CN103953530A - Passive pulsation fluid filtering device - Google Patents
Passive pulsation fluid filtering device Download PDFInfo
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- CN103953530A CN103953530A CN201410213804.XA CN201410213804A CN103953530A CN 103953530 A CN103953530 A CN 103953530A CN 201410213804 A CN201410213804 A CN 201410213804A CN 103953530 A CN103953530 A CN 103953530A
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Abstract
The invention discloses a passive pulsation fluid filtering device, which comprises an upper substrate, a lower substrate and a thin film layer, wherein the thin film layer is arranged between the upper substrate and the lower substrate; the upper substrate, the lower substrate and the thin film layer are in sealing fit; the bottom of the upper substrate is laterally provided with a micro-channel used for fluid to flow; two ends of the micro-channel are respectively provided with an inlet from which the fluid flows in, and an outlet from which the fluid flows out; the lower substrate is longitudinally provided with a through hole. According to the passive pulsation fluid filtering device disclosed by the invention, the outlet flowing rate of the fluid can be fluctuated within a smaller range so as to achieve a purpose of filtering.
Description
Technical field
The present invention relates to fluid filtering field, relate in particular to a kind of passive type pulsating fluid filtering device.
Background technique
In recent years, many on-mechanical pumps are used in the driver part of micro-flow system, and these on-mechanical pumps utilize the principles such as electrofluid drives, Electromagnetically actuated, electric osmose, outwards pumping trace, stable fluid.Yet, because having electric field, magnetic field etc., these on-mechanical pumps act directly on fluid, and solution and biocompatibility that can only pumping specific components be low, are not suitable for the accurate control of output reagent volume.
Thereby, utilize piezoelectric element (piezo-electric sheet or piezoelectric stack) as transducer, to carry out the piezoelectric pump of Fluid Transport, be same as its have simple in structure, volume is little, lightweight, driving force is large, low leakage, response time are short, it is low to consume energy, noiseless, without advantages such as electromagnetic interference, be widely used in the driver part of micro-flow system.By coordinating of flow transducer and piezoelectric pump, set up piezoelectric pump closed loop control system and have great importance for the accurate control realizing piezoelectric pump output reagent volume.
Yet because the fluid of piezoelectric pump pumping is pulsed, and affected by the magnetic hysteresis, creep etc. of piezoelectric constant, the flow of pumping is also unequal, and the impact such as the response frequency of flow transducer is low, sensor is difficult to check accurately flow.
For the above-mentioned problems in the prior art, the Bozhi Yang of Carnegie Mellon University in 2005 has proposed a kind of for stablizing the structure of fluctuating flow, but is difficult to the flow rates by regulating the size of micro passage to regulate wave filter to adapt to.The Walker Inman of MIT in 2007 has made a kind of aggressive valve pneumatic pump, and added by film and liquid and hindered the filter unit forming at delivery side of pump, make the flow of the pulsation that pneumatic pump pumps obtain filtering, yet this method need to play with filter sheet the effect of micro passage, and filter sheet is not easy to be integrated in micro-system.The people such as Rensheng Deng of NUS in 2012 adopt gas container to carry out the fluctuation of buffer traffic, yet gas container volume is large, is not suitable for micro-system.
Therefore, need to design a kind of passive type pulsating fluid filtering device, for realizing filtering.
Summary of the invention
The problem that the present invention solves is a kind of passive type pulsating fluid filtering device, for realizing filtering.
For addressing the above problem, the present invention has disclosed a kind of passive type pulsating fluid filtering device, comprise upper substrate, infrabasal plate, thin layer, described thin layer is arranged between described upper substrate, infrabasal plate, sealing laminating between described upper substrate, infrabasal plate, thin layer, described upper substrate bottom transverse is provided with for the mobile micro passage of fluid, and at the two ends of described micro passage, offers respectively the import flowing into for fluid and the outlet of flowing out for fluid, and described infrabasal plate is vertically arranged with through hole.
Preferably, described thin layer is PDMS thin layer, and described upper substrate, infrabasal plate are glass substrate.
Preferably, the Young's modulus of described PDMS thin layer is 750kPa, and Poisson's ratio u is 0.49.
