CN103840710A - Vibration energy collecting device - Google Patents

Vibration energy collecting device Download PDF

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Publication number
CN103840710A
CN103840710A CN201410085832.8A CN201410085832A CN103840710A CN 103840710 A CN103840710 A CN 103840710A CN 201410085832 A CN201410085832 A CN 201410085832A CN 103840710 A CN103840710 A CN 103840710A
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piezoelectric
metallic plate
movable metallic
unit
vibration energy
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CN201410085832.8A
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CN103840710B (en
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胡启方
任卓翔
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Abstract

The invention discloses a vibration energy collecting device which comprises an electrostatic unit, a piezoelectric unit and an energy storage circuit. The electrostatic unit, the piezoelectric unit and the energy storage circuit form a series loop, a mass block in the piezoelectric unit drives a movable metal sheet in the electrostatic unit to be bent and deformed under external vibrational excitation, therefore, deformation of a piezoelectric sheet in the piezoelectric unit and changes of electrostatic capacitance in the electrostatic unit are caused at the same time, alternating voltages generated by the deformation of the piezoelectric sheet are used as a precharging power supply of the electrostatic unit, and after precharging is completed, electric energy is output to the energy storage unit by the precharging power supply and the alternating voltages generated by the deformation of the piezoelectric sheet together. Piezoelectric type energy collection and electrostatic type energy collection are coupled, the precharging power supply does not need to be arranged independently, electrostatic type energy collection is passive, and energy collection efficiency is improved.

