CN103780143A - Piezoelectric nanometer generator, eyeball moving monitor sensor and monitor method - Google Patents
Piezoelectric nanometer generator, eyeball moving monitor sensor and monitor method Download PDFInfo
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Abstract
This invention relates to a piezoelectric nanometer generator, an eyeball moving monitor sensor and a monitor method. The piezoelectric nanometer generator comprises a lower electrode layer, a first insulation layer positioned on the upper surface of the lower electrode layer, a piezoelectric layer positioned on the upper surface of the first insulation layer, and an upper electrode layer positioned above the piezoelectric layer. The thickness of the generator is less than 20 Mum. The flexible piezoelectric nanometer generator is constructed by utilizing the piezoelectric properties possessed by piezoelectric thin film materials and the eyeball moving monitor sensor is manufactured based on the piezoelectric nanometer generator. The ultrathin flexible piezoelectric generator is attached on the surface of the eyelid. When the eyeball is moving, the pressure applied by the eyeball on the eyelid changes constantly along the moving, which causes the stress on the eyelid to change, and the change acts on the piezoelectric generator so as to output electric signals to the outside. The eyeball moving monitor sensor disclosed by the invention can perform long time monitor on human eyes, and is low in cost, easy for carrying and simple in structure.
Description
Technical field
The present invention relates to a kind of nano generator, particularly a kind of ultra-thin piezoelectric nano generator and the eyeball mobile monitor transducer based on this generator.
Background technology
Since nano generator in 2006 is by reported first, be just subject to global attracting attention with its small structure, effective collection and self-driven characteristic to environmental energy, attract large quantities of researchers to carry out follow to it.But current reported nano generator, particularly piezoelectric nano generator, all exist the problem that thickness is larger, general integral thickness is 1-5mm, and what have even reaches Centimeter Level.Can cause like this needs to consume larger energy and just can make generator generation deformation work, thereby limit its perception to miniature deformation and the collection to small energy.On the other hand, in existing piezoelectric nano generator, the insulating barrier using between piezoelectric and electrode layer is all organic substance, for example polymethyl methacrylate, but the combination between organic substance and electrode layer is to pass through van der Waals interaction, be not very firm, prepare in the process of piezoelectric layer in follow-up use hydro thermal method, can cause because of the difference of material thermal stress separating of this organic matter layer and electrode layer, cause the output performance of generator to reduce, also just more cannot use it in the monitoring of miniature deformation.
The deformation that people's eyeball produces in moving process is very little, but changes a lot of samples.Normal and the people's of the different mobile status of eyeball health and behavior have closely and contact.Such as, people is in sleep and normal work, and the state that its eyeball moves is different.People for a long time under fatigue state, for example, drives, and it is more and more slower that the movement of its eyeball can become.And rapid-eye-movement sleep behavior disorder and neurodegenerative disease, particularly alpha-synapse nucleoprotein disease (as Parkinson's disease) often has close contact.Meanwhile, the mobile status of eyeball also can be used for analyzing a people's psychologic situation, is often used to detect a lie in instrument.Therefore, the mobile status of eyeball is monitored and had more and more wider application.But being used at present the instrument of testing human eyeball mobile status all needs external power supply just can work, and complex structure, volume is large, cost is high, has caused this technology to be difficult to be promoted on a large scale.
Summary of the invention
In order to overcome the technological deficiency of above-mentioned existing nano generator and eyeball mobile monitor transducer, the object of the present invention is to provide a kind of ultra-thin nano generator and the eyeball mobile monitor transducer based on this generator.In order to achieve the above object, the invention provides a kind of piezoelectric nano generator, comprising: lower electrode layer, be placed in the first insulating barrier of described lower electrode layer upper surface, be placed in the piezoelectric layer of described the first insulating barrier upper surface, with, being positioned at the upper electrode layer of piezoelectric layer top, the thickness of described generator is less than 20 μ m.
Preferably, be also provided with the second insulating barrier between described piezoelectric layer and upper electrode layer, the upper and lower surface of described the second insulating barrier is fitted with described upper electrode layer and described piezoelectric layer respectively.
