CN103808565B - Integrated comb-type electrostatic preloading micro nano material mechanical property detection structure - Google Patents
Integrated comb-type electrostatic preloading micro nano material mechanical property detection structure Download PDFInfo
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- CN103808565B CN103808565B CN201310718672.1A CN201310718672A CN103808565B CN 103808565 B CN103808565 B CN 103808565B CN 201310718672 A CN201310718672 A CN 201310718672A CN 103808565 B CN103808565 B CN 103808565B
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Abstract
The invention discloses an integrated comb-type electrostatic preloading micro nano material mechanical property detection structure. The detection structure comprises a post-buckling micro force detection structure and an integrated comb-type electrostatic preloading structure, wherein after the integrated comb-type electrostatic preloading structure loads voltage on coupled integrated comb-type structures in the integrated structure, deformation can be caused by electrostatic acting force for preloading; when the integrated comb-type electrostatic preloading structure does not perform preloading, the post-buckling micro force detection structure is in a load-free state; when the integrated comb-type electrostatic preloading structure performs preloading, the post-buckling micro force detection structure is compressed axially to be in a preloading buckling balance state, and then is subjected to an axial micro force effect of a test element, so that the post-buckling micro force detection structure is subjected to magnified horizontal structural variation so as to perform micro force detection. The integrated comb-type electrostatic preloading micro nano material mechanical property detection structure provided by the invention has the advantages of small size, stability, reliability, recyclability, sensitivity to axial micro force, high force resolution ratio, controllable horizontal deformation and the like.
Description
Technical field
The present invention relates to micro-nano material mechanical test technical field, and in particular to a kind of integrated pectination electrostatic prestrain it is micro-
Receive material mechanical performance testing structure.
Background technology
With the fast development of nanometer technique, minute yardstick material and structure are widely used in every field,
Such as material science, microelectronics, biology, medical science and MEMS.And work as material be reduced in size to micro-nano-scale
When, due to some physical chemistry effects, cause structure that some changes occur so that its material behavior is with macro-scale completely
It is different, then the mechanical property research of material and structure to these micro-nano-scales just becomes particularly significant.
During research micro-nano material mechanical property, measured micro- power reaches micro- cattle or even skin cattle magnitude, and micro-force measurement is needed
There is very high sensitivity.Traditional loading blocks and dynamometry block cannot be suitable for, so research is applied to micro-nano-scale
The equipment of experimentation necessitates.
From Hooke's law F=k*x, to reach high-resolution power it is necessary to reduce spring constant k, or increase displacement
Resolution.For example, for existing business AFM probe microscope, the displacement resolution of existing angstrom magnitude, spring constant has reached
0.1～0.01N/m, and for the cantilever sensor traditional to these, it is extremely difficult to improve power resolution, because entering one
Step reduces spring constant can be affected by factors such as internal hot dry and structural instabilities；And displacement resolution is almost not
Can improve again.Moreover this cantalever type probe sensor sensitive direction is perpendicular to cantilever beam, and polar coordinates type is micro-nano
Manipulate instrument to use cooperatively, straight line loading is can be approximated to be in the case of small deformation, but when displacement is larger, it is clear that it is edge
Camber line loading.And the micro-nano weighted platform of cooperation Cartesian coordinate type, need axially sensitive micro force detection structure.
Known by the mechanics of materials, for elongate rod is acted on by axial compressive force, when axial compressive force value exceedes critical load
Wait, it may occur that unexpected Cross deformation, afterwards, when axial force increases small value, axially have the displacement of very little along bar, and along bar
Very big deformation laterally can occur, can be than high two orders of magnitude of axial direction, such that it is able to be amplified axially using horizontal large deformation
Micro-strain.And notice that the direction of depression bar transversely deforming is relevant with defect on depression bar and depression bar shape, so, can adopt
Initially using square-section bar and in the method for bar middle part Embedded defect so that structure can be along desired direction flexing.
The flexion type micro force detection structure that published document is proposed, need to be after the completion of sensor production, by driving pressure
Electroceramics applies prebuckling power, makes slender compression bar that flexing to occur, and the middle block that is rigidly connected is promoted, so as to draw test specimen
Stretch, then carry out micro-force measurement on this basis.Such flexing charger, operating difficultiess, difficulty are larger, poor repeatability, into
This height, is unfavorable for the use of post-buckling micro force detection sensing arrangement.
The content of the invention
It is contemplated that at least solving one of technical problem present in prior art.
For this purpose, it is an object of the invention to proposing a kind of integrated pectination electrostatic suitable for micro-nano material mechanics properties testing
The micro-nano material mechanics properties testing structure of prestrain.
