Second switch tool arm can be used for loading from loading interlock region and unload workpiece together with the first exchange mechanical arm.
Description
Technical field
The present invention relates to a kind of processing of workpiece, and more particularly to a kind of workpiece processing of high yield application.
Background technology
Ionic-implantation is a kind of standard technique for being used to the impurity for changing electric conductivity being introduced into workpiece.In an ion source
Desired impurity material is ionized, ion is accelerated to form the ion beam of tool predetermined energy, and ion beam is oriented into workpiece
Surface at.Energetic ion in ion beam is penetrated in workpiece material main body, and is imbedded in the lattice of workpiece material to form tool
Want the region of electric conductivity.
Yield is manufacturing two main points of solar cell with battery efficiency, and battery efficiency is to measure energy conversion into electricity
The amount of energy, higher battery efficiency are necessary to tool competitiveness.However, yield can not be sacrificed by improving the cost of battery efficiency.
Ionic-implantation is had proven to adulterate the feasible method of solar cell.The utilization of ionic-implantation eliminates now
The fabrication steps of such as diffusion furnace needed for technology, yield can be lifted and reduce cost.Such as because ionic-implantation only adulterates
Desired surface, if spread using ionic-implantation instead of stove, Laser edge separating step can be saved.Except saving processing procedure step
It is rapid outer, have proven to can reach higher battery efficiency using ionic-implantation.Ionic-implantation also can be to solar cell
Whole surface carries out code-pattern implantation (blanket implant), or only carries out selectivity or figure to the solar cell of part
Caseization is implanted into.The high price for stove diffusion and time-consuming lithographic can be avoided by being selectively implanting method using the high yield of ionic-implantation
Or patterning step.Any improvement for the yield of ion implanter or its reliability would be beneficial for global solar energy system
The person of making, applied solar energy battery can be accelerated as alternative energy source.
The content of the invention
According to the first aspect of the invention, there is provided a kind of Work piece processing system.This system includes multiple conveyer belts and added
Carry interlock region (load lock)；First exchange mechanical arm (robot) holds multiple workpiece, and is building platform and loading interlock region
Between transmit multiple workpiece；Each of rack mechanical arm in multiple conveyer belts exchanged with first transmit between mechanical arm it is multiple
Workpiece.
According to the second aspect of the invention, there is provided a kind of workpiece processing recipe.The method includes：Will using rack mechanical arm
Multiple finished works are sent to first conveyer belt from mechanical arm is exchanged, wherein exchanging mechanical arm includes multiple row finished work；
Multiple unprocessed workpieces are sent to exchange mechanical arm from the second conveyer belt followed by rack mechanical arm；Then repeatedly transmit
Workpieces processing and unprocessed workpiece, until unprocessed workpiece has been substituted all finished works on interchanger tool arm.
According to the third aspect of the invention we, there is provided a kind of workpiece processing recipe.The method includes：When second switch tool arm
When under the first exchange mechanical arm, multiple unprocessed workpieces are carried on the first exchange mechanical arm；Then when first hands over
When changing mechanical arm outside loading interlock region, second switch tool arm is moved into loading interlock region, by multiple machined works
Part is loaded on the second switch tool arm；Then second switch tool arm and multiple machined works are removed from loading interlock region
Part；Then when second switch tool arm is outside loading interlock region, first is exchanged in mechanical arm shift-in loading interlock region；Connect
And remove the first exchange mechanical arm out of loading interlock region；Then when first exchanges mechanical arm in stand, more than second
Individual unprocessed workpiece is carried on second switch tool arm, and multiple finished works are unloaded from second switch tool arm.
Brief description of the drawings
Referring to the drawings to become apparent from understanding the present invention, it is incorporated by reference in this specification, and wherein：
Fig. 1 is the perspective view of the first embodiment of Work piece processing system.
Fig. 2 is the top view of the first embodiment of the Work piece processing system represented by Fig. 1.
Fig. 3 is the side view of the first embodiment of the Work piece processing system represented by Fig. 1.
Fig. 4 A~4E show the embodiment that Work piece processing system progress workpiece processing is painted with Fig. 1~3.
Fig. 5 A~5F show another embodiment that Work piece processing system progress workpiece processing is painted with Fig. 1~3.