Preferably, between described thin layer, upper substrate and infrabasal plate, adopt irreversible sealing technology bonded seal.
Preferably, described irreversible sealing technology comprises oxygen plasma surface treatment or ultraviolet surface irradiation processing.
Preferably, described micro passage is rectangle or trapezoidal groove.
Preferably, the radius of described through hole is 2～6mm.
Preferably, the radius of described through hole is 5mm.
Compared with prior art, the present invention has the following advantages: disclosed passive type pulsating fluid filtering device, comprise upper substrate, infrabasal plate, thin layer, described thin layer is arranged between described upper substrate, infrabasal plate, sealing laminating between described upper substrate, infrabasal plate, thin layer, described upper substrate bottom transverse is provided with for the mobile micro passage of fluid, and at the two ends of described micro passage, offer respectively the import flowing into for fluid and the outlet of flowing out for fluid, described infrabasal plate is vertically arranged with through hole.Disclosed passive type pulsating fluid filtering device, during use, the pulsating fluid of being exported by piezoelectric pump flows into, from outlet, flows out from import, when the inlet velocity of pulsating fluid is greater than exit velocity, thin layer is expanded formation cavity volume downwards in through hole, and by fluid storage in the cavity volume being formed by thin layer, along with the storage volume of fluid is larger, cavity volume fluid pressure also increases thereupon; When the inlet velocity of pulsating fluid is during lower than exit velocity, thin layer upwards shrinks in through hole, pumps the fluid in cavity volume, and cavity volume internal pressure reduces, thereby the exit velocity of fluid is fluctuateed in less scope, reaches the object of filtering.
Accompanying drawing explanation
Fig. 1 is the three-dimensional exploded view of passive type pulsating fluid filtering device in the preferred embodiment of the present invention;
Fig. 2 is the sectional view of passive type pulsating fluid filtering device in the preferred embodiment of the present invention;
Fig. 3 is the structural representation when the inlet velocity of pulsating fluid is greater than exit velocity;
Fig. 4 is inlet velocity when the pulsating fluid structural representation during lower than exit velocity.
Embodiment
The existing driver part for Fluid Transport, because the fluid of piezoelectric pump pumping is pulsed, and magnetic hysteresis, creep of within each operation cycle, being subject to piezoelectric constant etc. affect, the flow of pumping is also unequal, and the impact such as the response frequency of flow transducer is low, sensor is difficult to check accurately flow.
In view of the above-mentioned problems in the prior art, the present invention has disclosed a kind of passive type pulsating fluid filtering device, comprise upper substrate, infrabasal plate, thin layer, described thin layer is arranged between described upper substrate, infrabasal plate, sealing laminating between described upper substrate, infrabasal plate, thin layer, described upper substrate bottom transverse is provided with for the mobile micro passage of fluid, and at the two ends of described micro passage, offer respectively the import flowing into for fluid and the outlet of flowing out for fluid, described infrabasal plate is vertically arranged with through hole.
Preferably, described thin layer is PDMS thin layer, and described upper substrate, infrabasal plate are glass substrate.
Preferably, the Young's modulus of described PDMS thin layer is 750kPa, and Poisson's ratio is 0.49.
Preferably, between described thin layer, upper substrate and infrabasal plate, adopt irreversible sealing technology bonded seal.
Preferably, described irreversible sealing technology comprises oxygen plasma surface treatment or ultraviolet surface irradiation processing.
Preferably, described micro passage is rectangle or trapezoidal groove.
Preferably, the radius of described through hole is 2～6mm.
Preferably, the radius of described through hole is 5mm.
Disclosed passive type pulsating fluid filtering device, during use, the pulsating fluid of being exported by piezoelectric pump flows into, from outlet, flows out from import, when the inlet velocity of pulsating fluid is greater than exit velocity, thin layer is expanded formation cavity volume downwards in through hole, and by fluid storage in the cavity volume being formed by thin layer, along with the storage volume of fluid is larger, cavity volume fluid pressure also increases thereupon; When the inlet velocity of pulsating fluid is during lower than exit velocity, thin layer upwards shrinks in through hole, pumps the fluid in cavity volume, and cavity volume internal pressure reduces, thereby the exit velocity of fluid is fluctuateed in less scope, reaches the object of filtering.