To achieve these goals, the micro-nano material mechanical property of integrated pectination electrostatic prestrain according to embodiments of the present invention
Structure can be detected, can be included:Post-buckling formula micro force detection structure and the electrostatic pre-load arrangement of integrated pectination, the post-buckling
Formula micro force detection structure is connected with the electrostatic pre-load arrangement of the integrated pectination, wherein, the electrostatic pre-add of the integrated pectination
Carry structure and be configured to cause using electrostatic force after on-load voltage in its internal paired integrated pectinate texture and become
Shape is implementing prestrain；The post-buckling formula micro force detection structure is configured to work as the electrostatic pre-load arrangement of the integrated pectination
When prestrain is not carried out, the post-buckling formula micro force detection structure in naturally without stress state, when integrated pectination it is electrostatic
When pre-load arrangement implements prestrain, the post-buckling formula micro force detection structure is axially compressed, in prestrain flexing balance
State, then the post-buckling formula micro force detection structure be subject to test specimen axial oligodynamic action, the prestrain flexing equilibrium-like
State changes, and makes the post-buckling formula micro force detection structure that the transversary change amplified to occur, so as to realize micro force detection.
Integrated pectination static pre-load micro-nano material mechanical property detection structure according to embodiments of the present invention, overall knot
Structure size is little, Stability Analysis of Structures, reliability high, and reusable, manufacture is easier；Very sensitive to axially micro- power, power is differentiated
Rate superelevation, transversely deforming can control；There is pre-loaded function, after by control voltage detection structure being made to enter needed for measurement
Flexion, is highly suitable for micro-nano material mechanics properties testing.
In addition, integrated pectination static pre-load micro-nano material mechanical property detection structure according to embodiments of the present invention is also
There can be following additional technical feature：
In one embodiment of the invention, the post-buckling formula micro force detection structure is plane axially symmetric structure, is had
Body includes：The micro force detection center-pole of suspension and micro- power sensing block, the micro force detection center-pole is located on the axis of symmetry, described
One end of micro force detection center-pole is connected with test specimen, and the other end is connected with the midpoint of micro- power sensing block, micro force detection center
Bar and the T-shaped connection of the micro- power sensing block；The first flexible depression bar for suspending, the second flexible depression bar, the 3rd flexible depression bar and the
Four flexible depression bars, the material phase of the described first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the 4th flexible depression bar
With, equal length, parallel with the axis of symmetry, the described first flexible depression bar, the second flexible depression bar are with regard to the axis of symmetry pair
Claim, the 3rd flexible depression bar, the 4th flexible depression bar with regard to the symmetrical axial symmetry, wherein, the one of the described first flexible depression bar
One end of end and the second flexible depression bar is connected with the side of micro- power sensing block, one end of the 3rd flexibility depression bar with
One end of the 4th flexible depression bar is connected with the opposite side of micro- power sensing block, the other end of the described first flexible depression bar and
First fixed block is connected with fixation, and the other end of the described second flexible depression bar is connected with fixation with the second fixed block；What is suspended can
Dynamic prestrain crossbeam, the side of the movable prestrain crossbeam and the other end of the described 3rd flexible depression bar and described 4th flexible
The other end of depression bar is connected, the opposite side of the movable prestrain crossbeam and the electrostatic pre-load arrangement phase of the integrated pectination
Even.
In one embodiment of the invention, the described first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the
The length-width ratio of four flexible depression bars is more than 100.
In one embodiment of the invention, the described first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the
Four flexible depression bars deform when being under pressure towards both sides direction protrusion.
In one embodiment of the invention, the electric heating flexing pre-load arrangement includes being declined with the post-buckling
The integrated static electrostatic structure of the connected suspension of power detection structure, the integrated static electrostatic structure of the suspension is because of making alive generation
Electrostatic interactions and deform upon, promote the movable prestrain crossbeam, the described first flexible depression bar, the second flexible pressure
Bar, the 3rd flexible depression bar and the 4th flexible depression bar are axially compressed by responsive to axial force, in flexion.
In one embodiment of the invention, the electrostatic pre-load arrangement of the integrated pectination is plane axial symmetry knot
Structure, specifically includes：Rigid drive rod, the drive rod is located on axis of symmetry, one end of the drive rod and the post-buckling
Formula micro force detection structure is connected；Comb seat and driving comb, the other end of the drive rod is driven to drive in comb seat with described
Point is connected, and the drive rod drives the T-shaped connection of comb seat with described, and the driving comb drives comb seat to be connected with described, described
The one end for driving comb seat connects the 3rd fixed block with fixation by the first spring supporting, and the other end of the driving comb seat is by the
Two spring supportings connect the 4th fixed block with fixation；Fixed comb seat and fixed fingers, the fixed fingers and the fixed comb
Seat is connected, and the fixed comb seat is used to fix, and the shaped position of the fixed fingers matches with the driving comb, described solid
Comb is determined for producing electrostatic interactions between the driving comb.
