CN103884704A - Spectral pupil laser confocal Brillouin-Raman spectrum measuring method and device - Google Patents
Spectral pupil laser confocal Brillouin-Raman spectrum measuring method and device Download PDFInfo
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- CN103884704A CN103884704A CN201410086366.5A CN201410086366A CN103884704A CN 103884704 A CN103884704 A CN 103884704A CN 201410086366 A CN201410086366 A CN 201410086366A CN 103884704 A CN103884704 A CN 103884704A
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Abstract
The invention relates to a spectral pupil laser confocal Brillouin-Raman spectrum measuring method and device and belongs to the technical field of microscopy spectral imaging. The device comprises a light source system for generating stimulating light beams, a measuring objective lens, a lighting pupil, a collecting pupil, a dichroic light splitting device, a spectroscope, an Raman spectrum detecting device, a Brillouin spectrum detecting device, a spectral pupil laser confocal detecting device, a three-dimensional scanning device, a displacement sensor and a data processing unit. The method and the device provided by the invention has the advantages that the abandoned rayleigh scattering light in confocal Raman spectrum detection is utilized to build a spectral pupil confocal microimaging system to realize the high-resolution imaging of the three-dimensional geometric position of a sample, the basic property and multiple cross effects of a substance are obtained by detecting the abandoned brillouin scattering light in confocal Raman spectrum detection and further the stress, elastic parameters and density of a material can be measured; the advantages of the confocal Raman spectrum detection technology and the confocal Brillouin spectrum detection technology are utilized to complement each other, and the comprehensive measurement and decoupling of multiple property parameters of the material are realized.
Description
Technical field
The invention belongs to microspectrum technical field of imaging, confocal microscopy is combined with spectrographic detection technology, relate to a kind of point of pupil confocal laser Brillouin-method for measuring Raman spectrum and device, can be used for the multispectral how performance parameter combined test of microcell and the high-resolution imaging of sample.
Technical background
In the time that light passes through medium, insulating particles are subject to the effect of light wave, transit to another quantum state from a quantum state, and give off scattering wave simultaneously, different energy level transition modes have produced respectively Rayleigh scattering, anti Stokes scattering and stokes scattering, according to changing range degree with lambda1-wavelength, light scattering are divided into: Rayleigh scattering (Rayleigh), Raman scattering (Raman) and Brillouin scattering (Brillouin).
In Rayleigh scattering, light and acoustic branch phonon positive energy exchange are less, and energy variation is less than 10
-5cm
-1, in Brillouin scattering, light and acoustic branch phonon positive energy exchange are less, Brillouin frequency shifts 0.01～2cm
-1, energy variation is 10
-5cm
-1～1cm
-1.In Raman scattering, the energy of light and optical phonon exchange is large, and Raman scattering frequency displacement is 10～5000cm
-1, Raman scattering energy variation is greater than 1cm
-1.
Raman spectrum is to be vibrated and the scattering spectrum that causes by intramolecule, different material has i.e. " dactylogram " of its feature Raman spectrum separately, the frequency of this project by the raman scattering spectrum that records, intensity, linear and polarization state change, composition, microstructure and the internal motion information etc. that obtain material, realize the measurement of material composition, stress, temperature, foreign matter then.
Brillouin scattering spectrum is by photic thermal excitation acoustics acoustical phonon, a kind of scattering spectrum that is occurred to interact by the acoustical phonon in light wave and medium again and produce, Brillouin (Brillouin) scattering is take photon as probe, can measure the multiple elementary excitation such as phonon, spin wave in condensed state matter, it can spectral limit (0.01～1.0cm between Raman and Rayleigh scattering
-1), be the important means of research material fundamental property (elasticity, magnetic, phase transformation) and multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.).This technology is widely used in the basic and applied research of condensed state material by developed countries such as America and Europes.In recent years, Brillouin scattering research is also for significant contribution has been made in birth and the development of Integrated ferroelectrics and spintronics.
Brillouin scattering spectrum is that the acoustical phonon in light wave and medium interacts (density fluctuation density fluctuation) and a kind of scattering spectrum of producing, the elastic vibration (vibrate outward and rotate) by molecule, just can record material fundamental property in microfabrication (elasticity, magnetic, phase transformation) and multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.) by recording Brillouin scattering spectral information, then realize the measurements such as material stress, elastic parameter, density.
In many performance parameters are measured, can be different with surveyed parameter because of measure and monitor the growth of standing timber material, raman scattering spectrum Detection Techniques and Brillouin scattering spectrum Detection Techniques have the chief, can form mutual supplement with each other's advantages by rational design.Aspect the laminar analysis measurement of microtexture, confocal Raman spectra Detection Techniques measuring accuracy is high, but can only survey transparent and internal information partially transparent sample.Thereby to utilize Raman scattering and Brillouin scattering spectrum be to realize the key that the many performance parameters of microtexture material are measured.
At present, commercial confocal laser Raman spectrum testing tool mainly contains the productions such as Britain RENISHAW.As shown in Figure 1, light-source system sends excitation beam and sees through after polarization spectroscope, quarter-wave plate and focusing objective len the principle of tradition confocal Raman spectra detection instrument, focuses on sample, inspires the Raman diffused light that is loaded with sample spectra characteristic; Move sample by 3 D scanning system, the Raman diffused light that makes corresponding sample zones of different is again by quarter-wave plate and be polarized spectroscope reflection, the first condenser is assembled the light of polarization spectroscope reflection, and utilization is positioned at the first pin hole spectral detector below and records the raman scattering spectrum that is loaded with sample spectral information.
