CN103762147B - Anode structure of ionization gauge - Google Patents
Anode structure of ionization gauge Download PDFInfo
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- CN103762147B CN103762147B CN201310722445.6A CN201310722445A CN103762147B CN 103762147 B CN103762147 B CN 103762147B CN 201310722445 A CN201310722445 A CN 201310722445A CN 103762147 B CN103762147 B CN 103762147B
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- anode ring
- ionization gauge
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Abstract
The present invention relates to a kind of anode structure of ionization gauge, comprising: net electrode, anode ring, auxiliary anode ring and multiple connection strutting piece, each described connection strutting piece supports described net electrode, anode ring, auxiliary anode ring respectively; Wherein, described net electrode is the spherical network structure be made up of electric conducting material, described anode ring and described auxiliary anode are by the inside of described connection supports support at described net electrode, described auxiliary anode ring is around described anode ring, and described net electrode, anode ring and auxiliary anode ring are insulated from each other.Net electrode adopts spherical structure, and its electric field formed has better symmetry and uniformity; Anode ring and net electrode can form shape of a saddle electric field, auxiliary anode ring makes the shape of shape of a saddle electric field more precipitous, whole electric field has constraint effect to electronics, makes the length of electronics movement locus in anode structure of ionization gauge of the present invention can become large, which thereby enhances the sensitivity of ionization gauge.
Description
Technical field
The present invention relates to vacuumatic measuring field, particularly relate to a kind of anode structure of ionization gauge.
Background technology
Technique is along with scientific and technical fast development, and high-technology field is had higher requirement to extra-high vacuum measurement, and especially the high-technology field such as Aero-Space, high-energy physics, Surface Science, proposes more urgent requirement to vacuum measurement.
Ionization gauge is hopeful most at present to solve the formalism that superelevation/extra-high vacuum measures problem, and according to the operation principle of ionization gauge, ionization gauge sensitivity improves, and is the key point extending its measurement lower limit.And ionization gauge sensitivity is the coefficient relevant to regulating structure, its definition is as follows:
In formula, S represents sensitivity, and L represents trajectory of electron motion length, and σ represents ionization probability, and k represents Boltzmann constant, and T represents thermodynamic temperature.
From formula (1), sensitivity is relevant with ionization probability σ to the movement locus length L that electronics is regulating Anodic region, and the electronic motion be confined in shape of a saddle anode electric field is the key being hopeful to extend movement locus length L most.
Sheng Leimei etc. propose a kind of carbon nanotube cathod anode structure of ionization gauge at " Asaddle-fieldgaugewithcarbonnanotubefieldemitters " (Diamond & RelatedMaterials14 (2005) 1695 – 1699).As shown in Figure 1, by negative electrode 1 ', gate pole 2 ' anode ring 3 ' and be coated with the glass cylinder 5 ' of golden film 4 ' and collector 6 ' forms anode ionization system, under suitable voltage is arranged, electric field is shape of a saddle distribution, sensitivity can reach 1.7Pa-1, but the shape of a saddle Electric Field Distribution of this anode ionized space still lacks good symmetry and uniformity, the vibration of electronics can be affected to a certain extent, in addition, the surface of gold film is larger, can discharge quantity be increased to a great extent, affect vacuum environment.
Summary of the invention
Provide hereinafter about brief overview of the present invention, to provide about the basic comprehension in some of the present invention.Should be appreciated that this general introduction is not summarize about exhaustive of the present invention.It is not that intention determines key of the present invention or pith, and nor is it intended to limit the scope of the present invention.Its object is only provide some concept in simplified form, in this, as the preorder in greater detail discussed after a while.
The invention provides a kind of anode structure of ionization gauge, this anode construction has higher sensitivity.
To achieve these goals, the invention provides a kind of anode structure of ionization gauge, comprising: net electrode, anode ring, auxiliary anode ring and multiple connection strutting piece, each described connection strutting piece supports described net electrode, anode ring, auxiliary anode ring respectively; Wherein, described net electrode is the spherical network structure be made up of electric conducting material, described anode ring and described auxiliary anode are by the inside of described connection supports support at described net electrode, described auxiliary anode ring is around described anode ring, and described net electrode, anode ring and auxiliary anode ring are insulated from each other.
Compared to prior art, beneficial effect of the present invention is, net electrode adopts spherical structure, and its electric field formed has better symmetry and uniformity; Anode ring and net electrode can form shape of a saddle electric field, auxiliary anode ring makes the shape of shape of a saddle electric field more precipitous, whole electric field has constraint effect to electronics, make the length of electronics movement locus in anode structure of ionization gauge of the present invention can become large, can learn according to above-mentioned formula (1), because movement locus length becomes large, improve the sensitivity of ionization gauge.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of anode structure of ionization gauge in prior art;
Fig. 2 is the schematic front view of anode structure of ionization gauge of the present invention;
Fig. 3 be in Fig. 2 A-A to sectional view.
