CN103954593A - Plasma signal acquisition device based on laser-induced-breakdown spectroscopy - Google Patents
Plasma signal acquisition device based on laser-induced-breakdown spectroscopy Download PDFInfo
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- CN103954593A CN103954593A CN201410213552.0A CN201410213552A CN103954593A CN 103954593 A CN103954593 A CN 103954593A CN 201410213552 A CN201410213552 A CN 201410213552A CN 103954593 A CN103954593 A CN 103954593A
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Abstract
The invention discloses a plasma signal acquisition device based on a laser-induced-breakdown spectroscopy, which belongs to the technical field of atomic emission spectral measurement. According to the device, the radiation light signals diverged by plasmas are collected into parallel light by a concave mirror, and then guided to a spectrograph to be subjected to spectral analysis; or the radiation light signals of the plasmas generated by laser induction are acquired by more than two acquisition lenses from different angles, and input to a spectrograph to be superposed for spectral analysis. The device is capable of reducing measurement instability due to the non-uniformity of the radiation light signals of the plasmas, and increasing the acquisition efficiency of the signals, and then improving the repeatability of laser-induced-breakdown spectral measurement.
Description
Technical field
The present invention relates to a kind of plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, belong to atomic emission spectrum field of measuring technique.
Background technology
Laser-induced Breakdown Spectroscopy technology (Laser-induced breakdown spectroscopy is called for short LIBS), claims again induced with laser plasma spectrum technology, is a kind of brand-new material element analytical technology growing up in the twentieth century later stage.The principle of work of Laser-induced Breakdown Spectroscopy technology is: under intense laser pulse effect, the material of sample surfaces is provoked into as plasma decay rapidly, in attenuation process, give off the photon of characteristic frequency, produce characteristic spectral line, element kind and concentration information that its frequency and strength information have comprised analytic target.Laser-induced Breakdown Spectroscopy technical operation cost is low, and measuring speed is fast, have high sensitivity, without or need little sample pretreatment and realize the advantages such as multielement measurement, and radiationless harm has great development potentiality in commercial production.
But because the laser action point of Laser-induced Breakdown Spectroscopy technology is very little, ablation amount of substance is little, very obvious for inhomogeneous, anisotropic material matrix effect; Meanwhile, the difference of the physical parameter such as the fluctuation of laser energy, plasma temperature, electron density causes the repeatable accuracy of Laser-induced Breakdown Spectroscopy commercial measurement lower; In addition, the electronic noise of the impact of environmental parameter and instrument internal components and parts itself etc. all easily produces and disturbs LIBS; Therefore the measuring accuracy of utilizing Laser-induced Breakdown Spectroscopy technology directly to measure sample can not be guaranteed, and has limited the application of Laser-induced Breakdown Spectroscopy technology in production reality.
Sample is done to simple pre-service, for example, by the compressing repeatability that can increase Laser-induced Breakdown Spectroscopy commercial measurement of sample powder, sample is ground, mixes the impact that can reduce matrix effect, but still cannot eliminate like this measuring error that parameter changes and unevenness causes due to plasma itself completely.
In addition, due to the unevenness of plasma, the light signal that plasma sends to all directions also changes larger, and the difference causing due to the plasma position difference of aiming at of fibre-optical probe is also the key factor that causes measuring error.
Summary of the invention
The object of this invention is to provide a kind of plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, specifically, to utilize the light signal of concave mirror or the radiation of multiple collection lens plasma to collect, improve the collection efficiency of light signal, overcome the measuring error that the unevenness of the light signal of plasma resonance causes.
The first technical scheme of the present invention is:
A plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, described device comprises incident unit, light signal receiving element, sample and data analysis unit; Incident unit contains laser instrument and condenser lens; Described light signal receiving element contains collection lens, optical fiber and a spectrometer; It is characterized in that: light signal receiving element also comprises the concave mirror of a center drilling, this concave mirror is placed on the surface of sample, the reflecting surface of concave mirror is towards gathering lens, laser is after condenser lens focuses on, impact at sample surfaces and produce plasma through the center pit of concave mirror, these collection lens be arranged on plasma directly over; Plasma is positioned at the focus place of concave mirror; The radiant light signal that what concave mirror sent plasma disperse is converted into directional light and collects rear input spectrum instrument, and the spectral signal that spectrometer is obtained imports data analysis unit and carries out spectral analysis.