The additional aspect and advantage of the present invention will be set forth in part in the description, and partly will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Description of the drawings
The above-mentioned and/or additional aspect and advantage of the present invention will become from the description with reference to accompanying drawings below to embodiment
It is substantially and easy to understand, wherein：
Fig. 1 is in the integrated pectination static pre-load micro-nano material mechanical property detection structure of one embodiment of the invention
The schematic diagram of post-buckling formula micro force detection structure；
Fig. 2 is in the integrated pectination static pre-load micro-nano material mechanical property detection structure of one embodiment of the invention
The schematic diagram of the electrostatic pre-load arrangement of integrated pectination；
Fig. 3 A and Fig. 3 B is respectively the micro-nano material power of integrated pectination electrostatic prestrain according to an embodiment of the invention
Schematic perspective view and top view when learning the non-prestrain of performance detection structure；
Fig. 4 A and Fig. 4 B is respectively the micro-nano material power of integrated pectination electrostatic prestrain according to an embodiment of the invention
Schematic perspective view and top view when learning the non-prestrain of performance detection structure；
Fig. 5 is integrated pectination static pre-load micro-nano material mechanical property detection knot according to an embodiment of the invention
Structure completes top view during prestrain；
Fig. 6 is integrated pectination static pre-load micro-nano material mechanical property detection knot according to an embodiment of the invention
Top view when structure test axial compressive force is acted on；
Fig. 7 is integrated pectination static pre-load micro-nano material mechanical property detection knot according to an embodiment of the invention
Top view when structure test axial tension is acted on；
Fig. 8 is integrated pectination static pre-load micro-nano material mechanical property detection in accordance with another embodiment of the present invention
The schematic perspective view of structure；
Fig. 9 is the integrated pectination static pre-load micro-nano material mechanical property detection according to another embodiment of the invention
The schematic perspective view of structure.
Specific embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from start to finish
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment of figure description is exemplary, it is intended to for explaining the present invention, and be not considered as limiting the invention.
The present invention proposes a kind of integrated pectination static pre-load micro-nano material mechanical property detection structure, including post-buckling
Formula micro force detection structure 1 and the electrostatic pre-load arrangement 2 of integrated pectination.Post-buckling formula micro force detection structure 1 is quiet with integrated pectination
Electric-type pre-load arrangement 2 is connected.Wherein, the electrostatic pre-load arrangement 2 of integrated pectination is configured to internal paired integrated at it
Using electrostatic force deformation can be caused to implement prestrain after on-load voltage in pectinate texture.Post-buckling formula micro force detection is tied
Structure 1 is configured to：When the electrostatic pre-load arrangement 2 of integrated pectination is not carried out prestrain, at post-buckling formula micro force detection structure 1
In naturally without stress state.When the electrostatic pre-load arrangement 2 of integrated pectination implements prestrain, post-buckling formula micro force detection knot
Structure 1 is axially compressed, in prestrain flexing poised state.Then the post-buckling formula micro force detection structure 1 is subject to the axle of test specimen
To oligodynamic action, prestrain flexing poised state changes, and makes post-buckling formula micro force detection structure 1 that the lateral junction amplified to occur
Structure changes, so as to realize micro force detection.
Integrated pectination static pre-load micro-nano material mechanical property detection structure according to embodiments of the present invention, overall knot
Structure size is little, Stability Analysis of Structures, reliability high, and reusable, manufacture is easier；Very sensitive to axially micro- power, power is differentiated
Rate superelevation, transversely deforming can control；There is pre-loaded function, after by control voltage detection structure being made to enter needed for measurement
Flexion, is highly suitable for micro-nano material mechanics properties testing.
In one embodiment of the invention, post-buckling formula micro force detection structure 1 be plane axially symmetric structure, such as Fig. 1
It is shown, specifically include：The flexible depression bar of the flexible depression bar 103, second of micro force detection center-pole 101, micro- power sensing block 102, first
104th, the 3rd flexible flexibility of depression bar the 105, the 4th depression bar 106, the first fixed block 107, the second fixed block 108 and movable prestrain are horizontal
Beam 109.First fixed block 107 and the second fixed block 108 are fixed on the pedestal of test platform, prestrain it is forward and backward and test
Time location is constant.Remaining component is in suspended state, and its shape or position may change because external force is acted on.
Micro force detection center-pole 101 is located on the axis of symmetry.One end of micro force detection center-pole 101 is connected with test specimen, separately
One end is connected with the midpoint of micro- power sensing block 102.Micro force detection center-pole 101 and the T-shaped connection of micro- power sensing block 102.
