CN103826379A - Non-equilibrium plasma generator and granular powder surface modification treatment system - Google Patents
Non-equilibrium plasma generator and granular powder surface modification treatment system Download PDFInfo
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- CN103826379A CN103826379A CN201410091619.8A CN201410091619A CN103826379A CN 103826379 A CN103826379 A CN 103826379A CN 201410091619 A CN201410091619 A CN 201410091619A CN 103826379 A CN103826379 A CN 103826379A
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Abstract
The invention discloses a non-equilibrium plasma generator and a granular powder surface modification treatment system. The non-equilibrium plasma generator comprises a cavity body, a shielding mesh and a high voltage electrode unit and a low voltage electrode which are both arranged in the cavity body, wherein the high voltage electrode unit is arranged on the lower surface of a high voltage electrode insulation cover plate, and comprises high voltage line electrodes in the distribution of a plurality of uniform arrays, and first through holes in the distribution of a plurality of uniform arrays are arranged on the high voltage electrode insulation cover plate; one end of each high voltage line electrode is fixed to one end of a high voltage electrode down-lead; the other end of the high voltage line electrode is fixed by a high voltage electrode fixing bolt, and the other end of the high voltage electrode down-lead is led out through the first through hole; all the high voltage electrode down-leads are connected and then used as the impulse high voltage input end of the non-equilibrium plasma generator. The non-equilibrium plasma generator and the granular powder surface modification treatment system adopt high voltage nanosecond repeat frequency impulse to directly drive non-equilibrium plasmas in the air under the atmospheric pressure, the discharge peak current density is larger, the efficiency of generating active particles is better, and the non equilibrium of plasmas is higher.
Description
Technical field
The invention belongs to gas discharge and plasma application field, relate to a kind of nonequilibrium plasma generation device and particulate powder surface modification treatment system.
Background technology
In recent years, atmospheric air nonequilibrium plasma was because exclusive advantage and huge application prospect have received concern especially.Nonthermal plasma is a kind of partially ionized low temperature plasma, and its electronics and ion temperature differ greatly.In this plasma, contain a large amount of electronics, metastable state ion, free radical isoreactivity particle, there is stronger reactivity, therefore there is application prospect at numerous areas such as the energy, material, machining, environmental protection.Wherein a very important research direction is to explore for the application to material surface modifying processing.Nonequilibrium plasma concentrates on the processing to macroscopical finished products such as films mostly for the processing of material, and particulate powder has more extensively and the intermediate raw material of special purpose as the macroscopical finished product of a kind of ratio, and the research that it is carried out to surface modification treatment is but relatively less.Compared with film or similar material, the contact area of particulate powder material and gas is much bigger.Thereby, the configuration of surface of powder and structure after plasma treatment, all likely there is marked change in particle size even.
At present, the more ripe production method of atmospheric air non-equilibrium plasma is dielectric barrier discharge and corona discharge, as CN101838800.B.Dielectric barrier discharge is due to the existence of dielectric, the distance of discharging gap is generally all smaller, affected structure extension and the practical application of sparking electrode, dielectric barrier in use may change proterties and produce pollution in addition, and its material properties also may impact exoelectrical reaction.The weak point of corona discharge is that ionisation of gas mainly concentrates near electrode, is difficult to obtain the plasma of large volume in the atmosphere of whole space, and plasma ionization efficiency is limited, and the electron energy of generation is not high, is difficult to be applied to large-scale industrial production.Therefore, in the natural environment of normal temperature atmospheric air low cost, produce large area or large volume nonthermal plasma continuously, significant for the industrial applications of plasma.
Summary of the invention
For the defect of prior art, the invention provides a kind of nonequilibrium plasma generation device, its object is to solve that the plasma that is difficult to obtain large volume, energy utilization efficiency that existing plasma discharge form exists are low, discharge peak currents density is little, produce that active particle efficiency is low, the non-equilibrium property of plasma is poor, use that restriction is large, an application cost high-technology difficult problem.
