CN103777381A - Tunable narrowband optical filtering equipment with liquid crystal phase modulator - Google Patents
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- CN103777381A CN103777381A CN201210416718.XA CN201210416718A CN103777381A CN 103777381 A CN103777381 A CN 103777381A CN 201210416718 A CN201210416718 A CN 201210416718A CN 103777381 A CN103777381 A CN 103777381A
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Abstract
The invention relates to a tunable narrowband optical filtering equipment with a liquid crystal phase modulator. The equipment comprises two design schemes, and according to the first design scheme, the tunable narrowband optical filtering equipment is mainly characterized in that a first band-pass filter, the liquid crystal phase modulator, a second band-pass filter and a driving circuit are included, the liquid crystal phase modulator is arranged in a Fabry-Perot cavity formed by the first band-pass filter and the second band-pass filter, and the driving circuit achieves the tunable function of the filters by controlling the effective refractive index of the liquid materials in the Fabry-Perot cavity. The difference between the main technique characteristics of the second design scheme and the first design scheme is that the first band-pass filter and the second band-pass filter are respectively replaced by step type filters which are provided with one long band pass and a short band pass and have different stopping spectrums.
Description
Technical field
The invention belongs to field of photoelectric technology, especially a kind of tunable narrow-band optically filtering equipment that uses liquid crystal phase-modulator.
Background technology
Traditional optical method F-P etalon is a kind of filtering device that utilizes multiple-beam interference principle to make, and mainly contains two types: a kind of is airspace, and a kind of is optical glass interval.The multiple-beam interference effect of the high reflectance institute forming method Fabry-Perot-type cavity by multilayer dielectric film on two logical light faces, can realize the multi-wavelength narrow-band filtering output in broad spectrum, and have that stable performance, clear aperature are large, luminous power damage threshold is high, simple in structure and the characteristic such as cost is low, therefore, be widely used in all kinds of laser instruments, optical gauge and photoconductive fiber communication apparatus.
Utilize traditional optical method F-P etalon can realize the tuber function of transmitted light frequency.For the Fabry-Perot etalon of airspace, can by change the incident angle of light carry out tuning, but the tuning range of this method is very little; Also can use the chamber progress row of using mechanical means (as step motor) to change Fabry-Perot etalon tuning, this method can realize large tuning range, but tuning precision is low, and high to the accuracy requirement of mechanical part, and stability is bad.In addition, use PZT piezoelectric ceramics (lead zirconate titanate) technology long by the chamber of change Fabry-Perot etalon, can improve tuning precision and speed, but be difficult for accomplishing miniaturization, and driving circuit is also more complicated; Change the temperature of etalon and also can realize in a big way tuning, still, the shortcoming of the method is that speed is slow.
Summary of the invention
The object of the invention is to overcome the deficiencies in the prior art, provide that a kind of stability is strong, tuning precision is high, speed is fast and volume is little and can realize the tunable narrow-band optically filtering equipment of single-mode output.
The present invention solves existing technical matters and takes following technical scheme to realize:
The first scheme: a kind of tunable narrow-band optically filtering equipment that uses liquid crystal phase-modulator comprises the first bandpass filter, liquid crystal phase-modulator, the second bandpass filter and driving circuit, liquid crystal phase-modulator is arranged in the chamber of the fabry-perot filter being made up of the first bandpass filter and the second bandpass filter, driving circuit is realized the tuber function of wave filter by liquid crystal phase-modulator in control Fabry-Perot-type cavity, according to the first bandpass filter to described and the second bandpass filter, different passband widths is set, the Free Spectral Range of fabry-perot filter is set, thereby control the quantity of the mould of the light signal that sees through described tunable narrow-band optically filtering equipment.
And, the first described bandpass filter and the second bandpass filter are a kind of bandpass filter of the multilayer dielectric film arranging on the inside surface of optically transparent material and have identical transmission bandwidth, in the passband of described bandpass filter, can different reflectivity be set according to the requirement of the different acutance coefficients to transmitted light, general this reflectivity is between 70% and 95%, arrange 100% or approach 100% reflectivity beyond the passband, and on the outside surface of optically transparent material, optical anti-reflective film is set.
And the first described bandpass filter and the passband width of the second bandpass filter are less than the Free Spectral Range of described fabry-perot filter, making through the light signal of described tunable narrow-band optically filtering equipment is single-mode optics signal.
