CN103913417A - Crystal orientation detection device of single crystal silicon rod and crystal orientation detection method thereof - Google Patents
Crystal orientation detection device of single crystal silicon rod and crystal orientation detection method thereof Download PDFInfo
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- CN103913417A CN103913417A CN201410106247.1A CN201410106247A CN103913417A CN 103913417 A CN103913417 A CN 103913417A CN 201410106247 A CN201410106247 A CN 201410106247A CN 103913417 A CN103913417 A CN 103913417A
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Abstract
The invention relates to the field of crystal growth furnaces, and aims at providing a crystal orientation detection device of a single crystal silicon rod, and a crystal orientation detection method thereof. The crystal orientation detection device of a single crystal silicon rod is used for detecting the crystal orientation of a round single crystal silicon rod clamped on a cutting workbench, and comprises a support, a support arm, a crystal orientation detection sensor support, a cylinder, a fixed shield, an elevating shield, a crystal orientation detection sensor; The crystal orientation detection method of the crystal orientation detection device of a single crystal silicon rod comprises: operating the cylinder, turning on a gas source, starting the crystal orientation detection sensor, and calculating a minimum of the distance between the round single crystal silicon rod surface and a laser emitting point, wherein the distance minimum is the crystal orientation of the crystal rod. The device of the invention can automatically detect the crystal orientation of a crystal rod clamped on the workbench, adopts a non-contact measuring method, is high in detection precision, rapid in response, and low in time consumption, and can realize automatic control; the device is simple in structure and low in cost, needs no manual intervention, and is suitable for full-automatic control of single crystal silicon rod assembly line processing workshops.
Description
Technical field
The invention relates to crystal growing furnace field, particularly a kind of silicon single crystal rod crystal orientation pick-up unit and crystal orientation detection method thereof.
Background technology
In solar module production run, more and more applied because it has the feature that photoelectric transformation efficiency is high as the starting material of solar module with monocrystalline silicon.
In the time producing solar battery sheet, first the silicon single crystal rod of monocrystal growing furnace growth to be cut into the short pole of certain length, and then short pole to be processed into after butt, grinding process to four jiaos be the square rod of circular arc, finally, again by square rod cutting flakiness, these thin slices have just become solar battery sheet after subsequent treatment.Be processed in the process of square rod at monocrystalline silicon round rod, require four crest lines of silicon single crystal rod to be retained in four vertex positions of square rod, the object of doing is like this technological requirement that the crystal orientation in order to guarantee crystal bar meets cell piece.
In prior art, be that crystal bar is bonded on worktable, crystal orientation generally judges by human eye, and then excises the rim charge of non-crystal bar crest line position, thisly judges that by naked eyes the detection method precision in crystal orientation is low, efficiency is low, operating personnel is required high.From now on, crystal bar processing will be taked continuous-flow type operation, crystal bar from blocking, butt, grinding, comprise that the processes such as logistics between these operations are all that robotization completes, do not need manual intervention.At this moment, when crystal bar packs into after butting machine, thereby the crystal orientation that how could automatically detect crystal bar judges that butt position becomes problem demanding prompt solution.
Summary of the invention
Fundamental purpose of the present invention is to overcome deficiency of the prior art, and a kind of crystal orientation pick-up unit and detection method thereof that can automatically detect the crystal orientation that is clamped in the crystal bar on worktable is provided.For solving the problems of the technologies described above, solution of the present invention is:
A kind of silicon single crystal rod crystal orientation pick-up unit is provided, and the crystal orientation of the circular single crystal silicon rod for detection of clamping on butt worktable, comprises support, sway brace, crystal orientation detecting sensor support, cylinder, secure shroud, lifting guard shield, crystal orientation detecting sensor;
Sway brace is fixed on support, secure shroud is arranged on supporting walls, crystal orientation detecting sensor is arranged in secure shroud by crystal orientation detecting sensor support, crystal orientation detecting sensor, for by measuring circular single crystal silicon rod surface to the distance of measuring zero point, is carried out the crystal orientation judgement of circular single crystal silicon rod;
The middle part of secure shroud is provided with hole, cylinder one end is arranged on sway brace, the other end is through the hole at secure shroud middle part, and be connected with lifting guard shield by the piston rod of cylinder, piston rod drives lifting guard shield to move up and down, to complete the opening and closing of lifting guard shield, when lifting guard shield is closed, can crystal orientation detecting sensor be covered in lifting guard shield by moving down of lifting guard shield, when lifting guard shield is opened, can crystal orientation detecting sensor be exposed in lifting guard shield by moving on lifting guard shield.
