CN103808802A - Full-optical laser ultrasonic measuring method for internal defect of material - Google Patents
Full-optical laser ultrasonic measuring method for internal defect of material Download PDFInfo
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Abstract
The invention discloses a full-optical laser ultrasonic measuring method for internal defects of a material. The method comprises the following steps: firstly, measuring the two-dimensional position and the size of the internal defect of a measured object on an x-y plane, and subsequently measuring the depth of the internal defect of the measured object in the z direction. By adopting the method, the three-dimensional position and the size information of the internal defect can be obtained by scanning, and the method is high in precision and efficiency, and is applicable to non-destructive detection on various materials.
Description
Technical field
The invention belongs to laser-ultrasound technical field of nondestructive testing, be specifically related to a kind of ultrasonic assay method of full optical lasers of material internal defect.
Background technology
Inherent vice is a kind of defect all extensively existing in various workpiece materials, if detect and confirm not in time, may cause fracture, the damage etc. of workpiece, has a strong impact on production safety.But, due to the disguise of inherent vice and the popularity existing in various types of materials, due to the requirement of high precision, detection online at a high speed, rugged surroundings and safety detection, at present inherent vice is carried out to Non-Destructive Testing and still there is very large difficulty again.Existing conventional lossless detection method mainly contains four large classes: EDDY CURRENT, magnetic detection, ray detection and Ultrasonic Detection.Use EDDY CURRENT and magnetic to detect and there is certain limitation, be not suitable for complex-shaped part, and can only detect surface and the near surface flaw of conductive material or ferrimagnet; Ray detection, due to the shortcoming of its harmfulness to human body, the ill-effect to other allergens etc., does not meet the requirement of safety detection; Ultrasonic Detection has high-penetrability, security and is applicable to the advantages such as various types of materials, it is a kind of important lossless detection method, but traditional supersonic testing method is contact, need to use couplant, the detection and the online fast checking that are unsuitable for pattern complex part detect, as document 1(number of patent application: 201310176780.0, " a kind of detection method of weld seam inherent vice and device ").
The non-contact ultrasonic detection method that can carry out scanning detection to inherent vice at present mainly contains: the detection method that electromagnetic acoustic detection method, Air Coupling supersonic testing method, laser-ultrasound detection method and multiple technologies combine, and as mixed methods such as the detection of laser excitation-electromagnetic acoustic, laser excitation-Air Coupling Ultrasonic Detection.Electromagnetic acoustic detection method can only detect the conductive material that volume is larger and affected greatly by surface quality, as document 2(number of patent application: 201210290309.X, " the metal defect detection method of laser-electromagnetic acoustic nondestructive detection system ") and document 3(Optics & Laser Technology, Vol.44,860-865(2012), " Inspection of cracks using laser-induced ultrasound with shadow method:Modeling and validation "), Air Coupling supersonic testing method is limited by its principle, probe and detection thing will keep suitable distance, ultrasound wave can be through twice serious decay in air, accuracy of detection is poor, be difficult to especially detect for small inherent vice, as document 4(mechanical engineering journal, Vol.44,10-14(2008) " development of Air-coupled Ultrasonic Non-destructive Evaluation "), laser-ultrasound detection method has noncontact, broadband, remote controlled, high-penetrability, can excite the advantages such as various modes ultrasound wave simultaneously, it is a kind of potential Dynamic Non-Destruction Measurement, regulate difficulty but need to overcome, the problems such as ultrasonic directivity control and reception, as document 5(Japanese Journal of Applied Physics, Vol.40, 1477-1481 (2001), " Nondestructive detection of small internal defects in carbon steel by laser ultrasonics ") in increased laser energy and cause material surface impaired in order to change the directivity of ultrasonic bulk wave and launching efficiency.
It is exactly existence and the size that is merely able to detect defect that above method also has a major defect for the inherent vice of test material, can not locate accurately the three-dimensional position of inherent vice.
Summary of the invention
The present invention proposes a kind of ultrasonic assay method of full optical lasers of material internal defect, can scanning detect obtain inherent vice three-dimensional position and dimension information, there is high precision, high efficiency, be applicable to the Non-Destructive Testing of various types of materials.
