CN103954680B - Identification device that a kind of optical thin film laser is injured and recognition methods - Google Patents
Identification device that a kind of optical thin film laser is injured and recognition methods Download PDFInfo
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- CN103954680B CN103954680B CN201410200783.8A CN201410200783A CN103954680B CN 103954680 B CN103954680 B CN 103954680B CN 201410200783 A CN201410200783 A CN 201410200783A CN 103954680 B CN103954680 B CN 103954680B
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Abstract
The invention discloses recognition methods and device that a kind of optical thin film laser is injured, it is distributed by gathering mass-to-charge ratio, carry out mass spectral analysis with computer software to differentiate with element, just can determine that the element kind comprised in injured material, thus accurately, online, Quick go out whether thin film damages.The device using the method is made up of test specimens sample platform, mass-to-charge ratio acquisition system and Computing system.The present invention is capable of differentiation thin film online, real-time, quick, accurate or optical element and injures state under light laser.The method is applied in laser damage threshold test, integrated, the automatization of test system, intellectuality can be realized.
Description
Technical field
The invention belongs to optical thin film detection technique field, relate to the method for discrimination that a kind of optical thin film is injured,
The identification device injured particularly to a kind of optical thin film laser and recognition methods.
Background technology
In high energy laser system, there is various optical element and thin-film device, these elements
It is inseparable with normally effectively operating of optical system that anti-laser injures performance.Laser damage threshold (LIDT)
It is to weigh thin film and the important indicator of this performance of optical element, and the current test to laser damage threshold is still
So there is many problems.In laser damage threshold test process, the most accurately, in real time, quickly,
The differentiation thin film of line injures core one ring becoming research.Therefore, for obtaining the laser damage threshold of thin film,
Whether primary condition is to occur damage to make under light laser effect thin film to differentiate fast and accurately, the thinnest
What kind of change film occurs be considered as there occurs and injure.
Differentiate at present the method that thin film and optical element are injured mainly have phase contrast microscopy, scattered light intensity detection method,
Plasma spark method, optoacoustic measurement method, light full-boiled process etc., these methods are respectively arranged with its pluses and minuses.Wherein phase contrast
Microscopy is a kind of detection method that international standard ISO11254 is recommended, and this method employing enlargement ratio is
Surface after laser irradiation is observed by the Normaski microscope of 100-150 times, whether to differentiate thin film
Injuring, the subjectivity of the method is very strong, and working strength is big, and testing efficiency is low, it is difficult to realize whole
The automatization of machine system.The principle of scattered light intensity detection method is: be mapped to sample when laser is the most oblique
Time on product, if without fault at the pip on surface, then the rule that reflection light will be given by geometric optics reflects,
If not allowing reflected principal ray enter photelectric receiver, just export almost without the signal of telecommunication.Pip when surface
Locate rough, or injured by producing after laser irradiation, then in chief ray considerable part energy can not orienting reflex,
But producing scattering, corresponding photelectric receiver just has the signal of telecommunication to export, by detection photelectric receiver with or without electricity
Signal exports, and actually before and after exploring laser light radiation, the change of the signal of telecommunication just can determine whether sample at illuminated laser spot
Whether product are injured, and the method is high to the smoothness requirements on sample surface, if laser emission front surface light
Cleanliness is inadequate, injures even if laser emission causes, and the detector output signal of telecommunication there will not be the biggest change,
Thus can not carry out exactly injuring differentiation.
Plasma spark method is also to differentiate a kind of common method of injuring of laser, the mechanism of the method be based on
When high power laser light and optical surface interact, ionization is constituted the material of optical surface, thus be produced from by
Electronics and ion, i.e. plasma.Therefore, interacted with optical surface by light-sensitive element exploring laser light
Time plasma spark it may determine that whether exist and injure.Generally, detection laser is that monochromatic light is (such as helium
The wavelength of Ne laser is 632.8nm), and plasma spark is polychromatic light, it is therefore desirable to elimination effect laser
Corresponding spectrum, just can be accurately detected plasma spark, can discriminate whether to have at optical surface to ruin
The phenomenon of wound.Conventional plasma spark diagnostic method is to install a photoelectric receiving device near optical surface,
When there is flash of light, photoelectric receiving device will export a level signal, and this is the most both at home and abroad based on plasma
Body flash of light differentiates the conventional method whether thin film is injured, and i.e. changes as the criterion whether damaged using light intensity.So
And, when the intensity of laser is sufficiently high, air also can puncture, and plasma spark phenomenon occurs.When
When light laser acts on film surface and plasma spark occurs, in most of the cases, obtain is thin
Film and the compound plasma of air, or only obtain be atmosphere plasma flash of light, therefore, use
The mode of detection light intensity differentiates whether thin film is injured, and causes " judging by accident " phenomenon of actual test to keep away
Exempt from.
