CN103759867B - Convex type flexible pressure sensitive element and method of production thereof - Google Patents
Convex type flexible pressure sensitive element and method of production thereof Download PDFInfo
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- CN103759867B CN103759867B CN201310756674.XA CN201310756674A CN103759867B CN 103759867 B CN103759867 B CN 103759867B CN 201310756674 A CN201310756674 A CN 201310756674A CN 103759867 B CN103759867 B CN 103759867B
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Abstract
The present invention relates to a kind of convex type flexible pressure sensitive element and method of production thereof, belong to sensor technical field.This pressure-active element comprises bottom packaging film, male-type pressure-sensitive film and male-type top layer packaging film.Wherein, bottom packaging film is the laminating insulation film having a pair thin electrode on marginal position, male-type pressure-sensitive film is the conductive polymer composite film that the surface utilizing solution mixing method to be prepared into has array protruding block, and male-type top layer packaging film is the macromolecule material film that surface has array protruding block.The time dependence of the pressure-active element output resistance of the present invention's development is little, can be weakened it to tonometric adverse effect, pressure survey between the narrow and small lth layer that can be used for complete machine and outfit in intelligence manufacture whole process, its gordian technique also can be applicable to the field such as robot finger tip haptic system and the development of artificial electron's skin.
Description
Technical field
The invention belongs to sensor technical field, be related specifically to the preparation of soft sensor and packaging technology.
Background technology
Along with the development of equipment manufacture, in intelligence manufacture whole process, a lot of key core parts of complete machine and outfit and the shape of key foundation parts become increasingly complex, and the requirement of its assembling and positioning precision is also more and more higher.In order to improve substantial equipment assembling speed, obtain best confined state and ensure products-supply security, need to measure the pressure between surface of revolution, but be subject to the restriction of site space physical dimension and the specific condition such as test environment, medium, be difficult to traditional rigid sensor is installed.Therefore, in the urgent need to a kind of sensor of slim softness, pressure survey task between complete layer on the curved surface that compliantly can be attached to parts.
Conductive polymer composite, as a kind of novel functional material, has piezoresistive effect, pliability, workability and damping property, therefore can be used as the sensitive material of thin soft stress sensor.Between the narrow and small lth layer being placed on national defence/commercial unit, not only can play damping, buffering effect, can also interlayer pressure be measured.Therefore, a lot of scientific research institution is all devoted to utilize the piezoresistive effect of conductive polymer composite to realize pressure survey.But adopt the pressure-active element that this material makes at present, its pressure-sensitive film and force-applying surface Full connected, outside under stressed effect, the time dependence of this pressure-active element output resistance is large, seriously reduces sensor performance.
Summary of the invention
The object of the invention is the weak point for overcoming prior art, proposing a kind of method of production of convex type flexible pressure sensitive element.The convex type flexible pressure sensitive element that the method utilizing the present invention to propose is developed, not only thin, the structural reduction of thickness, and reduce the adverse effect of time dependence to pressure measurement accuracy of pressure-active element output resistance, be specially adapted to pressure survey and artificial electron's skin between narrow and small lth layer and develop.
The technical scheme of the convex type flexible pressure sensitive element method of production that the present invention proposes is as follows:
Laminating a pair thin electrode on the marginal position at insulation film two ends, as bottom packaging film, the shape and size of thin electrode can adjust flexibly according to practical application; For subsequent use in stationary platform bottom packaging film being placed in program control jacking gear; Cuboid rigid material is carved array groove, and as male-type pressure-sensitive film mould, the shape of groove, size, spacing and quantity can adjust flexibly according to practical application; Conductive powder, liquid macroimolecule material and organic solvent in certain ratio are mixed, utilizes mechanical raking and sonic oscillation that conductive nano powder is disperseed in mixed solution, and under the effect of crosslinking chemical and catalyzer, form compound substance jelly; Compound substance jelly is coated in equably on bottom packaging film, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the conductive polymer composite film of surface with array protruding block by the extruding of compound substance jelly; After compound substance jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, and guarantee that thin electrode is covered completely by male-type pressure-sensitive film, and make two thin electrodes be positioned at the side of male-type pressure-sensitive film; Cuboid rigid material is carved array groove, and as male-type top layer packaging film mould, the shape of groove, size, spacing and quantity can adjust flexibly according to practical application; Crosslinking chemical is added in liquid macroimolecule material, rubbery polymeric substrate is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, rubbery polymeric substrate is extruded for the surperficial macromolecule material film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, after sulfidization molding, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
Feature of the present invention and effect:
Convex type flexible pressure sensitive element prepared by the method for production utilizing the present invention to propose, the bossing of pressure-sensitive film is only had to contact with force-applying surface, and two electrodes are arranged on the same side of pressure-sensitive film, reduce the resistor time dependence of pressure-active element, weaken it to tonometric adverse effect.