And, the first described bandpass filter and the passband width of the second bandpass filter are greater than the Free Spectral Range of described fabry-perot filter, and making through the light signal of described tunable narrow-band optically filtering equipment is 2 or 2 above multimode light signals.
First scheme: a kind of tunable narrow-band optically filtering equipment that uses liquid crystal phase-modulator comprises a long-pass step filter, liquid crystal phase-modulator, short-pass step filter and driving circuit, liquid crystal phase-modulator is arranged in the chamber of the fabry-perot filter being made up of described long-pass step filter and described short-pass step filter, driving circuit is realized the tuber function of wave filter by controlling liquid crystal phase-modulator in described Fabry-Perot-type cavity, according to the long-pass step filter to described and short-pass step filter, different cut-off light frequencies is set and obtains different combination passband widths, the Free Spectral Range of fabry-perot filter is set, thereby control the quantity of the mould of the light signal that sees through described tunable narrow-band optically filtering equipment.
And, described long-pass step filter and short-pass step filter are a kind of optical filters of the multilayer dielectric film arranging on the inside surface of optically transparent material, described long-pass step filter has 100% or approach 100% reflectivity for the light that is less than cutoff frequency, and described short-pass step filter has 100% or approach 100% reflectivity for the light that is greater than cutoff frequency; In the passband of described long-pass step filter and short-pass step filter, can require to arrange different reflectivity according to the difference of the acutance coefficient to transmitted light, general this reflectivity is between 70% and 95%, and on the outside surface of optically transparent material, optical anti-reflective film is set, the cutoff frequency of described long-pass step filter is less than the cutoff frequency of described short-pass step filter, is made up of the free transmission range of described fabry-perot filter the cutoff frequency of described long-pass step filter and the cutoff frequency of described short-pass step filter.
And the free transmission range of described fabry-perot filter is less than the Free Spectral Range of described fabry-perot filter, making through the light signal of described tunable narrow-band optically filtering equipment is single-mode optics signal.
And the free transmission range of described fabry-perot filter is greater than the Free Spectral Range of described fabry-perot filter, making through the light signal of described tunable narrow-band optically filtering equipment is 2 or 2 above multimode light signals.
And what described liquid crystal phase-modulator used is nematic phase type liquid crystal material, the thickness of liquid crystal material is several microns to tens microns.
And described wave filter driving circuit is the square-wave pulse circuit that a kind of frequency is about 2 KHz, pulse voltage amplitude from 0 volt to positive and negative 5 volts adjustable.
And described fabry-perot filter has identical function to zero degree or close to zero degree incident light in former and later two direction incidents.
And described tunable narrow-band optically filtering equipment is only effective to the linearly polarized light of particular polarization, and its polarization direction is consistent with the optical axis direction of described liquid crystal phase tuner.
Advantage of the present invention and good effect are: the present invention is reasonable in design; liquid crystal phase-modulator is placed in the chamber of Fabry-Perot etalon, realize the linearly polarized light frequency to seeing through fabry-perot filter continuously, fast and fine tune function, and the Free Spectral Range that can Fabry-Perot-type cavity be set according to the combination transmission bandwidth of the transmission bandwidth of the first set bandpass filter and the second bandpass filter or described long-pass and short-pass phase step type wave filter is realized single mode or the multimode output of wave filter.The present invention has machinery-free moving-member, stable and reliable for performance, cost is low, size is little, be easy to the features such as installation and production, can meet for the reliability service requiring under the little and extreme working environment of size, can be widely used in the fields such as laser instrument, optic test, optical-fibre communications, biology, medicine equipment and Fibre Optical Sensor network.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a common law F-P etalon;
Fig. 2 is a kind of structural representation of liquid crystal phase-modulator;
Fig. 3 is that the phase place of light transmission liquid crystal phase-modulator is with the change curve of extra electric field;
Fig. 4 is the schematic diagram of the driving electric signal of liquid crystal phase-modulator;
Fig. 5 is a kind of structural representation of the present invention;
Fig. 6 is the transmitted spectrum schematic diagram of the first and second bandpass filter;
Fig. 7 is the transmitted spectrum schematic diagram of long-pass step filter;
Fig. 8 is the transmitted spectrum schematic diagram of short-pass step filter;
Fig. 9 is the transmitted spectrum schematic diagram of common law F-P etalon;
Figure 10 is transmitted spectrum schematic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the embodiment of the present invention is further described.