Summary of the invention
It is an object of the invention to overcome above-mentioned the problems of the prior art, it is provided that a kind of optical thin film laser is ruined
The identification device of wound and recognition methods, this device and method can be applicable to all kinds of optical element and coated element
The online differentiation on surface, and have quickly, in high precision, feature accurately.
To achieve these goals, the technical solution adopted in the present invention is:
The identification device that a kind of optical thin film laser is injured, including laser instrument and test sample；Test sample
Being installed in test specimens sample platform, laser instrument just surface to be measured to test sample, the side of test specimens sample platform sets
It is equipped with for accelerating the microgranule sputtered through laser irradiation sample, and forms the acceleration electrode of collimated particle bundle,
And it is additionally provided with the electron source for improving ion concentration between test specimens sample platform and acceleration electrode；Accelerate electrode
Rear end arrange and make the magnetic field that ion deflects, be provided with for receiving not with the side accelerating electrode runs parallel
Some reception electrodes with the ion of deflection radius；The outfan receiving electrode is all connected to A/D converter
On signal input part, the signal output part of A/D converter connects to be had for generating sputtering particle mass-to-charge ratio spectrogram
Computer.
Described laser instrument is the high-energy laser that test sample surface thin film can be made to injure.
The wavelength of described laser is 1064nm, and pulsewidth is 10ns, and single pulse energy is 400mJ.
Described test specimens sample platform is by the two-dimensional movement platform of step motor control.
Described magnetic field is uniform magnetic field.
Described some reception electrode side by side parallel are arranged.
In described computer, storage has the standard mass-to-charge ratio of element.
A kind of optical thin film laser Damage recognition method, comprises the following steps:
1) first, test device is installed, the Laser emission of laser instrument is rectified being clamped in test specimens sample platform
Test sample, then the side in test specimens sample platform arranges accelerating field, and electron source is placed in test sample
Between platform and accelerating field, each reception electrode is all arranged with acceleration electrode runs parallel, and accelerates electrode and reception
Electrode is all adjacent with magnetic field, is sequentially connected with reception electrode, A/D converter and computer the most again；
2) then, opening laser instrument and computer, the film surface of test sample is damaged by laser irradiation
After, the microgranule of damage zone sputters to space, and the microgranule sputtered enters acceleration electrode, warp after electron source
Crossing the accelerating field accelerated between electrode and enter the magnetic field accelerating electrode rear, ion is under the action of a magnetic force
Deflect thus penetrate magnetic field and received by some reception electrodes, receive the analogue signal warp that electrode will receive
A/D converter is converted into digital signal and is transferred in computer, computer generate the matter lotus of sputtering particle
Compare spectrogram；
3) basis is stored in the standard mass-to-charge ratio of element in computer, determines the elementary composition, finally of sputtering thing
Just can directly be judged by contrast standard mass-to-charge ratio whether test sample there occurs to injure.
Described step 3) in, it is judged that method that whether test sample injures particularly as follows:
By step 2) in the quality spectrogram of sputtering particle that obtains contrast with the element in air, if had
Emerging element, the element that i.e. this element is not belonging in air, then test sample there occurs and injures；Otherwise,
Then test sample is intact.