But existing confocal Raman microtechnic exists following not enough:
(1) detection time is long, and system drifting is large.Because confocal Raman spectra signal is very weak, while carrying out collection of illustrative plates imaging, detector need carry out long-term integration (often reaching a few hours), the drift of optical system and sample worktable, often can cause sample out of focus, has then reduced the spatial resolving power that confocal Raman spectra is surveyed;
(2) sample parasitic light is stronger, has affected the signal to noise ratio (S/N ratio) of Raman spectrum detection instrument.Existing confocal Raman spectra detection instrument, survey the light path mode of light path completely altogether owing to having adopted back-reflection sample detection mode and incident excitation light path and scattered light, certainly will there is the deficiency that sample interference of stray light is large in it, limited the spectrographic detection ability of existing confocal microscope to high scattering sample;
(3) many performance parameters measurement capability is urgently improved.Existing confocal Raman spectra Detection Techniques, have abandoned and have contained the Rayleigh Scattering Spectra and the Brillouin scattering spectrum that enrich sample message, make it limited aspect the property detection such as elasticity and piezoelectricity of material.
Conventionally the raman spectrum strength of sample scattering be reflection Reyleith scanttering light beam intensity 10
-3～10
-6times, and existing confocal Raman spectra detection instrument is all surveyed the faint Raman spectrum of sample scattering and abandon the Rayleigh light beam and the Brillouin's light beam that are better than Raman diffused light.Thereby, utilizing the Rayleigh light beam abandoning in existing spectrum investigating system to assist surveys to improve existing confocal Raman spectra Detection Techniques spatial resolution, by recording the information such as the frequency displacement of Brillouin scattering spectrum, intensity, linear variation, obtain material fundamental property (elasticity, magnetic, phase transformation) and multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.), then realizing the measurements such as material stress, elastic parameter, density is the new way of multispectral high-resolution imaging and detection.
Summary of the invention
The object of the invention is for overcoming the deficiencies in the prior art, propose point pupil confocal laser Brillouin-method for measuring Raman spectrum and a device.Realize the high-resolution imaging of sample three-dimensional geometry position by utilizing the Rayleigh scattering light abandoning in confocal Raman spectra detection to build a point pupil confocal micro imaging system, and " extreme point " that utilize point pupil confocal microscopic imaging device controlled spectral detector with accurate corresponding this characteristic of its focus and accurately caught the Raman spectral information that object lens focal spot excites, and then realize the i.e. high-space resolution detection of " collection of illustrative plates unification " of the detected with high accuracy of sample microcell geometric position and spectral information, reach effectively taking into account of resolution characteristic and range ability simultaneously; Obtain material fundamental property (elasticity, magnetic, phase transformation) and multiple cross effect (piezoelectricity, magnetic bullet, photoelastic etc.) by surveying Brillouin scattering that confocal Raman spectra abandons in surveying, then realize the measurements such as material stress, elastic parameter, density; The feature of utilizing confocal Raman spectra Detection Techniques and confocal Brillouin spectrum Detection Techniques to have complementary advantages, the confocal spectrographic detection scheme that design Raman spectrum and Brillouin spectrum are surveyed simultaneously, realizes composite measurement and the decoupling zero of the many performance parameters of material.The present invention can survey and comprise the scattering spectrum such as fluorescence, Compton scattering light.
The object of the invention is to be achieved through the following technical solutions.
Divide pupil confocal laser Brillouin-method for measuring Raman spectrum, comprise the following steps:
Step 1, on the pupil plane of object lens, place illumination iris and collect pupil measuring; Light-source system sends excitation beam, after excitation beam transmission illumination pupil, focuses on sample, inspires the Raman diffused light, Brillouin scattering and the Rayleigh scattering light that are loaded with sample spectral characteristic; Raman diffused light, Reyleith scanttering light and Brillouin scattering arrive dichroic optical system after collecting pupil; Dichroic optical system can't harm Raman diffused light to separate with other two kinds of scattered light;
In the time that a spectral signal that the Raman spectrum detection system of docking receipts Raman diffused light obtains is processed, system can be carried out Raman spectrum detection;
In the time that the spectral signal only the Brillouin spectrum detection system of reception Brillouin scattering being obtained is processed, system can be carried out Brillouin spectrum detection;
In the time that the detection hot spot only point pupil confocal laser detection system of reception Reyleith scanttering light being obtained is processed, can carry out the three dimension scale tomography of high spatial resolution and survey;
In the time that the spectral signal that point pupil confocal laser detection system picked up signal that receives Reyleith scanttering light, the spectral signal of Raman spectrum detection system acquisition that receives Raman diffused light and the Brillouin spectrum detection system of reception Brillouin scattering are obtained is processed, system can be carried out the microcell collection of illustrative plates tomography of high-space resolution, realizes and divides pupil confocal laser spectral measurement and high-space resolution imaging to many performance parameters of sample " collection of illustrative plates unification ".
Especially, in the methods of the invention, described illumination iris and collection pupil can be circle, D shape or other shapes.
In the methods of the invention, described excitation beam can be the light beams such as line polarisation, rotatory polarization; It can also be the structure light beam being generated by pupil filtering technology.Polarized light is combined and can be compressed measurement focused spot size with pupil filtering technology, improves the transverse resolution of system, realizes super-resolution and surveys.
In the methods of the invention, can also survey and comprise fluorescence, Compton scattering scattering of light spectrum.
In the methods of the invention, only can realize the coupling of the measurement object lens to different N A value by computer system software processing, and debug without again system being carried out to any hardware.