The material of the first flexible depression bar 106 of the flexible flexible flexibility of depression bar the 104, the 3rd depression bar 105 and the 4th of depression bar 103, second
Expect identical, equal length, parallel with axis of symmetry.Wherein, the first flexible flexibility of depression bar 103 and second depression bar 104 is with regard to symmetrical
Axial symmetry, the 3rd flexible flexibility of depression bar 105 and the 4th depression bar 106 is with regard to symmetrical axial symmetry.One end of first flexible depression bar 103 and
One end of second flexible depression bar 104 and the side of micro- power sensing block 102（Left side for example shown in Fig. 1）It is connected.3rd flexible pressure
One end of one end of bar 105 and the 4th flexible depression bar 106 and the opposite side of micro- power sensing block 102（Right side for example shown in Fig. 1）
It is connected.The other end of the first flexible depression bar 103 is connected with fixation with the first fixed block 107.The other end of the second flexible depression bar 104
It is connected with fixation with the second fixed block 108.First the 103, second flexible depression bar 104 of flexible depression bar, the 3rd flexible depression bar 105 and the
The four flexible elongate forms of depression bar 106, preferably their length-width ratio is more than 100, at this moment the micro-nano of the integrated pectination electrostatic prestrain
The micro- power of axis of material mechanical performance testing structure is sensitive, and transversely deforming is larger, and the sensitivity of test and precision are higher.Additionally,
The first flexible depression bar 106 of the flexible flexible flexibility of depression bar the 104, the 3rd depression bar 105 and the 4th of depression bar 103, second can pass through prefabricated
Defect or by other techniques, so that the flexible depression bar 104 of the first flexible depression bar 103, second, the 3rd flexible depression bar 105 and the
Four flexible depression bars 106 are configured to be under pressure（The flexing pressure being subject to when the flexing pressure being subject to during prestrain and test
Power）When towards both sides protrusion deform, at this moment transversely deforming can control.
The side of movable prestrain crossbeam 109（Left side for example shown in Fig. 1）With the other end of the 3rd flexible depression bar 105 and
The other end of the 4th flexible depression bar 106 is connected, the opposite side of movable prestrain crossbeam 109（Right side for example shown in Fig. 1）With collection
It is connected into the electrostatic pre-load arrangement 2 of pectination.
In one embodiment of the invention, electric heating flexing pre-load arrangement 2 includes being declined power with the post-buckling
The integrated static electrostatic structure of the connected suspension of detection structure 1, the integrated static electrostatic structure of the suspension is quiet because making alive is produced
Electric interactions power and deform upon, promote movable prestrain crossbeam 109 so that the flexible depression bar of the first flexible depression bar 103, second
104th, the 3rd flexible flexibility of depression bar 105 and the 4th depression bar 106 is axially compressed by responsive to axial force, in flexion.
In one embodiment of the invention, the electrostatic pre-load arrangement 2 of integrated pectination is plane axially symmetric structure, such as
Shown in Fig. 2, specifically can include：Drive rod 201, drive comb seat 202, driving comb 203 and 204, the first spring supporting 205,
3rd fixed block 206, second spring supports the 207, the 4th fixed block 208, fixed comb seat 209 and 211, and fixed fingers 210
With 212.Wherein the 3rd fixed block 206, fourth speed block 208, fixed comb seat 209 and 211 are fixed on the pedestal of test platform,
Prestrain is forward and backward constant with testing time position.Remaining component is in suspended state, and its shape or position may be because of external force
Act on and change.
Drive rod 201 is located on the axis of symmetry of integrated pectination static pre-load micro-nano material mechanical property detection structure,
Made using rigid material.One end of drive rod 201（Left end as shown in Figure 2）It is connected with post-buckling formula micro force detection structure 1,
For example, can be connected with the movable prestrain crossbeam 109 in post-buckling formula micro force detection structure 1.
The midpoint for driving comb seat 202 is connected with the other end of drive rod 201, i.e., drive rod 201 and driving comb seat 202 are in T
Type connects.Driving comb 203 and 204 is connected with comb seat 202 is driven.The one end for driving comb seat 202 passes through the first spring supporting 205
Connect the 3rd fixed block 206 with fixation, the other end for driving comb seat 202 supports 207 to connect the 4th fixed block by second spring
208 with fixation.
Fixed comb seat 209,211 is connected with fixed fingers 210,212.Wherein, fixed comb seat 209 and 211 is used to fix.Gu
The shaped position and driving comb 203 and 204 for determining comb 210 and 212 matches.Fixed fingers 210 and 212 are used for and drive comb
Electrostatic interactions are produced between tooth 203 and 204.
Describe the micro-nano material of the integrated pectination electrostatic prestrain of one embodiment of the invention in detail with reference to Fig. 3 A to Fig. 7
The other details feature and the course of work of material mechanics properties testing structure.