Preferably, described upper electrode layer is directly fitted in the upper surface of described piezoelectric layer.
Preferably, the thickness of described generator is less than 15 μ m.
Preferably, described piezoelectric layer comprises piezoelectric.
Preferably, described piezoelectric layer also comprises Seed Layer, and described Seed Layer is between described the first insulating barrier and described piezoelectric.
Preferably, described piezoelectric is selected from zinc oxide, gallium nitride, cadmium telluride, cadmium sulfide, Kynoar, polyvinyl chloride, poly-difluoroethylene, barium titanate, lead zirconate titanate, lithium niobate, lithium tantalate, lithium germanate and lead magnesio-niobate piezoelectric ceramic.
Preferably, described piezoelectric has micro-nano structure.
Preferably, described micro-nano structure is selected from nano wire, nano particle, nanometer rods, nanotube, nanometer sheet and nano flower.
Preferably, described micro-nano structure is the nano-array being made up of nano wire, nanotube and/or nanometer rods.
Preferably, the thickness range of described piezoelectric layer is that 50nm is to 5 μ m.
Preferably, the thickness range of described piezoelectric layer is that 100nm is to 2 μ m.
Preferably, the thickness range of described piezoelectric layer is that 100nm is to 1 μ m.
Preferably, described the first insulating barrier is selected from aluminium oxide, silicon dioxide, zirconium aluminate and hafnium oxide, and/or described the second insulating barrier is selected from polymethyl methacrylate, poly-to dimethyl siloxane, barium titanate, silicon dioxide and zirconium aluminate.
Preferably, the thickness range of described the first insulating barrier be 200nm to 2 μ m, and/or the thickness range of described the second insulating barrier is that 20nm is to 2 μ m.
Preferably, the thickness range of described the first insulating barrier be 500nm to 1.5 μ m, and/or the thickness range of described the second insulating barrier is that 50nm is to 500nm.
Preferably, described top electrode and/or lower electrode layer are made up of metallic film.
Preferably, described metallic film is platinum film, aluminium film, silverskin, golden film or copper film.
Preferably, the thickness of described lower electrode layer is 5-12 μ m, and the thickness of described upper electrode layer is 10nm-100nm.
Preferably, described upper electrode layer is by the method preparation of deposition.
Preferably, described upper electrode layer and lower electrode layer are electrically connected by external circuit.
The present invention also provides a kind of eyeball mobile monitor transducer, wherein comprises above-mentioned any generator, and described upper electrode layer is connected with signal of telecommunication monitoring device by wire with described lower electrode layer.
Preferably, described signal of telecommunication monitoring device is voltage and/or current monitoring device.
Preferably, described monitoring sensor comprises 2 the above generators.
Preferably, the total length that described generator covers is at least the half from inner eye corner to tail of the eye upper eyelid length.
Preferably, the total length that described generator covers is suitable with the upper eyelid length from inner eye corner to the tail of the eye.
Preferably, the length of the described upper electrode layer in described generator and the wide length that is less than respectively described lower electrode layer and wide.
Preferably, also comprise that insulating sealed layer encapsulates described generator.
Preferably, described insulating sealed layer is organic film.
The present invention also provides a kind of eyeball mobile monitor method, wherein aforementioned eyeball mobile monitor transducer is pasted at upper eyelid outer surface, makes described upper electrode layer and the laminating of described upper eyelid intimate.
Preferably, the coverage of described eyeball mobile monitor transducer will reach at least the length from the middle part of upper eyelid to inner eye corner or the tail of the eye.
Compared with prior art, the eyeball mobile monitor transducer based on piezoelectric nano generator of the present invention has following advantages:
1, make first ultra-thin piezoelectric nano generator, the thickness of whole piezoelectric nano generator can be less than 20 μ m, is even less than 15 μ m.Ultra-thin piezoelectric nano generator has guaranteed that this device can have obvious response to small stress.