As further improvement, described cylinder is the double acting single piston rod cylinder with guide pole.
As further improvement, described crystal orientation detecting sensor is laser range sensor.
As further improvement, described silicon single crystal rod crystal orientation pick-up unit is also provided with air jet pipe and air jet pipe bracing frame, and air jet pipe is fixed on cylinder by air jet pipe bracing frame; Air jet pipe is connected with source of the gas, and source of the gas, for pass into pressurized air in air jet pipe, has gas outlet on the tube wall of air jet pipe, and aligning crystal orientation, gas outlet detecting sensor, for clearing up the pollutant at detecting sensor Laser emission mouth place, crystal orientation.
As further improvement, on the tube wall of described air jet pipe, have 6 gas outlets.
As further improvement, described source of the gas adopts the pressurized air that pressure is 0.5MPa.
As further improvement, described sway brace is fixed by screw and support.
The crystal orientation detection method that a kind of silicon single crystal rod crystal orientation pick-up unit based on described is provided, specifically comprises the steps:
(1) pack circular single crystal silicon rod into butt worktable, and make circular single crystal silicon rod start at the uniform velocity to rotate, the central axis of circular single crystal silicon rod is rotation center;
(2) operation cylinder, stretches out the piston rod of cylinder, drives lifting guard shield to rise, and exposes crystal orientation detecting sensor;
(3) open source of the gas, make the gas outlet ejection of pressurized air from air jet pipe, blow the pollutant at detecting sensor Laser emission mouth place, crystal orientation off;
(4) start crystal orientation detecting sensor, make crystal orientation detecting sensor Emission Lasers be irradiated to the surface of circular single crystal silicon rod, can measure the surface of circular single crystal silicon rod and send distance F a little to laser; Circular single crystal silicon rod rotates a circle around central axis, and the used time is T, is located in the T time, and per interval Δ t measures once, n measured value be F(n Δ t), wherein Δ t is measuring intervals of TIME,
To what record
individual data are carried out after high-pass filtering, and calculated minimum Fmin establishes Fmin=F (n
0Δ t), minimum value F (n
0Δ t) meets formula:
F (n
0Δ t)-F[(n
0-1) Δ t] < 0, and F[(n
0+ 1) Δ t]-F (n
0Δ is > 0 t)
Wherein, n
0represent n
0individual measurement point, i.e. measurement point corresponding to minimum value Fmin;
Distance minimum value Fmin is a little sent to laser in circular single crystal silicon rod surface, also be the maximal value at circular single crystal silicon rod surface distance circular single crystal silicon rod center, and the crystal orientation of circular single crystal silicon rod shows as four crest lines of crystal bar surface upper process in macroscopic view, the Fmin therefore recording position on corresponding circular silicon single crystal rod be the crystal orientation of crystal bar;
(5) operation cylinder, regains the piston rod of cylinder, drives lifting guard shield to move down, and covers crystal orientation detecting sensor.
Compared with prior art, the invention has the beneficial effects as follows:
Can automatically detect the crystal orientation that is clamped in the crystal bar on worktable, adopt contactless measurement, accuracy of detection is high, respond fast, consuming time short, can automatically control; Simple in structure, old low, do not need artificial participation, is applicable to the Automatic Control of silicon single crystal rod streamline job shop.
Accompanying drawing explanation
Fig. 1 is three-dimensional axonometric drawing of the present invention.
Fig. 2 is air jet pipe schematic diagram of the present invention.
Fig. 3 is course of work schematic diagram of the present invention.
Reference numeral in figure is: 1 support; 2 secure shroud; 3 sway braces; 4 cylinders; 5 lifting guard shields; 6 air jet pipe bracing frames; 7 air jet pipes; 8 crystal orientation detecting sensors; 9 crystal orientation detecting sensor supports; 10 circular single crystal silicon rods.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is described in further detail:
A kind of silicon single crystal rod crystal orientation pick-up unit as shown in Figure 1, the crystal orientation of the circular single crystal silicon rod 10 for detection of clamping on butt worktable, comprises support 1, sway brace 3, crystal orientation detecting sensor support 9, cylinder 4, secure shroud 2, lifting guard shield 5, crystal orientation detecting sensor 8, air jet pipe 7 and air jet pipe bracing frame 6.