Below in conjunction with accompanying drawing, the technological scheme in the embodiment of the present invention is described in detail.
As shown in Figure 1 and Figure 2, the present invention has disclosed a kind of passive type pulsating fluid filtering device, comprise upper substrate 2, infrabasal plate 4, thin layer 3, thin layer 3 is arranged between upper substrate 2, infrabasal plate 4, sealing laminating between upper substrate 2, infrabasal plate 4, thin layer 3, upper substrate 2 bottom transverse are provided with for the mobile micro passage 1 of fluid, and 1 two ends offer respectively the import 11 flowing into for fluid and the outlet 12 of flowing out for fluid in micro passage, and infrabasal plate 4 is vertically arranged with through hole 5.
Particularly, thin layer 3 is PDMS thin layer, and upper substrate 2, infrabasal plate 4 are glass substrate.Due to the special nature of glass, other material and its surface bond just can form the cavity of sealing, generally have the mode of two kinds of bonded seals: reversible sealing and irreversible sealing.Because the PDMS film surface after solidifying itself has certain adhesive force, therefore clean in the situation that, can to its surface, not do any processing and between direct and glass, realize laminating, two substrates can be torn by external force, and can realize repeatedly sealing, as long as clean just to dry up later, can use again.This process is reversible, is called reversible encapsulation.But what lean on due to this sealing means is intermolecular interaction force (being Van der Waals force), therefore the intensity of sealing is not high, easily produces leak of liquid in the situation that large or rate of flow of fluid being high in micro passage 1 internal pressure.In the preferred embodiment of the present invention, employing be to realize permanent sealing between PDMS thin layer and glass by the mode that oxygen plasma surface treatment or ultraviolet surface irradiation are processed, be referred to as irreversible sealing.In the preferred embodiment of the present invention, between thin layer 3, upper substrate 2, infrabasal plate 4, adopt irreversible sealing, its advantage is that package strength is larger, and can significantly improve the hydrophillic nature of PDMS film surface.
Claimant finds by derivation of equation analysis, the filtering performance existence impact of the different frequency of three parameters of the Young's modulus of the radius of through hole 5, thin layer 3 and Poisson's ratio, micro passage 1 passage flow resistance, import 11 on filtering device.Affect on the factor of control accuracy basis analyzing, claimant designs the fluid filtering device consisting of PDMS film and micro passage, and theory analysis is carried out in the thin layer 3 of filtering device, micro passage 1, set up mathematical model, and derive the analytic solutions of thin layer 3 distortion.Utilize Comsol software to set up the FEM (finite element) model of filtering device, respectively thin layer 3 distortion and micro passage 1 flow resistance are carried out to numerical calculation, and analyzed micro passage 1 flow resistance, pump driver frequency and the impact of through hole 5 radiuses on filter effect.
By a large amount of analytical calculations, in the preferred embodiment of the present invention, the Young's modulus of PDMS thin layer 3 is 750kPa, and Poisson's ratio is 0.49.And, by modeling analysis, find that the radius that increases through hole 5 can improve filter effect significantly, therefore, in the preferred embodiment of the present invention, the radius of through hole 5 is 2～6mm.Most preferably, the radius of through hole 5 is 5mm, and when the radius of through hole 5 reaches 5mm, outlet 12 fluctuation amplitude is only 1% (now can meet and eliminate the needs of pulsing) of import fluctuation amplitude.Certainly, do not considering under the prerequisite of cost, the radius size of through hole 5 can, in the situation that infrabasal plate 4 allows, further be chosen the radius that numerical value is larger.
In the preferred embodiment of the present invention, micro passage 1 is rectangle or trapezoidal groove.Particularly, micro passage 1 is to be etched in by laser beam machining rectangle or the trapezoidal groove that upper substrate 2 bottoms form, after through forming the rectangle of sealing or trapezoidal with infrabasal plate 4, thin layer 3 bondings.Rectangle or trapezoidal groove are easy to process, can adjust according to practical application.The relating to parameters such as the flow frequency at the size Selection of micro passage 1 and import 11 places, fluid type, can adjust according to actual conditions, make filter effect reach optimum.