Divide pupil confocal laser Brillouin-raman spectroscopy measurement device, comprise the light-source system, measurement object lens, illumination iris, collection pupil, dichroic light-dividing device, beam splitting system, Raman spectrum sniffer, Brillouin spectrum sniffer, point pupil confocal laser sniffer, three-dimensional scanner, displacement transducer and the data processing unit that produce excitation beam;
Wherein, place illumination iris and collect pupil on the pupil plane of measuring object lens, illumination iris and measurement object lens are positioned in the excitation beam exit direction of light-source system successively, and illumination iris is coaxial with excitation beam; After dichroic optical system is positioned at and collects pupil; Raman spectrum detection system is positioned in the transmission direction of dichroic optical system; Beam splitting system is positioned on the reflection direction of dichroic optical system; Brillouin spectrum detection system is positioned on the reflection direction of beam splitting system; Divide pupil confocal laser detection system to be positioned in the transmission direction of beam splitting system; Sample is fixed on the objective table of three-dimensional scanner;
Data processing unit comprises division focal spot detection module, extreme value computing module and data fusion module; Wherein, the hot spot that division focal spot detection module and extreme value computing module detect for the treatment of image capturing system, obtains a point pupil confocal laser response curve, obtains thus the positional information of sample; Data fusion module is used for merging positional information and spectral information, completes three-dimensionalreconstruction and the Spectrum Data Fusion of sample; Three's incidence relation is: the Aili spot that division focal spot detection module collects image capturing system is cut apart and surveyed, the signal obtaining enters extreme value computing module to carry out after extreme value asks for, obtaining a point pupil confocal laser response curve and entering data fusion module;
Computer processing system is connected with displacement transducer, three-dimensional scanner, data fusion module; Image capturing system is connected with division focal spot detection module.Data fusion module is connected with the first detector, the second detector;
Move sample by computer processing system control three-dimensional scanner, make zones of different Reyleith scanttering light and to Raman diffused light that should region sample, Brillouin scattering by measuring object lens and collecting pupil.
In apparatus of the present invention, can be by adding radial polarisation optical generator and iris filter to realize super-resolution spectrographic detection.Comprise and be positioned at radial polarisation optical generator and the first iris filter placed successively before illumination iris, and the second iris filter between beam splitting system and the 3rd condenser.
In apparatus of the present invention, spectrum investigating system can be common spectrum investigating system.Comprise that the first condenser, the test surface placed successively along light path are positioned at the first spectral detector of the first condenser focal position, be positioned at spectral detector the first detector afterwards, and the second condenser lens of placing successively along light path, test surface be positioned at the second spectral detector of second condenser lens focal position, and be positioned at the second detector after the second spectral detector; It can also be confocal spectrum investigating system, comprise the first condenser, the first pin hole that is positioned at the first condenser focal position placed successively along light path, be positioned at the spectral detector 1 after the first pin hole, be positioned at the first spectral detector the first detector afterwards, and the second condenser lens of placing successively along light path, be positioned at second condenser lens focal position the second pin hole, be positioned at the second spectral detector after the second pin hole, be positioned at the second detector after the second spectral detector.Parasitic light outside can effectively filtering focus, improves the signal to noise ratio (S/N ratio) of spectrographic detection.
In apparatus of the present invention, can be by increase light beam modulating system between light-source system and illumination iris.Comprise that the 4th condenser of placing successively along light path, the 3rd pin hole that is positioned at the 4th condenser focus place and focus are positioned at the 5th condenser at the 3rd pin hole place, modulate for the excitation beam that light-source system is sent, to obtain more high spatial resolution and better stimulation effect.
In apparatus of the present invention, can be to select the little beam splitting system (being that reflective light intensity is much larger than transmitted light intensity) of saturating inverse ratio, in guaranteeing point pupil confocal laser detection system light intensity, improve the utilization factor of Brillouin scattering.
In apparatus of the present invention, can pass through Optical Fiber Transmission exciting light and scattering spectrum, comprise the collimation lens coaxial with illumination iris, be positioned at first fibre-optic terminus at collimation lens focus place, by the first optical patchcord, the first fibre-optic terminus is connected with laser instrument; Be positioned at second fibre-optic terminus at the first condenser focus place, by the second optical patchcord, the second fibre-optic terminus be connected with the first spectral detector; The 3rd fibre-optic terminus that is positioned at second condenser lens focus place, is connected the 3rd fibre-optic terminus by the 3rd optical patchcord with the second spectral detector.To realize modularization dismounting, selection function and large scale are measured flexibly.
In apparatus of the present invention, can be by increasing image enhancement system, the Aili spot that enlarged image acquisition system detects.Comprise the 3rd condenser placed successively along light path, with the confocal image enhancement system of the 3rd condenser and be positioned at the image capturing system at image enhancement system focus place, to improve a point acquisition precision for pupil confocal laser detection system.