The invention provides a kind of nonequilibrium plasma generation device, comprise cavity, gauze screen and be arranged on high-field electrode unit and the low-field electrode unit in cavity; Two surfaces relative in described cavity are as high voltage electrode insulation cover plate and low-field electrode insulation cover plate, and two relative sides are as gauze screen, and two other relative side is as sealed insulation plate; Described high-field electrode unit is arranged on the lower surface of described high voltage electrode insulation cover plate, and described high-field electrode unit comprises the high-voltage line electrode that multiple uniform arrays are arranged, and is provided with the first through hole that multiple uniform arrays are arranged on described high voltage electrode insulation cover plate; One end of one end of each high-voltage line electrode and described high-field electrode lead-in wire is fixed; The other end of described high-voltage line electrode is fixed by described high-field electrode set bolt, and the other end of described high-field electrode lead-in wire is drawn by described the first through hole; And using the high voltage pulse input as described nonequilibrium plasma generation device after each high-field electrode lead-in wire connection; Described low-field electrode unit is arranged on the lower surface of described low-field electrode insulation cover plate, and described low-field electrode unit comprises the low-voltage line electrode that multiple uniform arrays are arranged; On described low-field electrode insulation cover plate, be provided with the second through hole that multiple uniform arrays are arranged; One end of one end of each low-voltage line electrode and described low-field electrode lead-in wire is fixed; The other end of described low-voltage line electrode is fixed by described low-field electrode set bolt, and the other end of described low-field electrode lead-in wire is drawn by described the second through hole; And ground connection after each low-field electrode lead-in wire is connected.
Wherein, described high-voltage line electrode is identical with the structure of described low-voltage line electrode, and the diameter of described high-voltage line electrode is 0.2mm to 1mm; The length of described high-voltage line electrode is 10cm to 200cm.
Wherein, the vertical interval of described high-voltage line electrode and low-voltage line electrode is 2cm to 8cm, and the level interval of each high-voltage line electrode in described high-field electrode unit is 5cm to 15cm.
Wherein, the repetition rate of the nanosecond pulse that the high voltage pulse input of described nonequilibrium plasma generation device receives is 100Hz to 1000Hz, and voltage magnitude is 50kV to 150kV, and the rising time of single high-voltage pulse is 30ns.
Wherein, the mesh diameter of described gauze screen is 0.5mm.
The present invention also provides a kind of particulate powder surface modification treatment system, comprise nonequilibrium plasma generation device, pulse generator and storage cage, described pulse generator is connected with the high voltage pulse input of described nonequilibrium plasma generation device by high-voltage conducting wires; Described storage cage is used for collecting processed particle; Described nonequilibrium plasma generation device is above-mentioned nonequilibrium plasma generation device.
The present invention can bring following technique effect:
(1) adopted nonequilibrium plasma in the repetitive frequency pulsed direct driving atmosphere air of high-voltage nanosecond, experimental result shows, than dielectric barrier discharge and corona discharge, in this discharge type, discharge peak currents density is larger, the efficiency that produces active particle is better, and the non-equilibrium property of plasma is also higher.
(2) linear array electrode can have different length and quantity, can increase the volume that in electric discharge, atmospheric pressure non-equilibrium plasma distributes, thereby allow air ionization district be filled in whole electric discharge device, has improved the utilization ratio of pulse power energy.
(3) linear array electrode is arranged under open normal temperature and pressure air ambient, do not need complicated dielectric impedance insulating barrier, abandon expensive and loaded down with trivial details vacuum, gas charging system, easily constructed compact conformation, lightweight, volume is little, the nonequilibrium plasma generation device of stable performance.Thereby make its use restriction less, application cost reduces greatly.
Accompanying drawing explanation
Fig. 1 is nonequilibrium plasma generation device of the present invention and particulate powder surface modification treatment system schematic.
Fig. 2 is the front schematic view of nonequilibrium plasma generation device of the present invention.