2, used first piezoelectric nano generator to monitor the movement of eyeball as self-driven transducer, the defect such as the complex structure, the cost that have solved existing eyeball monitoring sensor are high, volume is large and stability is low.Eyeball causes the STRESS VARIATION on eyelid surface in moving process, and this STRESS VARIATION acts on piezoelectric nano generator, and can constantly produce the signal of telecommunication, thereby realizes the monitoring that eyeball is moved.
3, use inorganic insulation layer to replace organic insulator, not only green non-poisonous, more improve the binding strength between insulating barrier and conductive layer, the sensitivity of generator and electric output performance are all improved a lot.
Accompanying drawing explanation
Shown in accompanying drawing, above-mentioned and other object of the present invention, Characteristics and advantages will be more clear.In whole accompanying drawings, identical Reference numeral is indicated identical part.Deliberately do not draw accompanying drawing by actual size equal proportion convergent-divergent, focus on demonstrating purport of the present invention.
Fig. 1 is a kind of typical structure schematic diagram of piezoelectric nano generator of the present invention;
Fig. 2 is the another kind of typical structure schematic diagram of piezoelectric nano generator of the present invention;
Fig. 3 is the another kind of typical structure schematic diagram of piezoelectric nano generator of the present invention;
Fig. 4 is the comparative analysis that the first insulating barrier is respectively the cross section electromicroscopic photograph of inorganic material and organic material, the piezoelectric nano generator that wherein (a) is inorganic material for the present invention's the first insulating barrier, the piezoelectric nano generator that is (b) organic material for the first conventional insulating barrier of prior art;
Fig. 5 is the working method schematic diagram of eyeball mobile monitor transducer of the present invention;
Fig. 6 is the preparation flow schematic diagram of eyeball mobile monitor transducer of the present invention;
Fig. 7 is structural representation, electromicroscopic photograph and the outward appearance photo in kind of the nano generator prepared of the embodiment of the present invention 1;
Fig. 8 is the signal of telecommunication output spectrogram of the nano generator prepared of the embodiment of the present invention 1;
Fig. 9 is installation photo and the signal of telecommunication output map of the eyeball mobile monitor transducer prepared of the embodiment of the present invention 2.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is only the present invention's part embodiment, rather than whole embodiment.Based on the embodiment in the present invention, those of ordinary skills, not making the every other embodiment obtaining under creative work prerequisite, belong to the scope of protection of the invention.
Secondly, the present invention is described in detail in conjunction with schematic diagram, and in the time that the embodiment of the present invention is described in detail in detail, for ease of explanation, described schematic diagram is example, and it should not limit the scope of protection of the invention at this.
The piezoelectric properties of the material relating in the present invention refer to material be compressed or tensile stress in, the polarization intensity of material changes, thereby produce contrary electric charge in the upper and lower surface of material, and then drive the movement of electronics at external circuit, the signal of telecommunication that generation can be surveyed.
Shown in Fig. 1 is a kind of typical structure of piezoelectric nano generator of the present invention, comprise: lower electrode layer 11, be placed in described lower electrode layer upper surface the first insulating barrier 12, be placed in the upper electrode layer 21 on piezoelectric layer 10 and the described piezoelectric layer 10 of described the first insulating barrier upper surface, the thickness of described generator is less than 20 μ m; Under the effect of external force, the material in piezoelectric layer with piezoelectric properties produces electrical potential difference between upper and lower surface because the stress being subject to changes, drive electronics in external circuit load by flowing with the wire that lower electrode layer 11 is connected with upper electrode layer 21, thereby produce the corresponding signal of telecommunication.
Wherein, the first insulating barrier 12, for generator provides a powerful potential barrier that prevents that electric charge from being transmitted and being assembled by the interface between piezoelectric layer 10 and lower electrode layer 11, can effectively improve the signal of telecommunication output performance of generator.Based on same reason, can also between upper electrode layer 21 and piezoelectric layer 10, set up again the second insulating barrier 22, and the upper and lower surface of this second insulating barrier 22 fits with upper electrode layer 21 and piezoelectric layer 10 respectively, specifically shown in Figure 2.