Fig. 3 A and Fig. 3 B is respectively the micro-nano material power of integrated pectination electrostatic prestrain according to an embodiment of the invention
Schematic perspective view and top view when learning the non-prestrain of performance detection structure.As shown in Figure 3 A and Figure 3 B, now integrated pectination is quiet
The micro-nano material mechanics properties testing structure of electric prestrain is not powered on, that is to say, that prestrain is not carried out, adds in natural nothing
Load state.Wherein：In certain plane, multiple fixed blocks and fixed fingers are fixed on plane to whole micro force detection structure setting
On, thickness of their thickness slightly larger than other components（As shown in Figure 3 B）, can so cause other components hanging.Four soft
Property depression bar 103,104,105 and 106 is symmetrical arranged, with very high length-width ratio（Such as long 3mm, it is wide 2 μm, it is thick 12 μm）, this
The pattern of sample causes flexible depression bar that Cross deformation in plane easily occurs, towards 001 direction or 002 direction flexing.In order that
There is flexing in flexible depression bar, the flexible depression bar itself per root can be caused asymmetric along some desired direction.In the reality
In applying example, for flexible depression bar 103 and 105 has initial microbend along 001 direction, for flexible depression bar 104 and 106 is along 002 side
To there is initial microbend.
Fig. 4 A and Fig. 4 B is respectively the micro-nano material power of integrated pectination electrostatic prestrain according to an embodiment of the invention
Performance detection structure is learned in the schematic perspective view and top view during prestrain.As shown in Figure 4 A and 4 B shown in FIG., by driving comb
Applied voltage between seat 202 and fixed comb seat 209,211, that is, allow driving comb 203,204 and fixed fingers 210,212 band respectively
Upper xenogenesis electric charge, so that producing electrostatic attraction between driving comb 203,204 and fixed fingers 210,212.And fix
Comb 210,212 is fixed by fixed comb seat 209,211, therefore driving comb 203,204 is moved to the left, so as to promote movable prestrain
Crossbeam 109 is moved.Therefore directly axis pressure P can be applied in the end of flexible depression bar 105 and 106, according to the transport properties of power,
Also the end that flexible depression bar 103 and 104 is connected between meeting applies axis pressure P.Axial compressive force P acts on elongated flexible depression bar
On, as P≤Pcr=4π2EI/L2When, flexible depression bar keeps its straight state constant.Wherein P is to act on the axial direction on flexible depression bar
Power, PcrIt is the critical load of the buckling of bar, E is the elastic modelling quantity of material, and I is the moment of inertia of minimum bar cross section centering axle.
As P >=PcrWhen, there is lateral buckling in each flexible depression bar, maximum displacement is in each flexible depression bar along itself initial imperfection direction
Centre position, for flexible depression bar 103 and 105 is along 001 direction flexing, for flexible depression bar 104 and 106 is bent along 002 direction
It is bent.There is certain relation between the transversely deforming and axial deformation of the flexible depression bar after flexing, actually transversely deforming can compare axle
Two orders of magnitude, that is, the effect for serving effective amplification are higher by displacement.The complete integrated pectination of actually used manufacture is quiet
During the micro-nano material mechanics properties testing structure of electric prestrain, by measuring the size of transversely deforming micro force detection neutrality bar is exported
Upper suffered power.It should be noted that when remove apply voltage when, drive comb seat 202 can respectively spring supporting 205,
Reset in the presence of 207, load p release, flexible depression bar 103,104,105 and 106 gradually recovers linear state, whole integrated comb
Shape static pre-load micro-nano material mechanical property detection structure returns to original state.That is, for the integrated pectination
Static pre-load micro-nano material mechanical property detection structure, by controlling driving voltage size the heat that suspends can be continuously controlled
The elongation of electric structure, so as to gradually apply end load P so that flexible depression bar enters flexing, that is, realizes prestrain.Together
Higher, repeatability that when can be seen that the integrated pectination static pre-load micro-nano material mechanical property detection structure controllability
Also it is very high.It should be noted that being subject to critical load P in flexible depression barcrWhen, maximum stress is also much smaller than in flexible depression bar
Critical fracture toughness, so flexible depression bar will not rupture all the time.
Voltage swing causes post-buckling micro force detection structure 1 to enter on the electrostatic pre-load arrangement 2 of integrated pectination is controlled
After preload condition, i.e., as shown in Figure 5 after, keep applied magnitude of voltage constant, that is, keep the transversely deforming of flexible depression bar
Maximum D values are constant.One end of test specimen is fixed on by micro force detection center-pole 101 by modes such as bonding or electron beam weldings
Left part, so as to realize stretching or compression to tested test block.
When compression is connected to the test specimen on micro force detection center-pole 101, micro force detection center-pole 101 is also axially pressed
Power is acted on, and axial compressive force is delivered in micro- power sensing block 102.Positioned at the flexible depression bar 105 and 106 on the right side of micro- power sensing block 102
Upper suffered axial compressive force increase, so laterally maximum distortion D2 increases.And it is located at the flexible depression bar in the left side of micro- power sensing block 102
Suffered axial compressive force reduces on 103 and 104, so laterally maximum distortion D1 reduces.Now post-buckling micro force detection structure and morphology
As shown in Figure 6.Obtained after D1 and D2 sizes by experimental technique detection, micro- power obtained by calibrating and transversely deforming are poor before access
The corresponding relation of value, it is possible to obtain the micro- power size in axial direction suffered by the magnitude of load that micro force detection center-pole is subject to, i.e. test specimen.