Fig. 3 is the reverse side schematic diagram of nonequilibrium plasma generation device of the present invention.
In institute's drawings attached, identical Reference numeral is used for representing identical element or structure, wherein:
1 is nonequilibrium plasma generation device, and 101 is high-voltage line electrode; 102 is low-voltage line electrode; 103 is high-field electrode lead-in wire; 104 is low-field electrode lead-in wire; 105 is high voltage electrode insulation cover plate; 106 is low-field electrode insulation cover plate; 107 is the first through hole; 108 is the second through hole; 109 is plasma generating area; 110 is left side gauze screen; 111 is right side gauze screen; 112 is side insulation cover plate; 113 is high-field electrode set bolt; 114 is low-field electrode set bolt; 2 is pulse generator; 3 is pending particle; 4 is processed particle; 5 is storage cage; 51 is half opening insulation booth; 52 is electrostatic screen plate.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein, only in order to explain the present invention, is not intended to limit the present invention.
The nonequilibrium plasma generation device 1 that the embodiment of the present invention provides can be applied to the surface modification treatment of material, the sterilizing of medical instruments and equipment etc.Fig. 1 shows the structure of this nonequilibrium plasma generation device 1, for convenience of explanation, only shows the part relevant to the embodiment of the present invention, and existing details are as follows:
Nonequilibrium plasma generation device 1 comprises cavity, gauze screen and is arranged on high-field electrode unit and the low-field electrode unit in cavity; Wherein cavity can be cuboid cavity; Two surfaces relative in cuboid cavity are respectively high voltage electrode insulation cover plate 105 and low-field electrode insulation cover plate 106; In cuboid cavity, two relative sides are gauze screen 110,111; In cuboid cavity, two other relative side is sealed insulation plate 112.
High-field electrode unit is arranged on the lower surface of high voltage electrode insulation cover plate 105, and high-field electrode unit comprises the high-voltage line electrode 101 that multiple uniform arrays are arranged; On high voltage electrode insulation cover plate 105, be provided with the first through hole 107 that multiple uniform arrays are arranged; One end of one end of each high-voltage line electrode 101 and high-field electrode lead-in wire 103 is fixed; The other end of high-voltage line electrode 101 is fixing by high-field electrode set bolt 113, and the other end of high-field electrode lead-in wire 103 is drawn by the first through hole 107; And using the high voltage pulse input as nonequilibrium plasma generation device 1 after each high-field electrode lead-in wire 103 connections.
Low-field electrode unit is arranged on the lower surface of low-field electrode insulation cover plate 106, and low-field electrode unit comprises the low-voltage line electrode 102 that multiple uniform arrays are arranged; On low-field electrode insulation cover plate 106, be provided with the second through hole 108 that multiple uniform arrays are arranged; One end of one end of each low-voltage line electrode 102 and low-field electrode lead-in wire 104 is fixed; The other end of low-voltage line electrode 102 is fixing by low-field electrode set bolt 114, and the other end of low-field electrode lead-in wire 104 is drawn by the second through hole 108; And ground connection after each low-field electrode lead-in wire 103 is connected.
In embodiments of the present invention, high-field electrode lead-in wire 103 can not be arranged on same plane with low-field electrode lead-in wire 104, with the electric field influence avoiding forming between contact conductor to the Electric Field Distribution between line electrode, thereby cause the generation region of nonequilibrium plasma to concentrate on a side of device; High-field electrode lead-in wire 103 and low-field electrode lead-in wire 104 are separately positioned on to the both sides of high voltage electrode insulation cover plate 105 and 106.
In real work, the nanosecond pulse of high pressure repetition rate is applied to the two ends of high and low pressure contact conductor 103,104, thereby forms severe non-uniform electric field between high and low linear array electrode, and this utmost point non-uniform field discharges air.Along with the change of the distance between high and low linear array electrode, the form of electric discharge also will change.Suitably choose the distance between high and low linear array electrode, can obtain the disperse shape glow discharge between sparkover and corona discharge.The atmospheric non-equilibrium plasma that the glow discharge of disperse shape produces is evenly being distributed between high and low linear array electrode.