Description

A kind of vibration energy collector
Technical field
The application relates to micro-energy technology field, relates in particular to a kind of vibration energy collector.
Background technology
Along with fossil energy progressively exhausted with and the pollution problem that causes increasingly serious, the mankind are exploring novel green energy resource to meet daily life running.Vibrational energy is a kind of energy extensively existing in natural environment; As, vehicle movement can produce vibrational energy, so in region and places such as traffic main artery road, subway circulation line and operational vehicles, mechanical vibrational energy metric density is only second to solar energy, by a kind of energy collecting device, these vibrational energy collections are converted into electric energy, can be used for supplying with the low power consuming devices such as electronic equipment; And for example, the mechanical vibrational energy that human body daily exercise produces also can be converted into electric energy by energy collecting device, is the low-power consumption medicine equipment energy supplies such as the neural artificial limb of implant into body.With respect to solar energy, mechanical vibrational energy is not subject to weather effect, and has good power stage stability, thereby has worldwide been subject to paying close attention to widely and studying.
Existing a kind of piezoelectric type vibration energy collector, it utilizes mass to drive piezoelectric beam distortion, and then makes piezoelectric produce deformation, thereby produces contrary polarization charge at piezoelectrics opposite face; Piezoelectric beam is arranged at the position of deformation maximum in collector structure conventionally, and carries out Conversion of Energy for driving the relevant chip area of mass of girder construction distortion to be difficult to be effectively used.Therefore,, with respect to area occupied, the volume of piezoelectric type vibration energy collector, its energy acquisition efficiency needs further to be improved.
Summary of the invention
In view of this, the application's object is to provide a kind of vibration energy collector, to improve vibrational energy collecting efficiency.
For achieving the above object, the application provides following technical scheme:
A kind of vibration energy collector, comprising: static unit, piezoelectric unit and accumulator;
Described static unit comprises fixed metal plate, insulation board and movable metallic plate;
Described insulation board is arranged between described fixed metal plate and movable metallic plate; Described fixed metal plate and insulation board are bonded to each other, and bending is a contour body; One side of described movable metallic plate, as stiff end, is fixedly connected with described insulation board;
Described piezoelectric unit comprises piezoelectric patches and mass;
Described piezoelectric patches is attached at the outer surface of described movable metallic plate, between described piezoelectric patches and described movable metallic plate, is provided with dielectric; Described mass is fixed on the opposite side of described stiff end, for driving described movable metallic plate to produce deformation;
Described piezoelectric patches is connected with described movable metallic plate by wire; Described accumulator is connected with described fixed metal plate and piezoelectric patches respectively;
Described accumulator is used for storing described static unit and piezoelectric unit transforms the electric energy obtaining.
Preferably, described vibration energy collector also comprises insulation cover plate and insulation base station;
Described insulation cover plate is covered in the stiff end top of described movable metallic plate, and the upper surface of described insulation base station is the cambered surface matching with described contour body, and described contour body is attached at the upper surface of described insulation base station;
Between described insulation cover plate and insulation base station, connect, to fix described movable metallic plate and described contour body.
Preferably, described insulation cover plate and insulation base station adopt identical insulating material to process.
Preferably, the insulating material that described insulation board adopts comprises kraft capacitor paper and insulation film.
Preferably, described piezoelectric patches is located at the outer surface of described movable metallic plate by insulating sticky sticker.
Preferably, described fixed metal plate and/or movable metallic plate adopt high resiliency sheet metal to process;
Described high resiliency sheet metal comprises beryllium-bronze plate.
Preferably, described piezoelectric patches comprises piezoelectrics, upper surface electrode and lower surface electrode;
Described upper surface electrode is attached at the upper surface of described piezoelectrics; Described lower surface electrode is attached at the lower surface of described piezoelectrics;
Described lower surface electrode is electrically connected with described movable metallic plate by wire; Described upper surface electrode is connected with described accumulator.
Preferably, described accumulator comprises the first diode, the second diode and storage capacitor;
Described the first diode and the second diode reverse parallel connection, described energy storage capacitor in series accesses described the second diode place parallel branch;
The negative electrode of described the first diode is connected to described fixed metal plate, and the anode of described the first diode is connected to described upper surface electrode.
Preferably, described piezoelectrics adopt following any piezoelectric to process: piezoelectric membrane and piezoelectric ceramic wafer.
Can find out from above-mentioned technical scheme, static unit, piezoelectric unit and accumulator are connected to series loop by the application, outside under vibrational excitation, mass in piezoelectric unit drives the deformation that bends of the movable sheet metal in static unit, thereby cause the variation of the deformation of piezoelectric patches in piezoelectric unit and the electrostatic capacitance of static unit simultaneously, the alternating voltage that static unit produces taking piezoelectric patches deformation is as precharge power supply, after precharge completes, with piezoelectric patches deformation produce alternating voltage together with export electric energy to accumulator.The embodiment of the present application has realized the coupling of piezoelectric type energy collection and electrostatic energy acquisition, does not need precharge power supply is set separately, has realized the passive of electrostatic energy acquisition, has improved energy acquisition efficiency, has solved the problem of prior art.
Brief description of the drawings
In order to be illustrated more clearly in the embodiment of the present application or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only some embodiment of the application, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The cross-sectional view of the vibration energy collector that Fig. 1 provides for the embodiment of the present application one;
The three-dimensional explosive view of the vibration energy collector that Fig. 2 provides for the embodiment of the present application two;