For the generator shown in Fig. 1 and Fig. 2, below piezoelectric all can be used in piezoelectric layer 10: zinc oxide, gallium nitride, cadmium telluride, cadmium sulfide, Kynoar, polyvinyl chloride, poly-difluoroethylene, barium titanate, lead zirconate titanate, lithium niobate, lithium tantalate, lithium germanate and lead magnesio-niobate piezoelectric ceramic.Reason as space is limited; can not carry out exhaustive to all possible material; only list several concrete materials herein for people's reference; but obviously these concrete materials can not become the restrictive factor of protection range of the present invention; because under the enlightenment of invention, the piezoelectric property that those skilled in the art has according to these materials is easy to select other similar materials.
Found through experiments, when the piezoelectric modulus of piezoelectric is higher, the signal of telecommunication of nano generator output is stronger.So, select suitable material to prepare piezoelectric layer 10 according to piezoelectric listed above, to obtain best signal of telecommunication output performance.
In order to improve the output performance of piezoelectric nano generator, preferably on the piezoelectric in described piezoelectric layer 10, micro-nano structure is set, to increase the stability of device in deformation process, this micro-nano structure is preferably nano wire, nano particle, nanometer rods, nanotube or nano flower, particularly by nano wire, the nano-array of nanotube or nanometer rods composition, it can be the wire of preparing by methods such as photoengravings, cube, or the array of rectangular pyramid shape, in array, the size of each this unit arrives micron dimension in nanometer, the cell size of concrete micro-nano structure, shape should not limit the scope of this invention.
The thickness of piezoelectric layer 10 is generally 50nm to 5 μ m, should reduce its thickness for improving its sensitivity as far as possible, be preferably 100nm to 2 μ m, more preferably 100nm is to 1 μ m, more preferably 100nm is to 500nm, and prepare this thin layer and can adopt the conventional method of this area, such as hydro thermal method, chemical vapour deposition technique etc.
In order to make piezoelectric layer can better form micro-nano structure, preferably first prepare one deck Seed Layer 101 at the upper surface of the first insulating barrier 12, specifically as shown in Figure 3.The method preparation of available this area routine, for example sputter or sedimentation.The thickness of Seed Layer does not have king-sized impact to the performance of generator, is generally between 50nm-200nm, adjusts to some extent according to the difference of selected piezoelectric layer material and seed layer materials.
The first insulating barrier 12 and/or the second insulating barrier 22 should have larger dielectric coefficient, to meet the inhibition to accumulation.Conventional insulating layer material is high-molecular organic material at present, but can produce larger toxicity in the process of preparing insulating barrier with these organic materials, be unfavorable for environmental protection, and the thickness of whole generator is wayward.The inventor is by a large amount of experiments, finds when preparing insulating barrier with inorganic insulating material, particularly when the first insulating barrier 12, can obtain outstanding electric output effect beyond expectation.Reason is in the time that the first insulating barrier 12 is selected from aluminium oxide, silicon dioxide, zirconium aluminate and hafnium oxide, except the effect of insulation and isolation, this thin layer of inorganic material can also obviously be strengthened the intensity of sticking between piezoelectric layer 10, insulating barrier 10 and lower electrode layer 11, shown in Fig. 4-a is the situation using aluminium oxide as the first insulating barrier, can find out between zinc oxide nanowire and alumina layer and aluminium oxide and the lower electrode layer of bottom between, in conjunction with all very tight, be very beneficial for reducing the thickness of whole generator, and improve the efficiency that applied stress is conducted to piezoelectric layer.This is that the nano-pore that alumina surface has on the other hand has also increased the contact area with zinc oxide, thereby has improved the bond strength between the two owing to having formed covalent bond by sharing oxygen atom between aluminium oxide and zinc oxide on the one hand.Fig. 4-b shows the situation using polymethyl methacrylate (English referred to as PMMA) as the first insulating barrier 12.Because PMMA is only attached on lower electrode layer with Van der Waals force, adsorption strength a little less than, the two is easy to separately.And the difference of thermal expansion coefficients of PMMA and zinc oxide is larger, therefore while preparing zinc oxide nanowire by hydro thermal method again on PMMA surface, the situation that just there will be zinc oxide film to separate with PMMA layer, cause the increase of whole generator thickness, applied stress to be effectively delivered on piezoelectric layer zinc oxide, the output performance of generator is declined.This shows, with inorganic insulating material, particularly inorganic oxide can overcome as the first insulating barrier 12 the problems referred to above that organic insulator brings preferably, thereby can prepare ultra-thin piezoelectric nano generator.Inorganic insulation layer can for example, by the conventional method preparation of this area, electrochemical process, magnetron sputtering method, vapour deposition method.General the first insulating barrier 12 is laminate structure, and thickness can be within the scope of 200nm-2 μ m, preferably 500nm-1.5 μ m, more preferably 900nm-1.2 μ m.