Compared with prior art, the method have the advantages that
The identification device that optical thin film laser of the present invention is injured, uses laser irradiation test sample surface, and it is ruined
The gasification of traumatic part branch or splash go out microgranule, and accelerated electrode enters magnetic field after accelerating, and ion is at the work of magnetic field force
With lower deflection and penetrate magnetic field, it is arranged on the reception electrode outside magnetic field and is received, and produce pulse signal,
Pulse signal is converted into digital signal through A/D converter and transmits to computer, finally gives sputtering microgranule
Mass-to-charge ratio spectrogram.The present invention is not using the change of optics or electrical signal as the criterion injured, but employing matter
The elemental constituent comprised in analysis of spectrum ejecta, compares more traditional method of discrimination, and not only discrimination precision is high, no
There is " judging by accident " phenomenon, the test environment of vacuum ensure that the interference of test is little, and distinguishing speed is fast, to thin
The differentiation of film damage from laser can complete in 1s；Meanwhile, the present invention differentiates the category width of thin film, nothing
Opinion is that reflectance coating, anti-reflection film, thin film, thick film all can realize high-precision differentiation.Finally, due to sputter
Microgranule in major part be ion, a part is neutral atom, in order to improve ion concentration, accelerate electrode
And between test specimens sample platform, electron source is set, makes the neutral atom sputtered also ionize, thus improve
The ionization level of splash microgranule.
The recognition methods that optical thin film laser of the present invention is injured, uses mass spectrum collection, the method for analysis to determine institute
Injure the element kind comprised in material rather than use photoelectric detector to accept light intensity or scattered signal,
It is not to use CCD to gather image, the element kind collected is contrasted with atmospheric elements, Jin Erke
To differentiate whether film surface is injured.Meanwhile, in test process, print position is fixed, it is not necessary to move
Walking test, but capture target online, real-time Transmission is to computer, and analyzes and processes, and reaches accurate
Judge the purpose whether thin film is injured.
Further, the present invention uses and injures sample elemental mass spectrometry to differentiate whether are thin film or optical element
Injure, i.e. using " determining the Elemental redistribution injuring in body " as sentencing that whether thin film or optical element are injured
According to, thus can effectively despumation, dust or the interference of surrounding atmosphere.
Accompanying drawing explanation
Fig. 1 is the structural representation of optical thin film laser Damage recognition device of the present invention.
Wherein, 1 is laser instrument；2 is test sample；3 is electron source；4 for accelerating electrode；5 is magnetic field；
6 for receiving electrode；7 is A/D converter；8 is computer.
Detailed description of the invention
The present invention will be further described in detail below in conjunction with the accompanying drawings:
Seeing Fig. 1, the identification device that optical thin film laser of the present invention is injured, including laser instrument 1 and test specimens
Product 2, laser instrument 1 is the high-energy laser that test sample 2 surface film can be made to injure, and the wavelength of laser
For 1064nm, pulsewidth is 10ns, and maximum single pulse energy is 400mJ；Test sample 2 is installed on test specimens
In sample platform 9, test specimens sample platform 9 is by the two-dimensional movement platform of step motor control；Laser instrument 1 is just to survey
The surface to be measured of test agent 2, the side of test specimens sample platform 9 is provided with for accelerating through laser irradiation sample institute
The microgranule sputtered, and form the acceleration electrode 4 of collimated particle bundle, and test specimens sample platform 9 with accelerate electrode 4
Between be additionally provided with the electron source 3 for improving ion concentration；The rear end setting accelerating electrode 4 makes ion occur
The magnetic field 5 of deflection, wherein, magnetic field 5 is uniform magnetic field.With accelerate the parallel side of electrode 4 be provided with for
The reception electrode 6 that some side by side parallel of the ion receiving different deflection radius are arranged；Receive the output of electrode 6
End is all connected on the signal input part of A/D converter 7, and the signal output part of A/D converter 7 connects to be had
Computer 8, computer 8, according to the standard mass-to-charge ratio of the element stored therein, generates sputtering particle quality
Spectrogram.