Beneficial effect
The inventive method, contrast prior art has following innovative point:
1, the present invention will divide pupil confocal laser microtechnic and spectrographic detection technology to organically combine, merge the high precision Objective rallying point position tracking ability of point pupil confocal laser microtechnic, utilize " extreme point " of point pupil confocal laser response curve to focus on the accurate corresponding characteristic of focus with object lens, can carry out in real time sample, accurate track and localization, the shortcoming that has overcome traditional confocal spectrographic detection technology focus capture spectrum ability, this is one of innovative point being different from existing spectrographic detection technology;
2, the present invention is owing to adopting the detection light path of oblique incidence, and anti-scattering power is strong, has overcome existing confocal microscopic imaging technology and cannot suppress lacking of focal plane scattered light interference, has improved the signal to noise ratio (S/N ratio) of spectrographic detection.This be different from existing spectrographic detection technology innovative point two;
3, the present invention can survey the raman scattering spectrum and the Brillouin scattering spectrum that contain different information by appropriate design simultaneously, form and have complementary advantages, realize material composition and the high-resolution of basic physical property have been surveyed, be convenient to the integration test of many performance parameters, this be different from existing spectrographic detection technology innovative point three;
4, owing to adopting monochromatic light road division focal spot detection to realize the imaging of geometric position, it had both significantly simplified the light channel structure of traditional confocal microscope system, retain again the advantage of confocal laser system and original point of pupil confocal system, only processed by software exchange various modes such as just can realizing point micro-detection of pupil confocal laser, confocal laser Raman spectrum are surveyed, confocal laser Brillouin spectrum is surveyed, the integration test of point many performance parameters of pupil confocal laser and select freely and hand-off process.This be different from existing Raman spectrum Detection Techniques innovative point four;
The inventive method has following features:
1, will divide pupil confocal laser microscopic system and spectrum imaging system to merge mutually on 26S Proteasome Structure and Function, both can realize the tomography of sample microcell geometric parameter, can realize again the spectrographic detection of sample microcell, realize the multiple imaging patterns such as microscale tomography, collection of illustrative plates tomography and spectrum test simultaneously;
2, can realize effectively taking into account of range ability and resolution characteristic, by being arranged on the parameter of getting two tiny areas on focal spot, to mate the sample of different reflectivity, range of application is expanded;
3, the present invention can be by the beam splitting system before point pupil differential confocal detection system and Brillouin spectrum detection system is selected to suitable saturating inverse ratio, with maximum using light intensity;
4, the present invention can, by having introduced the tight focusing technology that radial polarisation light combines with iris filter, realize the multispectral integration test of super-resolution.
Accompanying drawing explanation
Fig. 1 is confocal Raman spectra formation method schematic diagram;
Fig. 2 is of the present invention point of pupil confocal laser Brillouin-method for measuring Raman spectrum schematic diagram;
Fig. 3 is that D shape is divided pupil confocal laser Brillouin-method for measuring Raman spectrum schematic diagram;
Fig. 4 is of the present invention point of pupil confocal laser Brillouin-Raman spectrum super-resolution measuring method schematic diagram;
Fig. 5 is of the present invention point of pupil confocal laser Brillouin-raman spectroscopy measurement device schematic diagram;
Fig. 6 is point pupil confocal laser Brillouin-raman spectroscopy measurement device schematic diagram with confocal spectrum investigating system of the present invention;
Fig. 7 is point pupil confocal laser Brillouin-raman spectroscopy measurement device schematic diagram with light beam modulating system of the present invention;
Fig. 8 is that Optical Fiber Transmission formula of the present invention is divided pupil confocal laser Brillouin-raman spectroscopy measurement device schematic diagram;
Fig. 9 of the present inventionly has the focal spot amplification system of detection and divides pupil confocal laser Brillouin-raman spectroscopy measurement device schematic diagram;
Figure 10 is that of the present invention point of super-resolution divided pupil confocal laser Brillouin-method for measuring Raman spectrum and device embodiment schematic diagram;
Figure 11 is point confocal response curve of pupil and the Raman spectrum response curve schematic diagram of of the present invention point of pupil confocal laser Brillouin-method for measuring Raman spectrum.
Wherein, 1-light-source system, 2-measures object lens, 3-illumination iris, 4-collects pupil, 5-sample, 6-dichroic optical system, 7-Raman spectrum detection system, 8-the first condenser, 9-the first spectral detector, 10-the first detector, 11-beam splitting system, 12-Brillouin spectrum detection system, 13-second condenser lens, 14-the second spectral detector, 15-the second detector, 16 points of pupil confocal laser detection systems, 17-the 3rd condenser, 18 image capturing systems, 19-search coverage, 20-radial polarisation optical generator, 21-the first iris filter, 22-the second iris filter, 23-3 D scanning system, 24-displacement transducer, 25-data processing unit, 26-division focal spot detection module, 27-extreme value computing module, 28-data fusion module, 29-computer processing system, 30-divides pupil confocal laser response curve, 31-Raman spectrum response curve, 32-Brillouin spectrum responds curve, 33-the first pin hole, 34-the second pin hole, 35-light beam modulating system, 36-the 4th condenser, 37-the 3rd pin hole, 38-the 5th condenser, 39-collimation lens, 40-the first fibre-optic terminus, 41-the first optical patchcord, 42-the second fibre-optic terminus, 43-the second optical patchcord, 44-the 3rd fibre-optic terminus, 45-the 3rd optical patchcord, 46-image enhancement system, 47-polarization spectroscope, 48-quarter-wave plate, 49-focusing objective len
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
Divide pupil confocal laser Brillouin-method for measuring Raman spectrum, comprise the following steps:
As shown in Figure 3, first, on the pupil plane of measuring object lens 2, place illumination iris 3 and collect pupil 4; Light-source system 1 sends excitation beam, and excitation beam sees through after the illumination iris 3 of measuring object lens 2, focuses on sample 5, inspires the Raman diffused light and the Brillouin scattering that are loaded with sample 5 spectral characteristics, and reflects Reyleith scanttering light; Raman diffused light, Brillouin scattering and Reyleith scanttering light arrive dichroic optical system 6 through the collection pupil 4 of measuring object lens 2; Dichroic optical system 6 can't harm Raman diffused light to separate with other spectrum; The Brillouin scattering reflecting through dichroic optical system 6 and Reyleith scanttering light enter beam splitting system 11; Reyleith scanttering light and Brillouin scattering through beam splitting system 11 transmissions enter a point pupil confocal laser detection system 16; Divide pupil confocal laser detection system 16 to utilize detector lateral excursion can make the axial response family curve of point pupil confocal microscope system produce the characteristic of phase shift, realize the detection to sample 5 microcell geometric positions; The Brillouin scattering reflecting through beam splitting system 11 and Reyleith scanttering light enter Brillouin spectrum detection system 12 and carry out spectrographic detection; Meanwhile, enter and in Raman spectrum detection system 7, carry out spectrographic detection through the Raman diffused light of dichroic optical system 6 transmissions.Sample 5 can be processed by strengthening the Raman enhancing technology such as Raman spectrum nano particle, to improve Raman scattering light intensity.
