CN103928281B - The high pressure cabin structure of high-voltage accelerator - Google Patents
The high pressure cabin structure of high-voltage accelerator Download PDFInfo
- Publication number
- CN103928281B CN103928281B CN201310685439.8A CN201310685439A CN103928281B CN 103928281 B CN103928281 B CN 103928281B CN 201310685439 A CN201310685439 A CN 201310685439A CN 103928281 B CN103928281 B CN 103928281B
- Authority
- CN
- China
- Prior art keywords
- high voltage
- cabin
- electric conductor
- insulated electric
- edge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H5/00—Direct voltage accelerators; Accelerators using single pulses
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/03—Mounting, supporting, spacing or insulating electrodes
- H01J2237/038—Insulating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/047—Changing particle velocity
- H01J2237/0473—Changing particle velocity accelerating
- H01J2237/04735—Changing particle velocity accelerating with electrostatic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/31701—Ion implantation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Particle Accelerators (AREA)
Abstract
The present invention relates to high pressure field, it discloses a kind of high pressure cabin structure of high-voltage accelerator, including a high voltage cabin, charged particle generator, accelerating tube, beam corridor and target;The inside in the high voltage cabin is hollow cavity, and the charged particle generator is arranged in the hollow cavity；The high voltage cabin is arranged on high current potential to assist the electronics for accelerating to come out from charged particle generator；High voltage cabin is enclosed in the shell of a ground connection；The outer vicinity at the edge in the high voltage cabin is provided with insulated electric conductor.The beneficial effects of the invention are as follows：The position of insulated electric conductor is set according to the difference of high voltage cabin structure and the airspace of the grounding shell of surrounding, so that the highest for further improving high voltage cabin bears voltage.
Description
Technical field
The present invention relates to the high pressure cabin structure in power high voltage field, more particularly to a kind of high-voltage accelerator.
Background technology
High-voltage accelerator generally has a high voltage cabin.High voltage cabin is typically by conductive material such as manufactures such as metals.
The inside in high voltage cabin is typically hollow cavity, and ion gun or electron gun are typically provided at the hollow cavity in high voltage cabin
It is interior；High voltage cabin is typically provided at high current potential（High voltage cabin current potential）, to assist to accelerate the ion out from ion gun
Or the electronics come out from electron gun；High voltage cabin and the part or subsystem of other high-voltage accelerators, are typically surrounded
In the shell of a ground connection；The shell of this ground connection protects personnel from high voltage injury when high-voltage accelerator is run, with
And accelerator components and subsystem are protected from high-tension infringement.
Insulating materials between high voltage cabin and grounding shell is typically air, and the highest operation current potential in high voltage cabin leads to
It is often that airspace between high voltage cabin and grounding shell is determined；But, between high voltage cabin and grounding shell
Air distance is usually constructed with a limitation, the i.e. size of the size-constrained high-voltage accelerator in design of grounding shell, therefore, right
In common high-voltage accelerator, the current potential in high voltage cabin is generally limited to about 300kV.
According to the practice of high-voltage engineering,（See E.Kuffel etc., " High-Voltage Technology basis ", ISBN-13：978-0-
7506-3634-6）, air breakdown electric discharge is mainly as caused by two effects.First effect is the electric-field strength of electrode surface
Effect is spent, second effect is the total voltage effect on airspace；First effect determines that air breakdown electric discharge is at what
Place and how to start, second effect determines whether local air breakdown electric discharge one small may be in its air
An air arc is developed on path, second effect can be described so again, and the highest in high voltage cabin bears current potential and sky
The distance at gas interval is not a linear relationship, sees Fig. 3, even if airspace increases same distance, in high voltage, high electricity
The increment that the highest of ballasting bears voltage can decline, and this nonlinear effect is referred to as total voltage effect.Come for high voltage cabin
Say, because current potential is high and airspace is big, total voltage effect is typically the limited dominating factor of working voltage.
Therefore, for a high voltage cabin with limited airspace, in order to which the highest for increasing high voltage cabin bears electricity
Pressure, either is required for being improved to the structure in high voltage cabin still to the voltage's distribiuting and electric-field intensity in airspace.
To lower the electric-field intensity of high voltage cabin edge, Tekletsadik and Low are draped over one's shoulders in United States Patent (USP) 7675046
A kind of high voltage cabin structure is revealed（See Fig. 1, Fig. 2 a and Fig. 2 b, be reprinted from United States Patent (USP) 7675046）.Fig. 1 is from U.S. Patent number
7675046 reprint, it is shown that the high voltage cabin structure with insulated electric conductor.Fig. 2 a are reprinted from U.S. Patent number 7675046, display
The details at high voltage cabin edge and insulated electric conductor.Fig. 2 b are reprinted from U.S. Patent number 7675046, it is shown that on high voltage cabin side
The Potential Distributing in airspace between edge and the ground potential border of surrounding.