The cross-sectional view of the vibration energy collector that Fig. 3 provides for the embodiment of the present application two;
The equivalent circuit diagram of the vibration energy collector that Fig. 4 provides for the embodiment of the present application;
The vibration energy collector that Fig. 5 provides for the embodiment of the present application is at the equivalent circuit diagram of static unit pre-charging stage;
The vibration energy collector that Fig. 6 provides for the embodiment of the present application is at the equivalent circuit diagram in energy storage stage.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present application, the technical scheme in the embodiment of the present application is clearly and completely described, obviously, described embodiment is only some embodiments of the present application, instead of whole embodiment.Based on the embodiment in the application, those of ordinary skill in the art are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the application's protection.
The embodiment of the present application discloses a kind of vibration energy collector, to improve vibrational energy collecting efficiency.
The vibration energy collector that the embodiment of the present application one provides, comprising: static unit 100, piezoelectric unit 200 and accumulator 300; With reference to the cross-sectional view of the vibration energy collector shown in Fig. 1, described static unit 100 comprises fixed metal plate 2, insulation board 3 and movable metallic plate 4; Described piezoelectric unit 200 comprises piezoelectric patches 5 and mass 6.
Concrete, insulation board 3 is arranged between fixed metal plate 2 and movable metallic plate 4, and fixed metal plate 2, insulation board 3 and movable metallic plate 4 form an electrostatic capacitance.Fixed metal plate 2 and insulation board 3 are bonded to each other, and bending is a contour body; One side of movable metallic plate 4, as stiff end, is fixedly connected with insulation board 3; One side relative with described stiff end is as movable end, and when described movable end activity, when movable metallic plate 4 bends deformation, the gap between movable metallic plate 4 and fixed metal plate 2 changes, thereby causes electrostatic capacitance change.
Piezoelectric patches 5 is attached at the outer surface of movable metallic plate 4, between piezoelectric patches 5 and movable metallic plate 4, is provided with dielectric 5 '.Mass 6 is fixed on the opposite side of the stiff end of movable metallic plate 4, i.e. movable end, for driving movable metallic plate 4 to produce deformation.
Piezoelectric patches 5 is connected with movable metallic plate 4 by wire, realizes being electrically connected of static unit 100 and piezoelectric unit 200; Accumulator 300 is connected with fixed metal plate 2 and piezoelectric patches 5 respectively, and accumulator 300, static unit 100 and piezoelectric unit 200 form series loop; The electric energy that accumulator 300 obtains for storing static unit 100 and piezoelectric unit 200 collection conversions.
The operation principle of above-mentioned vibration energy collector is as follows:
In vibrational excitation situation outside, mass 6 moves up and down, and drives movable metal electrode 4 flexural deformations; The deformation of movable metal electrode 4, makes the capacitance of fixed metal plate 2, insulation board 3 and the electrostatic capacitance that movably metallic plate 4 forms change on the one hand, drives on the other hand piezoelectric patches 5 to produce deformation; When piezoelectric patches 5 produces deformation, lower surface forms the equivalent charges of different polarity thereon, produces an alternating voltage; Instantaneous voltage value at described alternating voltage is dropped to by crest in the half period of trough, and described alternating voltage carries out precharge to described electrostatic capacitance; Risen to by trough in the half period of crest in the instantaneous voltage value of described alternating voltage, described alternating voltage and described electrostatic capacitance are exported electric energy simultaneously, are stored to accumulator.
From said structure and operation principle, static unit, piezoelectric unit and accumulator are connected to series loop by the embodiment of the present application, outside under vibrational excitation, mass in piezoelectric unit drives the deformation that bends of the movable sheet metal in static unit, thereby cause the variation of the deformation of piezoelectric patches in piezoelectric unit and the electrostatic capacitance of static unit simultaneously, the alternating voltage that static unit produces taking piezoelectric patches deformation is as precharge power supply, after precharge completes, with piezoelectric patches deformation produce alternating voltage together with export electric energy to accumulator.The embodiment of the present application has realized the coupling of piezoelectric type energy collection and electrostatic energy acquisition, does not need precharge power supply is set separately, has realized the passive of electrostatic energy acquisition, has improved energy acquisition efficiency, has solved the problem of prior art.
As the preferred embodiment of one, the embodiment of the present application two provides another kind of vibration energy collector, the three-dimensional explosive view of vibration energy collector as shown in Figure 2, and the cross-sectional view of the vibration energy collector shown in Fig. 3, this vibration energy collector comprises: static unit 100, piezoelectric unit 200 and accumulator 300; Wherein, static unit 100 comprises insulation base station 1, fixed metal plate 2, insulation board 3, movable metallic plate 4 and insulation cover plate 7; Piezoelectric unit 200 comprises piezoelectric patches 5 and mass 6; Accumulator 300 comprises the first diode D1, the second diode D2 and storage capacitor C0.
Concrete, in static unit 100, insulation board 3 is arranged between fixed metal plate 2 and movable metallic plate 4, and fixed metal plate 2, insulation board 3 and movable metallic plate 4 form an electrostatic capacitance.Fixed metal plate 2 and insulation board 3 are bonded to each other, and bending is a contour body, are attached at the upper surface of insulation base station 1; One side of movable metallic plate 4, as stiff end, is fixedly connected with insulation board 3, and insulation cover plate 7 is covered in the stiff end top of movable metallic plate 4.Between insulation cover plate 7 and insulation base station 1, be fixedly connected with by parts such as screws, fixed metal plate 2, insulation board 3 and movable metallic plate 4 are carried out to mechanical presses, the stiff end of movable metallic plate 4 and the respective ends of fixed metal plate 2 and insulation board 3 are fixed.
In piezoelectric unit 200, mass 6 is fixed on the opposite side of the stiff end of movable metallic plate 4, i.e. movable end, for driving movable metallic plate 4 to produce deformation.