In general, the above technical scheme of conceiving by the present invention compared with prior art, can obtain following advantage:
(1) this device has adopted the method for nonequilibrium plasma in the repetitive frequency pulsed direct driving atmosphere air of high-voltage nanosecond, experimental result shows, than dielectric barrier discharge and corona discharge, in this discharge type, discharge peak currents density is larger, the efficiency that produces active particle is better, and the non-equilibrium property of plasma is also higher.
(2) in this device, linear array electrode can have different length and quantity, can increase the volume that in electric discharge, atmospheric pressure non-equilibrium plasma distributes, thereby allow air ionization district be filled in whole electric discharge device, has improved the utilization ratio of pulse power energy.
(3) in this device, linear array electrode is arranged under open normal temperature and pressure air ambient, do not need complicated dielectric impedance insulating barrier, abandon expensive and loaded down with trivial details vacuum, gas charging system, easily constructed compact conformation, lightweight, volume is little, the nonequilibrium plasma generation device of stable performance.Thereby make its use restriction less, application cost reduces greatly.
In embodiments of the present invention, high-voltage line electrode 101 and low-voltage line electrode 102 all can adopt wire electrode, adopt the main cause of line electrode to be that the radius of curvature of line electrode is little, more easily between electrode, form severe non-uniform electric field, and severe non-uniform electric field is the necessary condition that produces atmospheric non-equilibrium plasma.High-voltage line electrode 101 and low-voltage line electrode 102 can adopt by conductors such as copper, aluminium, graphite to be made, and the technique of making electrode belongs to the known technology that those skilled in the art can be known, does not repeat them here.
In embodiments of the present invention, left and right side gauze screen and high and low pressure electrode set bolt are insulating material and make, and gauze screen mesh diameter is taken as 0.5mm.The filtering major diameter magazine particle that act as of gauze screen enters nonequilibrium plasma generation device 1, and the internal work condition that guarantees nonequilibrium plasma generation device 1 remains atmospheric air condition, abandon expensive and loaded down with trivial details vacuum, gas charging system, made the service condition of device unrestricted.
In embodiments of the present invention, the diameter of high-voltage line electrode 101 and low-voltage line electrode 102 can be elected 0.2mm to 1mm as.The length adjustment scope of high-voltage line electrode 101 and low-voltage line electrode 102 can be between 10cm to 200cm.Arranging of high and low pressure line electrode 101,102 diameters and length is mainly that to form severe non-uniform electric field between electrode be object, and this is also one of necessary condition that in air, nonequilibrium plasma produces.
Wherein, the vertical interval of high-voltage line electrode 101 and low-voltage line electrode 102 can be at 2cm between 8cm, and the level interval of each high-voltage line electrode 101 in high-field electrode unit can be at 5cm between 15cm.In low-field electrode unit, the setting of each low-voltage line electrode 102 arranges identical with the electrode in high-field electrode unit.Arranging of high and low pressure line electrode 101,102 vertical intervals and level interval is that to form severe non-uniform electric field between electrode be object equally, experiment is found, along with reducing of electrode vertical interval, electric discharge is developed to thread sparkover form by the glow discharge of disperse shape, and along with the increase of electrode vertical interval, electric discharge is developed to faint corona discharge by the glow discharge of disperse shape.Equally, along with reducing of electrode level interval, electric discharge is developed to thread sparkover form by the glow discharge of disperse shape, and along with the increase of electrode level interval, electric discharge by the glow discharge of large volume disperse shape to separately independently the glow discharge of disperse shape develop.