In this structure, the outside edges in high voltage cabin are placed around the insulant outside insulated electric conductor, insulated electric conductor
The dielectric constant of matter is typically larger than 75 kv/inch, and the insulated electric conductor reduces the electric-field intensity of high voltage cabin edge, so that
The highest for improving high voltage cabin bears voltage, according to business news report, and this improved high voltage cabin structure can effectively be run
In 500KV high direct voltage.
However, the high voltage cabin structure that United States Patent (USP) 7675046 is disclosed fails to handle the influence of total voltage effect well.
Although some the high voltage cabin structures mentioned in United States Patent (USP) 7675046, to improve the voltage point improved in whole airspace
Cloth, but those structures were both unrealistic, were also technically what is be difficult to carry out.
Therefore, for a high voltage cabin with limited airspace high-voltage accelerator system, it is necessary to new technology
To improve the voltage's distribiuting in the Electric Field Distribution and airspace near high voltage cabin structure, the highest to increase high voltage cabin
Bear voltage.
The content of the invention
In order to solve the problems of the prior art, the invention provides a kind of high pressure cabin structure of high-voltage accelerator, solve
The highest in prior art high voltage appearance cabin bears the problem of voltage is not high.
The invention provides a kind of high pressure cabin structure of high-voltage accelerator, including a high voltage cabin, charged particle occurs
Device, accelerating tube, beam corridor and target;The inside in the high voltage cabin is hollow cavity, the charged particle generator
It is arranged in the hollow cavity；The high voltage cabin is arranged on high current potential to assist to accelerate to come out from charged particle generator
Electronics；High voltage cabin is enclosed in the shell of a ground connection；The outer vicinity at the edge in the high voltage cabin is provided with absolutely
Edge conductor；The insulated electric conductor is arranged between hyperbaric chamber and grounding shell to reduce the electric-field intensity of hyperbaric chamber edge and change
It is apt to hyperbaric chamber to the Potential Distributing between grounding shell.
As a further improvement on the present invention, the charged particle generator is ion gun or electron gun.
As a further improvement on the present invention, the high pressure cabin structure of described high-voltage accelerator accelerates high-tension electricity provided with one
Source, the acceleration high voltage power supply provides an accelerating potential Va between high voltage cabin and the shell of ground connection；The accelerating potential
Va ceiling voltage（V）In the range of 200KV to 1500KV.
As a further improvement on the present invention, the edge in the high voltage cabin is circular shape to reduce the electric field of edge
Intensity, generally has three airspaces between the high voltage cabin and grounding shell：First airspace, the second airspace,
With the 3rd airspace, the space scale of these airspaces is identical or differs；The each section of edge in high voltage cabin is generally right
Answer two airspaces in three airspaces.
As a further improvement on the present invention, the insulated electric conductor is the group of single entity or several sections of insulated electric conductor entities
Close;A certain section of a certain section of edge generally against above-mentioned high voltage cabin of insulated electric conductor, a certain section of insulated electric conductor is generally against institute
State two airspaces in three airspaces.
As a further improvement on the present invention, the insulated electric conductor includes a supporting support, an inner wire, a bag
Enclose the megohmite insulant of inner wire；The supporting support connection high voltage cabin and insulated electric conductor are simultaneously used as the support of insulated electric conductor；Branch
The inner wire of support support and insulated electric conductor is connected and so that inner wire has identical current potential Va with high voltage cabin；The support branch
Frame is the combination of single entity or several supporting support entities.
As a further improvement on the present invention, two skies that the position of the insulated electric conductor is faced according to the insulated electric conductor
The size at gas interval is set；When two airspaces are equal, the insulated electric conductor is set to be asymmetric；The position of insulated electric conductor
Put the line of symmetry for being generally arranged at the edge for being symmetrical with high voltage cabin.
As a further improvement on the present invention, two skies that the position of the insulated electric conductor is faced according to the insulated electric conductor
The size at gas interval is set；When two airspaces are unequal, the insulated electric conductor is set to be asymmetric；The insulation is led
The position of body is generally arranged at the line of symmetry at the edge for deviateing high voltage cabin, and its position is generally to a lateral deviation of wide airspace
From.
As a further improvement on the present invention, the insulated electric conductor reduces the electric-field strength near the perimeter in high voltage cabin
Degree；The asymmetric position of the insulated electric conductor is set the whole air of the high voltage cabin structure with different airspaces
The voltage's distribiuting in septal area domain serves improvement result.
The beneficial effects of the invention are as follows：Adjacent edges of this accelerator in high voltage cabin set insulated electric conductor, so as to change
The Electric Field Distribution of the adjacent edges in high voltage cabin；Meanwhile, according to the airspace of high voltage cabin structure and the grounding shell of surrounding
Difference the position of insulated electric conductor is set so that the highest for further improving high voltage cabin bears voltage.
【Brief description of the drawings】
Fig. 1 is reprinted from U.S. Patent number 7675046, the high voltage cabin structure with insulated electric conductor before display.
Fig. 2 a are reprinted from U.S. Patent number 7675046, it is shown that the details of high voltage cabin edge and insulated electric conductor.