In technique scheme of the present invention, the reflecting surface of described concave mirror is parabolic type, the circular hole that the diameter of concave mirror center pit is 10mm-20mm.
The second technical scheme provided by the invention is: the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, and described device comprises incident unit, light signal receiving element, sample and data analysis unit; Incident unit contains laser instrument and condenser lens; Described light signal receiving element contains collection lens, optical fiber and spectrometer; It is characterized in that: described collection lens at least adopt 2, laser impacts at sample surfaces and produces plasma with vertical direction after condenser lens focuses on, described at least two collection lens are arranged on plasma top, and are arranged on the semisphere face taking plasma as the center of circle; The radiant light signal of dispersing that multiple collection lens send plasma gathers, and input corresponding spectrometer separately, each spectrometer has identical wavelength coverage, the spectral signal finally each spectrometer being obtained imports data analysis unit and superposes, then the spectral signal after stack is carried out to spectral analysis.
In the second technical scheme of the present invention, described at least two collection lens are evenly arranged in taking plasma as the center of circle, on the semisphere face that radius is 50mm-100mm.
The present invention has the following advantages and high-lighting effect: after the light signal of plasma resonance is collected through concave mirror and reflected, the information that originally inhomogeneous light signal comprises substantially can both enter optical fiber and be received by spectrometer, thus the measuring error of having avoided light signal anisotropy to cause.Adopt multiple collection lens to collect, and the signal that all directions are collected sums up, also can effectively overcome the unevenness of plasma resonance, thereby greatly improve efficiency and the stability of signals collecting, improve the sensitivity of measuring system, reduce the detection limit of element to be measured.
Brief description of the drawings
Fig. 1 is the structural principle schematic diagram of the first technical scheme embodiment of the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology provided by the invention.
Fig. 2 is the structural principle schematic diagram of the second technical scheme embodiment of the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology provided by the invention.
In figure: 1-pulsed laser; 2-condenser lens; 3-collection lens; 3a-the first gathers lens; 3b-the second gathers lens; 4-optical fiber; 5-spectrometer; 5a-the first spectrometer; 5b-the second spectrometer; 6-sample; 7-data analysis unit; 8-concave mirror; 9-plasma;
Embodiment
Below in conjunction with accompanying drawing, the present invention is further illustrated.
Fig. 1 is the structural principle schematic diagram of the first technical scheme embodiment of the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology provided by the invention, and described device comprises incident unit, light signal receiving element, sample and data analysis unit 7; Incident unit contains laser instrument 1 and condenser lens 2; Light signal receiving element contains collection lens 3, optical fiber 4 and spectrometer 5; Light signal receiving element also comprises the concave mirror 8 of a center drilling, this concave mirror is placed on the surface of sample 6, the reflecting surface of concave mirror is towards gathering lens 3, the circular hole that a diameter is 10-20mm is opened at the center of concave mirror 8, laser is after condenser lens focuses on, impact at sample surfaces and produce plasma through the circular hole at concave mirror center with the angle tilting, angle of inclination is to become between 45 degree to 60 degree with vertical direction; The reflecting surface of concave mirror is preferably parabolic type, gather lens 3 be arranged on plasma directly over; Plasma 9 is positioned at the focus place of concave mirror; The radiant light signal that what concave mirror 8 sent plasma disperse is converted into directional light and collects rear input spectrum instrument.The collected lens 3 of parallel optical signal gather and focus on rear input optical fibre 4, and the spectral signal that spectrometer is obtained importing data analysis unit 7 is carried out spectral analysis.
The second technical scheme is to adopt at least two collection lens, and the diverging light signal of different directions is all gathered, and has not only offset the unevenness of different directions signal, and can effectively increase the intensity of signal, is conducive to spectral analysis.Described device comprises incident unit, light signal receiving element, sample and data analysis unit 7; Incident unit contains laser instrument 1 and condenser lens 2; Described light signal receiving element contains collection lens, optical fiber 4 and spectrometer 5; Described collection lens at least adopt 2, the laser that laser instrument 1 sends is after condenser lens focuses on 2, impact at sample surfaces and produce plasma with vertical direction, described at least two collection lens are arranged on plasma top, and are arranged on the semisphere face taking plasma as the center of circle; The radiant light signal of dispersing that multiple collection lens send plasma 9 gathers, and input corresponding spectrometer separately, each spectrometer should have identical wavelength coverage, the spectral signal finally each spectrometer being obtained imports data analysis unit and superposes, then the spectral signal after stack is carried out to spectral analysis.