The invention also discloses the recognition methods that a kind of optical thin film laser is injured, comprise the following steps:
1) first, test device is installed, the Laser emission of laser instrument is rectified being clamped in test specimens sample platform
Test sample, then the side in test specimens sample platform arranges accelerating field, and electron source is placed in test sample
Between platform and accelerating field, each reception electrode is all arranged with acceleration electrode runs parallel, and accelerates electrode and reception
Electrode is all adjacent with magnetic field, is sequentially connected with reception electrode, A/D converter and computer the most again；
2) then, opening laser instrument and computer, the film surface of test sample is damaged by laser irradiation
After, the microgranule of damage zone sputters to space, and the microgranule sputtered enters acceleration electrode, warp after electron source
Crossing the accelerating field accelerated between electrode and enter the magnetic field accelerating electrode rear, ion is under the action of a magnetic force
Deflecting, final injection magnetic field is received by some reception electrodes, receives the pulse simulation that electrode will receive
Signal is converted into digital signal through A/D converter and is transferred in computer, computer generate sputtering particle
Mass-to-charge ratio spectrogram；
3) basis is stored in the standard mass-to-charge ratio of element in computer, determines the elementary composition, with regard to energy of sputtering thing
Directly judge whether test sample there occurs to injure.Concrete, by step 2) in the sputtering particle that obtains
Mass-to-charge ratio spectrogram contrasts with the element in air, if there being the emerging element being not belonging in air,
Then test sample there occurs and injures；Otherwise, then test sample is intact.
The principle of the present invention:
The method of discrimination that the thin film that the present invention uses is injured, is different from the method for discrimination of routine.The core of the method
The heart is, not using the change of optics or electrical signal as the criterion injured, but uses the side of elementary analysis
Method, gathers mass spectrum and analyzes the elemental constituent comprised in splashings, just can directly judge whether sample occurs
Injure.Its ultimate principle judged is: under the radiation of high-power, high energy laser, optical element or thin
In the microcell of film surface, generally in very short time, (nanosecond order) have accumulated high energy (millijoule), from
And make the acutely gasification of material local, it is also possible to time serious flash.The microgranule that gasification or splash go out, wherein
Major part is ion, and a part is neutral atom.After electron source, also there is electricity in neutral atom therein
From, thus improve the ionization level of splash microgranule.Ion forms collimated ion beam after electric field, enter even by force
In magnetic field.
If ion institute carried charge is q, quality is m, speed is V, and it is B vertically into magnetic induction
Magnetic field in, then the circular motion radius rotated is:
And speed V of ion is to be determined have by the voltage U accelerating electrode
Then
Owing to U and B is constant, therefore charged ion circular motion radius in magnetic field depends on mass of ion
Ratio with quantities of charge.As can be seen here, in uniform magnetic field, there is the ion of same mass-to-charge ratio with same
Radius rotates, and the ion radius of turn of different mass-to-charge ratioes then differs, so that various ion is according to matter lotus
Ratio separates, and the reception electrode being distributed in diverse location can receive the ion of different radiuses of rotation.Therefore,
Just can determine that out the quality of ion according to the position and size of current receiving electrode, the most just can specify in splashings
The element kind comprised.Air is as common external interference, and its element is most likely to occur in mass spectrum,
But it mainly contains the elements such as N, O, C, H, and the chemical composition of thin film or optical element is different from air,
Generally comprise the elements such as Si, Ti, Al, Mg, Zn, Zr.If containing thin in vapour (or splashings)
Film or the element of optical element, then, it is possible to conclude that sample there occurs that laser is injured.
The process of method of testing of the present invention includes:
First, use pulse laser high-power, high-octane that thin film or optical element surface are carried out irradiation,
Sample is once injured, and the surface mass constituting thin film or optical element will be gasified or excite, with atom
Splash away with the form of ion.Secondly, use electron source that the atom in splashings is carried out ionization, near and
Gather the mass-to-charge ratio distribution of splashing ion.Then, utilize computer software that mass spectrum is analyzed, according to from
The size of sub-matter lotus number, determines the concrete element kind gathering ion.Finally, the element and in air enters
Row comparison, if the unit in the particle collected have outside atmospheric elements, it becomes possible to determine thin film
There occurs and injure.Use this method and apparatus, can realize the accurate differentiation that optical thin film injures, finally by
Computer system carries out computing, can quickly provide the laser damage threshold of thin film.
The present invention, by gathering the mass spectrum of splashings, determines the recognition methods of the comprised element of particle, thus sentences
Whether the most dissimilar film sample is injured.For reaching to differentiate that the purpose injured of laser uses following dress
Putting, this device is made up of test specimens sample platform, mass-to-charge ratio acquisition system and Computing system.The present invention will
Superlaser irradiation is to sample surface, and sample can be thin film, can also be the samples such as optical element
Product, use mass spectrum collection, the method for analysis to determine the element kind comprised in injured material, it determines method
It is the distribution gathering mass-to-charge ratio, carries out mass spectral analysis by computer software and differentiate with element, thus accurately,
Online, Quick goes out whether thin film damages.