Accompanying drawing explanation
Fig. 1 is convex type flexible pressure sensitive component structure schematic diagram.
1 is insulation film, and 2 is laminating thin electrode on insulation film, and 3 is the conductive polymer composite film that surface has array protruding block, and 4 is the macromolecule material film that surface has array protruding block.
Embodiment
Below in conjunction with embodiment, the convex type flexible pressure sensitive element method of production that the present invention proposes is described:
Laminating a pair thin electrode 2 on the marginal position at insulation film 1 two ends, as bottom packaging film, the shape and size of thin electrode can adjust flexibly according to practical application, for subsequent use in stationary platform bottom packaging film being placed in program control jacking gear, cuboid organic glass is carved array groove, and as male-type pressure-sensitive film mould, the shape of groove, size, spacing and quantity can adjust flexibly according to practical application, conductive powder, liquid macroimolecule material and organic solvent in certain ratio are mixed, utilizes mechanical raking and sonic oscillation that conductive nano powder is disperseed in mixed solution, and under the effect of crosslinking chemical and catalyzer, form compound substance jelly, compound substance jelly is coated in equably on bottom packaging film, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the conductive polymer composite film of surface with array protruding block by the extruding of compound substance jelly, after compound substance jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film 3, and guarantee that thin electrode 2 is covered completely by male-type pressure-sensitive film 3, and make two thin electrodes be positioned at the side of male-type pressure-sensitive film 3, cuboid organic glass is carved array groove, and as male-type top layer packaging film mould, the shape of groove, size, spacing and quantity can adjust flexibly according to practical application, ethyl orthosilicate is added in room temperature vulcanized silicone rubber material, silicon rubber jelly is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, silicon rubber jelly is extruded for the surperficial silicon rubber film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, male-type top layer packaging film 4 is formed after sulfidization molding, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element, as shown in Figure 1.
Embodiment 1
Laminating a pair slim copper foil electrode on the marginal position at Kapton two ends, as bottom packaging film, polyimide thickness is 12.5 microns, and the thickness of slim copper foil electrode is 10 microns, and shape is square, and the length of side is 5 millimeters, for subsequent use in stationary platform bottom packaging film being placed in program control jacking gear, cuboid organic glass is carved array groove, and as male-type pressure-sensitive film mould, the xsect of groove is square, and the length of side is 5 millimeters, and thickness is 1 millimeter, and number of recesses is that 4 row 4 arrange totally 16, and the sideline distance of each groove is 50 millimeters, be the carbon black of 40-60 nanometer, room temperature vulcanized silicone rubber and normal hexane by mean grain size by 0.08: 1: 100 mass ratio mixing, utilize mechanical raking and sonic oscillation that carbon black is disperseed in mixed solution, and under the effect of ethyl orthosilicate and dibutyl tin laurate, form carbon black filled silicon rubber composite material jelly, carbon black filled silicon rubber composite material jelly is coated on bottom packaging film equably, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the carbon black filled silicon rubber composite material film of surface with array protruding block by carbon black filled silicon rubber composite material jelly extruding, after carbon black filled silicon rubber composite material jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, quantity, the size of its rat are identical with the groove of male-type pressure-sensitive film mould with spacing, and guarantee that slim copper foil electrode is covered completely by male-type pressure-sensitive film, and two slim copper foil electrodes are made to be positioned at the side of male-type pressure-sensitive film, cuboid organic glass is carved array groove, as male-type top layer packaging film mould, the xsect of groove is square, the length of side is 8 millimeters, thickness is 2 millimeters, number of recesses is that 4 row 4 arrange totally 16, and the center of each groove is identical with the center of the groove on male-type pressure-sensitive film mould, ethyl orthosilicate is added in room temperature vulcanized silicone rubber material, silicon rubber jelly is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, silicon rubber jelly is extruded for the surperficial silicon rubber film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, male-type top layer packaging film is formed after sulfidization molding, the quantity of its rat, size is identical with the groove of male-type top layer packaging film mould with spacing, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
Embodiment 2
