CN103941344A - Planar waveguide-type single fiber two-way wavelength division multiplexer - Google Patents
Planar waveguide-type single fiber two-way wavelength division multiplexer Download PDFInfo
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- CN103941344A CN103941344A CN201310021410.XA CN201310021410A CN103941344A CN 103941344 A CN103941344 A CN 103941344A CN 201310021410 A CN201310021410 A CN 201310021410A CN 103941344 A CN103941344 A CN 103941344A
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Abstract
The invention relates to the technical field of integrated optics, and provides a planar waveguide-type single fiber two-way wavelength division multiplexer which is made by a semiconductor silicon plane process based on a planar optical waveguide technology. The device is designed in a three section type hybrid series-parallel connection structure, including three directional couplers, and a Mach-Zehnder interferometer. A two-way data transmission method in which three channels of the wavelength division multiplexer combine an upstream burst mode and a downstream continuous mode can provide core hardware technology for a three network integration passive optical network (PON) of a broadcast network, a telecommunication network, and the internet, so that the transmission efficiency of optical signals is improved. The device is not only compact in structure, high in integration level, small in size, light in weight, and stable and reliable in performance, but also suitable for mass production; and production efficiency is high, and cost is low. The wavelength division multiplexer is suitable for a fiber-to-the-home (FTTH) network system of three network integration.
Description
Technical field
The present invention is a kind of planar waveguide-type two-way wavelength division multiplexer, belongs to integrated optics technique field.
Background technology
Network system that Fiber to the home at present (FTTH) is being divided main employing EPON (PON) mode of mixing, downgoing signal adopts broadcast mode, is divided into identical multiple signals and passes to respectively each ONT Optical Network Terminal (ONU); Upstream data transmits and adopts time-division multipoint access technologies, and each ONT Optical Network Terminal order in the time slot of distributing to it sends, and the unification of optical branching device intensive data is transmitted to optical line terminal.There is the problem of two aspects in existing two-way wavelength division multiplexer: first, existing device is all generally double-channel, if for the network system of fiber-to-the-home TV, voice-and-data " integration of three networks ", there is technically limitation, be difficult to realize " single fiber bi-directional ", " integration of three networks " truly.Secondly, existing device is generally to adopt traditional fused biconical taper technique to make, production technology difficulty is large, stability and reliability not high enough, be not suitable for producing in enormous quantities, and integrated level is low, loss ratio is larger.
Summary of the invention
The object of this invention is to provide one and comprise three directional couplers, the syllogic of a Mach-Zehnder interferometer is mixed series/parallel single fiber bi-directional three channel architectures, in conjunction with wavelength-division/solution wavelength division multiplexer of the bidirectional data transfers mode of uplink burst pattern and descending continuous mode, be specially adapted to TV, voice-and-data " integration of three networks " Fiber to the home occasion, can, for " integration of three networks " EPON (PON) system of broadcasting and television network, telecommunications network and internet provides kernal hardware technology, improve the transmission efficiency of light signal.
The solution of the present invention is that one of design adopts the semiconductor processing technology of silica-based deposition of silica and the planar optical waveguide that technique is made, Waveguide core is deposited on silicon-based wafer, and be placed in refractive index and thickness and be all different from the silicon dioxide liner of light core and cover covering, the refractive index of its liner and covering covering is slightly less than the refractive index of light core, and thickness is two to three times of light core thickness; This slab guide light channel structure feature is: leading portion coupling mechanism, center coupler, Mach-Zehnder interferometer, latter end coupling mechanism composition for specific wavelength design have separation, coupling, the syllogic of filter function is mixed wavelength-division/solution wavelength division multiplexer of series/parallel single fiber three channel architectures.
The present invention compared with the prior art tool has the following advantages:
1 because the semiconductor processing technology and the technique that adopt silica-based deposition of silica are made, stability and integrity problem that device that traditional fused biconical taper technique makes exists on production technology and device performance are overcome, production efficiency and the performance of device are improved, make device be applicable to producing in enormous quantities, and volume is little, lightweight, integrated level is high, cost is low.
2 mix series/parallel because design has adopted syllogic, and single fiber bi-directional three channel architectures, have overcome common single fiber bi-directional double-channel wavelength division multiplexer in the limitation that Fiber to the home applies, and have expanded the range of application of device, have improved the work efficiency of device.
