CN103809239B - Sub-wavelength waveguide and preparation method - Google Patents
Sub-wavelength waveguide and preparation method Download PDFInfo
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- CN103809239B CN103809239B CN201210445107.8A CN201210445107A CN103809239B CN 103809239 B CN103809239 B CN 103809239B CN 201210445107 A CN201210445107 A CN 201210445107A CN 103809239 B CN103809239 B CN 103809239B
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- 238000002360 preparation method Methods 0.000 title abstract description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 21
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- 238000000034 method Methods 0.000 claims abstract description 13
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- 229920002120 photoresistant polymer Polymers 0.000 claims description 2
- 230000008569 process Effects 0.000 abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 16
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000005516 engineering process Methods 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 239000012212 insulator Substances 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 8
- 238000004891 communication Methods 0.000 description 7
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- 239000002184 metal Substances 0.000 description 6
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- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical group [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002070 nanowire Substances 0.000 description 2
- 239000004038 photonic crystal Substances 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- PQTCMBYFWMFIGM-UHFFFAOYSA-N gold silver Chemical compound [Ag].[Au] PQTCMBYFWMFIGM-UHFFFAOYSA-N 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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- 238000002834 transmittance Methods 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
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CN201210445107.8A CN103809239B (en) | 2012-11-09 | 2012-11-09 | Sub-wavelength waveguide and preparation method |
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CN201210445107.8A CN103809239B (en) | 2012-11-09 | 2012-11-09 | Sub-wavelength waveguide and preparation method |
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CN103809239A CN103809239A (en) | 2014-05-21 |
CN103809239B true CN103809239B (en) | 2016-06-15 |
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CN201210445107.8A Active CN103809239B (en) | 2012-11-09 | 2012-11-09 | Sub-wavelength waveguide and preparation method |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107942415A (en) * | 2017-12-07 | 2018-04-20 | 河北工程大学 | A kind of method for preparing sub-wavelength antireflection press mold |
CN108037561A (en) * | 2017-12-14 | 2018-05-15 | 中国科学院光电技术研究所 | Waveguide structure for phase regulation and control of chip laser radar based on super surface |
CN111025473B (en) * | 2019-11-22 | 2022-06-28 | 纤瑟(天津)新材料科技有限公司 | Coupling structure for establishing coupling between solid waveguide and SWG waveguide |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1181635A (en) * | 1996-10-28 | 1998-05-13 | 索尼株式会社 | Quantum wires formed on substrate, manufacturing method thereof, and device having quantum wires on substrate |
CN1801478A (en) * | 2004-06-10 | 2006-07-12 | 台湾积体电路制造股份有限公司 | Semiconductor devices, semiconductor nano-wire devices and methods of fabrication the same |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101593506B1 (en) * | 2011-04-20 | 2016-02-12 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | Sub-wavelength grating-based optical elements |
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- 2012-11-09 CN CN201210445107.8A patent/CN103809239B/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1181635A (en) * | 1996-10-28 | 1998-05-13 | 索尼株式会社 | Quantum wires formed on substrate, manufacturing method thereof, and device having quantum wires on substrate |
CN1801478A (en) * | 2004-06-10 | 2006-07-12 | 台湾积体电路制造股份有限公司 | Semiconductor devices, semiconductor nano-wire devices and methods of fabrication the same |
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CN103809239A (en) | 2014-05-21 |
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Effective date of registration: 20170614 Address after: 226009 Jiangsu city of Nantong province science and Technology Industrial Park of Su Tong Jiang Cheng Road No. 1088 Jiang Bei Lou Park Development Research Co-patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Patentee after: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Address before: 226009 Nantong science and Technology Industrial Park, Su Tong Road, Jiangsu, No. 14, No. 30 Co-patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: JIANGSU SUNFY OPTOELECTRONICS TECHNOLOGY CO.,LTD. Co-patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Address after: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee after: Nantong Xinwei Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee before: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address after: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee after: Shanghai Institute of Microsystems, Chinese Academy of Sciences, Nantong new Micro Research Institute Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Address before: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee before: NANTONG OPTO-ELECTRONICS ENGINEERING CENTER, CHINESE ACADEMY OF SCIENCES Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |
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Effective date of registration: 20240529 Address after: 200050 No. 865, Changning Road, Shanghai, Changning District Patentee after: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES Country or region after: China Address before: 226009 North Building of Jiangcheng R & D Park, No. 1088, Jiangcheng Road, Sutong science and Technology Industrial Park, Nantong City, Jiangsu Province Patentee before: Nantong Xinwei Research Institute Country or region before: China Patentee before: SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY, CHINESE ACADEMY OF SCIENCES |