It should be noted that integrated pectination static pre-load micro-nano material mechanical property detection structure is demarcated
Process refers to, measures the micro- power size being subject on a series of micro force detection center-pole by experiment horizontal with flexibility depression bar
One-to-one relationship between modified difference.When actually used, by straight under optical microscope, scanning electron microscope
Connect the difference of the flexible depression bar transversely deforming of observation, or flexible depression bar transversely deforming is obtained using the method for some indirect operations
Difference.For example：（1）Using the method for electric capacity：Flexible depression bar transversely deforming maximum spray bronze, with surrounding package container or
Other equipment forms capacitor, by obtaining transversely deforming information to the measurement that electric capacity changes.（2）Using the method for resistance：
The side deposited resistive in flexible depression bar centre position, by the deformation of depression bar strain is caused, and causes the change of semiconductor resistor, by
The change of resistance obtains transversely deforming information.（3）Using the method for optical lever：Laser beam is got to into the side of bar, by laser
The change of facula position obtain the information of bar deformation angle, further obtain transversely deforming information.Again by the horizontal change for measuring
Shape is poor, the corresponding relation of micro- power obtained by calibrating and transversely deforming difference before inquiry, it is possible to obtain micro force detection center-pole
The magnitude of load being subject to.
In the same manner, when stretching is connected to the test specimen on micro force detection center-pole 101, while micro force detection center-pole 101
Acted on by axial tension, axial tension is delivered in micro- power sensing block 102.Positioned at the flexible pressure on the right side of micro- power sensing block 102
Suffered axial compressive force reduces on bar 105 and 106, so laterally maximum distortion D2 reduces.And it is located at the left side of micro- power sensing block 102
Suffered axial compressive force increase on flexible depression bar 103 and 104, so laterally maximum distortion D1 increases.Now post-buckling micro force detection
Structure and morphology is as shown in Figure 7.Obtained after D1 and D2 sizes by experimental technique detection, micro- power obtained by calibrating and horizontal stroke before access
To the corresponding relation of deformation difference, it is possible to obtain axially micro- suffered by the magnitude of load that micro force detection center-pole is subject to, i.e. test specimen
Power size.
In sum, by the size of the horizontal maximum distortion of detection, the output of micro- power size has been obtained.
Due to the integrated pectination of the integrated pectination static pre-load micro-nano material mechanical property detection structure it is electrostatic pre-
Loading structure has pre-loaded function, and especially by fixed block to suspension electrothermal structure applied voltage, suspension electrothermal structure is in electric current
Effect is lower to produce Joule heat, thermal expansion deformation occurs, so as to compress post-buckling formula micro force detection structure.For pre-load arrangement,
When magnitude of voltage exceedes a certain marginal value, and the corresponding power acted on long depression bar exceedes critical load, long depression bar can flexing generation
Cross deformation, hereafter, when axial force increases small numerical value, transversely deforming increases a lot, and small axial deformation is amplified whereby.That
When the power of micro- cattle or even skin cattle magnitude is subject on micro force detection center-pole, the long depression bar in instability status also can be horizontal
There is very big deformation, be easy to measurement.That is the corresponding spring constant very little of the sensor, significantly improves power resolution
Rate.Further, since the structure is symmetrical, the stability during use is effectively ensured.In a word, this integrated pectination electrostatic
The micro-nano material mechanics properties testing structure overall structure size of prestrain is little, while Stability Analysis of Structures, reliability are high and repeatable
Use, manufacture is easier；Very sensitive to axially micro- power, power resolution superelevation, transversely deforming can control；There is prestrain work(
Can, depression bar is in post-buckling state, that is, working condition when can cause original state by control voltage.
It should be noted that the tool of the integrated pectination static pre-load micro-nano material mechanical property detection structure of the present invention
Body implementation method has various.One of which implementation method is that the method for first passing through machining produces each widget, so
A suitable substrate is selected afterwards, and each structure member is bonded together or is relied on other modes according to the connected mode of design
Assembling.Another kind of implementation method is to pass through deposition film and selective etch and corruption on silicon chip using microelectronic processing technology
The method processing of erosion is realized, for example, selects to use silicon oxycarbide insulator (SOI) chip, with silicon as substrate layer material, titanium dioxide
Silicon covers again one layer of silicon as sacrificial layer material, in silicon dioxide layer.The resist coating first on uppermost silicon layer, exposure
（Using the method for irradiation, such as optics, X-ray, electron beam or ion beam）, the figure on mask plate is transferred on photoresist,
Then with photoresist as mask layer by etching technics, such as Deep Reaction ion etching method (DRIE) etches silicon layer, by photoetching
Figure on glue is transformed into silicon layer.Again by using Fluohydric acid. (HF) etching silicon dioxide layer.Suitably control the quarter of Fluohydric acid.