The second insulating barrier 22 because form after piezoelectric layer preparation, without the harsh treatment step of the condition of passing through again, therefore the kind of material is so not large on the impact of generator performance, can use conventional inorganic or organic insulating material, optional from polymethyl methacrylate, poly-to dimethyl siloxane, barium titanate, silicon dioxide, zirconium aluminate.The second insulating barrier is as used organic material with conventional spin-coating method preparation, to prepare as the method that also can use electrochemistry, magnetron sputtering, evaporation by inorganic material, and thickness is generally 20nm-2 μ m, tries one's best thinner, preferably 50nm-500nm possible in the situation that.
Electrode layer should with insulating barrier or piezoelectric layer close contact, to guarantee the efficiency of transmission of electric charge, preferably mode be by electric conducting material the mode by deposition in the outer surface film forming of insulating barrier or piezoelectric layer; Concrete deposition process can be magnetron sputtering or evaporation.
The general thickness of nano generator of the present invention is less than 20 μ m, is preferably less than 15 μ m, makes whole generator have very high sensitivity.For reaching this effect, should coordinate to select material and the thickness of above-mentioned each assembly.
Find to have positive correlation between the size of the external output electrical signals of nano generator of the present invention and applied stress by research, this makes this nano generator possess the primary condition as strain gauge.And due to the ultra-thin characteristic of nano generator of the present invention, make it to have there is extremely strong sensitivity, can monitor minimal stress.Based on this, the inventor has designed eyeball mobile monitor transducer.Its agent structure is disclosed arbitrary money piezoelectric nano generator before the present invention, only upper electrode layer 21 need be connected with required signal of telecommunication monitoring device by wire with lower electrode layer 11, described signal of telecommunication monitoring device can be both voltage monitor, also can be current monitoring device, can also the two gather simultaneously.
When in use, eyeball mobile monitor transducer is pasted to the outer surface at upper eyelid with binding agents such as eyelashe glues, upper electrode layer 21 is wherein fitted with the intimate of upper eyelid, as shown in Figure 5: in the time that eyeball is positioned at centre position, after deformation keeps stablizing, there is no the externally signal of output.In the time that eyeball moves to the right, eyeball constantly changes along with mobile to upper eyelid institute applied pressure: in the time that eyeball moves to tail of the eye place gradually by middle part, the nano generator at tail of the eye place is outwardly-bent distortion gradually, the deformation of eyelid middle part nano generator recovers to some extent, the stress that causes the corresponding piezoelectric layer 10 in this two place to be subject to changes, thus external output signal; In the time that eyeball moves to left from the right, can there is again corresponding variation in this diastrophic state, thereby externally export another one signal.As long as eyeball, in continuous movement, just constantly has the signal of external output to be detected.
In order to monitor comparatively accurately the mobile status of eyeball, in monitoring sensor, the total length of generator will be at least the half from inner eye corner to tail of the eye upper eyelid length, to can cover in eyeball moving process at least one-period at an edge, canthus from centre to, be that the coverage of eyeball mobile monitor transducer will reach at least the length from the middle part of upper eyelid to inner eye corner or the tail of the eye, the total length that preferred power generator covers is suitable with the upper eyelid length from inner eye corner to the tail of the eye, and generator is realized overall length covering substantially to upper eyelid.