In embodiments of the present invention, the repetition rate of the nanosecond pulse that the high voltage pulse input of nonequilibrium plasma generation device 1 receives is at 100Hz in 1000Hz, and voltage magnitude is at 50kV in 150kV, and the rising time of single high-voltage pulse is 30ns.The amplitude of high voltage pulse and the selection of rising edge are that to form severe non-uniform electric field between electrode be object equally, and this is also the necessary condition that in air, nonequilibrium plasma produces.Experiment is found, along with reducing of the rising time of high-voltage pulse, electric discharge develops into the disperse shape glow discharge that can produce nonequilibrium plasma by thread sparkover form, and the amplitude of nanosecond pulse is larger, frequency is higher, the strength of discharge of glow discharge is larger, and progressively makes electric discharge be developed to thread sparkover form by the glow discharge of disperse shape.
For the nonequilibrium plasma generation device 1 that the further description embodiment of the present invention provides, existing in conjunction with instantiation, details are as follows:
In practice process, by regulating amplitude, rising time and the repetition rate of high-voltage nanosecond pulse, and material, diameter, length, level interval, vertical interval, the line electrode quantity of adjusting linear array electrode, design and completed a large amount of discharge tests, obtained the example experience that obtains in a large number large volume diffuse discharge, concrete example is as follows.
The present embodiment is a kind ofly to produce that in air, non-equilibrium plasma is for the device of particulate powder surface modification treatment, and its topology layout schematic diagram as shown in Figure 1, Figure 2, Figure 3 shows.High-voltage line electrode 101 and low-voltage line electrode 102 are the graphite silk of diameter 0.8mm, length 100cm, and the quantity of high and low pressure linear array electrode wires is respectively 6, and the interelectrode vertical interval of linear array is 4cm, and level interval is 12cm.The high voltage pulse input input pulse amplitude of nonequilibrium plasma generation device 1 is 120kV, and rising time is 30ns, and repetition rate is 500Hz, and pending particle 4 is nano carbon black.In experiment, produce large volume diffuse discharge plasma, and nano carbon black material properties is improved after processing.
In the nonequilibrium plasma generation device 1 that the embodiment of the present invention provides, the instantiation of parameters refers to following table:
Table 1
The nonequilibrium plasma generation device 1 that the embodiment of the present invention provides can be applied in particulate powder surface modification treatment system, as shown in Figure 1, particulate powder surface modification treatment system comprises nonequilibrium plasma generation device 1, pulse generator 2 and storage cage 5; Wherein pulse generator 2 is connected with the high voltage pulse input of nonequilibrium plasma generation device 1 by high-voltage conducting wires; Pending particle 3 is blown in nonequilibrium plasma generation device after being seen through left side gauze screen by hair-dryer, enter plasma generating area, particulate powder material is after plasma surface modification is processed, and processed particle 4 sees through right side gauze screen 111 and enters storage cage 5 under the wind-force of hair-dryer.Finally, processed particle 4, under the effect of surface electrostatic absorption affinity, is deposited under electrostatic screen plate, thereby completes the collection of particle powder material.
Wherein, nonequilibrium plasma generation device 1 comprises high-voltage line electrode 101, low-voltage line electrode 102, high-field electrode lead-in wire 103, low-field electrode lead-in wire 104, high voltage electrode insulation cover plate 105, low-field electrode insulation cover plate 106, the first through hole 107, the second through hole 108, plasma generating area 109, left side gauze screen 110, right side gauze screen 111, side insulation cover plate 112, high-field electrode set bolt 113, low-field electrode set bolt 114.