Control three-dimensional scanner 23 by computer processing system 29 and move sample 5, make zones of different Reyleith scanttering light and to Raman diffused light that should region sample 5, Brillouin scattering by measuring object lens and collecting pupil.
In the time that the raman spectral signal that Raman spectrum detection system 7 is obtained is processed, system can be carried out Raman spectrum detection; In the time that the Brillouin light spectrum signal that Brillouin spectrum detection system 12 is obtained is processed, system can be carried out Brillouin spectrum detection; In the time that the signal that point pupil confocal laser detection system 16 is obtained is processed, carry out high spatial resolution tomography; When the Brillouin light spectrum signal obtaining when the signal that point pupil confocal laser detection system 16 is obtained, raman spectral signal that Raman spectrum detection system 7 obtains and Brillouin spectrum detection system 12 is processed simultaneously, system can be carried out the microcell collection of illustrative plates tomography of high spatial resolution, the integration test of the many performance parameters to sample.
Especially, circular illumination iris 3 and collection pupil 4 can be replaced with to other shapes (as D shape, forms D shape and divides the test of pupil confocal laser Raman spectrum, as shown in Figure 3).
Especially, excitation beam can be the light beams such as line polarisation, rotatory polarization; Can also be the structure light beam being generated by pupil filtering technology, polarized light be combined and can be compressed measurement focused spot size with pupil filtering technology, improves the transverse resolution of system, as shown in Figure 4.
Divide pupil confocal laser Brillouin-raman spectroscopy measurement device, as shown in Figure 5, comprise the light-source system 1, measurement object lens 2, dichroic optical system 6, Raman spectrum detection system 7, point pupil confocal laser detection system 16,3 D scanning system 23, displacement transducer 23, data processing unit 25 and the computer processing system 29 that produce excitation beam.
Wherein, on the pupil plane of measuring object lens 2, place illumination iris 3 and collect pupil 4.Wherein, illumination iris 3 and measurement object lens 2 are positioned in the excitation beam exit direction of light-source system 1 successively, and illumination iris 3 is coaxial with excitation beam; After dichroic optical system 6 is positioned at and collects pupil 4; Beam splitting system 11 is positioned on the reflection direction of dichroic optical system 6.
Raman spectrum detection system 7 is positioned in the transmission direction of dichroic optical system 6; Raman spectrum detection system 7 comprises the first condenser 8, the first spectral detector 9 and the first detector 10.Wherein, the test surface of the first spectral detector 9 is positioned at the focus place of the first condenser 8, after the first detector 10 is positioned at the first spectral detector 9.
Brillouin spectrum detection system 12 is positioned at Brillouin spectrum detection system 12 on the reflection direction of beam splitting system 11 and comprises second condenser lens 13, the second spectral detector 14 and the second detector 15.Wherein the test surface of the second spectral detector 14 is positioned at the focus place of second condenser lens 13, after the second detector 15 is positioned at the second spectral detector 14.
Divide pupil confocal laser detection system 16 to be positioned in the transmission direction of beam splitting system 11; Divide pupil confocal laser detection system 16 to comprise the 3rd condenser 17 and image capturing system 18, wherein, the test surface of image capturing system 18 is positioned at the focus place of the 3rd condenser 17.
Control 3 D scanning system 23 by computer processing system 29 and move sample 5, make zones of different Reyleith scanttering light and to Raman diffused light that should region sample 5 by measuring object lens 2 and collecting pupil 4.
As shown in Figure 6, lay the first pin hole 33 and the second pin hole 34 in the focal position of the first condenser 8 and second condenser lens 13, thereby form point multispectral comprehensive test device of pupil confocal laser with confocal spectrum investigating system.
As shown in Figure 7, between light-source system 1 and illumination iris 3, lay light beam modulating system 35; Light beam modulating system 35 comprises that the 4th condenser 36 of placing successively along light path, the 3rd pin hole 37 that is positioned at the 4th condenser 36 focus places and focus are positioned at the 5th condenser 38 at the 3rd pin hole 37 places, forms point multispectral comprehensive test device of pupil confocal laser with light beam modulating system.
As shown in Figure 8, can pass through Optical Fiber Transmission exciting light and scattering spectrum, comprise the collimation lens 39 coaxial with illumination iris 3, be positioned at first fibre-optic terminus 40 at collimation lens 39 focus places, by the first optical patchcord 41, the first fibre-optic terminus 40 is connected with laser instrument 1; Be positioned at second fibre-optic terminus 42 at the first condenser 8 focus places, by the second optical patchcord 43, the second fibre-optic terminus 42 be connected with the first spectral detector 9; The 3rd fibre-optic terminus 44 that is positioned at second condenser lens 13 focus places, is connected 14 by the 3rd fibre-optic terminus 44 with the second spectral detector by the 3rd optical patchcord 45.To realize modularization dismounting, selection function and large scale are surveyed and are measured flexibly.
