CN103794446B - A kind of system of vertical direction angular surveying - Google Patents
A kind of system of vertical direction angular surveying Download PDFInfo
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- CN103794446B CN103794446B CN201310507667.6A CN201310507667A CN103794446B CN 103794446 B CN103794446 B CN 103794446B CN 201310507667 A CN201310507667 A CN 201310507667A CN 103794446 B CN103794446 B CN 103794446B
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Abstract
The present invention relates to a kind of technical field of vertical direction angular surveying, be particularly applied in the technique of some angular-sensitive of ion implantation apparatus, and can accurately measure the line angle of vertical direction by accurate structure control. A system for vertical direction angular surveying, comprises gear bundle cup (1), motor and transmission mechanism (2), Dose Controller (3) and inner gear selection part (6), I/V conversion and amplifier section (7), ADC modular converter (8), NI system (4) and inner motion control board UMI-7774 (9), line acquisition module PXI-7842R (10), motion control card PXI-7352 (11), host computer (5) thereof thereof. Description is described in detail a kind of method of measuring vertical direction angle and control, and has provided specific embodiment.
Description
Technical field
The present invention relates to a kind of technical field of vertical direction angular surveying, be particularly applied in some angle of ion implantation apparatusSpend responsive technique, and can accurately measure the line angle of vertical direction by accurate structure control.
Background technology
While entering into the technique of 45nm and following rank along with semiconductor production line, product is to ion implantation angle requirementWindow more and more less, for middle line injection device, the technique of some angular-sensitive, implant angle offset design angle0.1 degree will cause product rejection. And at present the middle line ion implantation apparatus of our design can measure water square toLine angle and the depth of parallelism, and by accurate structure control, can make implant angle in the horizontal direction be controlled at 0.1In degree, for vertical direction line angle, do not provide the function that can measure, therefore cannot quantize the angle of vertical directionDegree deviation. From the nearest process test data at Shanghai 28nm production line, the angle of vertical direction changes not only can be affectedTo the deviation of implant angle, and can, because angular deviation causes the deviation of overall dose, directly cause RS-matching to reachLess than the requirement of production line, so the function of adding vertical direction angular surveying for current middle line ion implantation apparatusImperative, according to client's requirement, must add the function of vertical direction angular surveying, to meet current middle line implantationEnter technological requirement.
Summary of the invention
Patent of the present invention is that the one proposing for above-mentioned problems of the prior art is simple in structure, realizing canThe technique vertical direction angular surveying technology for some angular-sensitive of ion implantation apparatus of leaning on.
Patent of the present invention is achieved through the following technical solutions:
A system for vertical direction angular surveying, comprises gear bundle cup (1), motor and transmission mechanism (2), dosage controlDevice (3) and inner gear thereof are selected part (6), I/V conversion and amplifier section (7), ADC modular converter (8), NI systemSystem (4) and inner motion control board UMI-7774 (9), line acquisition module PXI-7842R (10), motion control card thereofPXI-7352 (11), host computer (5).
Described host computer (5) is connected with NI system (4) by optical fiber; Motor and drive mechanism (2) are by transmissionMechanism drives gear bundle cup (1) to rotate ± 11 °; The line that gear bundle cup (1) gathers is by gathering cable through Dose Controller (3)Pass to NI system (4) and draw; Line acquisition module PXI-7842R (10) is by FPGA cable and Dose Controller(3); Motion control board UMI-7774 (9) is by data I/O cable and motion control card PXI-7352 (11) phaseConnect; Motor line of codes, secondary coding line are connected with axle 3, the axle 4 of motion control board UMI-7774 (9) respectively.
Prior art relatively, the beneficial effect of circuit of the present invention is:
1. by the accurate structure control of gear bundle cup (1), can accurately measure the line angle of vertical direction, hardwareRealize simple.
2. in the situation that sampling precision meets the demands, use the soft interruption line synchronous motor motion that makes to sample, make to controlSimple.