Nonequilibrium plasma generation device 1 is rectangular build nonequilibrium plasma generation device, and the structural design of whole generator and arrangement are front-rear center symmetrical expression.The upper and lower surface of nonequilibrium plasma generation device 1 is made up of high voltage electrode insulation cover plate 105 and low-field electrode insulation cover plate 106.High-voltage line electrode 101 is placed in the lower surface of high voltage electrode insulation cover plate 105, and low-voltage line electrode 102 is placed in the upper surface of high voltage electrode insulation cover plate 106.The first through hole 107 is positioned at one end of high voltage electrode insulation cover plate 105, and the second 108 of through holes are positioned at one end of low-field electrode insulation cover plate 106.High-field electrode lead-in wire 103 is drawn downwards by the first through hole 107, and low-field electrode lead-in wire 104 is upwards drawn by the second through hole 108.One end of high-voltage line electrode 101 is fixed by the mode of winding and the lower end of high-field electrode lead-in wire 103, and obtains reliable electric connection; The other end of high-voltage line electrode 101 is fixing by high-field electrode set bolt 113.Same, one end of low-voltage line electrode 102 is fixed by the mode of winding and the upper end of high-field electrode lead-in wire 104, and obtains reliable electric connection; The other end of low-voltage line electrode 102 is fixing by low-field electrode set bolt 114.For avoiding the electric field between high and low pressure contact conductor to cause that the electric field between linear array electrode produces distortion, high-voltage line electrode 101 and low-voltage line electrode 102 are not taken on same vertical plane with the link going between separately, but are separately fixed at the rear and front end of nonequilibrium plasma generation device 1.Meanwhile, being fixedly and removably connecting between high-voltage line electrode 101 and low-voltage line electrode 102 and high and low pressure insulation cover plate, to facilitate electrode in actual applications to change.
In the present invention, high-voltage line electrode 101 and low-voltage line electrode 102 are conductive filament, can be made by the metallic conductor such as copper, aluminium, also can be made by non-metal conductors such as graphite.The quantity of high-voltage line electrode 101 and low-voltage line electrode 102 is adjustable, specifically can between 1 to 20, regulate.The diameter of high-voltage line electrode 101 and low-voltage line electrode 102 is between 0.2mm to 1mm.The length of high-voltage line electrode 101 and low-voltage line electrode 102 is also adjustable, and concrete adjustable range arrives between 200cm at 10cm.The non-equilibrium hot plasma of diffuse discharge only can produce under the condition of severe non-uniform electric field, and Given this, the vertical interval of high-voltage line electrode 101 and low-voltage line electrode 102 is taken at 2cm between 8cm, and level interval is taken at 5cm between 15cm.
High voltage electrode insulation cover plate 105, low-field electrode insulation cover plate 106 and side insulation cover plate 112 are made up of the material of high insulating property, can select the material such as polymethyl methacrylate, epoxy resin.
High-field electrode lead-in wire 103, low-field electrode lead-in wire 104 can be made up of the electric conducting material such as copper conductor, aluminum conductor, and diameter is taken as 0.8mm.The first through hole 107, the second through hole 108 are round through hole, and diameter is taken as 1mm.
Left side gauze screen 110 and right side gauze screen 111 are insulating material and make, and gauze screen mesh diameter is taken as 0.5mm, enters nonequilibrium plasma generation device 1 with filtering major diameter magazine particle.Described high-field electrode set bolt 113 and low-field electrode set bolt 114 are made up of insulating material equally.In discharge process, plasma generating area 109 is rendered as large volume spatial dispersion shape electric discharge state.
In running work, pulse generator 2 provides the high-voltage nanosecond pulse of the required repetition rate of diffuse discharge for the high-low pressure linear array electrode two ends in nonequilibrium plasma generation device 1, the repetition rate of the pulse of executing can regulate at 100Hz in 1000Hz, voltage magnitude can regulate at 50kV in 150kV, the rising time of single high-voltage pulse, in nanosecond, specifically can be 30ns.High-voltage nanosecond pulse is applied to behind linear array electrode two ends, has produced the non-equilibrium hot plasma of diffuse discharge of large volume under atmospheric air condition in the central area of nonequilibrium plasma generation device.Pending particle 3 is blown in nonequilibrium plasma generation device 1 after being seen through left side gauze screen 110 by hair-dryer, enter plasma generating area 109, particulate powder material is after plasma surface modification is processed, and processed particle 4 sees through right side gauze screen 111 and enters storage cage 5 under the wind-force of hair-dryer.Finally, processed particle 4, under the effect of surface electrostatic absorption affinity, is deposited on electrostatic screen plate 52 times, thereby completes the collection of particle powder material.