Laminating a pair slim copper foil electrode on the marginal position at Kapton two ends, as bottom packaging film, polyimide thickness is 12.5 microns, and the thickness of slim copper foil electrode is 10 microns, and shape is circular, and diameter is 3 millimeters, for subsequent use in stationary platform bottom packaging film being placed in program control jacking gear, cuboid organic glass is carved array groove, and as male-type pressure-sensitive film mould, the xsect of groove is circular, and diameter is 3 millimeters, and thickness is 1 millimeter, and number of recesses is that 3 row 3 arrange totally 9, and the distance in each groove center of circle is 60 millimeters, be the carbon nano-tube of 100, room temperature vulcanized silicone rubber and normal hexane by average aspect ratio by 0.03: 1: 200 mass ratio mixing, utilize mechanical raking and sonic oscillation that carbon nano-tube is disperseed in mixed solution, and under the effect of ethyl orthosilicate and dibutyl tin laurate, form carbon nano-tube filled silicon rubber composite material jelly, carbon nano-tube filled silicon rubber composite material jelly is coated on bottom packaging film equably, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the carbon nano-tube filled silicon rubber composite material film of surface with array protruding block by carbon nano-tube filled silicon rubber composite material jelly extruding, after carbon nano-tube filled silicon rubber composite material jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, quantity, the size of its rat are identical with the groove of male-type pressure-sensitive film mould with spacing, and guarantee that slim copper foil electrode is covered completely by male-type pressure-sensitive film, and two slim copper foil electrodes are made to be positioned at the side of male-type pressure-sensitive film, cuboid organic glass is carved array groove, as male-type top layer packaging film mould, the xsect of groove is circular, diameter is 5 millimeters, thickness is 2 millimeters, number of recesses is that 3 row 3 arrange totally 9, and the center of circle of each groove is identical with the center of circle of the groove on male-type pressure-sensitive film mould, ethyl orthosilicate is added in room temperature vulcanized silicone rubber material, silicon rubber jelly is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, silicon rubber jelly is extruded for the surperficial silicon rubber film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, male-type top layer packaging film is formed after sulfidization molding, the quantity of its rat, size is identical with the groove of male-type top layer packaging film mould with spacing, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
Embodiment 3
Laminating a pair slim copper foil electrode on the marginal position at Kapton two ends, as bottom packaging film, polyimide thickness is 12.5 microns, and the thickness of slim copper foil electrode is 10 microns, and shape is square, and the length of side is 1 millimeter, for subsequent use in stationary platform bottom packaging film being placed in program control jacking gear, cuboid organic glass is carved array groove, and as male-type pressure-sensitive film mould, the xsect of groove is square, and the length of side is 4 millimeters, and thickness is 0.5 millimeter, and number of recesses is that 6 row 6 arrange totally 36, and the sideline distance of each groove is 30 millimeters, be the carbon black of 80-100 nanometer, room temperature vulcanized silicone rubber and normal hexane by mean grain size by 0.10: 1: 100 mass ratio mixing, utilize mechanical raking and sonic oscillation that carbon black is disperseed in mixed solution, and under the effect of ethyl orthosilicate and dibutyl tin laurate, form carbon black filled silicon rubber composite material jelly, carbon black filled silicon rubber composite material jelly is coated on bottom packaging film equably, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the carbon black filled silicon rubber composite material film of surface with array protruding block by carbon black filled silicon rubber composite material jelly extruding, after carbon black filled silicon rubber composite material jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, quantity, the size of its rat are identical with the groove of male-type pressure-sensitive film mould with spacing, and guarantee that slim copper foil electrode is covered completely by male-type pressure-sensitive film, and two slim copper foil electrodes are made to be positioned at the side of male-type pressure-sensitive film, cuboid organic glass is carved array groove, as male-type top layer packaging film mould, the xsect of groove is square, the length of side is 6 millimeters, thickness is 1 millimeter, number of recesses is that 6 row 6 arrange totally 36, and the center of each groove is identical with the center of the groove on male-type pressure-sensitive film mould, ethyl orthosilicate is added in room temperature vulcanized silicone rubber material, silicon rubber jelly is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, silicon rubber jelly is extruded for the surperficial silicon rubber film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, male-type top layer packaging film is formed after sulfidization molding, the quantity of its rat, size is identical with the groove of male-type top layer packaging film mould with spacing, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
Embodiment 4