Fig. 1 has provided the schematic diagram of a kind of common Fabry-Perot (Fabry-Perot) light standard tool 100.The material of this Fabry-Perot light standard tool 100 generally uses to resemble near infrared and visible light wave range and melts quartz or the such optical glass of BK7, the refractive index of supposing material is n, two logical light faces 2 and 4 all plate highly reflecting films, its reflectivity is R, thickness is h, and light, to approach the incident angle incident of zero degree, only has the 2nh=m of meeting λ, could see through etalon, wherein m is the level time of transmitted light.The Free Spectral Range FSR of light standard tool 100
1can be expressed as: Δ λ=λ
2/ (2nh), or with frequency representation: Δ ν=c/ (2nh), wherein c is the light velocity.The crest frequency of transmitted light can be expressed as: ν=mc/ (2nh), and wherein m is order of interference, the frequency bandwidth of transmitted light can be expressed as:
Δ ν
1/2(FWHM)=c (1-R)/(2nhR
1/2), wherein c is the light velocity.
Can find out the Free Spectral Range FSR of light standard tool 100 from above-mentioned two formula
1with thickness be that h is inversely proportional to.The refractive index of supposing material is n=1.5, realize FSR
1=100GHz, 1 millimeter of thickness h ≈.Free Spectral Range FSR
1larger, its thickness is just less.After the material of etalon and thickness are determined, the frequency bandwidth of transmitted light is main relevant with reflectivity R, and reflectivity is higher, and (finesse) is less for frequency broadband or acutance.The feature of the transmitted spectrum of Fabry-Perot (Fabry-Perot) light standard tool is that the bandwidth of each transmission spectrum can be accomplished very narrow, the frequency interval of transmitted spectrum equates and the non-constant width of optical frequency bandwidth, generally can cover optical frequency bands of a spectrum more than 100 nanometers, as shown in Figure 9.
Because the general liquid crystal material as photoelectric device has high resistivity, therefore, can be considered to desirable dielectric substance.Owing to forming the orderly orientation of molecule and the form of extension elongation, liquid crystal has anisotropic dielectric characteristic and mono-symmetry, and as a uniaxial crystal, the direction of its optical axis is consistent with the oriented of molecule.When under the effect of liquid crystal molecule at external electrical field, can form electric dipole.Under the moment loading forming at electric dipole, make the orientation of liquid crystal molecule turn to the direction of electric field, can, by changing the power of electric field, change the direction of the optical axis of liquid crystal.Therefore, can utilize this characteristic of liquid crystal to make optical phase modulator, tunable optic filter or other photoelectric devices, as photoswitch and light intensity modulator etc.The thickness of the general liquid crystal rete as photoelectric device is several microns to tens microns.The present invention utilizes just liquid crystal, under electric field action, the refractive index of linearly polarized light is produced to this characteristics design of change and forms.
Fig. 2 is the structural representation of a liquid crystal phase-modulator 200, comprises outer optically transparent material 12 and 24, transparent electrode layer 16 and 26, and separation layer 19 and liquid crystal layer 18. generally plate optical anti-reflective films in the inside and outside both side surface 5 and 7 of optically transparent material 12 and 24.Two transparency electrodes 16 of liquid crystal phase tuner are connected with driving circuit 14 with 26, the driving signal being produced by driving circuit forms and drives electric field between two transparency electrode retes, utilize the effective refractive index n of electric field change Fabry-Perot intraluminal fluid crystalline substance, regulate light frequency ν and the Free Spectral Range (FSR) of the transmitted light of fabry-perot filter.Common driving electric field is that voltage is several volts, and frequency is the square-wave signal of 2 KHz, as shown in Figure 4.Fig. 3 has provided a thickness and has been about the nematic phase type liquid crystal of 10 microns at 2KHz, and amplitude peak is under the driving of square-wave voltage of 5 volts of +/-, to optical wavelength be 1550 nanometer optical wave phase places change be related to schematic diagram.The maximum light phase that can realize approximately 2 π postpones.
It shown in Fig. 5, is the first structure of the present invention, tunable fabry-perot filter 300 comprise the first bandpass filter 10, liquid crystal phase-modulator 200, the second bandpass filter 20 and driving circuit 14, the first bandpass filter 10 and the second bandpass filter 20 be respectively the outside surface 8 of optically transparent material 9 and 23 and 22 or inside surface 11 and 21 on plate multilayer dielectric film and realize.The first bandpass filter 10 and the second bandpass filter 20 have identical filtering characteristic, as shown in Figure 6, and at free transmission range ν
1with ν
2between (filtering interval 32), reflectivity is R, reflectivity is higher, transmitted spectrum approximately narrow (generally for optical communication, this reflectivity between 70% to 95%, for other application, as requested specially arrange), be less than ν
1(filtering interval 30) or be greater than ν
2(filtering interval 34) reflectivity is 100% or approaches 100%, and modern coating technique can accomplish to be greater than 100 nanometers this passband frequency spectrum scope.