Embodiment
The Work piece processing system relevant with solar cell described below.However, the example of the present invention can be used for other
Workpiece, such as semiconductor crystal wafer, light-emittingdiode, insulating barrier cover silicon (silicon-on-insulator, SOI) wafer or other
Element.Work piece processing system can be used for ion implanter or other such as deposit, etch or the processing procedure of other Work piece processing systems
Equipment.Therefore, the present invention is not only restricted to following example.
Work piece processing system 100 represented by Fig. 1~3 can be handled per hour using the matrix 101 of 4 × 4 workpiece 112
Wafer or workpiece number (wph) be about 3000.Certainly the design of other matrixes 101 also can be used, following example is not limited only to 4
× 4 matrixes 101.
Work piece processing system 100 establishes workpiece from cassette (not shown) (cassette) or other interface conveying work pieces 112
112 matrix 101, and the matrix 101 of workpiece 112 is moved into loading interlock region 102.Loading interlock region 102 to be connected to from
A part for sub- implanting device 111 or some other process apparatus.Interlock region 102 is loaded to be used for the true of ion implanter 111
Empty situation is isolated with the atmospheric condition of outside, and can both lift the pressure that can also reduce loading interlock region 102.In one example,
Workpiece 112 is placed in loading interlock region 102 or ion implanter 111 using in the mechanical or carrier of electrostatic clamp.Work
Part processing system 100 also can perform invertible program, and workpiece 112 is transmitted back into cassette or other interfaces.Loading in Fig. 1~3 is mutual
Locking area 102 can have one or more loadings to interlock chamber.Fig. 1 embodiment shows two loading interlocking apertures 113, each loading
Interlocking apertures 113 is oriented to the separated loading interlocking chamber for being connected to ion implanter 111.Two loaded in interlock region 102 add
Top one of each other can be placed in by carrying interlocking chamber；In another embodiment, the two loading interlocking chambers can be by each other
Gap separate.
In this example, three conveyer belt 106a-c will be from cassette or other interface conveying work pieces 112, the biography of workpiece 112
Send at a given speed, when away from or spacing (pitch) perform, in one example, mechanical arm can be used to be placed in workpiece 112
On conveyer belt 106a-c；In another example, workpiece 112 is directly offloaded on conveyer belt 106a-c from cassette.In other realities
Apply in example, can be used and be more or less than three conveyer belt 106a-c, each that may specify in conveyer belt 106a-c is to be used for work
The load or unloading of part, or can not only be used to load but also be used to unload.In a particular instance, conveyer belt 106a is used to unload from cassette
Workpiece 112 is carried, while another conveyer belt 106c is used to workpiece 112 being loaded in cassette.But conveyer belt 106a-c load
Or offloading functions in operation when alterable, such as according to by particular delivery with the cassette that 106a-c is supplied be it is empty or full and
Change.
During matrix 101 is sent to, camera 107 on conveyer belt 106a-c and the place for being connected to camera 107
Reason device will confirm that position of the workpiece 112 on one in conveyer belt 106a-c or relative to one 's in conveyer belt 106a-c
Position, and confirm whether the position or orientation of workpiece 112 must be corrected.Camera 107 may be viewed by the conveyer belt 106a-c of part.
In one example, there is camera 107 the vast visual field to be enough to watch or shoot multiple workpiece on one in conveyer belt 106a-c
112, four workpiece 112 of a such as row.In another example, camera 107 is more on each conveyer belt 106a-c with that can shoot
The visual field of individual workpiece 112.Such as camera 107 can shoot four workpiece 112 on each conveyer belt 106a-c.
Support (gantry) module 108 utilizes such as electrostatic force, mechanical force or vacuum power, from conveyer belt 106a-c
Workpiece 112 is chosen in one and establishes matrix 101.In one embodiment, support module 108 includes removable on conveyer belt 106a-c
Dynamic framework or track.Support module 108 includes rack mechanical arm 200, can dimensionally move and tiltable.Therefore, support mould
Group 108 can choose workpiece 112 from any one of conveyer belt 106a-c, or workpiece 112 is placed in conveyer belt 106a-c any
On individual.Support module 108 can remove workpiece 112 from matrix 101, and in order to send back cassette or other interfaces, workpiece 112 is put
In in any one of conveyer belt 106a-c.Matrix end effector (end effector) 105 is connected to the branch of support module 108
Frame mechanical arm 200.In a particular instance, this matrix end effector 105 can hold four workpiece 112, but hold it
The workpiece 112 of his quantity is also possible.The information for coming from camera 107 and processor can be used with school in this support module 108
The position or orientation of workpiece 112 during just such as transmitting.