Fig. 2 b are reprinted from U.S. Patent number 7675046, it is shown that high voltage cabin edge and around ground potential border it
Between airspace in Potential Distributing.
Fig. 3 illustrates the total voltage effect in high voltage cabin.
Fig. 4 illustrates the composition of a high-voltage accelerator with high voltage cabin.
Fig. 5 is a perspective view, it is shown that 1/8th of the high voltage cabin structure with insulated electric conductor.
Fig. 6 is high voltage cabin and the section view of insulated electric conductor of part.The set location of insulated electric conductor is symmetrical with high electricity
The edge of ballasting, the technology of this United States Patent (USP) 7675046 before being.
Fig. 7 is high voltage cabin and the section view of insulated electric conductor of part.Depending on high voltage cabin and the ground potential of surrounding
The distance on border, the set location of insulated electric conductor is asymmetric with the edge in high voltage cabin, and this is the technology of this patent;
Fig. 8 a show the distribution of the equipotential line around Fig. 6 high voltage cabin structure edge.
Fig. 8 b show the distribution of the equipotential line around Fig. 7 high voltage cabin structure edge.
Fig. 9 shows the Potential distribution of the outer surface of the insulated electric conductor outside Fig. 8 a and Fig. 8 b different high voltage cabin edges
Comparison.
Figure 10 shows the electric field point of the outer surface of the insulated electric conductor outside Fig. 8 a and Fig. 8 b different high voltage cabin edges
The comparison of cloth.
【Embodiment】
The present invention is further described for explanation and embodiment below in conjunction with the accompanying drawings.
A kind of high pressure cabin structure of high-voltage accelerator, including a high voltage cabin, charged particle generator, accelerating tube, beam
Flow transit and target;The inside in the high voltage cabin is hollow cavity, and the charged particle generator is arranged on the sky
In chambers of the heart body；The high voltage cabin is arranged on high current potential to assist the electronics for accelerating to come out from charged particle generator；High electricity
Ballasting is enclosed in the shell of a ground connection；The outer vicinity at the edge in the high voltage cabin is provided with insulated electric conductor；It is described
The electric-field intensity and improvement hyperbaric chamber that insulated electric conductor is arranged between hyperbaric chamber and grounding shell to reduce hyperbaric chamber edge are arrived
Potential Distributing between grounding shell.
The charged particle generator is ion gun or electron gun.
The high pressure cabin structure of described high-voltage accelerator accelerates high voltage power supply provided with one, and the acceleration high voltage power supply is in high electricity
One accelerating potential Va is provided between ballasting and the shell of ground connection；The ceiling voltage of the accelerating potential Va（V）Arrived in 200KV
In the range of 1500KV.
The edge in the high voltage cabin is circular shape to reduce the electric-field intensity of edge, the high voltage cabin and ground connection
Generally there are three airspaces between shell：First airspace, the second airspace and the 3rd airspace, these air
The space scale at interval is identical or differs；The each section of edge in high voltage cabin generally corresponds to two in three airspaces
Individual airspace.
The insulated electric conductor is the combination of single entity or several sections of insulated electric conductor entities;A certain section of insulated electric conductor is generally
Against a certain section of the edge in above-mentioned high voltage cabin, a certain section of insulated electric conductor is generally against two in three airspaces
Airspace.
The insulated electric conductor includes a supporting support, an inner wire, the megohmite insulant of an encirclement inner wire；It is described
Supporting support connects high voltage cabin and insulated electric conductor and is used as the support of insulated electric conductor；The inner wire of supporting support and insulated electric conductor
Connect and so that inner wire has identical current potential Va with high voltage cabin；The supporting support is single entity or several supports
The combination of support entity.
The sizes of two airspaces that the position of the insulated electric conductor is faced according to the insulated electric conductor is set；Two
When individual airspace is equal, the insulated electric conductor is set to be asymmetric；The position of insulated electric conductor, which is generally arranged at, is symmetrical with high electricity
The line of symmetry at the edge of ballasting.
The sizes of two airspaces that the position of the insulated electric conductor is faced according to the insulated electric conductor is set；Two
When individual airspace is unequal, the insulated electric conductor is set to be asymmetric；The position of the insulated electric conductor is generally arranged at deviation
Generally deviate to the side of wide airspace the line of symmetry at the edge in high voltage cabin, its position.
The insulated electric conductor reduces the electric-field intensity near the perimeter in high voltage cabin；The insulated electric conductor it is asymmetric
Position is set to be served to the voltage's distribiuting in the whole airspace region of the high voltage cabin structure with different airspaces
Improvement result.
Fig. 4 illustrates the composition of a high-voltage accelerator with high voltage cabin, and high voltage accelerator 30 generally includes one
Individual high voltage cabin 10, high voltage cabin is typically that by conductive material such as manufactures such as metals, high voltage cabin can also include one absolutely
Edge conductor 20, near insulated electric conductor 20 is placed on outside the edge in high voltage cabin, to the electric-field intensity around high voltage cabin structure
And voltage's distribiuting.