Piezoelectric patches 5 is attached at the outer surface of movable metallic plate 4 by dielectric 5 '; Piezoelectric patches 5 comprises piezoelectrics 52, upper surface electrode 51 and lower surface electrode 53.Upper surface electrode 51 is attached at the upper surface of piezoelectrics 52; Lower surface electrode 53 is attached at the lower surface of piezoelectrics 52; Lower surface electrode 53 is electrically connected with movable metallic plate 4 by wire; Upper surface electrode 51 is connected with described accumulator.Upper surface electrode 51, piezoelectrics 52 and lower surface electrode 53 form piezoelectric capacitance, and capacitance changes with the deformation quantity of piezoelectrics 52; When simultaneously piezoelectrics 52 deformation, its upper and lower surface produces equivalent charges of different polarity, thereby produces an alternating voltage between upper surface electrode 51 and lower surface electrode 53, i.e. piezoelectric voltage, its size also with.Because the deformation quantity of piezoelectrics 52 changes.Therefore, the variation of capacitance variations and piezoelectric voltage presents relation of following up.
In accumulator 300, the first diode D1 and the second diode D2 reverse parallel connection, storage capacitor C0 series connection access the second diode D2 place parallel branch; The anode that the negative electrode of the first diode D1 is connected to fixed metal plate 2, the first diode D1 is connected to upper surface electrode 51.
Above-mentioned vibration energy collector can be equivalent to circuit diagram shown in Fig. 4, and wherein, the first capacitor C 1 is equivalent to the electrostatic capacitance that fixed metal plate 2, insulation board 3 and movable metallic plate 4 form; The second capacitor C 2 is equivalent to the deformation electric capacity of piezoelectric patches 5, and upper surface electrode 51, piezoelectrics 52 and lower surface electrode 53 form piezoelectric capacitance; AC power Us is equivalent to the alternating voltage that upper surface electrode 51 and lower surface electrode 53 produce after with the equivalent charges of different polarity.
Below with reference to Fig. 3 and Fig. 4, the operation principle of the vibration energy collector that the embodiment of the present application two is provided is introduced.
In vibrational excitation situation outside, mass 6 moves up and down, and drives movable metal electrode 4 flexural deformations; The deformation of movable metal electrode 4, the electrostatic capacitance that makes on the one hand fixed metal plate 2, insulation board 3 and movable metallic plate 4 form, the capacitance of the first capacitor C 1 changes, and drives on the other hand piezoelectrics 52 to produce deformation; When piezoelectrics 52 produce deformation, form respectively the equivalent charges of different polarity at upper surface electrode 51 and lower surface electrode 53, form AC power Us.
Concrete, in the time that mass 6 moves downward, Us is within decline cycle (being instantaneous voltage value is dropped to trough half period by crest), and D1 conducting, D2 turn-off, further as shown in Figure 5, AC power Us's equivalent circuit diagram charges to the first capacitor C 1 and the second capacitor C 2 simultaneously; Meanwhile, the gap between fixed metal plate 2 and movable metallic plate 4 reduces gradually, and C1 increases gradually; When mass 6 moves to upper/lower positions, when movable metallic plate 4 is fitted with insulation board 3, C1 reaches maximum; Said process makes C1 can store more electric charge in this stage, more effectively from piezoelectric patches 5, obtains electric energy.
In the time that mass 6 moves upward, Us is within the rising cycle (being instantaneous voltage value is risen to crest half period by trough), D1 turn-offs, D2 conducting, AC power Us starts storage capacitor C0 to charge, by piezoelectrics deformation, deformation mechanical energy is converted to electrical power storage to storage capacitor C0; Simultaneously, on two pole plates (fixed metal plate 2 and movable metallic plate 4) due to C1, store electric charge, the movable end of movable metallic plate 4 is with the above-mentioned motion of mass 6, mechanical external force overcomes two electrostatic force actings between pole plate, the electric charge of two pole plates is moved on the pole plate of storage capacitor C0, the second capacitor C 2, to storage capacitor C0 charging under mechanical oscillation effect, realizes mechanical energy and is converted to electric energy.
From above-mentioned operation principle, the embodiment of the present application has realized the coupling of piezoelectric type energy collection and electrostatic energy acquisition, and with respect to single energy acquisition mode under equal conditions, energy acquisition efficiency improves greatly; Concrete, if this energy collecting device is regarded as taking piezoelectric type as main, electrostatic as auxiliary, electrostatic energy conversion portion can improve piezoelectric voltage output in the equal piezoelectric charge situation of generation so, thus the integral energy output that improves energy collecting device; If this energy collecting device is regarded as taking electrostatic as master, piezoelectric type are as auxiliary, piezoelectrics provide precharge charge source for electrostatic energy collector so, and this energy source can progressively not decayed along with the growth of service time, thereby realize the passive of electrostatic energy collecting device.
Piezoelectricity-electrostatic coupling formula that the application provides has no chance vibration energy collector, can be applicable to urban road vehicle flowrate monitoring wireless sensor system, supplies with source as lasting green energy; Also can form array, for the energy supplying system of new-energy automobile.
In the embodiment of the present application, be the insulating properties ensureing between lattice structure layer, insulation cover plate 7 and insulation base station 1 are preferably based on insulating material of the same race and make, as polytetrafluoroethylene etc.
In the embodiment of the present application, the insulating material that can be used for making insulation board comprises kraft capacitor paper and insulation film (as polytetrafluoroethylene film) etc.
Preferably, in the embodiment of the present application, piezoelectric patches 5 is attached to the outer surface of movable metallic plate 4 by insulation viscose glue, realizes insulation between the two simultaneously and be fixedly connected with.In addition, mass 6 also can be fixed on by modes such as stickups the movable end of movable metallic plate 4.
Preferably, in the embodiment of the present application, fixed metal plate 2 and/or movable metallic plate 4 adopt high resiliency sheet metal to process; Described high resiliency sheet metal comprises beryllium-bronze plate etc.
Preferably, in the embodiment of the present application, piezoelectrics 52 can adopt following any piezoelectric to process: piezoelectric membrane (concrete as poly meta fluoroethylene piezoelectric film) and piezoelectric ceramic wafer.
To the above-mentioned explanation of the disclosed embodiments, make professional and technical personnel in the field can realize or use the application.To be apparent for those skilled in the art to the multiple amendment of these embodiment, General Principle as defined herein can, in the case of not departing from the application's spirit or scope, realize in other embodiments.Therefore, the application will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (9)

