CN103878681A - 一种具有加载装置的多级抛光盘 - Google Patents
一种具有加载装置的多级抛光盘 Download PDFInfo
- Publication number
- CN103878681A CN103878681A CN201410079925.XA CN201410079925A CN103878681A CN 103878681 A CN103878681 A CN 103878681A CN 201410079925 A CN201410079925 A CN 201410079925A CN 103878681 A CN103878681 A CN 103878681A
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- CN
- China
- Prior art keywords
- grinding
- polishing disk
- polishing
- slide unit
- workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/12—Lapping plates for working plane surfaces
- B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201410079925.XA CN103878681B (zh) | 2014-03-06 | 2014-03-06 | 一种具有加载装置的多级抛光盘 |
Applications Claiming Priority (1)
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CN201410079925.XA CN103878681B (zh) | 2014-03-06 | 2014-03-06 | 一种具有加载装置的多级抛光盘 |
Publications (2)
Publication Number | Publication Date |
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CN103878681A true CN103878681A (zh) | 2014-06-25 |
CN103878681B CN103878681B (zh) | 2016-04-13 |
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CN201410079925.XA Active CN103878681B (zh) | 2014-03-06 | 2014-03-06 | 一种具有加载装置的多级抛光盘 |
Country Status (1)
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CN (1) | CN103878681B (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107414618A (zh) * | 2017-07-28 | 2017-12-01 | 义乌市台荣超硬制品有限公司 | 一种多粒度磨盘式磨削装置 |
CN108214325A (zh) * | 2016-12-09 | 2018-06-29 | 上海寅泽电子科技有限公司 | 一种可进行粗磨和精磨的砂磨流体抛光机械设备 |
CN112008053A (zh) * | 2020-08-27 | 2020-12-01 | 燕山大学 | 一种合金的制备装置及电流施加方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07154117A (ja) * | 1993-11-30 | 1995-06-16 | Tokin Corp | 共振周波数調整研削装置及びその研削方法 |
EP1138440A2 (de) * | 2000-03-28 | 2001-10-04 | Gerd Eisenblätter GmbH | Schleifwerkzeug und Verfahren zu seiner Herstellung |
CN1345264A (zh) * | 1999-03-30 | 2002-04-17 | 株式会社尼康 | 抛光盘、抛光机、抛光方法及制造半导体器件的方法 |
CN102658520A (zh) * | 2012-02-24 | 2012-09-12 | 浙江工业大学 | 基于分级结构化复合弹性研抛盘的动压光整*** |
CN102658528A (zh) * | 2012-02-24 | 2012-09-12 | 浙江工业大学 | 一种分级结构化复合弹性研抛盘 |
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2014
- 2014-03-06 CN CN201410079925.XA patent/CN103878681B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07154117A (ja) * | 1993-11-30 | 1995-06-16 | Tokin Corp | 共振周波数調整研削装置及びその研削方法 |
CN1345264A (zh) * | 1999-03-30 | 2002-04-17 | 株式会社尼康 | 抛光盘、抛光机、抛光方法及制造半导体器件的方法 |
EP1138440A2 (de) * | 2000-03-28 | 2001-10-04 | Gerd Eisenblätter GmbH | Schleifwerkzeug und Verfahren zu seiner Herstellung |
CN102658520A (zh) * | 2012-02-24 | 2012-09-12 | 浙江工业大学 | 基于分级结构化复合弹性研抛盘的动压光整*** |
CN102658528A (zh) * | 2012-02-24 | 2012-09-12 | 浙江工业大学 | 一种分级结构化复合弹性研抛盘 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108214325A (zh) * | 2016-12-09 | 2018-06-29 | 上海寅泽电子科技有限公司 | 一种可进行粗磨和精磨的砂磨流体抛光机械设备 |
CN107414618A (zh) * | 2017-07-28 | 2017-12-01 | 义乌市台荣超硬制品有限公司 | 一种多粒度磨盘式磨削装置 |
CN107414618B (zh) * | 2017-07-28 | 2018-12-25 | 义乌市台荣超硬制品有限公司 | 一种多粒度磨盘式磨削装置 |
CN112008053A (zh) * | 2020-08-27 | 2020-12-01 | 燕山大学 | 一种合金的制备装置及电流施加方法 |
CN112008053B (zh) * | 2020-08-27 | 2021-09-17 | 燕山大学 | 一种合金的制备装置及电流施加方法 |
Also Published As
Publication number | Publication date |
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CN103878681B (zh) | 2016-04-13 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191209 Address after: 314000 Democracy Village, Guangchen Town, Pinghu City, Jiaxing City, Zhejiang Province Patentee after: Pinghu Zhongrun Machinery Technology Co.,Ltd. Address before: 310018 Room 1004-1006, 17 Block 57, Baiyang Street Science Park Road, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee before: Zhejiang Qibo Intellectual Property Operation Co.,Ltd. Effective date of registration: 20191209 Address after: 310018 Room 1004-1006, 17 Block 57, Baiyang Street Science Park Road, Hangzhou Economic and Technological Development Zone, Zhejiang Province Patentee after: Zhejiang Qibo Intellectual Property Operation Co.,Ltd. Address before: Hangzhou City, Zhejiang province 310014 City Zhaohui District Six Patentee before: Zhejiang University of Technology |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A multistage polishing disc with loading device Effective date of registration: 20210915 Granted publication date: 20160413 Pledgee: Zhejiang Pinghu Rural Commercial Bank Co.,Ltd. Guangchen sub branch Pledgor: Pinghu Zhongrun Machinery Technology Co.,Ltd. Registration number: Y2021330001629 |