In order to solve the problems of the technologies described above, the invention provides a kind of ultrasonic assay method of full optical lasers of material internal defect, comprise the following steps:
Step 1, two-dimensional position and the size of mensuration measured object inherent vice on x-y face:
Use pulse laser sphere shape light irradiation at the ultrasonic bulk wave of measured object surface excitation, use detection light that laser vibration measurer inspires measured object opposite side to heart place detecting ultrasonic bulk wave;
The detection waveform of the ultrasonic bulk wave detecting with the oscillograph recording laser vibration measurer being connected with laser vibration measurer;
On x-y face, mobile measured object completes two-dimensional scan detection, draws two-dimentional C-Scan figure according to the peak-to-peak value of the measured object of oscillograph recording each position detection waveform on x-y face;
Determine two-dimensional position and the size of measured object inherent vice on x-y face according to the difference that represents the gray-scale value of ultrasonic bulk wave amplitude in C-Scan figure;
Use the surface excitation ultrasonic bulk wave of pulse laser linear light source irradiation at measured object, the ultrasonic bulk wave of the detection photodetection inspiring at the same side of measured object use laser vibration measurer after measured object bottom reflection, in this process, the axis of pulse laser line source be positioned at inherent vice directly over, survey light be positioned in the direction of pulse laser line source axis;
Regulating impulse laser line light source with survey the distance of light, make the shear wave amplitude maximum of the ultrasonic bulk wave of surveying;
Thereby move measured object in x direction and change the relative position of pulse laser linear light source irradiation on measured object surface, realize and detecting at x direction one-dimensional scanning, the detection waveform of the ultrasonic bulk wave detecting with the oscillograph recording laser vibration measurer being connected with laser vibration measurer, draws two-dimentional B-Scan figure according to the peak-to-peak value of the measured object of oscillograph recording each position detection waveform in x direction;
Inherent vice distance between present position in x direction when representing in B-Scan figure that grey value difference that ultrasonic bulk wave is blocked the amplitude of weakening for twice by inherent vice determines that ultrasonic bulk wave amplitude is weakened for twice by inherent vice, then calculate the depth location of inherent vice according to formula (1)
h=H(w-a)/w （1）
In formula (1), the depth location that h is inherent vice; A is ultrasonic bulk wave amplitude inherent vice distance between present position in x direction while significantly being weakened for twice by inherent vice; W is the linear light of pulse laser and survey the distance of light, meets the shear wave amplitude of ultrasonic bulk wave of the measured object bottom reflection line source and the distance of surveying light when maximum; H is measured object thickness.
Compared with prior art, its remarkable advantage is in the present invention:
(1) utilize pulsed laser source at the lower excitation ultrasound bulk wave of thermoelastic mechanism (low-yield), avoid material to occur melting phenomenon, realize Non-Destructive Testing;
(2) utilize laser excitation, laser pick-off ultrasonic signal, realize non-contact detecting, can complete fast checking and detect, improved detection efficiency;
(3) increase transparent covering layer by the laser excitation surface at measured object, changed the directivity of ultrasonic bulk wave, and improved the launching efficiency of ultrasonic bulk wave, further improved the accuracy of detection of defect;
(4), by the heart being detected and homonymy detection combines, three-dimensional position and size that can Accurate Measurement measured object inherent vice, even if tiny flaw also can accurately detect;
(5) scan containing defective measured object by the omnidistance control step motor of computing machine, control oscillograph and receive and real-time processing data, realized Automatic Control, reproducible, easy operating.
Accompanying drawing explanation
Fig. 1 uses the inventive method to measure the schematic diagram of inherent vice two-dimensional position and size on x-y face.
Fig. 2 is the schematic diagram while using the inventive method to measure the depth information of inherent vice.
Fig. 3 is the Ultrasonic C-Scan figure obtaining during the present invention tests.
Fig. 4 is the ultrasonic B-Scan figure obtaining during the present invention tests.
Embodiment
The present invention is a kind of ultrasonic assay method of full optical lasers of material internal defect, comprises two steps,
Step 1: measure two-dimensional position and the size of measured object 6 inherent vices on x-y face;
Step 2: measure the degree of depth of measured object 6 inherent vices in z direction.
Step 1 specifically as shown in Figure 1, use pulse laser sphere shape light 1 irradiation at the ultrasonic bulk wave of measured object 6 surface excitation, ultrasonic bulk wave is to measured object 6 internal communications, use laser vibration measurer 14 inspire survey light 2 measured object 6 opposite sides to heart place detecting ultrasonic bulk wave, the detection waveform of the ultrasonic bulk wave detecting with the oscillograph 13 recording laser vialogs 14 that are connected with laser vibration measurer 14, on x-y face, mobile measured object 6 completes two-dimensional scan detection, the peak-to-peak value of the measured object recording according to oscillograph 13 each position detection waveform on x-y face is drawn two-dimentional C-Scan figure, because the defect of measured object 6 inside has weakening effect to the amplitude of ultrasonic bulk wave, so, can determine two-dimensional position and the size of measured object 6 inherent vices on x-y face according to the difference that represents the gray-scale value of ultrasonic bulk wave amplitude in C-Scan figure.