Sway brace 3 is fixed by screws on support 1, and secure shroud 2 is arranged on supporting walls 3, and crystal orientation detecting sensor 8 is arranged in secure shroud 2 by crystal orientation detecting sensor support 9.Crystal orientation detecting sensor 8, for by measuring circular single crystal silicon rod 10 surfaces to the distance of measuring zero point, is carried out the crystal orientation judgement of circular single crystal silicon rod 10, and crystal orientation detecting sensor 8 adopts laser range sensor here.
The middle part of secure shroud 2 is provided with hole, cylinder 4 one end are arranged on sway brace 3, and the other end passes the hole at secure shroud 2 middle parts, and is connected with lifting guard shield 5 by the piston rod of cylinder 4, piston rod drives lifting guard shield 5 to move up and down, to complete the opening and closing of lifting guard shield 5.When lifting guard shield 5 is closed, can crystal orientation detecting sensor 8 be covered in lifting guard shield 5 by moving down of lifting guard shield 5; When lifting guard shield 5 is opened, can crystal orientation detecting sensor 8 be exposed in lifting guard shield 5 by moving on lifting guard shield 5.Here cylinder 4 adopts the double acting single piston rod cylinder with guide pole.
Air jet pipe 7 is fixed on cylinder 4 by air jet pipe bracing frame 6, and air jet pipe 7 is connected with source of the gas, and source of the gas is for pass into pressurized air in air jet pipe 7, and source of the gas adopts the pressurized air that pressure is 0.5MPa.As shown in Figure 2, have 6 gas outlets on the tube wall of air jet pipe 7, aligning crystal orientation, gas outlet detecting sensor 8, for clearing up the pollutant at crystal orientation detecting sensor 8 Laser emission mouth places.
Based on the crystal orientation detection method of described a kind of silicon single crystal rod crystal orientation pick-up unit, can, with reference to shown in figure 3, specifically comprise the steps:
(1) pack circular single crystal silicon rod 10 into butt worktable, and circular single crystal silicon rod 10 is started with certain angular velocity rotation, the central axis of circular single crystal silicon rod 10 is rotation center;
(2) operation cylinder 4, stretches out the piston rod of cylinder 4, drives lifting guard shield 5 to rise, and exposes crystal orientation detecting sensor 8;
(3) open source of the gas, make the gas outlet ejection of pressurized air from air jet pipe 7, blow the pollutant at crystal orientation detecting sensor 8 Laser emission mouth places off;
(4) start crystal orientation detecting sensor 8, make detecting sensor 8 Emission Lasers in crystal orientation be irradiated to the surface of circular single crystal silicon rod 10, can measure the surface of circular single crystal silicon rod 10 and send distance F a little to laser; Circular single crystal silicon rod 10 rotates a circle around central axis, and the used time is T, is located in the T time, and per interval Δ t measures once, n measured value be F(n Δ t), wherein Δ t is measuring intervals of TIME,
To what record
individual data are carried out after high-pass filtering, and calculated minimum Fmin establishes Fmin=F (n
0Δ t), minimum value F (n
0Δ t) meets formula:
F (n
0Δ t)-F[(n
0-1) Δ t] < 0, and F[(n
0+ 1) Δ t]-F (n
0Δ is > 0 t)
Wherein, n
0represent n
0individual measurement point, i.e. measurement point corresponding to minimum value Fmin.
Distance minimum value Fmin is a little sent to laser in circular single crystal silicon rod 10 surfaces, also be the maximal value at circular single crystal silicon rod 10 surface distance circular single crystal silicon rod 10 centers, and the crystal orientation of circular single crystal silicon rod 10 shows as four crest lines of crystal bar surface upper process in macroscopic view, the Fmin therefore recording position on corresponding circular silicon single crystal rod 10 be the crystal orientation of crystal bar;
(5) operation cylinder 4, regains the piston rod of cylinder 4, drives lifting guard shield 5 to move down, and covers crystal orientation detecting sensor 8, avoids crystal orientation detecting sensor 8 contaminated.
Finally, it should be noted that above what enumerate is only specific embodiments of the invention.Obviously, the invention is not restricted to above embodiment, can also have a lot of distortion.All distortion that those of ordinary skill in the art can directly derive or associate from content disclosed by the invention, all should think protection scope of the present invention.