In one embodiment, support module 108 can contain two y-axis actuators, an x-axis actuator, a z-axis actuator,
With a tilt actuators.This provides four frees degree and the pickup of workpiece 112 and storing operation is carried out.Support module
The position of 108 adjustable matrix end effectors 105, to match the position of workpiece 112 on one in conveyer belt 106a-c.Branch
Also one or more workpiece 112 on recoverable such as x, y and θ (inclination) direction of frame module 108.Support module 108 can be in conveyer belt
Any one in 106a-c transmits conveyer belt 106a-c between any position in matrix 101, matrix 101 can position such as handing over
The position changed in a part for mechanical arm 103a exchange module 109.Such as can be corrected during transmitting herein, pass through support
Executable up to 180 ° of the rotation or inclination along θ directions of module 108.
In another embodiment, support module 108 can skip or do not put " bad " workpiece, and these " bad " workpiece may
It is to damage or crush.Support module 108 also compensates for not being properly positioned at " omission " on conveyer belt 106a-c in matrix 101
Workpiece.In this regard, camera 107 can be used for assisting support module 108 with being connected to the processor of camera.
The end effector 105 of support module 108 designs for more clamping jaws (gripper), and it is the micro edition of matrix 101
This.Therefore when matrix 101 can be 4 × 4 workpiece 112, support module 108 can be 1 × 4 or some other design.Workpiece 112
Can by support module 108 individually or group correct.
In an embodiment of running, support module 108 obtains four machined workpiece 112, and these is placed in defeated
Send with one in 106a-c.Then support module 108 obtains four unprocessed workpieces 112 from conveyer belt 106a-c and is placed in
In matrix 101.Machined and unprocessed workpiece 112 can be run on different conveyer belt 106a-c.This reduction support module 108
Run time, and reduce the time of the not conveying work pieces 112 of support module 108.Machined work before unprocessed workpiece 112 is placed in
Part 112 is removed in the matrix 101 at place.Repeat this program, and the load to matrix 101 that is carried out by support module 108 and
Unloading combination, can be substituted whole matrix 101 with different workpiece 112.
Module 109 is exchanged by the matrix 101 of the conveying work pieces 112 between building platform 104 and loading interlock region 102.This is handed over
Mold changing group 109 includes at least one exchange mechanical arm, and one or more linear actuators can be used in each mechanical arm that exchanges, such as
Fig. 1 embodiment display exchanges mechanical arm 103a and exchanges mechanical arm 103b.Exchange mechanical arm 103a and be placed in exchange mechanical arm
On 103b, and in load and when unloading, one that exchanges mechanical arm 103a-b is placed on outside route.In one embodiment,
Each mechanical arm 103a-b that exchanges has a z-axis actuator and two y-axis actuators, for putting or grasping workpiece 112
Blade.
In one example, unprocessed workpiece 112 can be obtained from the matrix 101 for building platform 104 by exchanging mechanical arm 103a, and
Mechanical arm 103b is exchanged to may extend in loading interlock region 102 to obtain finished work 112.Then from loading interlock region 102
Finished work 112 is removed, and unprocessed workpiece 112 is placed in loading interlock region 102.Then finished work 112 is back to
Platform 104 is built to unload, while is implanted into or processes unprocessed workpiece 112 in addition.
Matrix 101 foundation with loading interlock region 102 take out drop (pumping down) or be vented can be consistent, this can increase
Add the yield for the system (such as ion implanter 111) for being connected to loading interlock region 102.
Fig. 4 A~4E show the embodiment that Work piece processing system progress workpiece processing is painted using Fig. 1~3.In Fig. 4 A
In, will be able to be that the rack mechanical arms 200 of part of support module 108 of Fig. 1~3 is placed on first conveyer belt 106c.Herein
In embodiment, matrix 101 includes the finished work 201 of 16 4 × 4 arrangements, including 4 row finished works 201.Matrix 101
One that the exchange mechanical arm 103a-b as represented by Fig. 1 to Fig. 3 can be placed in above or by it holds.One in conveyer belt 106a-c
Individual (the conveyer belt 106a i.e. in this example) includes unprocessed workpiece 202 (shady place of Fig. 4 A example).Finished work 201
And the example that unprocessed workpiece 202 is the workpiece 112 represented by Fig. 1 to Fig. 3.