The erosion time so that silicon dioxide is dissolved, finally remove photoresist using acetone soln and obtain required silicon MEMS, note
Four fixed blocks of the meaning now integrated pectination static pre-load micro-nano material mechanical property detection structure are formed directly into silicon
Piece substrate surface.
Integrated pectination static pre-load micro-nano material mechanical property detection structure disclosed by the invention is adapted to micro- very much
Receive material mechanical performance testing field, it can be widely used in milli ox according to the adjustment of drawingdimension, receive Adeps Bovis seu Bubali skin cattle across chi
The measurement of micro- power of degree.The sensing equipment can be used in the environment such as vacuum, air, liquid, electromagnetic field.Due to physical dimension it is non-
It is often little, the Experiments of Machanics of the micro-nano-scale of some real-time onlines can be done in probe and ultramicroscope, such as CNT
Stretching and compression, bending etc..
It should be noted that the micro-nano material mechanical property of the integrated pectination electrostatic prestrain in other embodiments of the invention
Such as in detection structure, the electrostatic pre-load arrangement 2 of integrated pectination can also be other forms, shown in Fig. 8 and Fig. 9.These
The optional deformation of the embodiment of the present invention is belonged to, does not change the essence of invention.
In describing the invention, it is to be understood that term " " center ", " longitudinal direction ", " horizontal ", " length ", " width ",
" thickness ", " on ", D score, "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outward ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumference " be based on orientation shown in the drawings or
Position relationship, is for only for ease of the description present invention and simplifies description, rather than indicates or imply that the device or element of indication must
With specific orientation, with specific azimuth configuration and operation, therefore must be not considered as limiting the invention.
Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that indicating or implying relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can express or
Implicitly include one or more this feature.In describing the invention, " multiple " are meant that two or more,
Unless otherwise expressly limited specifically.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected, or be detachably connected, or it is integral；Can be that machinery connects
Connect, or electrically connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements.For the ordinary skill in the art, can be according to concrete feelings
Condition understands above-mentioned term concrete meaning in the present invention.
In the present invention, unless otherwise clearly defined and limited, fisrt feature second feature " on " or D score can be with
It is the first and second feature directly contacts, or the first and second features are by intermediary mediate contact.And, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height less than second feature.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means to combine specific features, structure, material or spy that the embodiment or example are described
Point is contained at least one embodiment of the present invention or example.In this manual, to the schematic representation of above-mentioned term not
Identical embodiment or example must be directed to.And, the specific features of description, structure, material or feature can be with office
Combine in an appropriate manner in one or more embodiments or example.Additionally, those skilled in the art can be by this specification
Described in different embodiments or example be combined and combine.
Although embodiments of the invention have been shown and described above, it is to be understood that above-described embodiment is example
Property, it is impossible to limitation of the present invention is interpreted as, one of ordinary skill in the art within the scope of the invention can be to above-mentioned
Embodiment is changed, changes, replacing and modification.
Claims (5)
1. a kind of integrated pectination static pre-load micro-nano material mechanical property detection structure, it is characterised in that include：Post-buckling
Formula micro force detection structure and the electrostatic pre-load arrangement of integrated pectination, the post-buckling formula micro force detection structure and the integrated comb
The electrostatic pre-load arrangement of shape is connected, wherein,
The electrostatic pre-load arrangement of the integrated pectination is configured to the on-load voltage in its internal paired integrated pectinate texture
After can cause deformation implementing prestrain using electrostatic force；
The post-buckling formula micro force detection structure is configured to when the electrostatic pre-load arrangement of the integrated pectination is not carried out pre-add
During load, the post-buckling formula micro force detection structure is in naturally without stress state, when the electrostatic pre-load arrangement of integrated pectination
When implementing prestrain, the post-buckling formula micro force detection structure is axially compressed, in prestrain flexing poised state, Ran Housuo
Axial oligodynamic action of the post-buckling formula micro force detection structure by test specimen is stated, the prestrain flexing poised state changes,
Make the post-buckling formula micro force detection structure that the transversary change amplified to occur, so as to realize micro force detection；
Wherein, the post-buckling formula micro force detection structure is plane axially symmetric structure, is specifically included：
The micro force detection center-pole of suspension and micro- power sensing block, the micro force detection center-pole is located on axis of symmetry, micro- power
One end of inspection center's bar is connected with test specimen, and the other end is connected with the midpoint of micro- power sensing block, micro force detection center-pole with
The T-shaped connection of micro- power sensing block；
The first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the 4th flexible depression bar for suspending, the described first flexible pressure
The material of bar, the second flexible depression bar, the 3rd flexible depression bar and the 4th flexible depression bar is identical, equal length, with the axis of symmetry
Parallel, the first flexible depression bar, the second flexible depression bar are the described 3rd flexible depression bar, the 4th soft with regard to the symmetrical axial symmetry
Property depression bar with regard to the symmetrical axial symmetry, wherein, one end of one end of the first flexible depression bar and the second flexible depression bar
It is connected with the side of micro- power sensing block, one end and institute of one end of the described 3rd flexible depression bar and the 4th flexible depression bar
The opposite side for stating micro- power sensing block is connected, and the other end of the described first flexible depression bar is connected with fixation with the first fixed block, described
The other end of the second flexible depression bar is connected with fixation with the second fixed block；
The movable prestrain crossbeam for suspending, the other end of the side of the movable prestrain crossbeam and the described 3rd flexible depression bar and
The other end of the described 4th flexible depression bar is connected, and the opposite side of the movable prestrain crossbeam is electrostatic pre- with the integrated pectination
Loading structure is connected.