Claims (8)
1. a silicon single crystal rod crystal orientation pick-up unit, the crystal orientation of the circular single crystal silicon rod for detection of clamping on butt worktable, it is characterized in that, comprise support, sway brace, crystal orientation detecting sensor support, cylinder, secure shroud, lifting guard shield, crystal orientation detecting sensor;
Sway brace is fixed on support, secure shroud is arranged on supporting walls, crystal orientation detecting sensor is arranged in secure shroud by crystal orientation detecting sensor support, crystal orientation detecting sensor, for by measuring circular single crystal silicon rod surface to the distance of measuring zero point, is carried out the crystal orientation judgement of circular single crystal silicon rod;
The middle part of secure shroud is provided with hole, cylinder one end is arranged on sway brace, the other end is through the hole at secure shroud middle part, and be connected with lifting guard shield by the piston rod of cylinder, piston rod drives lifting guard shield to move up and down, to complete the opening and closing of lifting guard shield, when lifting guard shield is closed, can crystal orientation detecting sensor be covered in lifting guard shield by moving down of lifting guard shield, when lifting guard shield is opened, can crystal orientation detecting sensor be exposed in lifting guard shield by moving on lifting guard shield.
2. a kind of silicon single crystal rod according to claim 1 crystal orientation pick-up unit, is characterized in that, described cylinder is the double acting single piston rod cylinder with guide pole.
3. a kind of silicon single crystal rod according to claim 1 crystal orientation pick-up unit, is characterized in that, described crystal orientation detecting sensor is laser range sensor.
4. a kind of silicon single crystal rod according to claim 3 crystal orientation pick-up unit, is characterized in that, described silicon single crystal rod crystal orientation pick-up unit is also provided with air jet pipe and air jet pipe bracing frame, and air jet pipe is fixed on cylinder by air jet pipe bracing frame; Air jet pipe is connected with source of the gas, and source of the gas, for pass into pressurized air in air jet pipe, has gas outlet on the tube wall of air jet pipe, and aligning crystal orientation, gas outlet detecting sensor, for clearing up the pollutant at detecting sensor Laser emission mouth place, crystal orientation.
5. a kind of silicon single crystal rod according to claim 4 crystal orientation pick-up unit, is characterized in that, has 6 gas outlets on the tube wall of described air jet pipe.
6. a kind of silicon single crystal rod according to claim 4 crystal orientation pick-up unit, is characterized in that, described source of the gas adopts the pressurized air that pressure is 0.5MPa.
7. according to a kind of silicon single crystal rod crystal orientation pick-up unit described in claim 1 to 6 any one, it is characterized in that, described sway brace is fixed by screw and support.
8. the crystal orientation detection method based on a kind of silicon single crystal rod claimed in claim 4 crystal orientation pick-up unit, is characterized in that, specifically comprises the steps:
(1) pack circular single crystal silicon rod into butt worktable, and make circular single crystal silicon rod start at the uniform velocity to rotate, the central axis of circular single crystal silicon rod is rotation center;
(2) operation cylinder, stretches out the piston rod of cylinder, drives lifting guard shield to rise, and exposes crystal orientation detecting sensor;
(3) open source of the gas, make the gas outlet ejection of pressurized air from air jet pipe, blow the pollutant at detecting sensor Laser emission mouth place, crystal orientation off;
(4) start crystal orientation detecting sensor, make crystal orientation detecting sensor Emission Lasers be irradiated to the surface of circular single crystal silicon rod, can measure the surface of circular single crystal silicon rod and send distance F a little to laser; Circular single crystal silicon rod rotates a circle around central axis, and the used time is T, is located in the T time, and per interval Δ t measures once, n measured value be F(n Δ t), wherein Δ t is measuring intervals of TIME,
To what record
individual data are carried out after high-pass filtering, and calculated minimum Fmin establishes Fmin=F (n
0Δ t), minimum value F (n
0Δ t) meets formula:
F (n
0Δ t)-F[(n
0-1) Δ t] < 0, and F[(n
0+ 1) Δ t]-F (n
0Δ is > 0 t)
Wherein, n
0represent n
0individual measurement point, i.e. measurement point corresponding to minimum value Fmin;