High-voltage accelerator 30 can further include charged particle generator（Such as ion gun）13, accelerating tube 12, beam
Flow transit 16 and target 18.For the personnel with high-voltage accelerator technical ability, charged particle generator, accelerating tube,
The construction and operation of beam corridor and target are the technical ability that have.
Charged particle generator 13 is generally drawn high voltage power supply 14 with one and is connected, and draws high voltage power supply 14 in high voltage cabin
One extraction high pressure is provided between charged particle generator（Vex）, draw high pressure is drawn from charged particle generator 13 with
Accelerate charged particle.In one embodiment, the extraction voltage for drawing power supply can be in the range of 1KV to 150KV.
One accelerates high voltage power supply 11 to provide an accelerating potential between high voltage cabin 10 and grounding shell 15（Va）,.
In one embodiment, the ceiling voltage that high voltage power supply may be provided is accelerated（V）In 100KV to 1500KV scope.In addition
Some applicable cases under, accelerate high voltage power supply may not be powered to high voltage cabin, or according to required charged particle beam 17
Energy only provides relatively low accelerating potential.Although a simply power supply for clarity, in Fig. 4, in actual design
In, accelerate high voltage power supply 11 to be the combination by two or more power supplys to provide required voltage range, for example
0-1500KV scope.
Fig. 5 is a perspective view, it is shown that 1/8th of a kind of high voltage cabin structure.High voltage cabin 101 be typically by
Conductive material is such as manufactures such as metals, and high voltage cabin 101 is typically to be enclosed in the shell 102 of a ground connection.This ground connection
Shell when high-voltage accelerator is run, protect personnel from high voltage injury, and protection accelerator components and subsystem exempt from
By high-tension infringement.The edge 106 in high voltage cabin is typically circular shape to reduce the electric-field intensity of edge, high voltage cabin
Airspace between 101 and grounding shell 102 is 103,104 and 105 respectively, and the distance of these airspaces is typically different
's.Have further to reduce compared with the electric-field intensity at the edge 106 of roundlet arc radius, the outer vicinity at edge 106 can be with
Place one or more insulated electric conductors 107.Insulated electric conductor 107 can be a single entity, or several sections of insulated electric conductor entities
Combination.
High voltage cabin 101 is typically by being insulation column（Do not shown in Fig. 5）Support.Fig. 6 be part high voltage cabin and
A certain section of section view of insulated electric conductor.The placement location of insulated electric conductor is symmetrical with the edge 106 in high voltage cabin, before this is
United States Patent (USP) 7675046 disclosed by technology.Insulated electric conductor 107 includes a supporting support 113, an inner wire 111, one
The individual megohmite insulant 112 for surrounding inner wire 111, the dielectric constant of megohmite insulant 112 is more than 75 kv/inch.In an implementation
In example, insulating bodies 112 can be a solid insulator.Solid solid insulation is potentially included, but is not limited only to, and is combined
Foamed plastics, polytetrafluoroethylene (PTFE)（PTFE）, chliorinated polyvinyl chloride（CPVC）, polyvinylidene fluoride（PVDF）, ethene trifluoro chloroethene
Alkene（ECTFE）, polytetrafluoroethylene (PTFE)（PTFE）Or polyimides（Such as Kapton）.Syntactic foam can be some fillers
（Such as epoxy, organosilicon, or resin）With some materials（Such as hollow glass bead, polymer beads）Mixture.
The connection high voltage of supporting support 113 cabin 101 and insulated electric conductor 107, and it is used as the support of insulated electric conductor 107.Support
Support 113 can be connected with the inner wire 111 of insulated electric conductor, and cause inner wire to have identical current potential with high voltage cabin 101
Va.Supporting support 113 can be the combination of a single entities or multiple supporting supports, and the quantity of supporting support and position take
The characteristics of feature certainly in insulated electric conductor 107, the shape in high voltage cabin 101 and supporting support itself.
In a kind of a certain section of section view of high voltage cabin structure shown by Fig. 6, the placement location pair of insulated electric conductor
Claim in the edge 106 in high voltage cabin.The edge camber line 106 in high voltage cabin is usually with 90 degree of radian.Line of symmetry 110 passes through
The center of edge camber line 106 and in point line of edge camber line 106,110 be edge camber line 106 line of symmetry.For change（Reduce）
The purpose of electric-field intensity around edge 106, the position of insulated electric conductor 107 is positioned at the line of symmetry 110 for being symmetrical with edge 106.
The underlying cause for so setting the position of insulated electric conductor 107 is the Electric Field Distribution around edge 106 is symmetrical with edge 106.
The design of insulated electric conductor, includes the shapes and sizes of its inner wire 111, megohmite insulant 112 and supporting support 113
Design, can be carried out, its design process is familiar with known to the personnel of high-voltage engineering according to the knowledge of high-voltage engineering.