2. integrated pectination static pre-load micro-nano material mechanical property detection structure according to claim 1, its feature
It is that the length-width ratio of the described first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the 4th flexible depression bar is more than 100.
3. integrated pectination static pre-load micro-nano material mechanical property detection structure according to claim 2, its feature
It is that the described first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the 4th flexible depression bar are configured to pressed
Deform towards both sides direction protrusion during power.
4. integrated pectination static pre-load micro-nano material mechanical property detection structure according to claim 1, its feature
It is that the electrostatic pre-load arrangement of the integrated pectination includes the suspension being connected with the post-buckling formula micro force detection structure
There is shape because making alive produces electrostatic interactions in integrated pectination electrostatic structure, the integrated pectination electrostatic structure of the suspension
Become, promote the movable prestrain crossbeam, the described first flexible depression bar, the second flexible depression bar, the 3rd flexible depression bar and the 4th are soft
Property depression bar is axially compressed by responsive to axial force, in flexion.
5. integrated pectination static pre-load micro-nano material mechanical property detection structure according to claim 1, its feature
It is that the electrostatic pre-load arrangement of the integrated pectination is plane axially symmetric structure, is specifically included：
Rigid drive rod, the drive rod is located on axis of symmetry, and one end of the drive rod and the post-buckling decline power inspection
Geodesic structure is connected；
Comb seat and driving comb, the other end of the drive rod is driven to drive the midpoint of comb seat to be connected with described, the driving
Bar drives the T-shaped connection of comb seat with described, and the driving comb drives comb seat to be connected with described, described to drive one end of comb seat to lead to
Cross the first spring supporting and connect the 3rd fixed block with fixation, the other end of the driving comb seat is supported by second spring and connects the
Four fixed blocks are with fixation；
Fixed comb seat and fixed fingers, the fixed fingers are connected with the fixed comb seat, and the fixed comb seat is used to fix,
The shaped position of the fixed fingers matches with the driving comb, and the fixed fingers are used between the driving comb
Produce electrostatic interactions.
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| CN201310718672.1A CN103808565B (en) | 2013-12-10 | 2013-12-24 | Integrated comb-type electrostatic preloading micro nano material mechanical property detection structure |
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| CN2013106625416 | 2013-12-10 | ||
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| CN201310718672.1A CN103808565B (en) | 2013-12-10 | 2013-12-24 | Integrated comb-type electrostatic preloading micro nano material mechanical property detection structure |
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| CN105115822B (en) * | 2015-09-08 | 2017-06-20 | 西安交通大学 | A kind of universality single shaft slide bar type deformeter high |
| CN107917775A (en) * | 2017-11-01 | 2018-04-17 | 集安市盛程水利水电建设公司 | Pressure transducer based on Fabry Perot interference with strut buckling principle |
| CN110078014B (en) * | 2019-04-19 | 2022-02-22 | 西安交通大学 | MEMS microgravity sensor chip with quasi-zero rigidity characteristic based on electrostatic preloading |
| CN112229749B (en) * | 2020-09-02 | 2021-07-09 | 厦门大学 | Micro-nano structure mechanical characteristic parameter measuring device, measuring plate and measuring method |
| CN114062170A (en) * | 2021-11-02 | 2022-02-18 | 中国航空工业集团公司北京长城计量测试技术研究所 | Balanced type micro force value loading device and method based on comb capacitor |
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| US6894420B2 (en) * | 2002-03-14 | 2005-05-17 | Memx, Inc. | Non-linear actuator suspension for microelectromechanical systems |
| CN2864664Y (en) * | 2005-12-16 | 2007-01-31 | 北京工业大学 | Microstructure double direction bending pulling fatigue experimental device |
| GB0602923D0 (en) * | 2006-02-14 | 2006-03-22 | Univ Catholique Louvain | Thermal stress actuated micro- and nanomachines for testing mechanical propertis of micro and nano-sized material samples |
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