In figure 4b, rack mechanical arm 200 is placed on matrix 101, and four finished works is chosen from matrix 101
201, this four finished works 201 represent a row.After finished work 201 has been jammed or chosen, rack mechanical arm 200
The position of recoverable finished work 201 or inclination.
In figure 4 c, four finished works 201 have been sent to one in conveyer belt 106a-c by rack mechanical arm 200
Individual (the conveyer belt 106c i.e. in this example) is with unloading.Then, in Fig. 4 D, rack mechanical arm 200 is placed in unprocessed workpiece 202
Go up and choose these unprocessed workpieces 202.After unprocessed workpiece 202 has been jammed or chosen, the recoverable of rack mechanical arm 200
The position of unprocessed workpiece 202 or inclination.Because the mistake (not shown) unloaded from cassette or other interfaces, unprocessed workpiece
202 can bend or place mistake.
In Fig. 4 E, rack mechanical arm 200 puts four unprocessed workpieces 202 in matrix 101 into, utilizes conveyer belt
One in 106a-c, unloaded finished work 201 is moved into cassette or other interfaces.More unprocessed workpieces 202
It can be loaded on one in conveyer belt 106a-c.This program of repetition unloads until finished work 201 from matrix 101, and not
Workpieces processing 202 has been loaded in matrix 101.Then, the finished work 201 in matrix 101 is taken by unprocessed workpiece 202
Generation.
As shown in Fig. 4 A~4E, load is carried out in succession with Uninstaller during rack mechanical arm 200 moves.In timbering machine
Unprocessed workpiece 202 was both loaded in matrix 101 by the specific period of the start of tool arm 200, rack mechanical arm 200, will also be added
Work workpiece 201 unloads from matrix 101.Herein during activity, various loads and may be in the form of successive the step of Uninstaller
Occur, untill finished work 201 is substituted by unprocessed workpiece 202 in matrix 101.In addition, utilize rack mechanical arm 200
The step of to load or unload matrix 101, may there is other orders.
Fig. 5 A~5F show another embodiment for the workpiece processing that Work piece processing system is painted using Fig. 1~3.First exchanges
Mechanical arm 300 can be Fig. 13 part for exchanging module 109 with second switch tool arm 301, and can correspond to an example
In exchange mechanical arm 103a-b.In fig. 5, one by unprocessed workpiece 202 from conveyer belt 106 of rack mechanical arm 200
It is loaded on the first exchange mechanical arm 300.These unprocessed workpieces 202 can be 4 × 4 matrixes, but because Fig. 5 A are sectional views, figure
5A only draws four.When load, second switch tool arm 301 is placed under the first exchange mechanical arm 300.
In figure 5b, the first exchange mechanical arm 300 moves in vertical direction with second switch tool arm 301, and empty
Second switch tool arm 301 is extended in loading interlock region 102.In figure 5 c, it is also 4 × 4 that second switch tool arm 301, which is removed,
The finished work 201 of matrix.Then unprocessed workpiece 202 is placed in loading interlock region 102 by the first exchange mechanical arm 300
It is interior.If loading interlock region 102 only has single hole, during loading and unload in loading interlock region 102, first exchanges mechanical arm 300
It can change upright position with second switch tool arm 301.If loading interlock region 102 is with porous or with being enough to accommodate simultaneously
First exchanges the macropore of mechanical arm 300 and second switch tool arm 301, then upright position is not needed during load and unloading
Change.
In figure 5d, the first exchange mechanical arm 300 is placed on outside route, such as the first exchange mechanical arm 300 can be placed on and add
Below load interlock region 102 or its elsewhere.This makes rack mechanical arm 200 unload finished work 201 from second switch tool arm 301
It is loaded onto on one of conveyer belt 106, unprocessed workpiece 202 can also be loaded to second switch tool arm 301 by rack mechanical arm 200
On.Then as shown in fig. 5e, first exchange mechanical arm 300 left from stand, and from loading interlock region 102 unload it is machined
Workpiece 201, then as illustrated in figure 5f, second switch tool arm 301 put unprocessed workpiece 202 in loading interlock region 102 into.Branch
Frame mechanical arm 200 by finished work 201 from the first exchange mechanical arm 300 be offloaded in conveyer belt 106 one, and from defeated
Send one in band 106 to load unprocessed workpiece 202 to the first to exchange on mechanical arm 300.Then down-stream is as shown in Figure 5A
Start again at, in first exchange mechanical arm 300 load with unloading during, by second switch tool arm 301 be placed in stand or
It is merely retained under the first exchange mechanical arm 300.