Reference numeral:
1 '-negative electrode; 2 '-gate pole; 3 '-anode ring; 4 '-Jin film; 5 '-glass cylinder; 6 '-collector;
1-anode structure of ionization gauge (the present invention); 2-net electrode; 3-anode ring; 4-auxiliary anode ring; 5-ring flange; 6-connects strutting piece; 7-first anode ring; 8-second plate ring.
Embodiment
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is the present invention's part embodiment, instead of whole embodiments.The element described in an accompanying drawing of the present invention or a kind of execution mode and feature can combine with the element shown in one or more other accompanying drawing or execution mode and feature.It should be noted that for purposes of clarity, accompanying drawing and eliminate expression and the description of unrelated to the invention, parts known to persons of ordinary skill in the art and process in illustrating.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not paying creative work, all belongs to the scope of protection of the invention.
In the following embodiment of the present invention, the sequence number of embodiment and/or sequencing are only convenient to describe, and do not represent the quality of embodiment.The description of each embodiment is all emphasized particularly on different fields, in certain embodiment, there is no the part described in detail, can see the associated description of other embodiments.
This provides a kind of anode structure of ionization gauge 1, comprising: net electrode 2, and this net electrode 2 is network structures spherical in shape, and is made up of electric conducting material; Anode structure of ionization gauge 1 of the present invention is bag anode ring 3, auxiliary anode ring 4 and multiple connection strutting piece also.Connect strutting piece and support net electrode 2, anode ring 3 and auxiliary anode ring 4 respectively, and anode ring 3 and auxiliary anode ring 4 are supported on net electrode 2 spherical inner, state auxiliary anode ring around anode ring, in addition, net electrode, between anode ring and auxiliary anode ring, be all insulated from each other.Certainly, can know, net electrode interior is hollow, makes anode ring and auxiliary anode ring be supported on net electrode interior to provide space.
In the present invention, net electrode 2, anode ring 3 acting in conjunction can form shape of a saddle electric field, auxiliary anode ring 4 can change the distribution situation of electric field, such as can compress shape of a saddle electric field, this electric field is made to become precipitous, namely compress the part that saddle-shaped centre is low, the part making two ends raised is more precipitous.
The net electrode 2 of anode structure of ionization gauge 1 of the present invention adopts spherical structure, and its electric field (such as shape of a saddle electric field) formed has better symmetry and uniformity; The electric field that auxiliary anode ring 4 pairs of net electrodes 2 and anode ring 3 acting in conjunction are formed has effect of contraction, therefore the length of electronics movement locus in anode structure of ionization gauge 1 of the present invention can become large, can learn according to above-mentioned formula (1), because movement locus length becomes large, improve the sensitivity of ionization gauge.
Optionally, the above-mentioned net electrode 2 of ionization gauge anode mechanism of the present invention can be formed by the conductive filament manufacture of diameter 0.3-0.6 millimeter, such as that conductive filament braiding winding is made, and, this braiding is wound around can be integrally formed a complete spherical, also can form two semicircles, then splice, certainly, then form multiple part splices passable equally.In addition, except being worked out by conductive filament, also can form with the electric conductor etching of spherical shell shape.Further, the material of net electrode is one or more in molybdenum, tungsten, copper, stainless steel, carbon nano-tube, when net electrode is made up of conductive filament braiding winding, conductive filament can be one or more in these materials, and net electrode be spherical shell shape electric conductor etching formed time, spherical shell shape electric conductor can be one or more in above-mentioned material.
Optionally, the diameter of net electrode 2 is 30-40 millimeter.Adopting glass cylinder compared in prior art, and enclosing golden film, the manufacturing process of net electrode 2 of the present invention is simple, is easy to Installation and Debugging, cost-saving.
Further, anode ring 3 and described auxiliary anode ring 4 optionally adopt intrafascicular one or more of molybdenum, tungsten, copper, stainless steel, nano wire bundle, carbon nano-tube.Namely anode ring 3 and auxiliary anode ring 4 can be metals also can be nonmetal.In the optional execution mode of one, anode ring 3 has two, and the diameter of one of them is 6-9 millimeter, and another diameter is 14-16 millimeter; Auxiliary anode ring 4 has one, and its diameter is 17-20 millimeter.For convenience of description anode ring less for diameter is referred to as first anode ring, represents in Fig. 3 with label 7, the anode ring that diameter is larger is referred to as second plate ring, represents in Fig. 3 with label 8.Wherein second plate ring is around first anode ring, and auxiliary anode ring is around first anode ring and second plate ring.Certainly, the setting position of first anode ring, second plate ring and auxiliary anode ring also can be understood as: first anode ring 7, second plate ring 8 and auxiliary anode ring 4 are coaxial, and be arranged in same level, they are still coaxial with net electrode 2 further.