Adopt and prepare with the following method the eyeball mobile monitor transducer (referring to Fig. 6) based on piezoelectric nano generator of the present invention: first prepare a lower electrode layer (for example aluminium foil), upper surface at lower electrode layer sticks adhesive tape at interval of a segment distance, do not have the part of masking tape to form the first insulating barrier (for example aluminum oxide film) on lower electrode layer surface by anode oxidation method, on the first insulating barrier, form Seed Layer by sputter again, in this Seed Layer, prepare piezoelectric layer by hydro thermal method or additive method original position, for example zinc oxide nanowire (ZnO NWs), afterwards for example, in the upper surface spin coating first insulating layer (PMMA) of piezoelectric layer, method by deposition after the second insulating barrier forms forms the very thin upper electrode layer (for example Al layer) of one deck, finally for example, by removing adhesive tape and corresponding lower electrode layer cutting being formed to multiple nano generators unit (NG I and NG II).
Because nano generator of the present invention is very thin, the material of use also all possesses good toughness, and therefore this device can be bent 360 degree (as shown in Fig. 7-c).For fear of the conducting of upper/lower electrode layer, can allow length and the wide length that is all less than described lower electrode layer and wide of upper electrode layer.Again described piezoelectric nano generator is carried out to encapsulation process, couple together with copper conductor and upper/lower electrode, thereby realize the monitoring that eyeball is moved.Described encapsulated layer can be insulating material, in order not affect the whole thickness of nano generator and to use sensitivity, and encapsulated layer preferred insulation film, particularly organic film, its thickness is selected thinner possible in the situation that as far as possible, can be 100nm-2 μ m.
Embodiment 1: the preparation of piezoelectric nano generator
Adopt anode oxidation method to grow one deck aluminum oxide film as the first insulating barrier on the aluminium film of thick 10 microns of wide 1 cm x of long 5 cm x, on aluminum oxide film, magnetron sputtering a layer thickness is 100nm zinc oxide seed layer.Then, on zinc oxide seed layer, grow the zinc oxide nano-wire array of a layer thickness approximately 2 μ m by hydro thermal method as piezoelectric.Then thick the gathering dimethyl siloxane as the second insulating barrier of spin coating one deck 20nm on zinc oxide nano-wire array.Finally, the aluminium film of preparing a layer thickness 50nm by sedimentation on gather dimethyl siloxane is as upper electrode layer.The structural representation of this generator is referring to Fig. 7-a, the electromicroscopic photograph that Fig. 7-b is corresponding construction, and Fig. 7-d is the partial enlarged drawing of Seed Layer and the first insulating barrier, the photo in kind that Fig. 7-c is generator.
Generator is applied to external force, as rub or flicking, voltmeter has corresponding signal of telecommunication output, and explanation can be converted into electric energy by mechanical energy and generate electricity.Accompanying drawing is to use in the aluminium oxide of the different-thickness situation as the first insulating barrier, the signal of telecommunication output situation of generator, and wherein Fig. 8-a is open circuit voltage figure, Fig. 8-b is short circuit current figure.
Embodiment 2: the preparation of piezoelectric nano generator
Using the aluminium foil of thick 12 microns of wide 2 cm x of long 3 cm x as lower electrode layer, prepare layer of silicon dioxide film thereon as the first insulating barrier, the Kynoar thin layer of preparing a layer thickness approximately 1 μ m by spin-coating method at the first surface of insulating layer is as piezoelectric layer.Then on piezoelectric layer the aluminium film of the about 20nm of Direct precipitation a layer thickness as upper electrode layer.Upper electrode layer is connected with external voltage table by wire with lower electrode layer, generator is applied to external force, as rub or flicking, voltmeter has corresponding signal of telecommunication output, and explanation can be converted into electric energy by mechanical energy and generate electricity.