1. a vibration energy collector, is characterized in that, comprising: static unit, piezoelectric unit and accumulator;
Described static unit comprises fixed metal plate, insulation board and movable metallic plate;
Described insulation board is arranged between described fixed metal plate and movable metallic plate; Described fixed metal plate and insulation board are bonded to each other, and bending is a contour body; One side of described movable metallic plate, as stiff end, is fixedly connected with described insulation board;
Described piezoelectric unit comprises piezoelectric patches and mass;
Described piezoelectric patches is attached at the outer surface of described movable metallic plate, between described piezoelectric patches and described movable metallic plate, is provided with dielectric; Described mass is fixed on the opposite side of described stiff end, for driving described movable metallic plate to produce deformation;
Described piezoelectric patches is connected with described movable metallic plate by wire; Described accumulator is connected with described fixed metal plate and piezoelectric patches respectively;
Described accumulator is used for storing described static unit and piezoelectric unit transforms the electric energy obtaining.
2. vibration energy collector according to claim 1, is characterized in that, also comprises insulation cover plate and insulation base station;
Described insulation cover plate is covered in the stiff end top of described movable metallic plate, and the upper surface of described insulation base station is the cambered surface matching with described contour body, and described contour body is attached at the upper surface of described insulation base station;
Between described insulation cover plate and insulation base station, connect, to fix described movable metallic plate and described contour body.
3. vibration energy collector according to claim 2, is characterized in that, described insulation cover plate and insulation base station adopt identical insulating material to process.
4. according to the vibration energy collector described in claim 1~3 any one, it is characterized in that, the insulating material that described insulation board adopts comprises kraft capacitor paper and insulation film.
5. according to the vibration energy collector described in claim 1~3 any one, it is characterized in that, described piezoelectric patches is located at the outer surface of described movable metallic plate by insulating sticky sticker.
6. according to the vibration energy collector described in claim 1~3 any one, it is characterized in that, described fixed metal plate and/or movable metallic plate adopt high resiliency sheet metal to process;
Described high resiliency sheet metal comprises beryllium-bronze plate.
7. according to the vibration energy collector described in claim 1~3 any one, it is characterized in that, described piezoelectric patches comprises piezoelectrics, upper surface electrode and lower surface electrode;
Described upper surface electrode is attached at the upper surface of described piezoelectrics; Described lower surface electrode is attached at the lower surface of described piezoelectrics;
Described lower surface electrode is electrically connected with described movable metallic plate by wire; Described upper surface electrode is connected with described accumulator.
8. vibration energy collector according to claim 7, is characterized in that, described accumulator comprises the first diode, the second diode and storage capacitor;
Described the first diode and the second diode reverse parallel connection, described energy storage capacitor in series accesses described the second diode place parallel branch;
The negative electrode of described the first diode is connected to described fixed metal plate, and the anode of described the first diode is connected to described upper surface electrode.
9. vibration energy collector according to claim 7, is characterized in that, described piezoelectrics adopt following any piezoelectric to process: piezoelectric membrane and piezoelectric ceramic wafer.
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104218848A (en) * 2014-10-09 2014-12-17 吉林大学 Self-adaptive piezoelectric generation cantilever beam
CN106160570A (en) * 2016-02-03 2016-11-23 浙江大学 Based on the cantilever beam vibration generating device under tunnel wind environment
CN107359818A (en) * 2017-08-17 2017-11-17 浙江师范大学 A kind of piezoelectricity windmill
CN107395064A (en) * 2017-09-18 2017-11-24 苏州市职业大学 A kind of energy recycle device based on piezoelectric cantilever
CN108199617A (en) * 2017-12-20 2018-06-22 北京航天控制仪器研究所 A kind of transverse direction MEMS piezoelectricity-electrostatic coupling energy collecting device and processing method
CN109600072A (en) * 2014-09-08 2019-04-09 诺基亚技术有限公司 Flexible hybrid energy generates and storage power subsystem
CN112514087A (en) * 2018-05-30 2021-03-16 阿肯色大学董事会 Energy harvesting devices and sensors and methods of making and using the same

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US20050236935A1 (en) * 2004-04-22 2005-10-27 Ngk Insulators, Ltd. Microswitch and method for manufacturing the same
CN101002343A (en) * 2004-10-21 2007-07-18 米其林技术公司 Energy harvester with adjustable resonant frequency
CN103162872A (en) * 2011-12-14 2013-06-19 日本电波工业株式会社 External force detection equipment

Patent Citations (3)

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Publication number Priority date Publication date Assignee Title
US20050236935A1 (en) * 2004-04-22 2005-10-27 Ngk Insulators, Ltd. Microswitch and method for manufacturing the same
CN101002343A (en) * 2004-10-21 2007-07-18 米其林技术公司 Energy harvester with adjustable resonant frequency
CN103162872A (en) * 2011-12-14 2013-06-19 日本电波工业株式会社 External force detection equipment

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109600072A (en) * 2014-09-08 2019-04-09 诺基亚技术有限公司 Flexible hybrid energy generates and storage power subsystem
CN109600072B (en) * 2014-09-08 2021-02-02 诺基亚技术有限公司 Flexible hybrid energy generation and storage power supply unit
CN104218848A (en) * 2014-10-09 2014-12-17 吉林大学 Self-adaptive piezoelectric generation cantilever beam
CN106160570A (en) * 2016-02-03 2016-11-23 浙江大学 Based on the cantilever beam vibration generating device under tunnel wind environment
CN107359818A (en) * 2017-08-17 2017-11-17 浙江师范大学 A kind of piezoelectricity windmill
CN107359818B (en) * 2017-08-17 2023-05-16 浙江师范大学 Piezoelectric windmill
CN107395064A (en) * 2017-09-18 2017-11-24 苏州市职业大学 A kind of energy recycle device based on piezoelectric cantilever
CN108199617A (en) * 2017-12-20 2018-06-22 北京航天控制仪器研究所 A kind of transverse direction MEMS piezoelectricity-electrostatic coupling energy collecting device and processing method
CN108199617B (en) * 2017-12-20 2019-07-12 北京航天控制仪器研究所 A kind of transverse direction MEMS piezoelectricity-electrostatic coupling energy collecting device and processing method
CN112514087A (en) * 2018-05-30 2021-03-16 阿肯色大学董事会 Energy harvesting devices and sensors and methods of making and using the same
CN112514087B (en) * 2018-05-30 2024-03-12 阿肯色大学董事会 Energy harvesting devices and sensors and methods of making and using the same

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