Certainly, should be appreciated that, above-mentioned set-up mode is a kind of optional embodiment, be not limited to the present invention, first anode ring 7, second plate ring 8 and auxiliary anode ring 4 also can disalignments, not in same level, or coaxial in same level, these can not be used in the present invention, and which kind of set-up mode is all the movement locus in order to there be better (length) after ensureing the incident anode structure of ionization gauge 1 of removable electrical.
Further, anode structure of ionization gauge 1 of the present invention also comprises ring flange 5, connects strutting piece and net electrode, anode ring and auxiliary anode ring is supported on ring flange respectively.
Wherein connect strutting piece 6 and both there is electrical connection function, have support function again.Connect the core body that strutting piece 6 has conduction, this ensures that it realizes electrical connection function, and also have the insulation crust of parcel conductive core perisporium, conductive core can not only be isolated from the outside by this insulation crust, equally also can play a supporting role.Connecting strutting piece 6 is connected on ring flange 5 by above-mentioned net electrode 2, anode ring 3 and auxiliary anode ring 4, and they are supported on ring flange 5, therefore, such as in the above-described embodiments, when there is two anode rings and an auxiliary anode ring 4, connect strutting piece 6 and at least need four, support two anode rings, an auxiliary anode ring and net electrodes 2 respectively.Certainly the stability in order to support, also can use multiple connection strutting piece 6 to support simultaneously.
But should be appreciated that, the support function of above-mentioned connection strutting piece can be provided by insulation crust, also can be provided by conductive core and insulation crust, certainly, which kind of form is all to net electrode, anode ring and auxiliary anode ring are supported on ring flange simultaneously.
Connect strutting piece 6 for one now to illustrate, what connect strutting piece 6 is connected to ring flange 5 by conductive core by net electrode 2, and one end of conductive core connects net electrode 2, other end mounting flange 5.Because be connect strutting piece 6 for one, so connect net electrode 2 for this support connecting piece, in fact this connects strutting piece 6 and can connect net electrode 2, any one in anode ring 3 or auxiliary anode ring 4, is not connected strutting piece 6 by the parts that this connection strutting piece 6 connects by other and connects.Certain support function and linkage function similar, connect the insulation crust of strutting piece 6 and support above-mentioned net electrode 2 or anode ring 3 or auxiliary anode ring 4.
More than just one connects strutting piece 6 is example, one end of the conductive core of each in fact connection strutting piece 6 connects net electrode 2, anode ring 3 or auxiliary anode ring 4 respectively, the other end is connected to ring flange 5, and supports described net electrode 2, anode ring 3, auxiliary anode ring 4 by insulation crust.Should be appreciated that, anode structure of ionization gauge 1 is in vacuum working environment, such as in vacuum chamber, by connecting support connecting piece, the net electrode 2 be in vacuum environment, anode ring 3 and auxiliary anode ring 4 are electrically connected to ring flange 5, ring flange 5 has the binding post connected for conductive core, this binding post can penetrate ring flange 5, for electric signal transmission.
In the optional execution mode of one, the insulation crust of above-mentioned connection strutting piece 6 can be pottery, can insulate, and also has certain intensity can support part such as net electrode 2 grade.Certainly, this is optional execution mode, is not intended to limit the present invention.
Further, in order to ensure the more stable of support, at net electrode 2 outer surface, one circle reinforcing ring is set, the conductive core of above-mentioned connection strutting piece 6 is directly connected with ferrule, this reinforcing ring can conduct electricity, do not affect the electrical connection between conductive core and net electrode 2, namely conductive core is connected with net electrode 2 by metal retainer ring.Certainly, be appreciated that the material that reinforcing ring adopts is electric conducting material by above-mentioned explanation.
The fixed form of above-mentioned reinforcing ring has multiple, and such as reinforcing ring can be embedded in net electrode 2 surface, may also be and is bundled on net electrode 2 by conductive filament.In addition, the setting position of reinforcing ring also can have various ways, and can be such as the center of circle of face, ring body place through net electrode 2 of reinforcing ring, namely net electrode be divided into symmetrical two parts by reinforcing ring, also can be understood as face, reinforcing ring place, is the plane of symmetry of net electrode 2.Certainly, when net electrode 2 is ball shape, even aforesaid way also can find multiple position to install on net electrode 2, as long as can ensure can more firmly fix net electrode 2 by this reinforcing ring.
Above-mentionedly be the optional execution mode of the present invention, be not limitation of the present invention, the such as quantity of anode ring, the size material etc. of each part, can change to some extent in rational scope.