A certain section of each edge in high voltage cabin is generally in face of two the air gaps, such as in Fig. 6 structure, side
Edge 106 is in face of two airspaces 103 and 104.Due to actual, airspace 103 and interval 104 typically have difference
Distance.In the example of fig. 6, airspace 104 is wider than interval 103.Determining to insulated electric conductor 107 is spaced between different air
Position should have obvious influence, and this will be explained in the figure 7.
However, the position of all insulated electric conductors disclosed in U.S. Patent number 7675046 is set, no matter each edge
Two airspaces faced are apart from upper identical or different, and the position of insulated electric conductor sets that to be all symmetrical with insulated electric conductor institute right
The edge for the hyperbaric chamber answered.Although this symmetrical position sets the electric-field intensity reduced near perimeter, fail to change
The kind voltage's distribiuting across airspace.
The positional symmetry of insulated electric conductor 107 is in the method to set up at edge 106, the technology before being（See U.S. Patent number
7675046）The unique set-up mode used.This method to set up fails to handle the influence of total voltage effect well.
For one have limited airspace high voltage cabin high-voltage accelerator system, the present invention propose more preferably and
The technology of the setting insulated electric conductor 107 more optimized, new technology improve simultaneously electric-field intensity around high voltage cabin edge 106 and
Voltage's distribiuting in airspace, by increasing capacitance it is possible to increase the highest in high voltage cabin bears voltage.This will be explained in the figure 7.
Fig. 7 is high voltage cabin and the section view of insulated electric conductor of part.The placement location of insulated electric conductor is asymmetric with height
The edge 106 in voltage cabin, this is the technology of this patent.Insulated electric conductor 207 includes a supporting support 123, an inner wire
121, the megohmite insulant 122 of an encirclement inner wire 121, the dielectric constant of megohmite insulant 122 is more than 75 kv/inch.One
In individual embodiment, insulating bodies 122 can be a solid insulator.Solid insulator is potentially included, but is not limited only to,
Syntactic foam, polytetrafluoroethylene (PTFE)（PTFE）, chliorinated polyvinyl chloride（CPVC）, polyvinylidene fluoride（PVDF）, ethene trifluoro
Vinyl chloride（ECTFE）, polytetrafluoroethylene (PTFE)（PTFE）Or polyimides（Such as Kapton）.Syntactic foam can be some fillings
Thing（Such as epoxy, organosilicon, or resin）With some materials（Such as hollow glass bead, polymer beads）Mixture.
The connection high voltage of supporting support 123 cabin 101 and insulated electric conductor 207, and it is used as the support of insulated electric conductor 207.Support
Support 123 can be connected with the inner wire 121 of insulated electric conductor, and cause inner wire to have identical current potential with high voltage cabin 101
Va.Supporting support 123 can be the combination of a single entities or multiple supporting supports, and the quantity of supporting support and position take
The characteristics of feature certainly in insulated electric conductor 207, the shape in high voltage cabin 101 and supporting support itself.
Each edge in high voltage cabin is generally in face of two the air gaps, such as in Fig. 7 structure, the face of edge 106
To two airspaces 103 and 104.Due to actual, airspace 103 and airspace 104 are typically with different
Distance.In the example of fig. 6, airspace 104 is more wider than interval 103.The position setting of insulated electric conductor 207 is asymmetric with edge
106 line of symmetry 110.For the specific example shown in Fig. 7, because airspace 104 is than 103 wider, insulated electric conductors of interval
207 position has been elevated above the position of line of symmetry 110, and such position sets and can enable a system to bear higher
Highest bear voltage.More generally it is asymmetric set insulated electric conductor method be, the setting of insulated electric conductor, from edge 106
The position of line of symmetry 110 is risen, and asymmetric position is moved to the direction of broader airspace 104.
The design of insulated electric conductor 207, including its inner wire 121, the shape of megohmite insulant 122 and supporting support 123 and big
Small design, can be carried out, its design process is familiar with known to the personnel of high-voltage engineering according to the knowledge of high-voltage engineering
's.
Between two air that the position at the edge 106 relative to high voltage cabin of insulated electric conductor is faced according to edge 106
Adjusted every 103 and 104 distance.The general rule of thumb of the position of asymmetric setting insulated electric conductor is that insulation is led
The setting of body, deviates the position of the line of symmetry 110 at edge 106, is moved to the side of wide airspace.
The position method to set up of such as Fig. 6 of technology before insulated electric conductor（It is referred to as being symmetrical arranged）It is exhausted with the art of this patent
The position method to set up of edge conductor（It is referred to as asymmetric to set）There is the difference of essence.There is provided solution is symmetrical arranged, only
Allow for and how to have reduced electric-field intensity near the perimeter of high voltage cabin；The there is provided solution party without being symmetrical arranged
Case, has considered not only the electric-field intensity how reduced near the perimeter of high voltage cabin, and for different air
The high voltage cabin structure at interval, it is also contemplated that how to improve the voltage's distribiuting in whole airspace region.
For the high voltage cabin structure with equal airspace, being symmetrical arranged for insulated electric conductor is one natural
Selection.However, high voltage cabin structure generally all has unequal airspace, therefore, the asymmetric setting side of insulated electric conductor
Method is better method.