Program represented by Fig. 5 A~5F can be used for loading the system for interlocking chamber with two, one in vertical direction
On another.In this embodiment, first mechanical arm 300 and second switch tool arm 301 are exchanged in vertical direction
With larger moving range, such as the first exchange mechanical arm 300 can be placed in the gap of two loadings interlocking chamber or in most
Under beneath loading interlock region.
This announcement is not limited with the scope of the specific embodiment described in this specification.In fact, except in this specification
Outside described embodiment, by above description and accompanying drawing, other various embodiments of the invention and modification are to this area skill
Art personnel are obvious.These other embodiments and modification are intended to cover in the scope of the present invention.Although in addition, this theory
Bright book is to describe the present invention, people in the art for the train of thought of the particular of specific purpose in specific environment
Member is it will be appreciated that, the effectiveness of the present invention is not limited to this, and the present invention can be advantageously real for many purposes and in many circumstances
Apply.Therefore, of the invention full breadth and spirit claims set forth below should be explained as described in this description.
Claims (14)
1. a kind of Work piece processing system, including：
Multiple conveyer belts；
Load interlock region；
Rack mechanical arm, including multiple clamping jaws, wherein the multiple clamping jaw is to from one in the multiple conveyer belt selection
Multiple workpiece, the rack mechanical arm between platform and each the multiple conveyer belt transmitting rows of multiple works building
Part, multiple workpiece of rack mechanical arm transmission are at one of two-dimentional matrix of the multiple workpiece of the construction platform
Point；And
First exchanges mechanical arm and second switch tool arm, respectively between the construction platform and the loading interlock region
The matrix of the multiple workpiece is transmitted, described first exchanges mechanical arm and the second switch tool arm has use respectively
In the blade for grasping the multiple workpiece, the first exchange mechanical arm is placed on the second switch tool arm, and described
First, which exchanges mechanical arm and the second switch tool arm, has a z-axis actuator to move in vertical direction together,
Described first exchanges mechanical arm and the second switch tool arm respectively two-dimensionally to move, when the rack mechanical
When the relatively described second switch tool arm of arm loads or unloads the matrix of the multiple workpiece, described first exchanges mechanical arm
Stand is moved in the horizontal direction.
2. Work piece processing system according to claim 1, in addition to camera, it has and can shoot the multiple conveyer belt
The visual field.
3. Work piece processing system according to claim 1, wherein the multiple conveyer belt includes three conveyer belts, Mei Gesuo
State used for conveyer belt in loading and unload the multiple workpiece.
4. Work piece processing system according to claim 1, in addition to the second loading interlock region, wherein first interchanger
Tool arm and the second switch tool arm between the construction platform and the loading interlock region or the construction platform with this
The matrix of the multiple workpiece is transmitted between two loading interlock regions.
5. a kind of workpiece processing recipe, including：
Multiple finished works are sent to first conveyer belt from mechanical arm is exchanged using rack mechanical arm, wherein the timbering machine
Tool arm includes multiple clamping jaws, the multiple clamping jaw to from the blade of the exchange mechanical arm choose it is rows of it is the multiple plus
Work workpiece, the multiple finished work be it is described exchange mechanical arm multiple workpiece two-dimentional matrix a part, institute
State exchange mechanical arm and include multiple blades, each blade grasps rows of the multiple finished work；
Rows of multiple unprocessed workpieces are sent to the exchange mechanical arm from the second conveyer belt using the rack mechanical arm
The blade；
Repeat the transmission to the multiple finished work and the multiple unprocessed workpiece, until unprocessed workpiece
Substitute all finished works on the exchange mechanical arm；And
The matrix of unprocessed workpiece is loaded in loading interlock region using the exchange mechanical arm.
6. workpiece processing recipe according to claim 5, wherein the interchanger tool arm includes four blades.
7. workpiece processing recipe according to claim 5, also it is included in and is carrying out the biography using the rack mechanical arm
The position of the multiple unprocessed workpiece is adjusted during sending.
8. workpiece processing recipe according to claim 5, wherein being removed in the rack mechanical arm the multiple machined
After workpiece is to vacate a blade, the multiple unprocessed workpiece is placed in the leaf vacated by the rack mechanical arm
In piece.