Embodiment 3: the preparation of the eyeball mobile monitor transducer based on piezoelectric nano generator
Adopting anode oxidation method growth thickness on long 20 millimeters × wide 5 millimeters × aluminium film of thick 12 microns is the first insulating barrier zirconium aluminate film of 1 μ m, then evaporation one deck lead zirconate titanate Seed Layer on this film.On this Seed Layer, grow one deck lead zirconate titanate nanometer stick array by hydro thermal method as piezoelectric layer again, and on this nano-wire array spin coating one strata to dimethyl siloxane as the second insulating barrier.Finally, on gather dimethyl siloxane, prepare layer of copper film as upper electrode layer, utilize wire upper/lower electrode is connected and draw.Use immobilization with adhesive tape on the surface of upper eyelid this device, make copper film and upper eyelid close contact, when people's eyeball can be observed obvious output signal in mobile process, thereby realize the monitoring that eyeball is moved.Fig. 9-a is that riding position and the eyeball of monitoring sensor of the present invention moves schematic diagram, and Fig. 9-b is the signal of telecommunication in the time that eyeball moves at a slow speed with the frequency of about 0.4Hz output spectrogram, signal of telecommunication output spectrogram when Fig. 9-c is eyeball with the frequency fast moving of 1.6Hz.Can find out, when the frequency moving when eyeball changes, also there is obvious variation in the output frequency of monitoring sensor.This illustrates that eyeball mobile monitor transducer of the present invention can realize the object of monitoring to analyze eyeball mobile status by the signal of telecommunication.
The above, be only preferred embodiment of the present invention, not the present invention done to any pro forma restriction.Any those of ordinary skill in the art, do not departing from technical solution of the present invention scope situation, all can utilize method and the technology contents of above-mentioned announcement to make many possible variations and modification to technical solution of the present invention, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not depart from technical solution of the present invention,, all still belongs in the scope of technical solution of the present invention protection any simple modification made for any of the above embodiments, equivalent variations and modification according to technical spirit of the present invention.
Claims (34)
1. a piezoelectric nano generator, is characterized in that, comprising:
Lower electrode layer,
Be placed in the first insulating barrier of described lower electrode layer upper surface,
Be placed in the piezoelectric layer of described the first insulating barrier upper surface,
With the upper electrode layer that is positioned at piezoelectric layer top;
The thickness of described generator is less than 20 μ m.
2. nano generator as claimed in claim 1, is characterized in that, is also provided with the second insulating barrier between described piezoelectric layer and upper electrode layer, and the upper and lower surface of described the second insulating barrier is fitted with described upper electrode layer and described piezoelectric layer respectively.
3. nano generator as claimed in claim 1, is characterized in that, described upper electrode layer is directly fitted in the upper surface of described piezoelectric layer.
4. the nano generator as described in claim 1-3 any one, is characterized in that, the thickness of described generator is less than 15 μ m.
5. the nano generator as described in claim 1-3 any one, is characterized in that, described piezoelectric layer comprises piezoelectric.
6. the nano generator as described in claim 1-3 any one, is characterized in that, described piezoelectric layer also comprises Seed Layer, and described Seed Layer is between described the first insulating barrier and described piezoelectric.
7. nano generator as claimed in claim 5, it is characterized in that, described piezoelectric is selected from zinc oxide, gallium nitride, cadmium telluride, cadmium sulfide, Kynoar, polyvinyl chloride, poly-difluoroethylene, barium titanate, lead zirconate titanate, lithium niobate, lithium tantalate, lithium germanate and lead magnesio-niobate piezoelectric ceramic.
8. nano generator as claimed in claim 5, is characterized in that, described piezoelectric has micro-nano structure.
9. nano generator as claimed in claim 8, is characterized in that, described micro-nano structure is selected from nano wire, nano particle, nanometer rods, nanotube, nanometer sheet and nano flower.
10. nano generator as claimed in claim 9, is characterized in that, described micro-nano structure is the nano-array being made up of nano wire, nanotube and/or nanometer rods.