Distance minimum value Fmin is a little sent to laser in circular single crystal silicon rod surface, also be the maximal value at circular single crystal silicon rod surface distance circular single crystal silicon rod center, and the crystal orientation of circular single crystal silicon rod shows as four crest lines of crystal bar surface upper process in macroscopic view, the Fmin therefore recording position on corresponding circular silicon single crystal rod be the crystal orientation of crystal bar;
(5) operation cylinder, regains the piston rod of cylinder, drives lifting guard shield to move down, and covers crystal orientation detecting sensor.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410106247.1A CN103913417B (en) | 2014-03-20 | 2014-03-20 | A kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410106247.1A CN103913417B (en) | 2014-03-20 | 2014-03-20 | A kind of silicon single crystal rod crystal orientation detection device and crystal orientation detection method thereof |
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| CN103913417A true CN103913417A (en) | 2014-07-09 |
| CN103913417B CN103913417B (en) | 2016-08-03 |
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ID=51039262
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106222745A (en) * | 2016-09-29 | 2016-12-14 | 宜昌南玻硅材料有限公司 | A kind of detection zone-melted silicon single crystal rod and drawing method thereof |
| CN110006839A (en) * | 2019-05-06 | 2019-07-12 | 西安奕斯伟硅片技术有限公司 | A kind of detection device and detection method |
| CN111618724A (en) * | 2020-04-16 | 2020-09-04 | 江苏京创先进电子科技有限公司 | Non-contact height measuring device for scribing machine |
| CN117352428A (en) * | 2023-10-09 | 2024-01-05 | 中环领先半导体材料有限公司 | Crystal orientation deviation detection method and system and silicon wafer processing method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6362487B1 (en) * | 1998-06-18 | 2002-03-26 | WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG | Method and device for nondestructive detection of crystal defects |
| CN201569427U (en) * | 2009-08-20 | 2010-09-01 | 江苏中能硅业科技发展有限公司 | Laser rangefinder |
| CN102791425A (en) * | 2011-01-28 | 2012-11-21 | 新东工业株式会社 | Grinding/polishing device for polygonal column member and grinding/polishing method |
| CN203298725U (en) * | 2013-06-25 | 2013-11-20 | 湖北工业大学 | Silicon rod geometric dimension measuring instrument |
| CN103921358A (en) * | 2014-03-11 | 2014-07-16 | 浙江晶盛机电股份有限公司 | Full-automatic integrated cutting and grinding combined machining device for monocrystalline silicon rods |
| CN203824893U (en) * | 2014-03-20 | 2014-09-10 | 浙江晶盛机电股份有限公司 | Monocrystalline silicon bar orientation detection device |
-
2014
- 2014-03-20 CN CN201410106247.1A patent/CN103913417B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6362487B1 (en) * | 1998-06-18 | 2002-03-26 | WACKER SILTRONIC GESELLSCHAFT FüR HALBLEITERMATERIALIEN AG | Method and device for nondestructive detection of crystal defects |
| CN201569427U (en) * | 2009-08-20 | 2010-09-01 | 江苏中能硅业科技发展有限公司 | Laser rangefinder |
| CN102791425A (en) * | 2011-01-28 | 2012-11-21 | 新东工业株式会社 | Grinding/polishing device for polygonal column member and grinding/polishing method |
| CN203298725U (en) * | 2013-06-25 | 2013-11-20 | 湖北工业大学 | Silicon rod geometric dimension measuring instrument |
| CN103921358A (en) * | 2014-03-11 | 2014-07-16 | 浙江晶盛机电股份有限公司 | Full-automatic integrated cutting and grinding combined machining device for monocrystalline silicon rods |
| CN203824893U (en) * | 2014-03-20 | 2014-09-10 | 浙江晶盛机电股份有限公司 | Monocrystalline silicon bar orientation detection device |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106222745A (en) * | 2016-09-29 | 2016-12-14 | 宜昌南玻硅材料有限公司 | A kind of detection zone-melted silicon single crystal rod and drawing method thereof |
| CN106222745B (en) * | 2016-09-29 | 2019-04-19 | 宜昌南玻硅材料有限公司 | A kind of detection zone-melted silicon single crystal stick and its drawing method |
| CN110006839A (en) * | 2019-05-06 | 2019-07-12 | 西安奕斯伟硅片技术有限公司 | A kind of detection device and detection method |
| CN111618724A (en) * | 2020-04-16 | 2020-09-04 | 江苏京创先进电子科技有限公司 | Non-contact height measuring device for scribing machine |
| WO2021208439A1 (en) * | 2020-04-16 | 2021-10-21 | 江苏京创先进电子科技有限公司 | Non-contact height measurement device for dicing machine |
| CN117352428A (en) * | 2023-10-09 | 2024-01-05 | 中环领先半导体材料有限公司 | Crystal orientation deviation detection method and system and silicon wafer processing method |
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| CN103913417B (en) | 2016-08-03 |
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