9. a kind of workpiece processing recipe, including：
When second switch tool arm is exchanged under mechanical arm positioned at first, multiple unprocessed workpieces are carried on described first and exchanged
On mechanical arm；
When the described first exchange mechanical arm is located on the second switch tool arm and is located at outside loading interlock region, by described in
In the second switch tool arm shift-in loading interlock region, multiple finished works are loaded to the second switch tool arm
On；
The second switch tool arm and the multiple finished work are removed from the loading interlock region；
, will when the second switch tool arm is exchanged under mechanical arm positioned at described first and is located at outside the loading interlock region
Described first exchanges in the mechanical arm shift-in loading interlock region；
Described first, which is removed, from the loading interlock region exchanges mechanical arm；And
When described first exchanges mechanical arm in stand, more than second individual unprocessed workpieces are carried on the second switch
On tool arm, and the multiple finished work is unloaded from the second switch tool arm, wherein the stand is described
Load under interlock region and on the second switch tool arm, and described first exchanges mechanical arm and second exchange
There is mechanical arm a z-axis actuator to move in vertical direction together.
10. workpiece processing recipe according to claim 9, wherein it is described the multiple unprocessed workpiece is carried on it is described
First exchanges the step on mechanical arm, in addition to exchanges mechanical arm from described first and unload more than second individual finished works.
11. workpiece processing recipe according to claim 9, in addition to remove first interchanger from the stand
Tool arm, and the described first exchange mechanical arm is moved into the loading interlock region so that more than second individual finished works are carried on into institute
State on the first exchange mechanical arm.
12. workpiece processing recipe according to claim 9, it is additionally included in and described is carried on the multiple unprocessed workpiece
Described first exchanges step and the step by the second switch tool arm shift-in loading interlock region on mechanical arm
Between rapid, change the described first upright position for exchanging mechanical arm and the second switch tool arm.
13. workpiece processing recipe according to claim 9, wherein it is described the multiple unprocessed workpiece is carried on it is described
First exchanges the step on mechanical arm, and using rack mechanical arm, the multiple unprocessed workpiece is sent to from conveyer belt
Described first exchanges mechanical arm.
14. workpiece processing recipe according to claim 9, wherein it is described by the multiple finished work from described second
Exchange mechanical arm unloading and the step more than described second individual unprocessed workpieces being carried on the second switch tool arm
Suddenly also include：
Using rack mechanical arm, the multiple finished work is sent to first conveyer belt from the second switch tool arm,
Wherein described second switch tool arm includes finished work described in multiple row；
Using the rack mechanical arm, more than described second individual unprocessed workpieces are sent to the second switch tool from conveyer belt
Arm；And
The multiple finished work and the transfer step of the multiple unprocessed workpiece are repeated, until the described second exchange
Untill the multiple finished work on mechanical arm is all substituted by more than described second individual unprocessed workpieces.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
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| US201161554715P | 2011-11-02 | 2011-11-02 | |
| US61/554,715 | 2011-11-02 | ||
| US13/658,512 US9694989B2 (en) | 2011-11-02 | 2012-10-23 | Workpiece handling system and methods of workpiece handling |
| US13/658,512 | 2012-10-23 | ||
| PCT/US2012/063250 WO2013067307A1 (en) | 2011-11-02 | 2012-11-02 | Workpiece handling system and methods of workpiece handling |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103988290A CN103988290A (en) | 2014-08-13 |
| CN103988290B true CN103988290B (en) | 2018-03-30 |
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|---|---|---|---|
| CN201280059757.7A Active CN103988290B (en) | 2011-11-02 | 2012-11-02 | Work piece processing system and workpiece processing recipe |
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| Country | Link |
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| US (2) | US20130108406A1 (en) |
| JP (1) | JP2014532995A (en) |
| KR (1) | KR20150042743A (en) |
| CN (1) | CN103988290B (en) |
| TW (1) | TWI607941B (en) |
| WO (1) | WO2013067307A1 (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| TW201321294A (en) | 2013-06-01 |
| US20130108406A1 (en) | 2013-05-02 |
| TWI607941B (en) | 2017-12-11 |
| KR20150042743A (en) | 2015-04-21 |
| US20130108401A1 (en) | 2013-05-02 |
| JP2014532995A (en) | 2014-12-08 |
| CN103988290A (en) | 2014-08-13 |
| WO2013067307A1 (en) | 2013-05-10 |
| US9694989B2 (en) | 2017-07-04 |
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