Described pulse laser sphere shape light 1 is to use pulsed laser 12 Emission Lasers and see through the rear formation of convex lens 9, and trigger pip 10 produces and exports to oscillograph 13 by laser instrument 12 and works to control oscillograph 13;
Measured object 6 can be fixed on stepper motor 7, computing machine 15 control step motors 7 move, and realize the two-dimensional movement of measured object 6 on x-y face, and computing machine 15 is controlled oscillograph 13 simultaneously two-dimensional scan detection data are carried out to the preservation of pointwise record;
At measured object 6 by a side of pulse laser sphere shape light 1 irradiation, be provided with transparent covering layer, as transparent adhesive tape, the clear lacquer etc., transparent covering layer is used for the directivity of the ultrasonic bulk wave that changes laser excitation, the energy maximum that ultrasonic bulk wave is propagated on to heart direction, and increase ultrasonic launching efficiency, improve the accuracy of detection of inherent vice.
In said process, can determine the two-dimensional position of inherent vice on x-y face according to Fig. 3, guarantee the axis of line source 11 be positioned at inherent vice directly over, survey light 2 and be positioned in line source 11 axis directions;
Regulate line source 11 and the distance of surveying light 2, make this distance meet the shear wave amplitude maximum of the ultrasonic bulk wave of measured object 6 bottom reflections;
Thereby move measured object 6 in x direction and change the relative position of pulse laser linear light source 11 irradiation on measured object 6 surfaces, realize and detecting at x direction one-dimensional scanning, carry out in the process of one-dimensional scanning detection at mobile measured object 6, ultrasonic bulk wave can be blocked and weaken twice by inherent vice, once wherein to be blocked weakening by inherent vice after ultrasonic bulk wave incides measured object 6, another time is that ultrasonic bulk wave is blocked weakening by inherent vice after measured object 6 bottom reflections, the detection waveform of the ultrasonic bulk wave detecting with the oscillograph 13 recording laser vialogs 14 that are connected with laser vibration measurer 14, the peak-to-peak value of the measured object recording according to oscillograph 13 each position detection waveform in x direction is drawn two-dimentional B-Scan figure, inherent vice distance between present position in x direction when representing in B-Scan figure that grey value difference that ultrasonic bulk wave is blocked the amplitude of weakening for twice determines that ultrasonic bulk wave amplitude is significantly weakened for twice by inherent vice, then calculate the depth location of inherent vice according to formula (1),
h=H(w-a)/w （1）
In formula (1), the depth location that h is inherent vice; A is ultrasonic bulk wave amplitude inherent vice distance between present position in x direction while significantly being weakened for twice by inherent vice; W is the linear light of pulse laser 11 and the distance of surveying light 2, meets the shear wave amplitude of ultrasonic bulk wave of the measured object 6 bottom reflections line source 11 and the distance of surveying light 2 when maximum; H is measured object thickness;
Described pulse laser linear light source 11 is use pulsed laser 12 to excite short-pulse laser and see through the line spot forming after cylindrical convex lens 8 focuses on.
Measured object 6 is fixed on stepper motor 7, and computing machine 15 control step motors 7 move, and realize the two-dimensional movement of measured object 6 on x-y face, and computing machine 15 is controlled oscillograph 13 simultaneously two-dimensional scan detection data are carried out to the preservation of pointwise record.
The result of last comprehensive step (1) and step (2), obtains three-dimensional position and the dimension information of inherent vice.
The present invention can further illustrate by following experiment:
The measured object that this experiment is chosen is the aluminium alloy plate type workpiece of custom-made, specification is 80mm × 60mm × 10mm, inside workpiece has manually added the gas hole defect that diameter is 1.2mm, outside is completely invisible, gas hole defect is positioned at x-y face central authorities, buried depth is 4mm, uses the inventive method to detect gas hole defect.
First,, shown in Fig. 1, two-dimensional position and size to inner gas hole defect on x-y face are measured.Use Nd:YAG laser instrument to inspire wavelength as pulsed laser and pool pulse laser sphere shape light irradiation that diameter is 2mm at aluminium alloy plate type surface of the work through convex lens for 532nm, the pulsewidth pulse laser that is 7ns, in order to change directivity and the launching efficiency of the ultrasonic bulk wave that laser inspires under thermoelastic mechanism, the surface-coated thick thermostable transparent adhesive tape of the about 0.1mm of one deck that covered being excited by aluminium alloy plate type workpiece.Laser vibration measurer receives detecting ultrasonic bulk wave at the exciting light of aluminium alloy plate type workpiece opposite side to heart position.Measured object is fixed on to be realized precision sweep on stepper and moves, every moved further 0.2mm, and scanning area is measured object middle section 20mm × 20mm.Oscillograph is connected with vialog, records the ultrasonic signal at each scanning position place, and computing machine connects stepper and oscillograph, realizes whole-course automation scanning and detects and data processing.