3. control circuit is simple and reliable, without destroying the existing motion controller structure and the circuit that are using operation, byRemaining axle is realized control and the monitoring of motor and drive mechanism (2) and secondary coding.
Brief description of the drawings
Fig. 1 is the theory diagram of vertical direction angle measurement system of the present invention;
Fig. 2, Fig. 3 are the control principle drawings that vertical direction angle measurement system of the present invention is implemented;
Fig. 4 is vertical direction angle measurement system of the present invention transmission and outward appearance
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the present invention is further introduced, but not as to limit of the present inventionFixed.
As shown in Figure 1: a kind of system of vertical direction angular surveying, comprises gear bundle cup (1), motor and transmission mechanism(2), Dose Controller (3) and inner gear thereof are selected part (6), I/V conversion and amplifier section (7), ADC modulus of conversionPiece (8), NI system (4) and inner motion control board UMI-7774 (9), line acquisition module PXI-7842R (10) thereof,Motion control card PXI-7352 (11), host computer (5).
Described host computer (5) is connected with NI system (4) by optical fiber; Motor and transmission mechanism (2) are by transmissionMechanism drives gear bundle cup (1) to rotate ± 11 °; The line that gear bundle cup (1) gathers is by gathering cable through Dose Controller (3)Pass to NI system (4) and draw; Line acquisition module PXI-7842R (10) is by FPGA cable and Dose Controller(3); Motion control board UMI-7774 (9) is by data I/O cable and motion control card PXI-7352 (11) phaseConnect; Motor line of codes, secondary coding line are connected with axle 3, the axle 4 of motion control board UMI-7774 (9) respectively.
2. as shown in Figure 2: when host computer (5) sends control command signal controlling electricity by optical fiber to NI system (4)When machine motion, when motor off working state, mediate (vertical direction), motor is carried out to initialization action, at axle 3Corresponding reverse spacing position (11 °) is looked at place, and now the coding of motor is classified as zero, and secondary coding software returns 0, afterwards for keeping awayAfter exempting from repeatedly to move, secondary coding does not make zero and is greater than 90 at each this position encoded radio, and now software correcting motor is encoded alsoIt is 0 that secondary coding value is proofreaied and correct. As shown in Figure 3: send electric machine operation state order, motor is at the uniform velocity walked to+11 °, and passes throughBeam current signal of the every 0.2 ° of synchronous acquisition of sync break collection signal, gathers 100 beam current signal altogether. Finally by dosage controlDevice processed (3) and inner gear thereof are selected part (6), I/V conversion and amplifier section (7), ADC modular converter (8) warpFPGA cable sends NI system (4) to, the monitoring of drawing.
Its axis 3 connects motor coding and it is carried out accurately controlling and monitoring, and axle 4 connecting secondary codings carry out itMonitoring.
The specific embodiment of patent of the present invention elaborates the content of patent of the present invention. To the general skill in this areaArt personnel, any apparent change of under the prerequisite that does not deviate from patent spirit of the present invention, it being done, all formsTo the infringement of patent patent of the present invention, will bear corresponding legal liabilities.
Claims (7)
1. a system for vertical direction angular surveying, is characterized in that: this system comprises gear bundle cup (1), motor and transmission mechanism (2), Dose Controller (3), NI system (4), host computer (5); Described Dose Controller (3) inside comprises gear selection part (6), I/V conversion and amplifier section (7), ADC modular converter (8); Described NI system (4) inside comprises motion control board UMI-7774(9), line acquisition module PXI-7842R(10), motion control card PXI-7352(11);
Motor and transmission mechanism (2) drive gear bundle cup (1) to rotate ± 11 °; The line that gear bundle cup (1) gathers is passed to NI system (4) and draws through Dose Controller (3) by gathering cable.