Disclosed passive type pulsating fluid filtering device, during use, as shown in Figure 3, Figure 4, the pulsating fluid of being exported by piezoelectric pump is from import 11 inflows, from exporting 12 outflows, when the inlet velocity of pulsating fluid is greater than exit velocity, thin layer 3 is expanded formation cavity volume downwards at through hole 5 places, and by fluid storage in the cavity volume being formed by thin layer, along with the storage volume of fluid is larger, cavity volume fluid pressure also increases thereupon; When the inlet velocity of pulsating fluid is during lower than exit velocity, thin layer 3 upwards shrinks at through hole 5 places, pumps the fluid in cavity volume, and cavity volume internal pressure reduces, thereby the exit velocity of fluid is fluctuateed in less scope, reach the object of the output of accurate control fluid volume.
Disclosed passive type pulsating fluid filtering device, simple in structure, manufacture easy.
Above-mentioned explanation to the disclosed embodiments, makes professional and technical personnel in the field can realize or use the present invention.To these embodiments' multiple modification, will be apparent for those skilled in the art, General Principle as defined herein can, in the situation that not departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention will can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (8)
1. a passive type pulsating fluid filtering device, it is characterized in that: comprise upper substrate, infrabasal plate, thin layer, described thin layer is arranged between described upper substrate, infrabasal plate, sealing laminating between described upper substrate, infrabasal plate, thin layer, described upper substrate bottom transverse is provided with for the mobile micro passage of fluid, and at the two ends of described micro passage, offer respectively the import flowing into for fluid and the outlet of flowing out for fluid, described infrabasal plate is vertically arranged with through hole.
2. passive type pulsating fluid filtering device according to claim 1, is characterized in that: described thin layer is PDMS thin layer, and described upper substrate, infrabasal plate are glass substrate.
3. passive type pulsating fluid filtering device according to claim 2, is characterized in that: the Young's modulus of described PDMS thin layer is 750kPa, and Poisson's ratio is 0.49.
4. passive type pulsating fluid filtering device according to claim 2, is characterized in that: between described thin layer, upper substrate and infrabasal plate, adopt irreversible sealing technology bonded seal.
5. passive type pulsating fluid filtering device according to claim 4, is characterized in that: described irreversible sealing technology comprises oxygen plasma surface treatment or ultraviolet surface irradiation processing.
6. passive type pulsating fluid filtering device according to claim 1, is characterized in that: described micro passage is rectangle or trapezoidal groove.
7. passive type pulsating fluid filtering device according to claim 1, is characterized in that: the radius of described through hole is 2～6mm.
8. passive type pulsating fluid filtering device according to claim 7, is characterized in that: the radius of described through hole is 5mm.
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| CN201410213804.XA CN103953530A (en) | 2014-05-20 | 2014-05-20 | Passive pulsation fluid filtering device |
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| CN201410213804.XA CN103953530A (en) | 2014-05-20 | 2014-05-20 | Passive pulsation fluid filtering device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108928122A (en) * | 2017-05-29 | 2018-12-04 | 精工爱普生株式会社 | Piezoelectric device, fluid ejection head, liquid ejection apparatus |
| CN111727365A (en) * | 2017-12-15 | 2020-09-29 | ams 国际有限公司 | Integrated particulate matter sensor system |
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| US20100187105A1 (en) * | 1999-06-28 | 2010-07-29 | California Institute Of Technology | Microfabricated Elastomeric Valve And Pump Systems |
| CN101042130A (en) * | 2007-04-30 | 2007-09-26 | 哈尔滨工程大学 | Pulseless type output micro-pump based on electromagnetic drive |
| WO2010012889A1 (en) * | 2008-08-01 | 2010-02-04 | Ams R&D Sas | Improved crinkle diaphragm pump |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108928122A (en) * | 2017-05-29 | 2018-12-04 | 精工爱普生株式会社 | Piezoelectric device, fluid ejection head, liquid ejection apparatus |
| CN111727365A (en) * | 2017-12-15 | 2020-09-29 | ams 国际有限公司 | Integrated particulate matter sensor system |
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