Fig. 2 is the structural principle schematic diagram of the second technical scheme embodiment of the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology provided by the invention, the present embodiment adopts two collection lens, first gathers lens 3a and the second collection lens 3b; Laser, after condenser lens focuses on, impacts at sample surfaces and produces plasma with vertical direction.Two collection lens are all arranged on the top of plasma 9, and being evenly arranged in radius is on the semisphere face of 50-100mm, and first gathers the corresponding first spectrometer 5a that wavelength coverage is identical of lens 3a; Second gathers the corresponding second spectrometer 5b that wavelength coverage is identical of lens 3b; After the light signal collecting from 2 collection lens imports spectral signal that 7,2 spectrometer analysis of data analysis unit obtain and superposes through optical fiber and spectrometer successively for spectral analysis.
Principle of work of the present invention is:
Laser-induced Breakdown Spectroscopy technology refers to that sample can be gasificated into high temperature, highdensity plasma in moment in the time that intense pulse laser is irradiated on sample through focusing on, and the plasma cognition in excited state externally discharges different rays.The wavelength that plasma emission spectroscopy spectral line is corresponding and intensity reflect respectively component and its concentration in surveyed object.This technology has high detection sensitivity, and cost is lower, can be simultaneously multiple element be analyzed etc. to advantage.
Due to the instability of parameter in space distribution such as the temperature of plasma itself, electron density and total populations, cause the position of detection probe and testing result to there is very strong correlativity; In addition, even in same detection position, the radiant light signal intensity that different laser pulses impact rear generation is also difficult to stable, so the method that the present invention adopts the method for concave mirror transmitting or many probes to collect signal overcomes the instability of the radiant light signal in this space distribution simultaneously.The repeatability that improves single measurement, contributes to improve measuring accuracy and accuracy.
Claims (4)
1. the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, described device comprises incident unit, light signal receiving element, sample and data analysis unit (7); Incident unit contains laser instrument (1) and condenser lens (2); Described light signal receiving element contains collection lens (3), optical fiber (4) and spectrometer (5); It is characterized in that: light signal receiving element also comprises the concave mirror (8) of a center drilling, this concave mirror is placed on the surface of sample (6), the reflecting surface of concave mirror is towards gathering lens, laser is after condenser lens focuses on (2), impact at sample surfaces and produce plasma through the center pit of concave mirror, these collection lens (3) be arranged on plasma directly over; Plasma (9) is positioned at the focus place of concave mirror; The radiant light signal of dispersing that concave mirror sends plasma (9) is converted into directional light and collects rear input spectrum instrument, and the spectral signal that spectrometer is obtained importing data analysis unit is carried out spectral analysis.
2. a kind of plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology as claimed in claim 1, is characterized in that: the reflecting surface of described concave mirror is parabolic type, the circular hole that the diameter of concave mirror center pit is 10mm-20mm.
3. the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, described device comprises incident unit, light signal receiving element, sample and data analysis unit (7); Incident unit contains laser instrument (1) and condenser lens (2); Described light signal receiving element contains collection lens, optical fiber (4) and spectrometer (5); It is characterized in that: described collection lens at least adopt 2, laser impacts at sample surfaces and produces plasma with vertical direction after condenser lens focuses on (2), described at least two collection lens are arranged on plasma top, and are arranged on the semisphere face taking plasma as the center of circle; The radiant light signal of dispersing that multiple collection lens send plasma (9) gathers, and input corresponding spectrometer separately, each spectrometer has identical wavelength coverage, the spectral signal finally each spectrometer being obtained imports data analysis unit and superposes, then the spectral signal after stack is carried out to spectral analysis.
4. the plasma signal harvester based on Laser-induced Breakdown Spectroscopy technology, is characterized in that: described at least two collection lens are evenly arranged in taking plasma as the center of circle, on the semisphere face that radius is 50mm-100mm.