The benefit of the asymmetric setting of insulated electric conductor will be detailed in result figure 8a, Fig. 8 b, Fig. 9 and Figure 10 that simulation is calculated
Ground explanation.
Fig. 8 a show the distribution of the equipotential line of the symmetrically arranged high voltage cabin structure of Fig. 6 use.Fig. 8 b are shown
The distribution of the equipotential line of the high voltage cabin structure of Fig. 7 asymmetric setting of use.In order to compare the result that simulation is calculated, two
In individual structure, the nacelle 101 in high voltage cabin, grounding shell 102, airspace 103 and 104 are all identicals；Insulated electric conductor
As inner wire 111 is with 121 size, as insulator 112 is also with 122 size；Airspace 104 is than interval
103 is more wider, but the position of insulated electric conductor is different.Fig. 8 a are using being symmetrical arranged, and Fig. 8 b are set using asymmetric.At this
In calculating, the nacelle 101 in high voltage cabin, the voltage of inner wire 111 and 121 are all disposed within identical voltage Va, are set to
670KV.The equipotential line 131 and 141 in airspace is all depicted in figure, their current potential is all 500KV.Selection
The reason for this equipotential line is, all closely outer surface of insulator 112 and 122 respectively of equipotential line 131 and 141.
In being symmetrical arranged of Fig. 8 a, equipotential line 131 is bent downwardly near insulator, and this is by insulator 112
What position was determined.A points in the vicinity of the bottom of insulator 112, near that, the surface field of insulator is high, space electricity
Gesture is also high, and A points are also the surface of insulator 112 closest to the local vicinity of the downside of grounding shell 102.Path 132 is from A
Possible shortest path of the point to the air breakdown electric discharge development of the downside of grounding shell 102, it has been experienced that, most air
Disruptive discharge event takes path 132..
In Fig. 8 b asymmetric setting, because the position of insulated electric conductor is moved upward, equipotential line 141 also there occurs
Corresponding change.Equipotential line 141 is basically parallel to the downside of grounding shell 102.On the other hand, on the right side of shell 10 2
On one side, equipotential line 141 than equipotential line 131 closer to the right side of grounding shell 10 2 a bit, still, due to interval 104 compare
It is spaced 103 wide, equipotential line 141 is closer to will not influence the overall high voltage capability of system on the right side of grounding shell.Exhausted
The B points of the vicinity of the bottom of edge body 122, near that, the surface field of insulator is high, and space potential is also high, and B points are also insulation
Local vicinity of the surface of body 122 closest to the downside of grounding shell 102.Path 142 is 102 from B point to grounding shell
The possible shortest path of the air breakdown electric discharge development of downside.Compare path 132 and path 142, can clearly find, road
Footpath 142 is longer than path 132.Therefore, development of the air breakdown electric discharge along path 142 is than the development difficulty along path 132
It is many.Therefore, the asymmetric setting of insulated electric conductor, the highest that can largely improve whole high voltage cabin bears voltage.
Fig. 9 further illustrates the benefit of the asymmetric setting of insulated electric conductor.Fig. 9 shows being symmetrical arranged and scheming for Fig. 8 a
The comparison of the Potential distribution of the outer surface of the insulated electric conductor of 8b asymmetric setting.In fig .9, fine line is setting symmetrical about
Insulator 112 surface Potential distribution, heavy line is the current potential point on the surface of the insulator 122 around asymmetric setting
Cloth.Transverse axis Y represents the distance with the downside of grounding shell 102 of some point on insulator surface, and larger Y represents this
Point has a longer distance to the downside of grounding shell 102.For identical potential level, in order to reduce air breakdown electric discharge
Possibility, it is desirable to have big Y.Fig. 9 is clearly illustrated, at identical about 500KV current potential, and asymmetric setting makes apart from Y
Add.
Figure 10 further illustrates the benefit of the asymmetric setting of insulated electric conductor.Figure 10 show Fig. 8 a be symmetrical arranged and
The comparison of the electric-field intensity distribution of the outer surface of the insulated electric conductor of Fig. 8 b asymmetric setting.In Fig. 10, fine line is to surround
The electric-field intensity distribution on the surface of symmetrically arranged insulator 112, heavy line is the table of the insulator 122 around asymmetric setting
The electric-field intensity distribution in face.Transverse axis Y represents some point and the distance of the downside of grounding shell 102 on insulator surface, compared with
Big Y represents that this point has a longer distance to the downside of grounding shell 102.In order to reduce the possibility of air breakdown,
Wish that the electric-field intensity on surface is low.Figure 10 clearly illustrates, the maximum electric field strength ratio on the insulated electric conductor surface of asymmetric setting
The maximum electric field intensity decreases on symmetrically arranged insulated electric conductor surface about 10%.