The first Design of Bandpass scheme: as plated bandpass filter multilayer dielectric film on the outside surface 8 and 22 at optically transparent material 9 and 23, the length in forming method Fabry-Perot-type (Fabry-Perot) chamber is D between two wave filters 10 and 20
1.The second Design of Bandpass scheme: as plated bandpass filter multilayer dielectric film on the inside surface 11 and 21 at optically transparent material 9 and 23, the length in forming method Fabry-Perot-type (Fabry-Perot) chamber is D between two wave filters 10 and 20
2, obviously, due to D
1be greater than D
2.The Free Spectral Range of the fabry-perot filter that therefore, the first design proposal can realize is less than the second design proposal.Certainly, also can between the inner side of optically transparent material 12 and 24 and transparent electrode layer 16 and 26, directly plate multilayer thin-film-filter realizes, like this, due to the thickness very little (several microns to tens microns) of liquid crystal, therefore, can realize the larger tunable fabry-perot filter of intrinsic Free Spectral Range (i.e. the Free Spectral Range of the tunable optic filter when without extra electric field), but wave filter manufacture difficulty is larger.
Take above-mentioned the first Design of Bandpass scheme as example, in Fig. 5, the light beam 6 that incides wave filter 300 is a branch ofly to propagate along z direction, polarization axle is the linearly polarized light of x direction, identical with the optical axis direction of liquid crystal phase-modulator 200, the refractive index of supposing light transparent materials is n, at free transmission range ν
1with ν
2between, only have the 2nD of meeting
1the light of+Γ=m λ could see through etalon, and wherein m is the level time of transmitted light.The Free Spectral Range FSR of wave filter 300
2for: Δ λ=λ
2/ (2nD
1+ Γ), or with frequency representation:
?Δ ν=c/ (2nD
1+ Γ), wherein c is the light velocity, and Γ representative changes by refraction the light path that incident light is produced by liquid crystal under DC Electric Field, and the crest frequency of transmitted light can be expressed as: ν=mc/ (2nD
1+ Γ), wherein m is order of interference, transmission light frequency broadband can be expressed as:
Δ ν (FWHM)=c (1-R)/((2nD
1+ Γ) R
1/2), wherein c is the light velocity.
According to above-mentioned formula, tunable fabry-perot filter 300, for the linearly polarized light that approaches zero degree incident, is supposed n=1.5, D
1=1 millimeter, λ=1550 nanometer, the tuning range that can obtain the transmitted light crest frequency of about 150GHz (is about the intrinsic Free Spectral Range FSR of wave filter 300
21.5 times).Comparatively speaking, according to formula above, the change in the frequency band broadband to Free Spectral Range Δ ν and transmitted light is much smaller.The transmitted spectrum schematic diagram of tunable fabry-perot filter as shown in figure 10.
As can be seen here, tunable fabry-perot filter 300, under the effect of extra electric field, can be realized the tuning of transmitted light crest frequency in a big way and substantially not change transmission light frequency broadband and Free Spectral Range.This characteristic is for many application of tunable fabry-perot filter 300, as it is significant to be applied to laser instrument and frequency spectrum instrument etc.Similarly, also can do identical analysis to the second Design of Bandpass scheme.At free transmission range ν
1with ν
2between spectrum region in addition 30 and 34, because the reflectivity of bandpass filter 10 and 20 is 100% or approaches 100%, therefore, the filtered device 300 of this part incident light has stoped.
Can be found out by above analysis, as the intrinsic Free Spectral Range FSR of wave filter 300
1be greater than free transmission range ν
2-ν
1time, only have a mould to see through wave filter 300; Work as FSR
2be less than free transmission range ν
2-ν
1, and be greater than (the ν of 0.5 times
2-ν
1) time; only have 2 moulds to see through wave filter 300. therefore; after the free transmission range of the first bandpass filter 10 and the second bandpass filter 20 is determined; can be by the intrinsic Free Spectral Range (FSR) of wave filter 300 be set; realize in this free transmission range the single mode of wave filter 300 or 2 and 2 tunable outputs with patrix.Due to Fig. 6 demonstration is the filter characteristic of a desirable wave filter, in fact, above-mentioned bandpass filter is between spectrum region 30 and 32, when 32 and 34 transition, can not a saltus step, but exist between a zone of transition, therefore, in the time that the free transmission range of the first bandpass filter 10 and the second bandpass filter 20 is set, also to consider above-mentioned factor.
