CN103926021A - Method for determining electron temperature of plasma - Google Patents
Method for determining electron temperature of plasma Download PDFInfo
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- CN103926021A CN103926021A CN201410138006.5A CN201410138006A CN103926021A CN 103926021 A CN103926021 A CN 103926021A CN 201410138006 A CN201410138006 A CN 201410138006A CN 103926021 A CN103926021 A CN 103926021A
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Abstract
The invention discloses a method for determining the electron temperature of plasma. Atomic spectral lines are selected as many as possible; 141 iron atomic spectral lines are drawn on a two-dimensional Boltzmann plane, and the electron temperature of the plasma is worked out; whether a linear correlation coefficient is less than a preset value of 0.98 is judged, iteration is stopped if the linear correlation coefficient is greater than or equal to 0.98, and the next step is executed if the linear correlation coefficient is less than 0.98; the distances between all data points and a fitting straight line are worked out, and the data point having the largest distance from the fitting straight line is found and assumed to be a; the data point a is deleted, the electron temperature of the plasma is worked out again by means of the remaining data points until iteration conditions are met, and the method is ceased. By means of the method, the iteration Boltzmann method is adopted and improved, the electron temperature of the plasma is worked out by combining laser induction, and the problems that when the electron temperature of the plasma is worked out with the Boltzmann diagonal method, given parameters are different, large errors also exist in signal strength measurement, and obtaining of the electron temperature is affected are solved.
Description
Technical field
The invention belongs to and solve electron temperature technical field, relate in particular to a kind of method of definite plasma electron temperature.
Background technology
Electron temperature is to describe the important thermodynamic parameter of plasma properties.When local thermodynamic equilibrium, the various temperature of plasma, as approximately equals such as electron temperature, ion temperature and excitation temperatures, are therefore referred to as plasma electron temperature.Solve at present plasma electron temperature common method and have Sha Ha-Boltzmann method, atom continuous radiation intensity rate method, Boltzmann Double-Line Method and Boltzmann oblique line method etc.Utilize Boltzmann oblique line method to solve isoionic electron temperature, comparatively speaking, the method is simple to operate and accuracy is higher.But, utilize the method to solve the correlation parameter that electron temperature need to be known spectral line in advance, such as the excitation energy E of upper energy level
m, upper energy level degeneracy g
mthe all rate A of spontaneous transition with corresponding spectral line
mndeng, these parameters that provide in document are not quite similar, and in addition, also there is larger experimental error in the measurement of spectral line signal intensity, and these all affect the Exact Solution of electron temperature.
Summary of the invention
The object of the present invention is to provide a kind of method of definite plasma electron temperature, be intended to solve while utilizing Boltzmann oblique line method to solve plasma electrons temperature, because the parameter providing in document is not quite similar, the measuring error of signal intensity and uncertain problem that the plasma electron temperature that brings solves.
The present invention is achieved in that a kind of method of definite plasma electron temperature comprises:
Step 1, preliminary election atomic spectral line as much as possible;
Step 2, according to formula
141 iron atom spectral lines are drawn in two-dimentional Boltzmann plane, calculate the electron temperature of plasma;
Step 3, judge whether linearly dependent coefficient is less than preset value 0.98, if be more than or equal to 0.98, stop iteration, if be less than 0.98, carry out step 4;
Step 4, calculate all data points to the distance of fitting a straight line, and find out apart from fitting a straight line apart from maximum data point and be assumed to be a;
Step 5, deleted data points a, utilize remaining data point, and operation steps two again, until meet iterated conditional, stop.
Further, along with the increase of iterations, linear fit coefficient increases gradually, and degree of accuracy and precision that electron temperature solves are significantly improved.
effect gathers
The method of definite plasma electron temperature of the present invention, adopt and improved iteration Boltzmann method, while having avoided utilizing Boltzmann oblique line method to solve isoionic electron temperature, because the parameter that provides in document is different, the measuring error of signal intensity and uncertain problem that the electron temperature that causes solves.
The utilization of the method has significantly improved the degree of accuracy that plasma electrons temperature solves, and before the method is used, the temperature of plasma is 19273K, but data fitting related coefficient only has 0.27; After 108 iteration, data fitting related coefficient brings up to 0.98, and data fitting is very stable, and the preci-sion and accuracy that electron temperature solves is higher, and now the electron temperature of plasma is 8058K.
Accompanying drawing explanation
Fig. 1 is definite method flow of the plasma electron temperature that provides of the embodiment of the present invention;
Fig. 2 is the Boltzmann figure of the iron atom spectral line that provides of the embodiment of the present invention;
Fig. 3 is that the electron temperature Te that provides of the embodiment of the present invention and linear fit coefficients R are with the Changing Pattern of iterations.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
Fig. 1 shows definite method flow of plasma electron temperature of the present invention, and as shown in the figure, the present invention is achieved in that a kind of method of definite plasma electron temperature comprises:
S101: preliminary election atomic spectral line as much as possible;
S102: 141 iron atom spectral lines are drawn in two-dimentional Boltzmann plane to the electron temperature of the plasma calculating;
S103: judge whether linearly dependent coefficient is less than preset value 0.98;
S104: calculate all data points to the distance of fitting a straight line, and find out apart from fitting a straight line apart from maximum data point and be assumed to be a;
S105: deleted data points a, utilizes remaining data point, and operation steps S101, stops until meeting iterated conditional again.