Brief description of the drawings
The present invention has following accompanying drawing:
Fig. 1 is the structural representation block diagram that syllogic of the present invention is mixed series/parallel single fiber three channel bidirectional wavelength division multiplexing devices
Fig. 2 is the principle sketch that syllogic of the present invention is mixed series/parallel single fiber three channel bidirectional wavelength division multiplexing devices
Fig. 3 is the cross section structure schematic diagram in planar optical waveguide process of the present invention
Wherein: the unadulterated silicon dioxide under-clad layer of silicon-based wafer Fig. 3-2, Fig. 3-1 deposition
Fig. 3-3 deposition is mixed chromium layer Fig. 3-5, the silicon dioxide sandwich layer Fig. 3-4 photoresist image of germanium
The accurate etching of etching chromium layer Fig. 3-7, Fig. 3-6 silicon dioxide sandwich layer
The silicon dioxide that photoresist and the deposition boron-doping of chromium layer Fig. 3-9 and phosphorus are removed in Fig. 3-8 covers covering
1. leading portion coupling mechanism 2. Mach-Zehnder interferometer 3. center coupler 4. latter end coupling mechanisms in figure
5. Optical Fiber Transmission port 6. wavelength 1310nm upward traveling wave segment data signal transmission user ports
7. wavelength 1490nm downstream band data transfer signal user port
8. wavelength 1550nm downstream band cable tv broadcast signal user port 9. leading portion coupling mechanisms
10. center coupler 11. latter end coupling mechanism 12. silicon-based wafer 13. liners (silicon dioxide under-clad layer)
14. Waveguide cores (silicon dioxide sandwich layer), 15. chromium layer 16. photoresist image
The silicon dioxide of 17. boron-dopings and phosphorus covers covering
Embodiment
Set forth the specific embodiment of the present invention below in conjunction with accompanying drawing:
The present invention adopts semiconductor processing technology and the technique of silica-based deposition of silica to be made, as shown in the planar optical waveguide cross section structure schematic diagram of Fig. 3-9, by silicon-based wafer (12), liner (13), Waveguide core (14) and covering covering (17) form, and its processing step is:
1. adopt plasma vapor phase deposition, upper at silicon-based wafer (12), deposit liner (13), as shown in Fig. 3-2
2. adopt plasma vapor phase deposition, upper at liner (13), deposition Waveguide core (14), as shown in Fig. 3-3
3. after high annealing, upper at Waveguide core (14), sputter one deck chromium (15), as shown in Figure 3-4
4. apply one deck photoresist, under mask plate, complete the photoetching of photoresist by litho machine, form photoresist image, as in Figure 3-5
5. utilize reactive ion etching technology, etching chromium layer, forms the structural representation as shown in Fig. 3-6
6. according to the desired size of waveguide and precision, complete the accurate etching of SiO 2 waveguide light core, form designed slab guide light path, as shown in Fig. 3-7
7. remove photoresist and chromium layer, form the structural representation as shown in Fig. 3-8
8. the silicon dioxide of deposition boron-doping and phosphorus covers covering, forms the structural representation as shown in Fig. 3-9
9. cutting crystal wafer, polishing grinding nude film, completes the encapsulation of chip
Wherein the refractive index of Waveguide core (14) earth silicon material is slightly larger than the refractive index of liner (13) and covering covering (17) earth silicon material; And the thickness of liner (13) and covering covering (17) is two to three times of Waveguide core (14) thickness, to ensure that light signal transmits expeditiously in Waveguide core.
The bidirectional data transfers of network system that Fiber to the home: descending with 1490nm wavelength continuous mode, up with 1310nm wavelength burst mode; The cable tv broadcast of system that Fiber to the home: downlink transfer 1550nm continuous mode.For the function of realize that Fiber to the home system " single fiber bi-directional ", " integration of three networks ", the present invention designs and adopts a kind of syllogic to mix series/parallel, wavelength-division/solution wavelength division multiplexer of single fiber three channel architectures, as shown in Figure 1.Leading portion coupling mechanism (1) is designed to the data transfer signal of separate wavelengths 1550nm downstream band, center coupler (3) is designed to the data transfer signal of the up wave band of coupled wavelength 1310nm, and latter end coupling mechanism (4) is designed to the cable tv broadcast signal of separate wavelengths 1490nm downstream band.By the Optical Fiber Transmission port (5) of device, by all TV, voice-and-data signals that Fiber to the home need to transmit, transmit in EPON by an optical fiber; By the user port (6) of device, receive the wavelength 1310nm upward traveling wave segment data signal transmission of automatic network; By user port (7), receive the wavelength 1490nm downstream band data transfer signal of automatic network; Receive the wavelength 1550nm downstream band cable tv broadcast signal of automatic network by user port (8).These ports have formed four inputs, the output signal interface of single fiber wavelength division multiplexer; Meanwhile, its structure is two-way, also can, signal from user port (the up wave band port of 1310nm, 1490nm/1550nm downstream band port) input, export from Optical Fiber Transmission port.
