CN103915358A - 一种工艺角自动检测装置及方法 - Google Patents
一种工艺角自动检测装置及方法 Download PDFInfo
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- CN103915358A CN103915358A CN201210591270.5A CN201210591270A CN103915358A CN 103915358 A CN103915358 A CN 103915358A CN 201210591270 A CN201210591270 A CN 201210591270A CN 103915358 A CN103915358 A CN 103915358A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201210591270.5A CN103915358B (zh) | 2012-12-30 | 2012-12-30 | 一种工艺角自动检测装置及方法 |
Applications Claiming Priority (1)
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CN201210591270.5A CN103915358B (zh) | 2012-12-30 | 2012-12-30 | 一种工艺角自动检测装置及方法 |
Publications (2)
Publication Number | Publication Date |
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CN103915358A true CN103915358A (zh) | 2014-07-09 |
CN103915358B CN103915358B (zh) | 2017-02-08 |
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CN201210591270.5A Active CN103915358B (zh) | 2012-12-30 | 2012-12-30 | 一种工艺角自动检测装置及方法 |
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CN (1) | CN103915358B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015196772A1 (zh) * | 2014-06-25 | 2015-12-30 | 东南大学 | 一种基于自定时振荡环的工艺角检测电路 |
CN106601643A (zh) * | 2016-11-15 | 2017-04-26 | 珠海格力电器股份有限公司 | 芯片的mos工艺角的测量方法、装置和*** |
WO2018038802A3 (en) * | 2016-08-24 | 2018-05-17 | Qualcomm Incorporated | Adaptive power regulation methods and systems |
TWI707220B (zh) * | 2019-05-23 | 2020-10-11 | 瑞昱半導體股份有限公司 | 電壓控制電路和電壓控制方法 |
CN112507654A (zh) * | 2020-11-20 | 2021-03-16 | 上海华力微电子有限公司 | Mos工艺角spice模型参数获取方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6563354B1 (en) * | 2000-03-22 | 2003-05-13 | Cypress Semiconductor Corp. | On-chip circuit to compensate output drive strength across process corners |
CN1937410B (zh) * | 2006-08-17 | 2010-05-12 | 复旦大学 | 一种自适应工艺和温度补偿的高频环振型锁相环电路 |
US7659783B2 (en) * | 2007-07-16 | 2010-02-09 | Micrel, Inc. | System and method for phase-locked loop (PLL) for high-speed memory interface (HSMI) |
CN101425795B (zh) * | 2008-11-20 | 2010-12-08 | 四川和芯微电子股份有限公司 | 一种精确锯齿波发生电路 |
-
2012
- 2012-12-30 CN CN201210591270.5A patent/CN103915358B/zh active Active
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2015196772A1 (zh) * | 2014-06-25 | 2015-12-30 | 东南大学 | 一种基于自定时振荡环的工艺角检测电路 |
US10422830B2 (en) | 2014-06-25 | 2019-09-24 | Southeast University | Process corner detection circuit based on self-timing oscillation ring |
WO2018038802A3 (en) * | 2016-08-24 | 2018-05-17 | Qualcomm Incorporated | Adaptive power regulation methods and systems |
US10394471B2 (en) | 2016-08-24 | 2019-08-27 | Qualcomm Incorporated | Adaptive power regulation methods and systems |
CN106601643A (zh) * | 2016-11-15 | 2017-04-26 | 珠海格力电器股份有限公司 | 芯片的mos工艺角的测量方法、装置和*** |
CN106601643B (zh) * | 2016-11-15 | 2019-04-05 | 珠海格力电器股份有限公司 | 芯片的mos工艺角的测量方法、装置和*** |
TWI707220B (zh) * | 2019-05-23 | 2020-10-11 | 瑞昱半導體股份有限公司 | 電壓控制電路和電壓控制方法 |
CN112507654A (zh) * | 2020-11-20 | 2021-03-16 | 上海华力微电子有限公司 | Mos工艺角spice模型参数获取方法 |
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Publication number | Publication date |
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CN103915358B (zh) | 2017-02-08 |
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Effective date of registration: 20200103 Address after: 1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN BYD MICROELECTRONICS Co.,Ltd. Address before: BYD 518118 Shenzhen Road, Guangdong province Pingshan New District No. 3009 Patentee before: BYD Co.,Ltd. |
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Address after: 518119 No.1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: BYD Semiconductor Co.,Ltd. Address before: 518119 No.1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee before: BYD Semiconductor Co.,Ltd. Address after: 1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: BYD Semiconductor Co.,Ltd. Address before: 1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN BYD MICROELECTRONICS Co.,Ltd. |
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