The work process of the present invention:
As it is shown in figure 1, effect laser is high-energy laser, can be any laser making thin film injure.
Test sample 2 is clamped on testboard, when film surface is by Irradiation of High after breakage, damage zone
Microgranule sputters to space immediately.The microgranule sputtered comprises ion, electronics and part neutral atom.In order to carry
Its ionization level high, sputtering thing, after the Ionized by Electrons that electron source 3 is launched, substantially increases the content of ion.
After the accelerated electrode of these ions 4, entering in uniform magnetic field, magnetic field force induced effect deflects.Ion
The radius of deflection depends on the mass-to-charge ratio of ion.Be installed on the reception electrode 6 of diverse location can receive with
Ion after different radii deflection, then be digital signal by analog-signal transitions through A/D converter 7 and transmit
In computer 8, just obtain sputtering the quality spectrogram of thing.In computer, be to the mass spectrum obtained
It is analyzed, according to being stored in the standard mass-to-charge ratio of element in computer, just can determine that the element group of sputtering thing
Become.Therefore, if element (mainly N, O, H, C, Ar of being not belonging in air of emerging element
Deng component spectrum), then can be concluded that this element comes from thin film, thus illustrate that thin film there occurs damage.
Laser provided by the present invention injures discriminating gear and mass spectrometric analysis method be applicable to all kinds of optical element and
Film surface, it is adaptable to various types of thin film injure differentiation, and have feature fast and accurately, it is achieved
The most full-automatic process of whole damage from laser judgement system.The present invention under the effect of superlaser,
Online, in real time, quickly, accurately can obtain optical thin film and injure state, eliminate the most conventional thin film
Injure the inaccurate phenomenon of differentiation.The present invention is through detailed Theoretical Calculation and analysis, it was demonstrated that be feasible,
And functional, stable, have wide practical use in actual industrial production.
When optical thin film laser damage threshold is measured, whether accurate and Quick thin film is injured is just to obtain
The really key of result.During test sample, print is placed on the two-dimensional movement platform of step motor control.Effect
Laser is wavelength 1064 nm, pulsewidth 10 ns, the high energy laser of single pulse energy 400mJ.Use this to swash
Light carries out the irradiation of pulse to print, if thin film is not injured, and composition thin film or optical element
Atom, ion will not sputter (gasification), receive electrode and then do not receive signal.If thin film there occurs damage,
Then in damage moment, strong expulsion events occurring, the microgranule of splash is the most final through further ionization, transmission
Received electrode to receive.Computer processing system receives, according to diverse location, the signal that electrode gathers, by these
Signal is converted into mass spectrum, and the elemental standards mass-to-charge ratio stored with internal system is compared, if there is
New element (C, H, O, N are outer), then it is assumed that thin film occurs in that damage.As for TiO2/SiO2 film
Heap, in test gather mass-to-charge ratio, when the mass-to-charge ratio collected have 48 (or 24,16,12) and 28 (or
14,9.3,7) time, then it is assumed that thin film there occurs to be injured, because these mass-to-charge ratio numerical value are Ti or Si elements
Mass-to-charge ratio.The method of this mass spectral analysis, equally applicable for any thin film or optical element.
Above content is only the technological thought that the present invention is described, it is impossible to limit protection scope of the present invention with this,
Every technological thought proposed according to the present invention, any change done on the basis of technical scheme, each fall within
Within the protection domain of claims of the present invention.