Although last it is noted that described the present invention and advantage thereof in detail above, be to be understood that and can carry out various change when not exceeding the spirit and scope of the present invention limited by appended claim, substituting and converting.And scope of the present invention is not limited only to the specific embodiment of process, equipment, means, method and step described by specification.One of ordinary skilled in the art will readily appreciate that from disclosure of the present invention, can use perform the function substantially identical with corresponding embodiment described herein or obtain and its substantially identical result, existing and that will be developed in the future process, equipment, means, method or step according to the present invention.Therefore, appended claim is intended to comprise such process, equipment, means, method or step in their scope.
Claims (10)
1. an anode structure of ionization gauge, is characterized in that, comprising:
Net electrode, anode ring, auxiliary anode ring and multiple connection strutting piece, each described connection strutting piece supports described net electrode, anode ring, auxiliary anode ring respectively;
Wherein, described net electrode is the spherical network structure be made up of electric conducting material, described anode ring and described auxiliary anode are by the inside of described connection supports support at described net electrode, described auxiliary anode ring is around described anode ring, and described net electrode, anode ring and auxiliary anode ring are insulated from each other.
2. anode structure of ionization gauge according to claim 1, is characterized in that,
Described net electrode weaves winding by conductive filament and makes spherical, and spherical in network structure.
3. anode structure of ionization gauge according to claim 1, is characterized in that,
The material of described net electrode is one or more in molybdenum, tungsten, copper, stainless steel, carbon nano-tube.
4. anode structure of ionization gauge according to claim 2, is characterized in that,
The diameter of described net electrode is 30-40 millimeter, and/or the diameter of described conductive filament is 0.3-0.6 millimeter.
5. anode structure of ionization gauge according to claim 1, is characterized in that,
Described anode ring has two, and the diameter of one of them is 6-9 millimeter, and another diameter is 14-16 millimeter, and in two described anode rings, the larger described anode ring of diameter is around the less described anode ring of diameter;
Described auxiliary anode ring has one, and its diameter is 17-20 millimeter.
6. anode structure of ionization gauge according to claim 1, is characterized in that,
Described anode ring and described auxiliary anode ring are intrafascicular one or more of molybdenum, tungsten, copper, stainless steel, nano wire bundle, carbon nano-tube.
7. anode structure of ionization gauge according to claim 1, is characterized in that,
Described connection strutting piece has conductive core, and wraps up the insulation crust of described conductive core perisporium.
8. anode structure of ionization gauge according to claim 7, is characterized in that,
Described anode structure of ionization gauge also comprises ring flange;
One end of the conductive core of each described connection strutting piece connects separately described net electrode, anode ring or auxiliary anode ring, and the other end is connected to ring flange, and described net electrode, anode ring, auxiliary anode ring is supported on described ring flange.
9. anode structure of ionization gauge according to claim 8, is characterized in that,
Arrange a circle reinforcing ring along on described net electrode, one end of described conductive core is connected to described reinforcing ring.
10. anode structure of ionization gauge according to claim 9, is characterized in that,
Described reinforcing ring is embedded in described net electrode, and described net electrode is divided into symmetrical two parts by described reinforcing ring.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310722445.6A CN103762147B (en) | 2013-12-24 | 2013-12-24 | Anode structure of ionization gauge |
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| CN201310722445.6A CN103762147B (en) | 2013-12-24 | 2013-12-24 | Anode structure of ionization gauge |
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| CN103762147A CN103762147A (en) | 2014-04-30 |
| CN103762147B true CN103762147B (en) | 2016-02-17 |
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| CN109767970B (en) * | 2018-12-05 | 2021-05-28 | 兰州空间技术物理研究所 | Miniature packaged ionization gauge |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5815051B2 (en) * | 1978-12-27 | 1983-03-23 | 株式会社真空電子 | Hot cathode ionization vacuum gauge |
| JPS6135325A (en) * | 1984-07-27 | 1986-02-19 | Japan Atom Energy Res Inst | Ionization vacuum gauge |
| JPS63198840A (en) * | 1987-02-13 | 1988-08-17 | Fumio Watanabe | Hot-cathode ionization gauge |
| JPH04105031A (en) * | 1990-08-24 | 1992-04-07 | Sukegawa Electric Co Ltd | X-ray beam electron stream setoff method and hot cathode type electric dissociate vacuum meter using the method |
| JP3400885B2 (en) * | 1995-03-06 | 2003-04-28 | アネルバ株式会社 | Flange mount type hot cathode ionization gauge |
| CN1112580C (en) * | 1999-06-25 | 2003-06-25 | 清华大学 | Very-high-vacuity micro-ionization meter with very low gas absorption and release rates |
| KR100383441B1 (en) * | 2000-09-26 | 2003-05-12 | 김도윤 | The Vaccum Gauge Using Field-Ionization of Carbon-Nano-Tube |
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