2. the system of a kind of vertical direction angular surveying as claimed in claim 1, it is characterized in that: the line value that gear bundle cup (1) gathers is passed through successively the gear of Dose Controller (3) and selected part (6), I/V conversion and amplifier section (7), ADC modular converter (8), and is finally sent to NI system (4) by FPGA data cable.
3. the system of a kind of vertical direction angular surveying as claimed in claim 1, it is characterized in that: by motion control card PXI-7352(11), motion control board UMI-7774(9) control spacing, speed, the acceleration-deceleration of motor, motor is rotated between ± 11 °.
4. the system of a kind of vertical direction angular surveying as claimed in claim 1, it is characterized in that: when motor off working state in vertical direction, when work, get ahead to-11 °, after at the uniform velocity walk to+11 °, and by the every 0.2 degree synchronous acquisition beam current signal of interrupt signal.
5. the system of a kind of vertical direction angular surveying as claimed in claim 1, is characterized in that: motor drives transmission mechanism to require to rotate according to expection by conveyer belt and gathers line, and motor is encoded and is classified as 0 in the time that initialization completes, and secondary coding software returns 0.
6. the system of a kind of vertical direction angular surveying as claimed in claim 1, is characterized in that: motor line of codes is monitored by axle 3, and secondary coding line is monitored by axle 4.
7. the system of a kind of vertical direction angular surveying as claimed in claim 1, it is characterized in that: motor is coded in spacing position and is classified as 0, secondary coding is greater than at 90 o'clock at the encoded radio of spacing position, and software correcting motor is encoded and secondary coding value is proofreaied and correct is 0.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507667.6A CN103794446B (en) | 2013-10-24 | 2013-10-24 | A kind of system of vertical direction angular surveying |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310507667.6A CN103794446B (en) | 2013-10-24 | 2013-10-24 | A kind of system of vertical direction angular surveying |
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| Publication Number | Publication Date |
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| CN103794446A CN103794446A (en) | 2014-05-14 |
| CN103794446B true CN103794446B (en) | 2016-05-04 |
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| CN201310507667.6A Active CN103794446B (en) | 2013-10-24 | 2013-10-24 | A kind of system of vertical direction angular surveying |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108931808B (en) * | 2017-05-26 | 2020-11-06 | 北京中科信电子装备有限公司 | Improved ion beam vertical angle measuring method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101371328A (en) * | 2006-01-20 | 2009-02-18 | 瓦里安半导体设备公司 | Methods and apparatus for ion beam angle measurement in two dimensions |
| CN101436523A (en) * | 2007-10-17 | 2009-05-20 | 北京中科信电子装备有限公司 | Detection system and method for accurately measuring ion beam spot width |
| CN101764030A (en) * | 2008-12-04 | 2010-06-30 | 北京中科信电子装备有限公司 | System and method for controlling ion implantation dosage |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI253096B (en) * | 2004-08-12 | 2006-04-11 | Nanya Technology Corp | Ion implantation monitor system and method thereof |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101371328A (en) * | 2006-01-20 | 2009-02-18 | 瓦里安半导体设备公司 | Methods and apparatus for ion beam angle measurement in two dimensions |
| CN101436523A (en) * | 2007-10-17 | 2009-05-20 | 北京中科信电子装备有限公司 | Detection system and method for accurately measuring ion beam spot width |
| CN101764030A (en) * | 2008-12-04 | 2010-06-30 | 北京中科信电子装备有限公司 | System and method for controlling ion implantation dosage |
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| CN103794446A (en) | 2014-05-14 |
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Effective date of registration: 20190725 Address after: 101111 No. 6 Xingguang Second Street, Tongzhou District, Beijing, 1 Building and 1 Floor Patentee after: Beijing Scintillation Section Zhongkexin Electronic Equipment Co., Ltd. Address before: 101111 No. 6 Xingguang Second Street, Tongzhou Optical-Mechanical Integration Industrial Base, Beijing Patentee before: Zhongkexin Electronic Equipment Co., Ltd., Beijing |
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