Under atmospheric air environment, gas discharge more often shows as the electric discharge of spark channel-style and corona discharge.Diffusion-type glow discharge is a kind of special electric discharge form between sparkover and corona discharge.The nonthermal plasma that diffuse discharge produces is a kind of partially ionized low temperature plasma, and its electronics and ion temperature differ greatly.Nonequilibrium plasma concentrates on the processing to macroscopical finished products such as films mostly to the processing of material, and compared with film or similar material, the contact area of particulate powder material and gas is much bigger.Therefore, the configuration of surface of powder and structure after plasma treatment, all likely there is marked change in particle size even.
In general, the above technical scheme of conceiving by the present invention compared with prior art, can obtain following advantage:
(1) the particulate powder surface modification treatment system that the present invention introduces can produce large volume nonequilibrium plasma, thereby increase the contact area of particulate powder and plasma, make the processing of particulate powder material surface modifying can carry out more fully, greatly improved the efficiency of powder surface modification.
(2) in this system, powdery granule surface modification treatment all, under normal temperature and pressure air ambient, does not need complicated dielectric impedance insulating barrier, has avoided the pollution to particle in surface modification treatment process medium barrier layer material.
(3) this system has been abandoned expensive and loaded down with trivial details vacuum, gas charging system, easily constructs compact conformation, lightweight, volume is little, the apparatus system of stable performance.Thereby make the use restriction of this system less, significant for the industrial applications of plasma.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., within all should being included in protection scope of the present invention.
Claims (6)
1. a nonequilibrium plasma generation device, is characterized in that, comprises cavity, gauze screen and is arranged on high-field electrode unit and the low-field electrode unit in cavity;
Two surfaces relative in described cavity are as high voltage electrode insulation cover plate (105) and low-field electrode insulation cover plate (106), two relative sides are as gauze screen (110,111), and two other relative side is as sealed insulation plate (112);
Described high-field electrode unit is arranged on the lower surface of described high voltage electrode insulation cover plate (105), described high-field electrode unit comprises the high-voltage line electrode (101) that multiple uniform arrays are arranged, and is provided with the first through hole (107) that multiple uniform arrays are arranged on described high voltage electrode insulation cover plate (105); One end of one end of each high-voltage line electrode (101) and described high-field electrode lead-in wire (103) is fixed; The other end of described high-voltage line electrode (101) is fixing by described high-field electrode set bolt (113), and the other end of described high-field electrode lead-in wire (103) is drawn by described the first through hole (107); And using the high voltage pulse input as described nonequilibrium plasma generation device after each high-field electrode lead-in wire (103) connection;
Described low-field electrode unit is arranged on the lower surface of described low-field electrode insulation cover plate (106), and described low-field electrode unit comprises the low-voltage line electrode (102) that multiple uniform arrays are arranged; On described low-field electrode insulation cover plate (106), be provided with the second through hole (108) that multiple uniform arrays are arranged; One end of one end of each low-voltage line electrode (102) and described low-field electrode lead-in wire (104) is fixed; The other end of described low-voltage line electrode (102) is fixing by described low-field electrode set bolt (114), and the other end of described low-field electrode lead-in wire (104) is drawn by described the second through hole (108); And ground connection after each low-field electrode lead-in wire (103) is connected.
2. nonequilibrium plasma generation device as claimed in claim 1, it is characterized in that, described high-voltage line electrode (101) is identical with the structure of described low-voltage line electrode (102), and the diameter of described high-voltage line electrode (101) is 0.2mm to 1mm; The length of described high-voltage line electrode (101) is 10cm to 200cm.
3. nonequilibrium plasma generation device as claimed in claim 1 or 2, it is characterized in that, the vertical interval of described high-voltage line electrode (101) and low-voltage line electrode (102) is 2cm to 8cm, and the level interval of each high-voltage line electrode (101) in high-field electrode unit is 5cm to 15cm.