As shown in Figure 9, in point pupil confocal laser detection system 16, increase image enhancement system 46, the Aili spot can enlarged image acquisition system 18 detecting, thus improve the acquisition precision of point pupil confocal laser sniffer; Place successively the 3rd condenser 17, image enhancement system 46 and image capturing system 18 along light path, wherein, image enhancement system 46 and the confocal point of the 3rd condenser 17, image capturing system 18 is positioned at the focus place of image enhancement system 46.
Embodiment
In the present embodiment, dichroic optical system 6 is Notch Filter, the first spectral detector 9 is Raman spectrum detector, beam splitting system 11 is spectroscope, the second spectral detector 14 is Brillouin spectrum detector, image capturing system 18 is CCD, and 3 D scanning system 23 is 3-D scanning worktable, and image enhancement system 46 is enlarging objective.
As shown in figure 10, point pupil confocal laser Brillouin-Raman spectrum super-resolution measuring method, its testing procedure is as follows:
First, on the pupil plane of measuring object lens 2, place illumination iris 3 and collect pupil 4.The light-source system 1 being made up of laser instrument sends the exciting light that can inspire sample 5 Raman spectrums, exciting light enters the 3rd pin hole 37 after the 4th condenser 36 is assembled becomes pointolite, after the 5th condenser 38 collimator and extenders that are positioned at the 3rd pin hole 37 through focus again, form parallel excitation beam.Excitation beam is transmission illumination pupil 3, measurement object lens 2 after radial polarisation optical generator 20 and the first iris filter 21 once, focus on sample 5, return to the Raman diffused light that is loaded with sample 5 spectral characteristics, Brillouin scattering and the Reyleith scanttering light that inspire.
Then, control 3-D scanning worktable 23 by computer processing system 29 and move sample 5, make zones of different Reyleith scanttering light and to Raman diffused light that should region sample 5 by measuring object lens 2 and collecting pupil 4, dichroic optical system 6 can't harm Raman diffused light to separate with other spectrum.
The Reyleith scanttering light reflecting through dichroic optical system 6 and Brillouin scattering enter spectroscope 11, Brillouin scattering and Reyleith scanttering light through spectroscope 11 transmissions enter light splitting pupil confocal laser detection system 16 after the second iris filter 22, after assembling, the 3rd condenser 17 enters enlarging objective 46, hot spot after being exaggerated is surveyed by CCD18, the hot spot that CCD18 detects enters division focal spot detection module 26, at detection focal spot center, tiny area search coverage 19 is set, the response that records this region is I (u); The signal obtaining is carried out extreme value by extreme value computing module 27 to be asked for, and obtains a point extreme point for pupil confocal laser response curve 30; Divide " extreme point " of pupil confocal laser response curve 30 and the focusing focus of excitation beam accurately corresponding, obtain the elevation information of sample surfaces by " extreme point " of response curve 30, the positional information of feeding back in conjunction with displacement transducer 24 reconstructs the three-dimensional surface shape of sample 5.
The Brillouin scattering reflecting through spectroscope 11 and Reyleith scanttering light enter Brillouin spectrum detection system 12, after the second pin hole 34 in the second converging lenses 13 and focus thereof, enter Brillouin spectrum detector 14 with and subsequent the second detector 15, record Brillouin scattering spectrum response curve I (λ
b) 32, wherein λ
bfor sample 5 stimulated luminescences excite the wavelength of sent Brillouin scattering.
Enter Raman spectrum detection system 7 through the Raman diffused light of dichroic optical system 6 transmissions simultaneously, after the first pin hole 33 in the first condenser 8 and focus thereof, enter Raman spectrum detector 9 with and subsequent the first detector 10, record the raman scattering spectrum response curve I (λ that is loaded with sample 5 spectral informations
r) 31, wherein λ
rby sample 5 stimulated luminescences are inspired Raman scattering light wavelength;
Because this device has adopted the tight focusing technology of radial polarisation light, if the signal to search coverage is processed, obtain a point pupil confocal laser response I (u), again by its extreme point, accurately catch the focal position that excites hot spot, system can be carried out the three dimension scale tomography of super-resolution.
If the spectral response curve I (λ that the Raman spectrum detection system 7 of Raman diffused light obtains is received in docking
r) 31 while processing, system can be carried out Raman spectrum detection.
If the spectral response curve I (λ obtaining receiving the Brillouin spectrum detection system 12 of Brillouin scattering and Reyleith scanttering light
b) 32 while processing, system can be carried out Brillouin spectrum detection.
If point pupil confocal laser response I (u), the raman spectral signal I (λ that Raman spectrum detection system 7 obtains that obtain receiving point pupil confocal laser detection system 16 of Reyleith scanttering light
r) and the Brillouin light spectrum signal I (λ that obtains of Brillouin spectrum detection system 12
b) while processing, system can be carried out the microcell collection of illustrative plates tomography of superspace resolution simultaneously, realizes many performance parameters Effect on Detecting that the superspace of sample 5 geometric position information and multispectral information is differentiated.