Claims (5)
1. a planar waveguide-type two-way wavelength division multiplexer, by silicon-based wafer, liner, Waveguide core and covering covering form, and it is characterized in that: on silicon-based wafer, and deposition refractive index and the different silicon dioxide liner of thickness, Waveguide core and covering covering, form planar optical waveguide device; Comprise three directional couplers, Mach-Zehnder interferometer composition single fiber three channel architectures, use single integrated optical device, and the three kinds of different channels of video display, voice, data to transmitted in both directions in an optical fiber and the signal of wavelength are coupled and separate.
2. by wavelength division multiplexer claimed in claim 1, it is characterized in that: adopt Mach-Zehnder interferometer, obtain the interference wave of two outs of phase at its output terminal, then pass through next stage coupling mechanism, can obtain the light wave component of required wavelength.
3. by wavelength division multiplexer claimed in claim 1, it is characterized in that: by leading portion coupling mechanism, center coupler and Mach-Zehnder interferometer for specific wavelength, latter end coupling mechanism form have separate, wavelength-division/solution wavelength division multiplexer of syllogic mixing series/parallel single fiber three channel architectures of coupling, filter function; Leading portion coupler design is separate wavelengths 1550nm downstream band signal, and center coupler is designed to coupled wavelength 1310nm upward traveling wave segment signal, and latter end coupler design is separate wavelengths 1490nm downstream band signal.
4. by wavelength division multiplexer claimed in claim 1, it is characterized in that: by Optical Fiber Transmission port, wavelength 1310nm upward traveling wave segment signal user port, wavelength 1490nm downstream band signal user port, wavelength 1550nm downstream band signal user port forms its four inputs, output signal interface.Its structure is two-way, both can be signal from the input of Optical Fiber Transmission port, from user port output (being the up wave band port of 1310nm, 1490nm/1550nm downstream band port); Also can, signal from user port input (being the up wave band port of 1310nm, 1490nm/1550nm downstream band port), export from Optical Fiber Transmission port.
5. by wavelength division multiplexer claimed in claim 1, it is characterized in that: planar waveguide light core is to be deposited on silicon-based wafer, and be placed in refractive index and thickness and be all different from the liner of Waveguide core and cover covering and form planar optical waveguide device; The refractive index of its liner and covering covering is slightly less than the refractive index of Waveguide core; The thickness of liner and covering covering is two to three times of Waveguide core thickness.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310021410.XA CN103941344A (en) | 2013-01-21 | 2013-01-21 | Planar waveguide-type single fiber two-way wavelength division multiplexer |
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| CN201310021410.XA CN103941344A (en) | 2013-01-21 | 2013-01-21 | Planar waveguide-type single fiber two-way wavelength division multiplexer |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200980079Y (en) * | 2006-05-23 | 2007-11-21 | 陈谷红 | A single-fiber and di-directional wavelength division multiplexing device |
| JP2010262314A (en) * | 2010-08-11 | 2010-11-18 | Furukawa Electric Co Ltd:The | Planar optical waveguide circuit and optical multiplexer/demultiplexer using the same |
| CN102243340A (en) * | 2011-07-05 | 2011-11-16 | 武汉电信器件有限公司 | Hybrid integrated planar waveguide detector chip based on coarse wave decomposing and multiplexing |
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- 2013-01-21 CN CN201310021410.XA patent/CN103941344A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200980079Y (en) * | 2006-05-23 | 2007-11-21 | 陈谷红 | A single-fiber and di-directional wavelength division multiplexing device |
| JP2010262314A (en) * | 2010-08-11 | 2010-11-18 | Furukawa Electric Co Ltd:The | Planar optical waveguide circuit and optical multiplexer/demultiplexer using the same |
| CN102243340A (en) * | 2011-07-05 | 2011-11-16 | 武汉电信器件有限公司 | Hybrid integrated planar waveguide detector chip based on coarse wave decomposing and multiplexing |
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Application publication date: 20140723 |