4. the nonequilibrium plasma generation device as described in claim 1-3 any one, it is characterized in that, the repetition rate of the nanosecond pulse that the high voltage pulse input of described nonequilibrium plasma generation device receives is 100Hz to 1000Hz, voltage magnitude is 50kV to 150kV, and the rising time of single high-voltage pulse is 30ns.
5. the nonequilibrium plasma generation device as described in claim 1-4 any one, is characterized in that, the mesh diameter of described gauze screen (110,111) is 0.5mm.
6. a particulate powder surface modification treatment system, comprise nonequilibrium plasma generation device (1), pulse generator (2) and storage cage (5), described pulse generator (2) is connected with the high voltage pulse input of described nonequilibrium plasma generation device (1) by high-voltage conducting wires; Described storage cage (5) is for collecting processed particle (4); It is characterized in that, described nonequilibrium plasma generation device (1) is the nonequilibrium plasma generation device described in the claims 1-5 any one.
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| CN110708851A (en) * | 2019-09-29 | 2020-01-17 | 上海交通大学 | Large-gap uniform dielectric barrier discharge plasma surface treatment device under atmospheric pressure |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050006095A (en) * | 2004-11-26 | 2005-01-15 | 송석균 | High pressure plasma discharge device |
| CN102752950A (en) * | 2011-04-22 | 2012-10-24 | 苏州市奥普斯等离子体科技有限公司 | Surface treatment method of low temperature plasma of granular material and device thereof |
| CN103458600A (en) * | 2013-07-31 | 2013-12-18 | 华中科技大学 | System producing atmospheric pressure dispersion discharging non-equilibrium plasma |
-
2014
- 2014-03-13 CN CN201410091619.8A patent/CN103826379B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20050006095A (en) * | 2004-11-26 | 2005-01-15 | 송석균 | High pressure plasma discharge device |
| CN102752950A (en) * | 2011-04-22 | 2012-10-24 | 苏州市奥普斯等离子体科技有限公司 | Surface treatment method of low temperature plasma of granular material and device thereof |
| CN103458600A (en) * | 2013-07-31 | 2013-12-18 | 华中科技大学 | System producing atmospheric pressure dispersion discharging non-equilibrium plasma |
Non-Patent Citations (2)
| Title |
|---|
| 刘云龙等: "Design and Construction Compact Repetitive Nanosecond Pulse Generator Based on Tesla Transformer", 《高电压技术》 * |
| 李黎等: "利用重复频率纳秒脉冲和线电极产生常温常压下的大气压弥散放电", 《中国电机工程学报》 * |
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| CN104066264A (en) * | 2014-06-18 | 2014-09-24 | 大连理工大学 | Direct-current self-excited pulse large-area high-air-pressure creepage discharge generation device |
| CN104066264B (en) * | 2014-06-18 | 2017-01-25 | 大连理工大学 | Direct-current self-excited pulse large-area high-air-pressure creepage discharge generation device |
| CN107770940A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Multi-grid plasma generator |
| CN107768217A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Self-separating ion source |
| CN107770939A (en) * | 2016-08-18 | 2018-03-06 | 孙保胜 | Polar-capacity tandem type plasma generator |
| CN108601191A (en) * | 2018-05-21 | 2018-09-28 | 王逸人 | Array double-dielectric barrier discharge device |
| CN109158411A (en) * | 2018-06-26 | 2019-01-08 | 昆明理工大学 | The method of one heavy metal species soil modification |
| CN110708851A (en) * | 2019-09-29 | 2020-01-17 | 上海交通大学 | Large-gap uniform dielectric barrier discharge plasma surface treatment device under atmospheric pressure |
| CN111629506A (en) * | 2020-05-20 | 2020-09-04 | 中国人民解放军空军工程大学 | Large-area space uniform plasma generator and generation method |
| CN112218418A (en) * | 2020-11-30 | 2021-01-12 | 清华大学 | Dielectric barrier surface discharge unit and electronic equipment |
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