11. nano generators as described in claim 1-3 any one, is characterized in that, the thickness range of described piezoelectric layer is that 50nm is to 5 μ m.
12. nano generators as claimed in claim 11, is characterized in that, the thickness range of described piezoelectric layer is that 100nm is to 2 μ m.
13. nano generators as claimed in claim 12, is characterized in that, the thickness range of described piezoelectric layer is that 100nm is to 1 μ m.
14. nano generators as described in claim 1-3 any one, is characterized in that, described the first insulating barrier is selected from aluminium oxide, silicon dioxide, zirconium aluminate and hafnium oxide.
15. nano generators as claimed in claim 2, is characterized in that, described the second insulating barrier is selected from polymethyl methacrylate, poly-to dimethyl siloxane, barium titanate, silicon dioxide and zirconium aluminate.
16. nano generators as described in claim 1-3 any one, is characterized in that, the thickness range of described the first insulating barrier is that 200nm is to 2 μ m.
17. nano generators as claimed in claim 16, is characterized in that, the thickness range of described the first insulating barrier is that 500nm is to 1.5 μ m.
18. nano generators as claimed in claim 2, is characterized in that, the thickness range of described the second insulating barrier is that 20nm is to 2 μ m.
19. nano generators as claimed in claim 18, is characterized in that, the thickness range of described the second insulating barrier is that 50nm is to 500nm.
20. nano generators as described in claim 1-3 any one, is characterized in that, described top electrode and/or lower electrode layer are made up of metallic film.
21. nano generators as claimed in claim 20, is characterized in that, described metallic film is platinum film, aluminium film, silverskin, golden film or copper film.
22. nano generators as claimed in claim 21, is characterized in that, the thickness of described lower electrode layer is 5-12 μ m, and the thickness of described upper electrode layer is 10nm-100nm.
23. nano generators as described in claim 1-3 any one, is characterized in that, described upper electrode layer is by the method preparation of deposition.
24. nano generators as described in claim 1-3 any one, is characterized in that, described upper electrode layer and lower electrode layer are electrically connected by external circuit.
25. 1 kinds of eyeball mobile monitor transducers, is characterized in that, comprise the generator described in claim 1-24 any one, and described upper electrode layer is connected with signal of telecommunication monitoring device by wire with described lower electrode layer.
26. monitoring sensors as claimed in claim 25, is characterized in that, described signal of telecommunication monitoring device is voltage and/or current monitoring device.
27. monitoring sensors as described in claim 25 or 26, is characterized in that, described monitoring sensor comprises 2 the above generators.
28. monitoring sensors as described in claim 25 or 26, is characterized in that, the total length that described generator covers is at least the half from inner eye corner to tail of the eye upper eyelid length.
29. monitoring sensors as claimed in claim 28, is characterized in that, the total length that described generator covers is suitable with the upper eyelid length from inner eye corner to the tail of the eye.
30. monitoring sensors as described in claim 25 or 26, is characterized in that, the length of the described upper electrode layer in described generator and the wide length that is less than respectively described lower electrode layer and wide.
31. monitoring sensors as described in claim 25 or 26, is characterized in that, also comprise that insulating sealed layer encapsulates described generator.
32. monitoring sensors as claimed in claim 31, is characterized in that, described insulating sealed layer is organic film.
33. 1 kinds of eyeball mobile monitor methods, is characterized in that, the eyeball mobile monitor transducer described in claim 25-32 any one is pasted at upper eyelid outer surface, make described upper electrode layer and the laminating of described upper eyelid intimate.
34. method for supervising as claimed in claim 33, the coverage that it is characterized in that described eyeball mobile monitor transducer will reach at least the length from the middle part of upper eyelid to inner eye corner or the tail of the eye.
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| CN107115095A (en) * | 2017-04-07 | 2017-09-01 | 王莹 | A kind of eye automatic checkout system and detection method |
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| CN113011264B (en) * | 2021-02-22 | 2024-02-02 | 业泓科技(成都)有限公司 | Identification sensing structure, fingerprint identification component and terminal |
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