Claims (7)
1. the identification device that an optical thin film laser is injured, it is characterised in that: include laser instrument (1) with
And test sample (2)；Test sample (2) is installed in test specimens sample platform (9), test specimens sample platform (9)
For by the two-dimensional movement platform of step motor control；Laser instrument (1) just table to be measured to test sample (2)
Face, the side of test specimens sample platform (9) is provided with the microgranule sputtered for acceleration through laser irradiation sample,
And form the acceleration electrode (4) of collimated particle bundle, and test specimens sample platform (9) and accelerating between electrode (4)
It is additionally provided with the electron source (3) for improving ion concentration；The rear end setting accelerating electrode (4) makes ion send out
The magnetic field (5) of raw deflection, the side parallel from accelerating electrode (4) is provided with for receiving different deflection radius
Some reception electrodes (6) of ion, these receive electrode (6) side by side parallel and arrange；Receive electrode (6)
Outfan be all connected on the signal input part of A/D converter (7), the signal of A/D converter (7)
Outfan connects the computer (8) for generating sputtering particle mass-to-charge ratio spectrogram.
The identification device that optical thin film laser the most according to claim 1 is injured, it is characterised in that: institute
The laser instrument (1) stated is the high-energy laser that test sample (2) surface film can be made to injure.
The identification device that optical thin film laser the most according to claim 1 and 2 is injured, it is characterised in that:
The wavelength of described laser is 1064nm, and pulsewidth is 10ns, and single pulse energy is 400mJ.
The identification device that optical thin film laser the most according to claim 1 is injured, it is characterised in that: institute
The magnetic field (5) stated is uniform magnetic field.
The identification device that optical thin film laser the most according to claim 1 is injured, it is characterised in that: institute
In the computer (8) stated, storage has the standard mass-to-charge ratio of element.
6. using an optical thin film laser Damage recognition method for device described in claim 1, its feature exists
In, comprise the following steps:
1) first, test device is installed, the Laser emission of laser instrument is rectified being clamped in test specimens sample platform
Test sample, then the side in test specimens sample platform arranges accelerating field, and electron source is placed in test sample
Between platform and accelerating field, each reception electrode is all arranged with acceleration electrode runs parallel, and accelerates electrode and reception
Electrode is all adjacent with magnetic field, is sequentially connected with reception electrode, A/D converter and computer the most again；
2) then, opening laser instrument and computer, the film surface of test sample is damaged by laser irradiation
After, the microgranule of damage zone sputters to space, and the microgranule sputtered enters acceleration electrode, warp after electron source
Crossing the accelerating field accelerated between electrode and enter the magnetic field accelerating electrode rear, ion is under the action of a magnetic force
Deflect thus penetrate magnetic field and received by some reception electrodes, receive the analogue signal warp that electrode will receive
A/D converter is converted into digital signal and is transferred in computer, computer generate the matter lotus of sputtering particle
Compare spectrogram；
3) basis is stored in the standard mass-to-charge ratio of element in computer, determines the elementary composition, finally of sputtering thing
Just can directly be judged by contrast standard mass-to-charge ratio whether test sample there occurs to injure.
Optical thin film laser Damage recognition method the most according to claim 6, it is characterised in that: described
Step 3) in, it is judged that method that whether test sample injures particularly as follows:
By step 2) in the mass-to-charge ratio spectrogram of sputtering particle that obtains contrast with the element in air, if
Have emerging element, the element that i.e. this element is not belonging in air, then test sample there occurs and injures；Instead
It, then test sample is intact.
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| CN104407401B (en) * | 2014-11-18 | 2016-09-14 | 北京卫星环境工程研究所 | Middle and upper atmosphere contents temperature Wind measurement instrument |
| CN105223126A (en) * | 2015-11-05 | 2016-01-06 | 中国科学院光电研究院 | A kind of polymkeric substance irradiation damage proving installation and method of testing |
| CN109633325B (en) * | 2018-12-24 | 2023-12-29 | 苏州烽燧电子有限公司 | Control circuit of electronic fuze thick film circuit tester |
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| CN101718712B (en) * | 2009-12-02 | 2012-03-21 | 西安工业大学 | Combined testing device and testing method of laser damage thresholds of film and optical element |
| CN102226764A (en) * | 2011-04-02 | 2011-10-26 | 西安工业大学 | Discrimination method for laser damage on the surface of a film or an optical element and determination device thereof |
| CN103364176B (en) * | 2012-12-06 | 2016-01-20 | 西安工业大学 | A kind of laser damage threshold test macro |
| CN203881709U (en) * | 2014-05-13 | 2014-10-15 | 西安工业大学 | Recognition device for laser-induced damage of optical thin film |
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