The ultrasonic signal that detection is obtained is processed, and extracts the peak-to-peak value of the ultrasonic through compressional wave at each scanning position place, is depicted as C-Scan figure, as shown in Figure 3.Dash area 3 in this figure has shown position and the size of internal porosity defect on x-y face accurately.
Then,, shown in Fig. 2, the depth information of inherent vice is measured.Nd:YAG laser instrument inspire wavelength be 532nm, the pulsewidth pulse laser that is 7ns pool 5mm × 0.5mm through cylindrical convex lens line spot irradiation on measured object surface, under thermoelastic mechanism, can't harm and inspire ultrasonic bulk wave and to measured object internal communication, after bottom reflection, received detection by laser vibration measurer at measured object surface homonymy and obtain.Measured object is fixed on to be realized precision sweep on stepper and moves, and direction of scanning is for along exciting line source axis direction, step-length 0.1mm, and scanning distance is 20mm.Oscillograph is connected with vialog, records the ultrasonic signal at each scanning position place, and computing machine connects stepper and oscillograph, realizes whole-course automation scanning and detects and data processing.
Guarantee to survey light and be positioned on the axis that excites line source, and in conjunction with the position on the x-y face of the inherent vice that detection obtains before this, guarantee that this axis is positioned at directly over gas hole defect.Adjusting excites the distance between incidence point and eye point, guarantees the amplitude maximum through the ultrasonic bulk wave of bottom reflection, and it is w=18mm that record now excites the distance of incidence point and eye point.Guarantee that this distance is constant, utilize stepper to move measured object and scan, sweep span is 0.1mm.Utilize computer control stepper and oscillograph to realize automatic scanning and detect and data processing, record the ultrasonic signal at each scanning position place.
The ultrasonic signal that detection is obtained is processed, and extracts the peak-to-peak value of the ultrasonic reflection bulk wave at each scanning position place, is depicted as B-Scan figure, as shown in Figure 4.Due to the existence of inherent vice, in scanning process, the ultrasonic bulk wave of bottom reflection can be blocked by twice, cause the obviously weak of amplitude, from Fig. 4, can show accurately the position that bulk wave is blocked, measure the distance a=10.5mm blocking for twice between position, in conjunction with thickness H=10mm and the w=18mm of aluminium alloy plate type workpiece, according to formula h=H (w-a)/w, can calculate the buried depth h=4.2mm of gas hole defect, very approaching with known processing buried depth 4mm.The width being blocked according to reflected body wave and time delay can evaluate the size of defect.
Comprehensive above implementation step, diameter 1.2mm, the internal porosity defect of buried depth 4mm can accurately be detected and be obtained.
Claims (5)
1. the ultrasonic assay method of full optical lasers of material internal defect, is characterized in that, comprises the following steps:
Step 1, two-dimensional position and the size of mensuration measured object 6 inherent vices on x-y face:
Use pulse laser sphere shape light 1 irradiation at the ultrasonic bulk wave of measured object 6 surface excitation, use detection light 2 that laser vibration measurer 14 inspires measured object 6 opposite sides to heart place detecting ultrasonic bulk wave;
The detection waveform of the ultrasonic bulk wave detecting with the oscillograph 13 recording laser vialogs 14 that are connected with laser vibration measurer 14;
On x-y face, mobile measured object 6 completes two-dimensional scan detection, and the peak-to-peak value of the measured object recording according to oscillograph 13 each position detection waveform on x-y face is drawn two-dimentional C-Scan figure;
Determine two-dimensional position and the size of measured object 6 inherent vices on x-y face according to the difference that represents the gray-scale value of ultrasonic bulk wave amplitude in C-Scan figure;
Step 2, measure the measured object 6 inherent vices degree of depth in z direction:
Use the surface excitation ultrasonic bulk wave of pulse laser linear light source 11 irradiation at measured object 6, the detection light 2 that uses laser vibration measurer 14 to inspire in the same side of measured object 6 is surveyed the ultrasonic bulk wave after measured object 6 bottom reflections, in this process, the axis of pulse laser line source 11 be positioned at inherent vice directly over, survey light 2 be positioned in pulse laser line source 11 axis directions;