The asymmetric method to set up of the insulated electric conductor of the present invention is better than the insulated electric conductor that U.S. Patent number 7675046 is disclosed
It is symmetrical arranged method.It is exhausted that the asymmetric method to set up and U.S. Patent number 7675046 of the insulated electric conductor of the art of this patent are disclosed
The method that is symmetrical arranged of edge conductor has the difference of essence, and essential difference is：There is provided solution is symmetrical arranged, simply
It take into account and how to reduce electric-field intensity near the perimeter of high voltage cabin；The there is provided solution without being symmetrical arranged,
Consider not only and how to have reduced electric-field intensity near the perimeter of high voltage cabin, and for different airspaces
High voltage cabin structure, it is also contemplated that how to improve the voltage's distribiuting in whole airspace region.The reality in one high voltage cabin
Example is simulated calculating and shown, the either improvement of the voltage's distribiuting in the reduction of surface field intensity, or airspace region, no
It is symmetrical arranged and is better than symmetrical arranged, therefore, the highest for improving whole high voltage cabin system is born voltage by asymmetric set.
The asymmetric method to set up of the insulated electric conductor of the present invention is exhausted also superior to the others that U.S. Patent number 7675046 is disclosed
The method to set up of edge conductor.Although U.S. Patent number 7675046 discloses using multiple insulated electric conductors to improve airspace
The method of Potential distribution, however, those methods were both unrealistic, it is also technically what is be difficult to carry out.
The asymmetric method to set up of the insulated electric conductor of the present invention is practical, simple and effective raising high voltage cabin
The method that highest bears voltage.
Above content is to combine specific preferred embodiment further description made for the present invention, it is impossible to assert
The specific implementation of the present invention is confined to these explanations.For general technical staff of the technical field of the invention,
On the premise of not departing from present inventive concept, some simple deduction or replace can also be made, should all be considered as belonging to the present invention's
Protection domain.
Claims (5)
1. a kind of high pressure cabin structure of high-voltage accelerator, it is characterised in that:Including a high voltage cabin, charged particle generator,
Accelerating tube, beam corridor and target;The inside in the high voltage cabin is hollow cavity, and the charged particle generator is set
In the hollow cavity；The high voltage cabin is arranged on high current potential to assist the electricity for accelerating to come out from charged particle generator
Son；High voltage cabin is enclosed in the shell of a ground connection；The outer vicinity at the edge in the high voltage cabin is provided with insulation and led
Body；Electric-field intensity and improve high that the insulated electric conductor is arranged between hyperbaric chamber and grounding shell to reduce hyperbaric chamber edge
Ballasting is to the Potential Distributing between grounding shell；The edge in the high voltage cabin is circular shape to reduce the electric-field strength of edge
Degree, there is three airspaces between the high voltage cabin and grounding shell：First airspace, the second airspace and the 3rd
Airspace, the space scale of these airspaces is identical or differs；Described three of each section of edge correspondence in high voltage cabin
Two airspaces in airspace；Two airspaces that the position of the insulated electric conductor is faced according to the insulated electric conductor
Size set；When two airspaces are unequal, the insulated electric conductor is set to be asymmetric；The position of the insulated electric conductor
The line of symmetry at the edge for being positioned away from high voltage cabin is put, its position is deviateed to the side of wide airspace；The insulation is led
Body reduces the electric-field intensity near the perimeter in high voltage cabin；The asymmetric position of the insulated electric conductor is set to difference
The voltage's distribiuting in whole airspace region of high voltage cabin structure of airspace serve improvement result.
2. the high pressure cabin structure of high-voltage accelerator according to claim 1, it is characterised in that：The charged particle generator
For ion gun or electron gun.
3. the high pressure cabin structure of high-voltage accelerator according to claim 1, it is characterised in that：Described high-voltage accelerator
High pressure cabin structure accelerates high voltage power supply provided with one, and the acceleration high voltage power supply provides one between high voltage cabin and the shell of ground connection
Individual accelerating potential Va；The ceiling voltage of the accelerating potential Va（V）In the range of 200KV to 1500KV.
4. the high pressure cabin structure of high-voltage accelerator according to claim 1, it is characterised in that：The insulated electric conductor is single
Entity or several sections of insulated electric conductor entities combination;A certain section of the edge in the opposite above-mentioned high voltage cabin of a certain section of insulated electric conductor,
Two airspaces in opposite three airspaces of a certain section of insulated electric conductor.