For free transmission range ν
2-ν
1larger situation, as be greater than 50 nanometers, the manufacture difficulty of bandpass filter 10 and bandpass filter 20 is larger, particularly, as requires between spectrum region little situation between 30 and 32,32 and 34 zone of transition, and difficulty is larger.For this reason, designed the second structure of the present invention: this project organization has used two phase step type wave filters with different filter ranges to replace respectively the first bandpass filter 10 and the second bandpass filter 20.As shown in Figure 7, be a long-pass phase step type wave filter, light frequency is greater than ν
1light to have reflectivity be R, and light frequency is less than ν
1light to have reflectivity be 100% or approach 100%, replace bandpass filter 10 by this long wave pass.Shown in Fig. 8 is a short-pass phase step type wave filter, and light frequency is less than ν
2light to have reflectivity be R, and light frequency is greater than ν
2light to have reflectivity be 100% or approach 100%, by this short wave-pass filter replacement bandpass filter 20, obviously, the structure of this use long-pass and short-pass phase step type wave filter is identical to the function of wave filter 300 with the design proposal of above-mentioned use bandpass filter.
This uses the advantage of the second structure of long-pass and short-pass phase step type wave filter to be: (1) relatively easily realizes large free transmission range (ν
2-ν
1), (2) relatively easily realize smaller from by the end of passband or the frequency spectrum transition from passband to rejection zone, because wave filter 300 has the reversibility of symmetry and light path, therefore, above-mentioned two phase step type wave filters are exchanged, do not affect the performance of wave filter 300.
It is emphasized that above-mentioned explanation only plays demonstration and describes, is not an in detail exhaustively explanation, is not intended to limit the present invention on described concrete form yet.Through description above, all may occur many changes of the present invention and variation.Selected concrete enforcement is only used to better explain the application in principle of the present invention and reality.This explanation can make the people who is familiar with this field can better utilize the present invention, designs according to actual needs different concrete enforcement and changes accordingly.
Claims (12)
1. one kind uses the tunable narrow-band optically filtering equipment of liquid crystal phase-modulator, it is characterized in that: comprise the first bandpass filter, liquid crystal phase-modulator, the second bandpass filter and driving circuit, liquid crystal phase-modulator is arranged in the chamber of the fabry-perot filter being made up of the first bandpass filter and the second bandpass filter, driving circuit is realized the tuber function of wave filter by liquid crystal phase-modulator in control Fabry-Perot-type cavity, according to the first bandpass filter to described and the second bandpass filter, different passband widths is set, the Free Spectral Range of fabry-perot filter is set, thereby control the quantity of the mould of the light signal that sees through described tunable narrow-band optically filtering equipment.
2. a kind of tunable narrow-band optically filtering equipment according to claim 1, it is characterized in that: the first described bandpass filter and the second bandpass filter are a kind of bandpass filter of the multilayer dielectric film arranging on the inside surface of optically transparent material and have identical transmission bandwidth, in the passband of described bandpass filter, can different reflectivity be set according to the requirement of the different acutance coefficients to transmitted light, general this reflectivity is between 70% and 95%, arrange 100% or approach 100% reflectivity beyond the passband, and on the outside surface of optically transparent material, optical anti-reflective film is set.
3. a kind of tunable narrow-band optically filtering equipment according to claim 1, is characterized in that:
The first described bandpass filter and the passband width of the second bandpass filter are less than the Free Spectral Range of described fabry-perot filter, and making through the light signal of described tunable narrow-band optically filtering equipment is single-mode optics signal.
4. a kind of tunable narrow-band optically filtering equipment according to claim 1, is characterized in that:
The first described bandpass filter and the passband width of the second bandpass filter are greater than the Free Spectral Range of described fabry-perot filter, and making through the light signal of described tunable narrow-band optically filtering equipment is 2 or 2 above multimode light signals.