As shown in figure 10, divide pupil confocal laser Brillouin-raman spectroscopy measurement device to comprise to produce excitation beam light-source system 1, measure object lens 2, illumination iris 3, collect pupil 4, Notch Filter6, Raman spectrum detection system 7, spectroscope 11, Brillouin spectrum detection system 12, point pupil confocal laser detection system 16, radial polarisation optical generator 20, the first iris filter 21, the second iris filter 22,3-D scanning worktable 23, displacement transducer 24 and data processing unit 25; Wherein, on the pupil plane of measuring object lens 2, place illumination iris 3 and collect pupil 4; Radial polarisation optical generator 20, the first iris filter 21 and illumination iris 3 are placed in the light beam exit direction of light-source system 1, radial polarisation optical generator 20, the first iris filter 21, illumination iris 3 are coaxial with excitation beam, after Notch Filter6 is placed on and collects pupil 4, Raman spectrum detection system 7 is placed in the transmission direction of Notch Filter6, and spectroscope 11 is positioned on the reflection direction of Notch Filter6.Brillouin spectrum detection system 12 is placed on the reflection direction of spectroscope 11, point pupil confocal laser detection system 16 is on the reflection direction of spectroscope 11, and data processing unit 25 is for merging and processing the data that Raman spectrum detection system 7, Brillouin spectrum detection system 12, point pupil confocal laser detection system 16 and displacement transducer 24 collect; In Raman spectrum detection system 7, place the first pin hole 33 parasitic light is carried out to filtering at the focus place of the first condenser 8, surveys signal to noise ratio (S/N ratio) to improve Raman spectrum; In Brillouin spectrum detection system 12, place the second pin hole 34 parasitic light is carried out to filtering at the focus place of second condenser lens 13, the signal to noise ratio (S/N ratio) of surveying to improve Brillouin spectrum; Light-source system 1 by comprising the 4th condenser 36, be positioned at the excitation beam that light beam modulating system 35 that the 5th condenser 38 that the 3rd pin hole 37 at the 4th condenser 36 focus places and focus be positioned at the 3rd pin hole 37 places forms sends light-source system 1 and modulate, to guarantee the quality of excitation beam; Divide the picture on the 3rd condenser 17 focal planes in pupil confocal laser detection system 16 to be amplified into CCD18 by enlarging objective 46, so that detector carries out division focal spot detection, improve detection accuracy.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on the claims in the present invention basis is all protection scope of the present invention.
Claims (9)
1. point pupil confocal laser Brillouin-method for measuring Raman spectrum, is characterized in that comprising the following steps:
Step 1 is placed illumination iris (3) and is collected pupil (4) on the pupil plane of measuring object lens (2); Light-source system (1) sends excitation beam, excitation beam sees through after the illumination iris (3) of measuring object lens (2), focus on sample (5) upper, inspire the Raman diffused light and the Brillouin scattering that are loaded with sample (5) spectral characteristic, and reflect Reyleith scanttering light; Raman diffused light, Brillouin scattering and Reyleith scanttering light arrive dichroic optical system (6) through the collection pupil (4) of measuring object lens (2); Dichroic optical system (6) can't harm Raman diffused light to separate with other spectrum;
Step 2, the Brillouin scattering and the Reyleith scanttering light that reflect through dichroic optical system (6) enter beam splitting system (11); Reyleith scanttering light and Brillouin scattering through spectroscope transmission enter a point pupil confocal laser detection system (16); Divide pupil confocal laser detection system (16) to utilize detector lateral excursion can make the axial response family curve of point pupil confocal microscope system produce the characteristic of phase shift, realize the detection to sample (5) microcell geometric position; The Brillouin scattering reflecting through beam splitting system (11) and Reyleith scanttering light enter Brillouin spectrum detection system (12) and carry out spectrographic detection; Meanwhile, enter in Raman spectrum detection system (7) and carry out spectrographic detection through the Raman diffused light of dichroic optical system (6) transmission;
Step 3, enter a point pupil confocal laser detection system (12) through Reyleith scanttering light and the Brillouin scattering of beam splitting system (11) transmission; Divide pupil confocal laser detection system (12) to utilize detector lateral excursion can make the axial response family curve of point pupil confocal microscope system produce the characteristic of phase shift, realize the detection to sample microcell geometric position; Detailed process is: the detection hot spot that point pupil confocal laser detection system (12) is obtained is processed, obtain search coverage, record the corresponding I of intensity loudness (u) of the concavo-convex variation of reflection sample, can carry out the three dimension scale tomography of high-space resolution surveys, wherein, u is axial normalization optical coordinate;
In the time that the raman spectral signal that Raman spectrum detection system (7) is obtained is processed, system can be carried out Raman spectrum detection; In the time that the Brillouin light spectrum signal that Brillouin spectrum detection system (12) is obtained is processed, system can be carried out Brillouin spectrum detection; In the time that the signal that point pupil confocal laser detection system (16) is obtained is processed, carry out high spatial resolution tomography; In the time that the Brillouin light spectrum signal of the raman spectral signal that a point signal for pupil confocal laser detection system (16) acquisition, Raman spectrum detection system (7) are obtained and Brillouin spectrum detection system (12) acquisition is processed simultaneously, system can be carried out the microcell collection of illustrative plates tomography of high spatial resolution, the integration test of the many performance parameters to sample.
2. according to point pupil confocal laser Brillouin-method for measuring Raman spectrum described in right 1, it is characterized in that: illumination iris (3) and collection pupil (4) can be circular; Can also be D shape or other shapes.
3. according to point pupil confocal laser Brillouin-method for measuring Raman spectrum described in right 1, it is characterized in that: excitation beam can be the light beams such as line polarisation, rotatory polarization; Can also be the structure light beam being generated by pupil filtering technology, polarized light be combined and can be compressed measurement focused spot size with pupil filtering technology, improves the transverse resolution of system.