Concrete steps of the present invention are:
The first step, preliminary election atomic spectral line as much as possible, 141 iron atom spectral lines of preliminary election;
Second step, according to formula
141 iron atom spectral lines are drawn in two-dimentional Boltzmann plane, and as shown in Figure 2, now linear fit related coefficient is only 0.27, and the electron temperature of the plasma calculating is 19273K;
The 3rd step, judges whether linearly dependent coefficient is less than preset value 0.98, if be more than or equal to 0.98, returns to second step, if be less than 0.98, carries out the 4th step;
The 4th step, calculates all data points to the distance of fitting a straight line, and finds out apart from fitting a straight line apart from maximum data point and be assumed to be a;
The 5th step, deleted data points a, utilizes remaining data point, and operation steps S101, stops until meeting iterated conditional again.
Further, as shown in Figure 3, along with continuous iteration, linear fit coefficient increases (by 0.27, being increased to 0.98) gradually, and electron temperature changes to 8058K by 19273K, and along with the increase of iterations, it is more and more stable that electron temperature becomes.
Definite method of plasma electron temperature of the present invention, adopt and improved iteration Boltzmann method, while having avoided utilizing Boltzmann oblique line method to solve isoionic electron temperature, because the parameter providing in document is not quite similar, the measurement of signal intensity exists the Exact Solution problem that affects electron temperature compared with large error.
Although above-mentioned, by reference to the accompanying drawings the specific embodiment of the present invention is described; but be not limiting the scope of the invention; one of ordinary skill in the art should be understood that; on the basis of technical scheme of the present invention, those skilled in the art do not need to pay various modifications that performing creative labour can make or distortion still within protection scope of the present invention.
Claims (2)
1. a method for definite plasma electron temperature, is characterized in that, definite method of described plasma electron temperature comprises:
Step 1, preliminary election atomic spectral line as much as possible, selected spectral line is The more the better, and the upper energy levels distribution of selected spectral line is more discrete better;
Step 2, according to formula
take formula left-hand component as ordinate, E
mfor horizontal ordinate, 141 iron atom spectral lines are drawn in two-dimentional Boltzmann plane, by linear fit, utilize the slope meter that matching obtains to calculate the electron temperature of plasma;
Step 3, judge whether linearly dependent coefficient is less than preset value 0.98, if be more than or equal to 0.98, stop iteration, if be less than 0.98, carry out step 4;
Step 4, calculate all data points to the distance of fitting a straight line, and find out apart from fitting a straight line apart from maximum data point and be assumed to be a;
Step 5, deleted data points a, utilize remaining data point, and operation steps two again, until meet iterated conditional, stop.
2. the method for definite plasma electron temperature as claimed in claim 1, is characterized in that, along with the increase of iterations, linear fit coefficient increases gradually, and degree of accuracy and precision that electron temperature solves are more and more higher.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410138006.5A CN103926021A (en) | 2014-03-31 | 2014-03-31 | Method for determining electron temperature of plasma |
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| CN201410138006.5A CN103926021A (en) | 2014-03-31 | 2014-03-31 | Method for determining electron temperature of plasma |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064753A (en) * | 2017-03-23 | 2017-08-18 | 西南交通大学 | Bow net arc-plasma Multi-parameter Data Acquisition method and apparatus |
| CN111029239A (en) * | 2019-12-27 | 2020-04-17 | 上海华力集成电路制造有限公司 | Method for estimating plasma gas temperature in dry etching equipment |
| CN116429286A (en) * | 2023-06-07 | 2023-07-14 | 西南交通大学 | Object surface transient temperature measurement method, device, equipment and readable storage medium |
-
2014
- 2014-03-31 CN CN201410138006.5A patent/CN103926021A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107064753A (en) * | 2017-03-23 | 2017-08-18 | 西南交通大学 | Bow net arc-plasma Multi-parameter Data Acquisition method and apparatus |
| CN111029239A (en) * | 2019-12-27 | 2020-04-17 | 上海华力集成电路制造有限公司 | Method for estimating plasma gas temperature in dry etching equipment |
| CN116429286A (en) * | 2023-06-07 | 2023-07-14 | 西南交通大学 | Object surface transient temperature measurement method, device, equipment and readable storage medium |
| CN116429286B (en) * | 2023-06-07 | 2023-09-01 | 西南交通大学 | Object surface transient temperature measurement method, device, equipment and readable storage medium |
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Application publication date: 20140716 |
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