Regulating impulse laser line light source 11 and the distance of surveying light 2, make the shear wave amplitude maximum of the ultrasonic bulk wave of surveying;
Thereby move measured object 6 in x direction and change the relative position of pulse laser linear light source 11 irradiation on measured object 6 surfaces, realize and detecting at x direction one-dimensional scanning, the detection waveform of the ultrasonic bulk wave detecting with the oscillograph 13 recording laser vialogs 14 that are connected with laser vibration measurer 14, the peak-to-peak value of the measured object 6 recording according to oscillograph 13 each position detection waveform in x direction is drawn two-dimentional B-Scan figure;
Inherent vice distance between present position in x direction when representing in B-Scan figure that grey value difference that ultrasonic bulk wave is blocked the amplitude of weakening for twice by inherent vice determines that ultrasonic bulk wave amplitude is weakened for twice by inherent vice, then calculate the depth location of inherent vice according to formula (1)
h=H(w-a)/w （1）
In formula (1), the depth location that h is inherent vice; A is ultrasonic bulk wave amplitude inherent vice distance between present position in x direction while significantly being weakened for twice by inherent vice; W is the linear light of pulse laser 11 and the distance of surveying light 2, meets the shear wave amplitude of ultrasonic bulk wave of the measured object 6 bottom reflections line source 11 and the distance of surveying light 2 when maximum; H is measured object thickness.
2. the ultrasonic assay method of full optical lasers of material internal defect as claimed in claim 1, is characterized in that,
Described pulse laser sphere shape light 1 is to use pulsed laser 12 Emission Lasers and see through the rear formation of convex lens 9;
Described pulse laser linear light source 11 is use pulsed laser 12 to excite short-pulse laser and see through the line spot forming after cylindrical convex lens 8 focuses on.
3. the ultrasonic assay method of full optical lasers of material internal defect as claimed in claim 1, is characterized in that, laser instrument 12 produces trigger pip 10 and exports to oscillograph 13 and work to control oscillograph 13.
4. the ultrasonic assay method of full optical lasers of material internal defect as claimed in claim 1, it is characterized in that, measured object 6 is fixed on stepper motor 7, computing machine 15 control step motors 7 move, realize the two-dimensional movement of measured object 6 on x-y face, computing machine 15 is controlled oscillograph 13 simultaneously two-dimensional scan detection data is carried out to the preservation of pointwise record.
5. the ultrasonic assay method of full optical lasers of material internal defect as claimed in claim 1, it is characterized in that, in step 1, at measured object 6 by a side of pulse laser sphere shape light 1 irradiation, be provided with transparent covering layer, the energy maximum that ultrasonic bulk wave is propagated on to heart direction.
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| CN110672047A (en) * | 2019-10-16 | 2020-01-10 | 江苏省特种设备安全监督检验研究院 | Laser ultrasonic measurement method for thickness of high-temperature metal material |
| CN110567880A (en) * | 2019-10-22 | 2019-12-13 | 厦门大学 | Real-time online nondestructive test device for automobile hub |
| CN111595949A (en) * | 2020-05-18 | 2020-08-28 | 武汉大学 | Laser ultrasonic imaging detection system and detection method for self-adaptive irregular surface |
| CN111610254A (en) * | 2020-05-18 | 2020-09-01 | 武汉大学 | Laser ultrasonic full-focusing imaging detection device and method based on high-speed galvanometer cooperation |
| CN111595949B (en) * | 2020-05-18 | 2021-07-20 | 武汉大学 | Laser ultrasonic imaging detection system and detection method for self-adaptive irregular surface |
| CN112098520A (en) * | 2020-10-20 | 2020-12-18 | 北京石油化工学院 | Detection system and method for detecting internal defect shape of material based on laser ultrasonic |
| CN113393464A (en) * | 2021-08-18 | 2021-09-14 | 苏州鼎纳自动化技术有限公司 | Three-dimensional detection method for plate glass defects |
| CN113393464B (en) * | 2021-08-18 | 2021-11-05 | 苏州鼎纳自动化技术有限公司 | Three-dimensional detection method for plate glass defects |
| CN114295731A (en) * | 2021-12-28 | 2022-04-08 | 杭州电子科技大学 | Method for measuring depth of subsurface defect based on laser excitation longitudinal wave |
| CN114295731B (en) * | 2021-12-28 | 2023-02-21 | 杭州电子科技大学 | Method for measuring subsurface defect depth based on laser excitation longitudinal wave |
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