4. according to point pupil confocal laser Brillouin-method for measuring Raman spectrum described in right 1, it is characterized in that: this system can also be surveyed the scattering spectrum including fluorescence, Compton scattering light etc.
5. point pupil confocal laser Brillouin-raman spectroscopy measurement device, is characterized in that: comprise the light-source system (1), measurement object lens (2), dichroic optical system (6), Raman spectrum detection system (7), point pupil confocal laser detection system (16), 3 D scanning system (23), displacement transducer (24), the data processing unit (25) that produce excitation beam;
Wherein, on the pupil plane of measuring object lens (2), place illumination iris (3) and collect pupil (4).Wherein, illumination iris (3) and measurement object lens (2) are positioned in the excitation beam exit direction of light-source system (1) successively, and illumination iris (3) is coaxial with excitation beam; Sample (5) is fixed on the objective table of three-dimensional scanner (16);
Dichroic optical system (6) is positioned at collects pupil (4) afterwards; Raman spectrum detection system (7) is positioned in the transmission direction of dichroic optical system (6); Raman spectrum detection system (7) comprises the first condenser (8), the first spectral detector (9) and the first detector (10).Wherein, the test surface of the first spectral detector (9) is positioned at the focus place of the first condenser (8), and the first detector (10) is positioned at the first spectral detector (9) afterwards;
Beam splitting system (11) is positioned on the reflection direction of dichroic optical system (6).Brillouin spectrum detection system (12) is positioned at Brillouin spectrum detection system (12) on the reflection direction of beam splitting system (11) and comprises second condenser lens (13), the second spectral detector (14) and the second detector (15).Wherein the test surface of the second spectral detector (14) is positioned at the focus place of second condenser lens (13), and the second detector (15) is positioned at the second spectral detector (14) afterwards;
Divide pupil confocal laser detection system (16) to be positioned in the transmission direction of beam splitting system (11); Divide pupil confocal laser detection system (16) to comprise the 3rd condenser (17) and image capturing system (18), wherein, the test surface of image capturing system (18) is positioned at the focus place of the 3rd condenser (17).；
Data processing unit (25) comprises division focal spot detection module (26), extreme value computing module (27) and data fusion module (28); Wherein, the hot spot that division focal spot detection module (26) and extreme value computing module (27) detect for the treatment of image capturing system (18), obtains a point pupil confocal laser response curve (30), obtains thus the positional information of sample (5); Data fusion module (28) is for merging positional information I (u), Raman spectral information I (λ
r) and Brillouin light spectrum information I (λ
b), complete three-dimensionalreconstruction and Spectrum Data Fusion I (x, y, z, the λ of sample (5)
r, λ
b); Three's incidence relation is: the Aili spot that division focal spot detection module (26) collects image capturing system (18) is cut apart and surveys, the signal obtaining enters extreme value computing module (27) to carry out after extreme value asks for, obtaining a point pupil confocal laser response curve (30) and entering data fusion module (28);
Computer processing system (29) is connected with 3 D scanning system (23), displacement transducer (24), data fusion module (28).Image capturing system (18) is connected with division focal spot detection module (26).Data fusion module (28) is connected with the second detector (15) with the first detector (10).
6. as claimed in claim 5 point of pupil confocal laser Brillouin-raman spectroscopy measurement device, it is characterized in that, lay the first pin hole (33) in the focal position of the first condenser (8), and the first spectral detector (9) is positioned at the first pin hole (33) afterwards; Lay the second pin hole (34) in the focal position of second condenser lens (13), and the second spectral detector (14) is positioned at the second pin hole (34) afterwards, with the parasitic light beyond filtering focus, improves the signal to noise ratio (S/N ratio) of detection system.
7. as claimed in claim 5 point of pupil confocal laser Brillouin-raman spectroscopy measurement device, is characterized in that, between light-source system (1) and illumination iris (3), lays light beam modulating system (35); Light beam modulating system (35) comprises that the 4th condenser (36) of placing successively along light path, the 3rd pin hole (37) that is positioned at the 4th condenser (36) focus place and focus are positioned at the 5th condenser (38) that the 3rd pin hole (37) is located, to obtain better excitation beam and stimulation effect.
8. as claimed in claim 5 point of pupil confocal laser Brillouin-raman spectroscopy measurement device, it is characterized in that, can pass through Optical Fiber Transmission exciting light and scattering spectrum, comprise the collimation lens (40) coaxial with illumination iris (3), be positioned at first fibre-optic terminus (41) at collimation lens (40) focus place, by the first optical patchcord (42), the first fibre-optic terminus (41) are connected with laser instrument (1); Be positioned at second fibre-optic terminus (43) at the first condenser (8) focus place, by the second optical patchcord (44), the second fibre-optic terminus (43) be connected with the first spectral detector (9); Be positioned at the 3rd fibre-optic terminus (45) at second condenser lens (13) focus place, by the 3rd optical patchcord (46) by the 3rd fibre-optic terminus (45) be connected with the second spectral detector (14), be convenient to realize modularization dismounting, selection function and large scale are surveyed and are measured flexibly.
9. as claimed in claim 5 point of pupil confocal laser Brillouin-raman spectroscopy measurement device, it is characterized in that, divide pupil confocal laser detection system (16) to comprise the 3rd condenser (17) and image capturing system (18), wherein, the test surface of image capturing system (18) is positioned at the focus place of the 3rd condenser (17).Can also comprise image enhancement system (47), image enhancement system (47) and the confocal point of the 3rd condenser (17), image capturing system (18) is positioned at the focus place of image enhancement system (47), to improve a point acquisition precision for pupil laser differential confocal detection system.
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