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Cited By (11)
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| CN105136752A (en) * | 2015-09-25 | 2015-12-09 | 清华大学 | Online powder detecting device and measuring method based on laser-induced breakdown spectroscopy |
| CN105277531A (en) * | 2015-09-25 | 2016-01-27 | 清华大学 | Grading-based coal characteristic measurement method |
| CN105675587A (en) * | 2016-03-12 | 2016-06-15 | 西安交通大学 | Electric equipment online monitoring method and device based on laser-induced breakdown spectrometry |
| CN106706600A (en) * | 2016-12-05 | 2017-05-24 | 华中科技大学 | Remote LIBS (Laser-induced Breakdown Spectroscopy) test system with multi-probe optical signal collection unit |
| CN107091831A (en) * | 2017-05-28 | 2017-08-25 | 江西农业大学 | A kind of fruit heavy metal on-line measuring device and method |
| CN107340286A (en) * | 2017-08-10 | 2017-11-10 | 刘冠琳 | A kind of laser metabolic evaluation instrument and its detection method |
| CN108254362A (en) * | 2018-03-20 | 2018-07-06 | 苏州铭坤科技有限公司 | A kind of multi-channel laser induced breakdown spectrograph and multi-channel spectral detection method |
| CN109030466A (en) * | 2018-09-30 | 2018-12-18 | 清华大学 | A kind of laser breakdown spectral measurement system based on beam shaping |
| CN109164070A (en) * | 2018-08-21 | 2019-01-08 | 天津科技大学 | LIBS detection system and method for powdered rubber |
| CN109406494A (en) * | 2018-11-02 | 2019-03-01 | 柳州职业技术学院 | A kind of automation spectrum data gathering sample room with signal enhancing function |
| CN109507167A (en) * | 2018-11-16 | 2019-03-22 | 深圳达闼科技控股有限公司 | A kind of substance detecting method, calculates equipment and computer storage medium at device |
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Cited By (14)
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| CN105277531B (en) * | 2015-09-25 | 2018-04-10 | 清华大学 | A kind of coal characteristic measuring method based on stepping |
| CN105277531A (en) * | 2015-09-25 | 2016-01-27 | 清华大学 | Grading-based coal characteristic measurement method |
| CN105136752A (en) * | 2015-09-25 | 2015-12-09 | 清华大学 | Online powder detecting device and measuring method based on laser-induced breakdown spectroscopy |
| CN105136752B (en) * | 2015-09-25 | 2018-04-10 | 清华大学 | Online powder detection means and its measuring method based on LIBS |
| CN105675587A (en) * | 2016-03-12 | 2016-06-15 | 西安交通大学 | Electric equipment online monitoring method and device based on laser-induced breakdown spectrometry |
| CN106706600A (en) * | 2016-12-05 | 2017-05-24 | 华中科技大学 | Remote LIBS (Laser-induced Breakdown Spectroscopy) test system with multi-probe optical signal collection unit |
| CN106706600B (en) * | 2016-12-05 | 2019-07-09 | 华中科技大学 | A kind of long-range LIBS test macro having Multi probe optical signal collector unit |
| CN107091831A (en) * | 2017-05-28 | 2017-08-25 | 江西农业大学 | A kind of fruit heavy metal on-line measuring device and method |
| CN107340286A (en) * | 2017-08-10 | 2017-11-10 | 刘冠琳 | A kind of laser metabolic evaluation instrument and its detection method |
| CN108254362A (en) * | 2018-03-20 | 2018-07-06 | 苏州铭坤科技有限公司 | A kind of multi-channel laser induced breakdown spectrograph and multi-channel spectral detection method |
| CN109164070A (en) * | 2018-08-21 | 2019-01-08 | 天津科技大学 | LIBS detection system and method for powdered rubber |
| CN109030466A (en) * | 2018-09-30 | 2018-12-18 | 清华大学 | A kind of laser breakdown spectral measurement system based on beam shaping |
| CN109406494A (en) * | 2018-11-02 | 2019-03-01 | 柳州职业技术学院 | A kind of automation spectrum data gathering sample room with signal enhancing function |
| CN109507167A (en) * | 2018-11-16 | 2019-03-22 | 深圳达闼科技控股有限公司 | A kind of substance detecting method, calculates equipment and computer storage medium at device |
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Application publication date: 20140730 |