5. the high pressure cabin structure of high-voltage accelerator according to claim 1, it is characterised in that：The insulated electric conductor includes one
Individual supporting support, an inner wire, the megohmite insulant of an encirclement inner wire；The supporting support connection high voltage cabin and insulation
Conductor is simultaneously used as the support of insulated electric conductor；The inner wire of supporting support and insulated electric conductor connects and causes inner wire and high voltage cabin
With identical current potential Va；The supporting support is the combination of single entity or several supporting support entities.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310685439.8A CN103928281B (en) | 2013-12-16 | 2013-12-16 | The high pressure cabin structure of high-voltage accelerator |
| PCT/CN2014/074252 WO2015089950A1 (en) | 2013-12-16 | 2014-03-28 | High-voltage chamber structure of high-voltage accelerator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310685439.8A CN103928281B (en) | 2013-12-16 | 2013-12-16 | The high pressure cabin structure of high-voltage accelerator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103928281A CN103928281A (en) | 2014-07-16 |
| CN103928281B true CN103928281B (en) | 2017-08-25 |
Family
ID=51146463
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310685439.8A Active CN103928281B (en) | 2013-12-16 | 2013-12-16 | The high pressure cabin structure of high-voltage accelerator |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103928281B (en) |
| WO (1) | WO2015089950A1 (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3983401A (en) * | 1975-03-13 | 1976-09-28 | Electron Beam Microfabrication Corporation | Method and apparatus for target support in electron projection systems |
| CN101162679A (en) * | 2006-10-11 | 2008-04-16 | 日新离子机器株式会社 | Ion injector |
| CN101563749A (en) * | 2006-09-27 | 2009-10-21 | 瓦里安半导体设备公司 | Terminal structure of an ion implanter |
| CN101802963A (en) * | 2007-08-27 | 2010-08-11 | 瓦里安半导体设备公司 | Ion Implantation Equipment terminal structure with the insulated electric conductor that contains dielectric fins |
| CN101802964A (en) * | 2007-08-29 | 2010-08-11 | 瓦里安半导体设备公司 | The technology that terminal is isolated in the Ion Implantation Equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7770448B2 (en) * | 2005-09-16 | 2010-08-10 | Air Liquide Electronics U.S. LP. | Chemical storage device with integrated load cell |
| US7799999B2 (en) * | 2007-08-20 | 2010-09-21 | Varian Semiconductor Equipment Associates, Inc. | Insulated conducting device with multiple insulation segments |
-
2013
- 2013-12-16 CN CN201310685439.8A patent/CN103928281B/en active Active
-
2014
- 2014-03-28 WO PCT/CN2014/074252 patent/WO2015089950A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3983401A (en) * | 1975-03-13 | 1976-09-28 | Electron Beam Microfabrication Corporation | Method and apparatus for target support in electron projection systems |
| CN101563749A (en) * | 2006-09-27 | 2009-10-21 | 瓦里安半导体设备公司 | Terminal structure of an ion implanter |
| CN101162679A (en) * | 2006-10-11 | 2008-04-16 | 日新离子机器株式会社 | Ion injector |
| CN101802963A (en) * | 2007-08-27 | 2010-08-11 | 瓦里安半导体设备公司 | Ion Implantation Equipment terminal structure with the insulated electric conductor that contains dielectric fins |
| CN101802964A (en) * | 2007-08-29 | 2010-08-11 | 瓦里安半导体设备公司 | The technology that terminal is isolated in the Ion Implantation Equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015089950A1 (en) | 2015-06-25 |
| CN103928281A (en) | 2014-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2016201758A1 (en) | Passive compound strong-ionization discharging plasma lightning rejection device | |
| CN101410930B (en) | Insulator system for a terminal structure of an ion implantation system | |
| CN102326252A (en) | Electrical apparatus with electrostatic shield | |
| TW200816285A (en) | Terminal structure of an ion implanter | |
| US7786377B2 (en) | Device to attenuate atmospheric discharges | |
| CN103928281B (en) | The high pressure cabin structure of high-voltage accelerator | |
| Benziada et al. | Numerical simulation of the barrier effect on the electric field distribution in point-plane air gaps using COMSOL multiphysics | |
| TW200913022A (en) | Terminal structures of an ion implanter having insulated conductors with dielectric fins | |
| CN110768107A (en) | Lightning arrester and method for non-lightning-induced ground | |
| JP2004335390A (en) | Cone type insulation spacer | |
| KR101734050B1 (en) | Isolation Structure For Vacuum Circuit Breaker | |
| CN108231300B (en) | A kind of parallel connection clearance device of anti-thunder insulator | |
| SE531321C2 (en) | High Voltage Cable Connection | |
| JP6356311B1 (en) | Lightning strike control device | |
| CN204482145U (en) | Electrocurtain accelerator | |
| Srikant et al. | Simulation of air breakdown mechanism using different electrodes | |
| Chang et al. | Physical mechanism of electrode coatings to suppress wire particle’s firefly motion under DC stress and selecting criterion for in situ applications | |
| JP7224558B2 (en) | power converter | |
| CN206673318U (en) | A kind of integrated active and passive integral plasma drive thunder device | |
| Hu et al. | Influence of tower width and ion current on gap flashover characteristics of EHV/UHV AC and DC hybrid transmission lines during live-working | |
| CN210608015U (en) | Negative oxygen ion generating device and air purifier | |
| CN107484319B (en) | Expandable plasma generating device | |
| CN209997031U (en) | atmospheric pressure low temperature plasma emitter and therapeutic instrument based on same | |
| JPS6023514Y2 (en) | thrust generator | |
| Lasabi | Performance of insulators under HVDC stress. |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |