CN103839321A - Long-size-detection magnetic sensor and manufacturing method thereof - Google Patents

Long-size-detection magnetic sensor and manufacturing method thereof Download PDF

Info

Publication number
CN103839321A
CN103839321A CN201210480611.1A CN201210480611A CN103839321A CN 103839321 A CN103839321 A CN 103839321A CN 201210480611 A CN201210480611 A CN 201210480611A CN 103839321 A CN103839321 A CN 103839321A
Authority
CN
China
Prior art keywords
magnetic sensor
sensor chip
magnetic
short
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201210480611.1A
Other languages
Chinese (zh)
Other versions
CN103839321B (en
Inventor
时启猛
刘乐杰
曲炳郡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING JIAYUE TONGLEJI ELECTRONIC Co Ltd
Original Assignee
BEIJING JIAYUE TONGLEJI ELECTRONIC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING JIAYUE TONGLEJI ELECTRONIC Co Ltd filed Critical BEIJING JIAYUE TONGLEJI ELECTRONIC Co Ltd
Priority to CN201210480611.1A priority Critical patent/CN103839321B/en
Publication of CN103839321A publication Critical patent/CN103839321A/en
Application granted granted Critical
Publication of CN103839321B publication Critical patent/CN103839321B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Measuring Magnetic Variables (AREA)

Abstract

The invention provides a long-size-detection magnetic sensor and a manufacturing method thereof. The long-size-detection magnetic sensor includes at least one detection unit and a printed circuit board which supports the detection unit. Each detection unit includes at least one chip group and each chip group includes at least three short magnetic sensor chips. The short magnetic sensor chips in each chip group are arrayed in a transverse sequence. The long-size-detection magnetic sensor is low in cost and has the advantages of being simple in structure, small in size, small in thickness and high in sensitivity and the like and complies with demands of minisize, integration, low power consumption and high performance of a modern society on a magnetic sensor.

Description

A kind of long size detection Magnetic Sensor and preparation method thereof
Technical field
The invention belongs to Magnetic Sensor technical field, be specifically related to a kind of detection Magnetic Sensor for detection of long size magnetic mark and preparation method thereof.
Background technology
Magnetic Sensor is the characteristic that the magnetic variation that utilizes sensing unit to cause variations such as magnetic field, electric current, ess-strain, temperature, light plays sensitization, catch the magnetic variation of measured device by sensing unit, then change magnetic variation into electric signal, measurement electric signal can be distinguished the size of measured device.Magnetic Sensor is widely used in Aeronautics and Astronautics, microelectronics, geological exploration, medical imaging, information acquisition and finance and the field such as military.
Traditional Magnetic Sensor adopts coil as magnetosensitive unit, thisly has take coil as the Magnetic Sensor of magnetosensitive unit that volume is large, sensitivity is low, it is integrated to be difficult to, low-response, resolution be low, the defects such as stability, reliability and poor anti jamming capability.Traditional coil type Magnetic Sensor more and more can not adapt to the requirement of financial circles development.For this reason, person skilled has been developed thin-film magnetic field sensor, and using magnetic sensor chip as magnetosensitive unit, magnetic sensor chip comprises the wheatstone bridge circuits being made up of magnetic induction film, obtains magnetic signal by wheatstone bridge circuits.This thin-film magnetic field sensor has the features such as volume is little, thin thickness, sensitivity height, meets many demands for development such as the microminiaturization of modern society to Magnetic Sensor, integrated, low-power consumption and high-performance.
But along with the development of anti-counterfeiting technology, in order to strengthen the anti-counterfeit capability of financial Currency Type or bill, the length of anti-counterfeiting mark constantly increases, and the distribution range of anti-counterfeiting mark is more and more wider, this has improved the difficulty that detects imitative pseudo-mark greatly.Although can expand by increasing the length of magnetic induction film the sensing range of magnetic induction sensor,, be subject to the restriction of wafer density, the increase of the length of magnetic induction film can reduce again magnetic sensor chip yield rate, increases the manufacturing cost of magnetic sensor chip.
Summary of the invention
The technical problem to be solved in the present invention is exactly for the above-mentioned defect existing in prior art, and a kind of long size detection Magnetic Sensor and preparation method thereof is provided, and not only sensing range is large for it, and low cost of manufacture.
For this reason, the invention provides a kind of long size detection Magnetic Sensor, comprise the printed circuit board of at least one detecting unit and the described detecting unit of support, described detecting unit comprises at least one group of chipset, described in every group, chipset comprises at least three short magnetic sensor chips, and the described short magnetic sensor chip in same chip group laterally order is arranged.
Wherein, the described short magnetic sensor chip serial or parallel connection in described chipset and/or between chipset and chipset becomes wheatstone bridge circuits.
Wherein, described detecting unit comprises M group chipset, the longitudinal parallel arranged of a described M chipset, and wherein, M is more than or equal to 2 integer.
Wherein, described in every group, chipset comprises the short magnetic sensor chip of N sheet, every described short magnetic sensor chip comprises two magnetic susceptibility films, wherein, the tail end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet is electrically connected with the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n sheet, the tail end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n sheet is electrically connected with the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n+1 sheet, the tail end of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet is electrically connected with the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n sheet, the tail end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n sheet is electrically connected with the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n+1 sheet, and, the head end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet meets Vcc, the head end ground connection of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet, the tail end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n+1 sheet is electrically connected with the tail end of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n+1 sheet, and meet Vout, the integer of 2≤n.
Wherein, described in every group, chipset comprises the short magnetic sensor chip of M sheet, every described short magnetic sensor chip comprises two magnetic susceptibility films, wherein, the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m-1, the head end electrical connection of the Article 1 magnetic susceptibility film in head end and the short magnetic sensor chip of m+1 of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m also meets Vcc jointly, the tail end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m-1, the tail end of the Article 1 magnetic susceptibility film in tail end and the short magnetic sensor chip of m+1 of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m crosses to be electrically connected and forms common node A, the tail end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m-1, the tail end of the Article 2 magnetic susceptibility film in tail end and the short magnetic sensor chip of m+1 of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m crosses to be electrically connected and forms common node B, common node A and common node B meet Vout jointly, the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m-1, head end electrical connection the common ground of the Article 2 magnetic susceptibility film in head end and the short magnetic sensor chip of m+1 of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m, the integer of 2≤m.
Wherein, in same described chipset, the horizontal seamless arrangement of magnetic induction film of adjacent two described short magnetic sensor chips.
Wherein, in same described chipset, laterally there is gap in the magnetic induction film of adjacent two described short magnetic sensor chips.
Wherein, the length of the magnetic induction film of described short magnetic sensor chip is less than or equal to 3.3mm.
Wherein, in same described chipset, described short magnetic sensor chip is arranged in parallel and makes the magnetic induction film of described short magnetic sensor chip be positioned at same plane.
Wherein, the corresponding independent output channel of each detecting unit.
Wherein, described short magnetic sensor chip comprises at least two magnetic induction film, pad and wires parallel to each other and pinning direction is identical or contrary, by described pad and wire, described magnetic induction film electrical connection is formed to wheatstone bridge circuits.
Wherein, described magnetic induction film is giant magnetoresistance magnetic induction film, anisotropic magnetoresistive magnetic induction film, tunneling effect magnetic resistance magnetic induction film, giant magnetoresistance effect magnetic resistance magnetic induction film, Hall effect film or giant Hall effect film.
Wherein, also comprise capillary, described capillary is fixed on described printed circuit board, and is electrically connected with the conducting wire on described printed circuit board.
Wherein, also comprise screening can, described printed circuit board is arranged in described screening can, and makes described chipset and to be arranged on magnetic conductive hole on described screening can relative.
Wherein, described screening can adopts Ferrite Material or permalloy material to make, or is made up of metal material and/or nonmetallic materials, and is coated with overlap coating on the surface of described metal material and/or nonmetallic materials.
The present invention also provides a kind of method for making of growing size detection Magnetic Sensor, comprising:
Obtain printed circuit board and detecting unit, described detecting unit comprises at least one group of chipset, and described in every group, chipset comprises at least three short magnetic sensor chips, and the described short magnetic sensor chip described in same group in chipset laterally order is arranged;
Described detecting unit is fixed on to described printed circuit board, and the input end of described detecting unit and signal output part are electrically connected with the conducting wire of described printed circuit board;
Obtain capillary, described capillary is fixed on to described printed circuit board, and by the conducting wire on described printed circuit board, described capillary is electrically connected with input end and the signal output part of described detecting unit;
Obtain screening can, described printed circuit board is positioned in described screening can, and make described detecting unit and to be arranged on magnetic conductive hole on described screening can relative;
In described screening can, insert resin glue, and dried aging, thereby described printed circuit board is fixed in described screening can;
Remove being positioned at described screening can outside and described magnetic conductive hole unnecessary resin glue around.
In long size detection Magnetic Sensor provided by the invention, comprise at least one detecting unit, each detecting unit comprises at least one group of chipset, every group of chipset comprises at least three short magnetic sensor chips, arrange and form long Magnetic Sensor by the shorter short magnetic sensor chip of length, meet the demand that detects long anti-counterfeiting mark, and, overcome the restriction of wafer density, the yield of short magnetic sensor chip is higher than the yield of the long magnetic sensor chip of integrative-structure, thereby reduced the cost of manufacture of long size detection Magnetic Sensor.Simple in structure, the advantage such as volume is little, thin thickness, sensitivity height that this length size detection Magnetic Sensor also has, meets the microminiaturization of modern society to Magnetic Sensor, integrated, low-power consumption and high performance requirement.
Accompanying drawing explanation
Fig. 1 a is the exploded view of the long size detection Magnetic Sensor of the embodiment of the present invention;
Fig. 1 b is the partial enlarged drawing of Fig. 1 a;
Fig. 2 is the structural drawing of embodiment of the present invention detecting unit, short magnetic sensor chip series connection, and, the seamed arrangement of magnetic induction film of short magnetic sensor chip;
Fig. 3 is the structural drawing of the short magnetic sensor chip of the embodiment of the present invention;
Fig. 4 is the structural drawing of another embodiment of the present invention detecting unit, short magnetic sensor chip parallel connection, and, the seamed arrangement of magnetic induction film of short magnetic sensor chip;
The structural drawing of Fig. 5 a another embodiment of the present invention detecting unit, short magnetic sensor chip series connection, and, the magnetic induction film seamless arrangement of short magnetic sensor chip;
The structural drawing of Fig. 5 b another embodiment of the present invention detecting unit, short magnetic sensor chip parallel connection, and, the magnetic induction film seamless arrangement of short magnetic sensor chip;
Fig. 6 is the structural drawing of embodiment of the present invention multi-channel detection unit;
Fig. 7 is the method for making process flow diagram of the long size detection Magnetic Sensor of the embodiment of the present invention;
The structural drawing of Fig. 8 a further embodiment of this invention hyperchannel card reader Magnetic Sensor;
The exploded view of Fig. 8 b embodiment of the present invention hyperchannel card reader Magnetic Sensor.
Embodiment
For making those skilled in the art understand better technical scheme of the present invention, below in conjunction with accompanying drawing, long size detection Magnetic Sensor provided by the invention and preparation method thereof is described in detail.
Fig. 1 a is the exploded view of the long size detection Magnetic Sensor of the embodiment of the present invention, and Fig. 1 b is the partial enlarged drawing of Fig. 1 a.As shown in Fig. 1 a and Fig. 1 b, long size detection Magnetic Sensor comprises screening can 1, detecting unit 2 and printed circuit board 3, and printed circuit board 3 is for supporting detecting unit 2, and detecting unit 2 and printed circuit board 3 are located in screening can 1.Detecting unit 2 can be single channel detecting unit, can be also multi-channel detection unit.On screening can 1, be provided with magnetic conductive hole 11, detecting unit 2 is relative with magnetic conductive hole 11.The magnetic field that anti-counterfeiting mark produces receives through the rear detected unit 2 of magnetic conductive hole 11.Each detecting unit 2 obtains being arranged on the magnetic id signal of tested bill different parts, according to the magnetic id signal obtaining to have that it's too late strong and weak, can judge the true and false of diverse location magnetic mark.
Embodiment for convenience of description, the present embodiment is defined as the length direction of detecting unit (or magnetic induction film) laterally, and the Width of detecting unit (or magnetic induction film) is defined as longitudinally.
Fig. 2 is the structural drawing of embodiment of the present invention detecting unit.As shown in Figure 2, detecting unit 2 is single channel detecting unit, it comprises one group of chipset, every group of chipset comprises three short magnetic sensor chip 21a, 21b, 21c, and three short magnetic sensor chip 21a, 21b, 21c laterally sequentially arrange, three short magnetic sensor chip 21a, 21b, 21c be arranged in parallel, and arrange in alignment, each short magnetic sensor chip comprises two magnetic induction films that are parallel to each other, and between the magnetic induction film of three short magnetic sensor chip 21a, 21b, 21c, has gap.Certainly, as shown in Figure 5 a, three short magnetic sensor chip 21a, 21b, 21c also can not arrange on same straight line, so that realize seamless connection between the magnetic induction film of three short magnetic sensor chip 21a, 21b, 21c.In addition, every group of chipset also can comprise more short magnetic sensor chips, that is, every group of chipset can comprise three or three above short magnetic sensor chips.As one embodiment of the invention, detect in Magnetic Sensor at single channel, comprise one group of chipset, this chipset comprises at least three short magnetic sensor chips, three laterally order arrangements of short magnetic sensor chip, can exist gap to connect between its magnetic induction film, also can realize seamless connection.
The length of the short magnetic sensor chip of the present embodiment is not more than 10mm, is preferably equal to or less than 3.3mm.By the laterally long magnetic sensor chip of (along its length) arrangement acquisition of multiple short magnetic sensor chips.For the long magnetic sensor chip of integrative-structure, the yield of the long magnetic sensor chip being spliced by short magnetic sensor chip is higher than the yield of the long magnetic sensor chip of integrative-structure, thereby can reduce the cost that Magnetic Sensor is manufactured.
Fig. 3 is the structural drawing of the short magnetic sensor chip of the embodiment of the present invention.As shown in Figure 3, short magnetic sensor chip comprises two magnetic induction film 211a, 211b that be arranged in parallel and pad 212a, 212b, 212c, 212d, wherein, the first pad 212a and the second pad 212b are separately positioned on head end and the tail end of the first magnetic induction film 211a, and the 3rd pad 212c and the 4th pad 212d are separately positioned on head end and the tail end of the second magnetic induction film 211b.
The pinning direction of magnetic induction film 211a, 211b can be identical, also can be contrary.Magnetic induction film is giant magnetoresistance magnetic induction film, anisotropic magnetoresistive magnetic induction film, tunneling effect magnetic resistance magnetic induction film, giant magnetoresistance effect magnetic resistance magnetic induction film, Hall effect film or giant Hall effect film.
The present embodiment utilizes wire that three short magnetic sensor chip 21a, 21b, 21c series connection are formed to Hui Sitong half-bridge circuit.As shown in Figure 2, the tail end of the Article 1 magnetic susceptibility film in the first short magnetic sensor chip 21a is electrically connected with the head end of the Article 1 magnetic susceptibility film in the second short magnetic sensor chip 21b, and the tail end of the Article 1 magnetic susceptibility film in the second short magnetic sensor chip 21b is electrically connected with the head end of the Article 1 magnetic susceptibility film in the 3rd short magnetic sensor chip 21c; The tail end of the Article 2 magnetic susceptibility film in the first short magnetic sensor chip 21a is electrically connected with the head end of the Article 2 magnetic susceptibility film in the second short magnetic sensor chip 21b, and the tail end of the Article 2 magnetic susceptibility film in the second short magnetic sensor chip 21b is electrically connected with the head end of the Article 2 magnetic susceptibility film in the 3rd short magnetic sensor chip 21c; And, the head end of the Article 1 magnetic susceptibility film in the first short magnetic sensor chip 21a connects Vcc(power supply), the head end ground connection (Gnd) of the Article 2 magnetic susceptibility film of the first short magnetic sensor chip 21a, the tail end of the Article 1 magnetic susceptibility film of the 3rd short magnetic sensor chip 21c is electrically connected with the tail end of the Article 2 magnetic susceptibility film of the 3rd short magnetic sensor chip 21c, and meeting Vout, Vout is as the signal output part of Hui Sitong half-bridge circuit.
In the above-described embodiments, every group of chipset is provided with three short magnetic sensor chips, but the present invention is not limited thereto, and every group of chipset can arrange three above short magnetic sensor chips as required.In fact, every group of chipset can comprise the short magnetic sensor chip of N sheet, the integer of N >=3.As long as short magnetic sensor chip is connected in such a way, , the tail end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet is electrically connected with the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n sheet, the tail end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n sheet is electrically connected with the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n+1 sheet, the tail end of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet is electrically connected with the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n sheet, the tail end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n sheet is electrically connected with the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n+1 sheet, and, the head end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet meets Vcc, the head end ground connection of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet, the tail end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n+1 sheet is electrically connected with the tail end of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n+1 sheet, and meet Vout, the integer of 2≤n.In the time that N is more than or equal to 4, the connection of all the other each short magnetic sensor chips is analogized by this principle, and N is more than or equal to the integer of n+1.
In another embodiment, utilize wire by three short magnetic sensor chip 21a, 21b, the 21c Hui Sitong of formation in parallel half-bridge circuit.As shown in Figure 4, the head end of the Article 1 magnetic susceptibility film in the first short magnetic sensor chip 21a, the head end electrical connection of the Article 1 magnetic susceptibility film in the head end of the Article 1 magnetic susceptibility film in the second short magnetic sensor chip 21b and the 3rd short magnetic sensor chip 21c, common access Vcc, the tail end of the Article 1 magnetic susceptibility film in the first short magnetic sensor chip 21a, the tail end electrical connection of the Article 1 magnetic susceptibility film in the tail end of the Article 1 magnetic susceptibility film in the second short magnetic sensor chip 21b and the 3rd short magnetic sensor chip 21c, jointly be connected to node 1, the tail end of the Article 2 magnetic susceptibility film in the first short magnetic sensor chip 21a, the tail end electrical connection of the Article 2 magnetic susceptibility film in the tail end of the Article 2 magnetic susceptibility film in the second short magnetic sensor chip 21b and the 3rd short magnetic sensor chip 21c, jointly be connected to node 2, node 1 and node 2 meet Vout jointly, by the head end electrical connection ground connection of the Article 2 magnetic susceptibility film in the head end of the Article 2 magnetic susceptibility film in the head end of the Article 2 magnetic susceptibility film in the first short magnetic sensor chip 21a and the second short magnetic sensor chip 21b and the 3rd short magnetic sensor chip 21c.
In the time that short magnetic sensor chip is in parallel, every group of chipset is not limited to three short magnetic sensor chips equally.Similar when connecting, every group of chipset can comprise the short magnetic sensor chip of M sheet, the integer of M >=3, as long as short M sheet magnetic sensor chip is in parallel in such a way, , the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m-1 is electrically connected and meets Vcc with the head end of the Article 1 magnetic susceptibility film in head end and the short magnetic sensor chip of m+1 of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m, the tail end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m-1 is electrically connected with the tail end of the Article 1 magnetic susceptibility film in tail end and the short magnetic sensor chip of m+1 of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m, connect common node 1, the tail end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m-1 is electrically connected and connects common node 2 with the tail end of the Article 2 magnetic susceptibility film in tail end and the short magnetic sensor chip of m+1 of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m, node 1 and node 2 meet Vout jointly, by the head end electrical connection ground connection of the Article 2 magnetic susceptibility film in head end and the short magnetic sensor chip of m+1 of the Article 2 magnetic susceptibility film in head end and the short magnetic sensor chip of m of the Article 2 magnetic susceptibility film in short m-1 magnetic sensor chip, the integer of 1≤m≤M, in the time that M is more than or equal to 4, the connection of all the other each short magnetic sensor chips is analogized by this principle, M is more than or equal to the integer of m+1.
In the present embodiment, three short magnetic sensor chip 21a, 21b, 21c laterally sequentially arrange, and have gap between the magnetic induction film of two adjacent short magnetic sensor chips, as shown in Figure 2 and Figure 4.But the present invention is not limited thereto, in another embodiment, as shown in Fig. 5 a and Fig. 5 b, three short magnetic sensor chip 21a, 21b, 21c laterally sequentially arrange, and there is not gap between the magnetic induction film of adjacent two short magnetic sensor chips, three short magnetic sensor chip 21a, 21b, 21c realize seamless link.
In the above-described embodiments, detecting unit 2 only comprises one group of chipset.But the present invention is not limited thereto, certainly, detecting unit 2 also can comprise two groups, three groups or more groups of chipsets.That is to say, in Magnetic Sensor of the present invention, detecting unit 2 comprises at least one group of chipset, the corresponding passage of each group chipset, and corresponding detecting unit is multi-channel detection unit.Fig. 6 is the structural drawing of embodiment of the present invention multi-channel detection unit.As shown in Figure 6, multi-channel detection unit comprises two groups of chip group, and three top short magnetic sensor chips are one group of chipset, and three short magnetic sensor chips are on the lower another group chipset, and the sensitive surface of two groups of chip group is in same level.Every group of chipset comprises three short magnetic sensor chips, and, the seamed arrangement of magnetic induction film of the short magnetic sensor chip in same chip group.Each chipset can be that the short magnetic sensor chip serial or parallel connection that is positioned at same a line is obtained to wheatstone bridge circuits, also can be by the short magnetic sensor chip intersection serial or parallel connection in different rows, as long as make can form Wheatstone bridge between the magnetic induction film of the each chip of this passage magnetic detecting unit, reach testing goal.As one embodiment of the invention, in the chipset of this multi-channel detection unit or between chipset, each short magnetic sensor chip laterally order is arranged, and the magnetic induction film seamless arrangement of preferred short magnetic sensor chip.
In another embodiment, multi-channel detection unit 2 comprises three groups or above chipset,, multi-channel detection unit 2 comprises M chipset, longitudinally (Width of short magnetic sensor chip) parallel arranged of M chipset, wherein, M is more than or equal to 2 integer, the sensitive surface of these chipsets is in same level, seamed or seamless link form Wheatstone bridge between the magnetic induction film of the short magnetic sensor chip of each chipset.
As shown in Fig. 1 a and Fig. 1 b, long size detection Magnetic Sensor also comprises capillary 5, and capillary 5 is fixed on printed circuit board 3, and is electrically connected with the conducting wire on printed circuit board.
The present embodiment, screening can 1 adopts Ferrite Material or permalloy material to make, or is made up of metal material and/or nonmetallic materials, and is coated with overlap coating on the surface of described metal material and/or nonmetallic materials.
It should be noted that, in the present embodiment, long size detection Magnetic Sensor is that short magnetic sensor chip is connected into Hui Sitong half-bridge circuit, but the present invention is not limited thereto.Long size detection Magnetic Sensor also can as required, connect into Hui Sitong full-bridge circuit by short magnetic sensor chip.
In the long size detection Magnetic Sensor of the present embodiment, detecting unit comprises at least one group of chipset, every group of chipset comprises at least three short magnetic sensor chips, arrange and form long Magnetic Sensor by the shorter short magnetic sensor chip order of length, meet the demand that detects long anti-counterfeiting mark, and, overcome the restriction of wafer density, the yield of short magnetic sensor chip is higher than the yield of the long magnetic sensor chip of integrative-structure, thereby reduced the cost of manufacture of long size detection Magnetic Sensor.Simple in structure, the advantage such as volume is little, thin thickness, sensitivity height that this length size detection Magnetic Sensor also has, meets the microminiaturization of modern society to Magnetic Sensor, integrated, low-power consumption and high performance requirement.
Fig. 8 a is the structural drawing that the another kind of long size hyperchannel card reader of the embodiment of the present invention detects Magnetic Sensor, and Fig. 8 b is the exploded view that the another kind of long size hyperchannel card reader of the embodiment of the present invention detects Magnetic Sensor.As shown in Fig. 8 a and Fig. 8 b, long size hyperchannel card reader detects Magnetic Sensor and comprises screening can 81, detecting unit 82, printed circuit board 83, be provided with magnetic conductive hole 84 on the top of screening can 81, at the fixed part 85 for fixed mask shell 81 that is provided with of screening can 81.Detecting unit 82 is fixed on printed circuit board 83, it comprises triple channel, every passage comprises at least one detecting unit, each detecting unit comprises at least one group of chipset, every group of chipset comprises at least three short magnetic sensor chips, and the described short magnetic sensor chip in same chip group laterally order is arranged, arrange and form long magnetic sensor chip by multiple short magnetic sensor chips, detect the requirement of long anti-counterfeiting mark to meet every passage.The concrete structure of detecting unit 82 is identical with above-described embodiment, does not repeat them here.Detecting unit 82 and printed circuit board 83 are located in screening can 81, and detecting unit 82 is relative with magnetic conductive hole 84.On printed circuit board 83, be also fixed with capillary 87, the corresponding three root bead pins 87 of each output channel, capillary 87 is electrically connected with detecting unit 82 by the conducting wire on printed circuit board 83.
The present invention also provides a kind of method for making of growing size detection Magnetic Sensor, as shown in Figure 7, comprises the following steps:
Step S1, obtains printed circuit board and detecting unit, and described detecting unit comprises at least one group of chipset, and described in every group, chipset comprises at least three short magnetic sensor chips, and the described short magnetic sensor chip described in every group in chipset laterally order is arranged;
Step S2, is fixed on described printed circuit board by described detecting unit, and the signal output part of described detecting unit and the conducting wire of described printed circuit board are electrically connected;
Step S3, obtains capillary, and described capillary is fixed on to described printed circuit board, and by the conducting wire on described printed circuit board, described capillary is electrically connected with the signal output part of described detecting unit;
Step S4, obtains screening can, described printed circuit board is positioned in described screening can, and makes described detecting unit and to be arranged on magnetic conductive hole on described screening can relative;
Step S5 inserts resin glue in described screening can, and dried aging, thereby described printed circuit board is fixed in described screening can;
Step S6, removes being positioned at described screening can outside and described magnetic conductive hole unnecessary resin glue around.
In the method for making of the long size detection Magnetic Sensor of the present embodiment, detecting unit comprises at least one group of chipset, every group of chipset comprises at least three short magnetic sensor chips, arrange and form long Magnetic Sensor by the shorter short magnetic sensor chip of length, meet the demand that detects long anti-counterfeiting mark, and, overcome the restriction of wafer density, the yield of short magnetic sensor chip is higher than the yield of the long magnetic sensor chip of integrative-structure, thereby reduced the cost of manufacture of long size detection Magnetic Sensor.The long size detection Magnetic Sensor that the method obtains also has the advantages such as simple in structure, volume is little, thin thickness, sensitivity height, meets the microminiaturization of modern society to Magnetic Sensor, integrated, low-power consumption and high performance requirement.
Be understandable that, above embodiment is only used to principle of the present invention is described and the illustrative embodiments that adopts, but the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement are also considered as protection scope of the present invention.

Claims (16)

1. one kind long size detection Magnetic Sensor, comprise the printed circuit board of at least one detecting unit and the described detecting unit of support, it is characterized in that, described detecting unit comprises at least one group of chipset, described in every group, chipset comprises at least three short magnetic sensor chips, and the described short magnetic sensor chip in same chip group laterally order is arranged.
2. long size detection Magnetic Sensor according to claim 1, is characterized in that, the described short magnetic sensor chip serial or parallel connection in described chipset and/or between chipset and chipset becomes wheatstone bridge circuits.
3. long size detection Magnetic Sensor according to claim 1, is characterized in that, described detecting unit comprises M group chipset, the longitudinal parallel arranged of a described M chipset, and wherein, M is more than or equal to 2 integer.
4. long size detection Magnetic Sensor according to claim 1, it is characterized in that, described in every group, chipset comprises the short magnetic sensor chip of N sheet, every described short magnetic sensor chip comprises two magnetic susceptibility films, wherein, the tail end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet is electrically connected with the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n sheet, the tail end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n sheet is electrically connected with the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of n+1 sheet, the tail end of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet is electrically connected with the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n sheet, the tail end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n sheet is electrically connected with the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of n+1 sheet, and, the head end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet meets Vc c, the head end ground connection of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n-1 sheet, the tail end of the Article 1 magnetic susceptibility film of the short magnetic sensor chip of n+1 sheet is electrically connected with the tail end of the Article 2 magnetic susceptibility film of the short magnetic sensor chip of n+1 sheet, and meet Vout, the integer of 2≤n.
5. long size detection Magnetic Sensor according to claim 1, it is characterized in that, described in every group, chipset comprises the short magnetic sensor chip of M sheet, every described short magnetic sensor chip comprises two magnetic susceptibility films, wherein, the head end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m-1, the head end electrical connection of the Article 1 magnetic susceptibility film in head end and the short magnetic sensor chip of m+1 of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m also meets Vcc jointly, the tail end of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m-1, the tail end of the Article 1 magnetic susceptibility film in tail end and the short magnetic sensor chip of m+1 of the Article 1 magnetic susceptibility film in the short magnetic sensor chip of m crosses to be electrically connected and forms common node A, the tail end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m-1, the tail end of the Article 2 magnetic susceptibility film in tail end and the short magnetic sensor chip of m+1 of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m crosses to be electrically connected and forms common node B, common node A and common node B meet Vout jointly, the head end of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m-1, head end electrical connection the common ground of the Article 2 magnetic susceptibility film in head end and the short magnetic sensor chip of m+1 of the Article 2 magnetic susceptibility film in the short magnetic sensor chip of m, the integer of 2≤m.
6. long size detection Magnetic Sensor according to claim 1, is characterized in that, in same described chipset, and the horizontal seamless arrangement of magnetic induction film of adjacent two described short magnetic sensor chips.
7. long size detection Magnetic Sensor according to claim 1, is characterized in that, in same described chipset, the magnetic induction film of adjacent two described short magnetic sensor chips laterally exists gap.
8. long size detection Magnetic Sensor according to claim 1, is characterized in that, the length of the magnetic induction film of described short magnetic sensor chip is less than or equal to 3.3mm.
9. long size detection Magnetic Sensor according to claim 1, is characterized in that, in same described chipset, described short magnetic sensor chip is arranged in parallel and makes the magnetic induction film of described short magnetic sensor chip be positioned at same plane.
10. long size detection Magnetic Sensor according to claim 1, is characterized in that, the corresponding independent output channel of each detecting unit.
11. long size detection Magnetic Sensors according to claim 1, it is characterized in that, described short magnetic sensor chip comprises at least two magnetic induction film, pad and wires parallel to each other and pinning direction is identical or contrary, by described pad and wire, described magnetic induction film electrical connection is formed to wheatstone bridge circuits.
12. long size detection Magnetic Sensors according to claim 11, it is characterized in that, described magnetic induction film is giant magnetoresistance magnetic induction film, anisotropic magnetoresistive magnetic induction film, tunneling effect magnetic resistance magnetic induction film, giant magnetoresistance effect magnetic resistance magnetic induction film, Hall effect film or giant Hall effect film.
13. long size detection Magnetic Sensors according to claim 11, is characterized in that, also comprise capillary, described capillary is fixed on described printed circuit board, and are electrically connected with the conducting wire on described printed circuit board.
14. long size detection Magnetic Sensors according to claim 1, is characterized in that, also comprise screening can, described printed circuit board is arranged in described screening can, and make described chipset and to be arranged on magnetic conductive hole on described screening can relative.
15. long size detection Magnetic Sensors according to claim 14, it is characterized in that, described screening can adopts Ferrite Material or permalloy material to make, or made by metal material and/or nonmetallic materials, and be coated with overlap coating on the surface of described metal material and/or nonmetallic materials.
The method for making of 16. 1 kinds of long size detection Magnetic Sensors, is characterized in that, comprising:
Obtain printed circuit board and detecting unit, described detecting unit comprises at least one group of chipset, and described in every group, chipset comprises at least three short magnetic sensor chips, and the described short magnetic sensor chip described in same group in chipset laterally order is arranged;
Described detecting unit is fixed on to described printed circuit board, and the input end of described detecting unit and signal output part are electrically connected with the conducting wire of described printed circuit board;
Obtain capillary, described capillary is fixed on to described printed circuit board, and by the conducting wire on described printed circuit board, described capillary is electrically connected with input end and the signal output part of described detecting unit;
Obtain screening can, described printed circuit board is positioned in described screening can, and make described detecting unit and to be arranged on magnetic conductive hole on described screening can relative;
In described screening can, insert resin glue, and dried aging, thereby described printed circuit board is fixed in described screening can;
Remove being positioned at described screening can outside and described magnetic conductive hole unnecessary resin glue around.
CN201210480611.1A 2012-11-23 2012-11-23 A kind of long size detection Magnetic Sensor and preparation method thereof Expired - Fee Related CN103839321B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210480611.1A CN103839321B (en) 2012-11-23 2012-11-23 A kind of long size detection Magnetic Sensor and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210480611.1A CN103839321B (en) 2012-11-23 2012-11-23 A kind of long size detection Magnetic Sensor and preparation method thereof

Publications (2)

Publication Number Publication Date
CN103839321A true CN103839321A (en) 2014-06-04
CN103839321B CN103839321B (en) 2018-05-15

Family

ID=50802782

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210480611.1A Expired - Fee Related CN103839321B (en) 2012-11-23 2012-11-23 A kind of long size detection Magnetic Sensor and preparation method thereof

Country Status (1)

Country Link
CN (1) CN103839321B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016125861A (en) * 2014-12-26 2016-07-11 セイコーNpc株式会社 Magnetic line sensor
CN107921974A (en) * 2015-09-10 2018-04-17 川崎重工业株式会社 The manufacture method of the electroded leaf spring of railcar bogie

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2921262B2 (en) * 1992-06-04 1999-07-19 株式会社村田製作所 Long magnetic sensor
JP2000268224A (en) * 1999-03-18 2000-09-29 Nippon Conlux Co Ltd Method and device for inspecting authenticity of paper money
CN2572490Y (en) * 2002-10-17 2003-09-10 深圳粤宝电子工业总公司 All compatible detection magnet head with very long seam
CN2788259Y (en) * 2005-04-15 2006-06-14 福建省电影机械厂 Huge magnetic resistance sensor of paper money counter
CN1922504A (en) * 2004-02-27 2007-02-28 株式会社村田制作所 Prolonged magnetic sensor
CN101672903A (en) * 2009-09-23 2010-03-17 电子科技大学 Preparation method of magnetic sensor of wheatstone bridge type spin valve
CN202013413U (en) * 2011-04-06 2011-10-19 江苏多维科技有限公司 Single chip bridge type magnetic field sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2921262B2 (en) * 1992-06-04 1999-07-19 株式会社村田製作所 Long magnetic sensor
JP2000268224A (en) * 1999-03-18 2000-09-29 Nippon Conlux Co Ltd Method and device for inspecting authenticity of paper money
CN2572490Y (en) * 2002-10-17 2003-09-10 深圳粤宝电子工业总公司 All compatible detection magnet head with very long seam
CN1922504A (en) * 2004-02-27 2007-02-28 株式会社村田制作所 Prolonged magnetic sensor
CN2788259Y (en) * 2005-04-15 2006-06-14 福建省电影机械厂 Huge magnetic resistance sensor of paper money counter
CN101672903A (en) * 2009-09-23 2010-03-17 电子科技大学 Preparation method of magnetic sensor of wheatstone bridge type spin valve
CN202013413U (en) * 2011-04-06 2011-10-19 江苏多维科技有限公司 Single chip bridge type magnetic field sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016125861A (en) * 2014-12-26 2016-07-11 セイコーNpc株式会社 Magnetic line sensor
CN107921974A (en) * 2015-09-10 2018-04-17 川崎重工业株式会社 The manufacture method of the electroded leaf spring of railcar bogie
CN107921974B (en) * 2015-09-10 2019-07-09 川崎重工业株式会社 The manufacturing method of the electroded leaf spring of railcar bogie

Also Published As

Publication number Publication date
CN103839321B (en) 2018-05-15

Similar Documents

Publication Publication Date Title
CN111308154B (en) Current sensor
EP3026451B1 (en) Single magnetoresistor tmr magnetic field sensor chip and magnetic currency detector head
CN102621504B (en) Monolithic reference full bridge magnetic field sensor
US20170307664A1 (en) Sensors, systems and methods for residual current detection
US7098655B2 (en) Eddy-current sensor with planar meander exciting coil and spin valve magnetoresistive element for nondestructive testing
US20080084205A1 (en) Concept for Detecting a Change of a Physical Quantity by Means of a Conductor Structure
CN108594151B (en) Positional error compensation method without magnetic core current sensor
EP2989473A1 (en) Apparatus and method for in situ current measurement in a conductor
CN205809273U (en) A kind of anisotropic magnetoresistance AMR sensor without set/reset device
CN103576101A (en) Multi-channel integrated type magnetic sensor
JP2016517952A (en) Magnetic sensing device, magnetic induction method and manufacturing process thereof
CN103645448A (en) Improved Wheatstone half-bridge circuit and sensor
CN103839320A (en) Magnetic sensor used for financial counterfeit detection machine and manufacturing method thereof
CN103530930A (en) Financial authenticity-identification magnetic sensor and manufacturing method thereof and financial authenticity-identification machine
CN112083211A (en) Current sensor
CN105911490A (en) Magnetic field sensor with self-check set lead
CN103839321A (en) Long-size-detection magnetic sensor and manufacturing method thereof
CN103512588B (en) Long Magnetic Sensor and manufacture method
CN105005010A (en) Low-power magnetic resistance sensor based on LTCC technology and preparation method therefor
CN103123369A (en) Current sensing device
CN103544764B (en) A kind of sensor for identifying magnetic medium
CN103617669B (en) A kind of Coin detection device
CN104167043A (en) Chip-type weak magnetic detection sensor
CN103632431A (en) A magnetic image sensor and an authentic identification method
US11614500B2 (en) Integrated magnetometer and method of detecting a magnetic field

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20180515

Termination date: 20191123