5. one kind uses the tunable narrow-band optically filtering equipment of liquid crystal phase-modulator, it is characterized in that: comprise a long-pass step filter, liquid crystal phase-modulator, short-pass step filter and driving circuit, liquid crystal phase-modulator is arranged in the chamber of the fabry-perot filter being made up of described long-pass step filter and described short-pass step filter, driving circuit is realized the tuber function of wave filter by controlling liquid crystal phase-modulator in described Fabry-Perot-type cavity, according to the long-pass step filter to described and short-pass step filter, different cut-off light frequencies is set and obtains different combination passband widths, the Free Spectral Range of fabry-perot filter is set, thereby control the quantity of the mould of the light signal that sees through described tunable narrow-band optically filtering equipment.
6. a kind of tunable narrow-band optically filtering equipment according to claim 5, it is characterized in that: described long-pass step filter and short-pass step filter are a kind of optical filters of the multilayer dielectric film arranging on the inside surface of optically transparent material, described long-pass step filter has 100% or approach 100% reflectivity for the light that is less than cutoff frequency, and described short-pass step filter has 100% or approach 100% reflectivity for the light that is greater than cutoff frequency; In the passband of described long-pass step filter and short-pass step filter, can require to arrange different reflectivity according to the difference of the acutance coefficient to transmitted light, general this reflectivity is between 70% and 95%, and on the outside surface of optically transparent material, optical anti-reflective film is set, the cutoff frequency of described long-pass step filter is less than the cutoff frequency of described short-pass step filter, is made up of the free transmission range of described fabry-perot filter the cutoff frequency of described long-pass step filter and the cutoff frequency of described short-pass step filter.
7. according to a kind of tunable narrow-band optically filtering equipment described in claim 5 and 6, it is characterized in that: the free transmission range of described fabry-perot filter is less than the Free Spectral Range of described fabry-perot filter, making through the light signal of described tunable narrow-band optically filtering equipment is single-mode optics signal.
8. according to a kind of tunable narrow-band optically filtering equipment described in claim 5 and 6, it is characterized in that: the free transmission range of described fabry-perot filter is greater than the Free Spectral Range of described fabry-perot filter, making through the light signal of described tunable narrow-band optically filtering equipment is 2 or 2 above multimode light signals.
9. according to a kind of tunable narrow-band optically filtering equipment described in claim 1 and 5, it is characterized in that: what described liquid crystal phase-modulator used is nematic phase type liquid crystal material, and the thickness of liquid crystal material is several microns to tens microns.
10. according to a kind of tunable narrow-band optically filtering equipment described in claim 1 and 5, it is characterized in that: described wave filter driving circuit is the square-wave pulse circuit that a kind of frequency is about 2 KHz, pulse voltage amplitude from 0 volt to positive and negative 5 volts adjustable.
11. according to a kind of tunable narrow-band optically filtering equipment described in claim 1 and 5, it is characterized in that: described fabry-perot filter has identical function to zero degree or close to zero degree incident light in former and later two direction incidents.
12. according to a kind of tunable narrow-band optically filtering equipment described in claim 1 and 5, it is characterized in that: described tunable narrow-band optically filtering equipment is only effective to the linearly polarized light of particular polarization, and its polarization direction is consistent with the optical axis direction of described liquid crystal phase tuner.
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Cited By (3)
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| CN109445155A (en) * | 2018-12-22 | 2019-03-08 | 复旦大学 | A kind of unpolarized type narrow-band optical bandpass filter of electric tuning |
| US20200003873A1 (en) * | 2017-04-20 | 2020-01-02 | Panasonic Intellectual Property Management Co., Ltd. | Optical scanning device, photoreceiver device, and photodetection system |
| CN113614633A (en) * | 2020-06-30 | 2021-11-05 | 深圳市海谱纳米光学科技有限公司 | Fabry-Perot cavity-based imaging system |
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| US20200003873A1 (en) * | 2017-04-20 | 2020-01-02 | Panasonic Intellectual Property Management Co., Ltd. | Optical scanning device, photoreceiver device, and photodetection system |
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| CN109445155B (en) * | 2018-12-22 | 2021-07-23 | 复旦大学 | Electrically tuned non-polarized narrow-band optical band-pass filter |
| CN113614633A (en) * | 2020-06-30 | 2021-11-05 | 深圳市海谱纳米光学科技有限公司 | Fabry-Perot cavity-based imaging system |
| CN113614633B (en) * | 2020-06-30 | 2023-03-10 | 深圳市海谱纳米光学科技有限公司 | Fabry-Perot cavity-based imaging system |
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Application publication date: 20140507 |