Laminating a pair slim copper foil electrode on the marginal position at Kapton two ends, as bottom packaging film, polyimide thickness is 12.5 microns, and the thickness of slim copper foil electrode is 10 microns, and shape is square, and the length of side is 1 millimeter, for subsequent use in stationary platform bottom packaging film being placed in program control jacking gear, cuboid organic glass is carved array groove, and as male-type pressure-sensitive film mould, the xsect of groove is square, and the length of side is 3 millimeters, and thickness is 0.5 millimeter, and number of recesses is that 3 row 3 arrange totally 9, and the sideline distance of each groove is 50 millimeters, be the carbon black of 30-50 nanometer, room temperature vulcanized silicone rubber and normal hexane by mean grain size by 0.05: 1: 100 mass ratio mixing, utilize mechanical raking and sonic oscillation that carbon black is disperseed in mixed solution, and under the effect of ethyl orthosilicate and dibutyl tin laurate, form carbon black filled silicon rubber composite material jelly, carbon black filled silicon rubber composite material jelly is coated on bottom packaging film equably, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the carbon black filled silicon rubber composite material film of surface with array protruding block by carbon black filled silicon rubber composite material jelly extruding, after carbon black filled silicon rubber composite material jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, quantity, the size of its rat are identical with the groove of male-type pressure-sensitive film mould with spacing, and guarantee that slim copper foil electrode is covered completely by male-type pressure-sensitive film, and two slim copper foil electrodes are made to be positioned at the side of male-type pressure-sensitive film, cuboid organic glass is carved array groove, as male-type top layer packaging film mould, the xsect of groove is square, the length of side is 5 millimeters, thickness is 1 millimeter, number of recesses is that 3 row 3 arrange totally 9, and the center of each groove is identical with the center of the groove on male-type pressure-sensitive film mould, ethyl orthosilicate is added in room temperature vulcanized silicone rubber material, silicon rubber jelly is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, silicon rubber jelly is extruded for the surperficial silicon rubber film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, male-type top layer packaging film is formed after sulfidization molding, the quantity of its rat, size is identical with the groove of male-type top layer packaging film mould with spacing, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
Embodiment 5
Laminating a pair slim copper foil electrode on the marginal position at Kapton two ends, as bottom packaging film, polyimide thickness is 12.5 microns, and the thickness of slim copper foil electrode is 10 microns, and shape is circular, and diameter is 2 millimeters, for subsequent use in stationary platform bottom packaging film being placed in program control jacking gear, cuboid organic glass is carved array groove, and as male-type pressure-sensitive film mould, the xsect of groove is square, and the length of side is 4 millimeters, and thickness is 0.5 millimeter, and number of recesses is that 3 row 3 arrange totally 9, and the sideline distance of each groove is 40 millimeters, be the carbon black of 10-20 nanometer, room temperature vulcanized silicone rubber and normal hexane by mean grain size by 0.04: 1: 100 mass ratio mixing, utilize mechanical raking and sonic oscillation that carbon black is disperseed in mixed solution, and under the effect of ethyl orthosilicate and dibutyl tin laurate, form carbon black filled silicon rubber composite material jelly, carbon black filled silicon rubber composite material jelly is coated on bottom packaging film equably, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the carbon black filled silicon rubber composite material film of surface with array protruding block by carbon black filled silicon rubber composite material jelly extruding, after carbon black filled silicon rubber composite material jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, quantity, the size of its rat are identical with the groove of male-type pressure-sensitive film mould with spacing, and guarantee that slim copper foil electrode is covered completely by male-type pressure-sensitive film, and two slim copper foil electrodes are made to be positioned at the side of male-type pressure-sensitive film, cuboid organic glass is carved array groove, as male-type top layer packaging film mould, the xsect of groove is square, the length of side is 6 millimeters, thickness is 1 millimeter, number of recesses is that 3 row 3 arrange totally 9, and the center of each groove is identical with the center of the groove on male-type pressure-sensitive film mould, ethyl orthosilicate is added in room temperature vulcanized silicone rubber material, silicon rubber jelly is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, silicon rubber jelly is extruded for the surperficial silicon rubber film with array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, male-type top layer packaging film is formed after sulfidization molding, the quantity of its rat, size is identical with the groove of male-type top layer packaging film mould with spacing, after removing male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
Claims (1)
1. the method for production of a convex type flexible pressure sensitive element, it is characterized in that, the method comprises the steps: laminating a pair thin electrode on the marginal position at insulation film two ends, and as bottom packaging film, the shape and size of thin electrode can adjust flexibly according to practical application; For subsequent use in stationary platform bottom packaging film being placed in program control jacking gear; Cuboid rigid material is carved array groove, and as male-type pressure-sensitive film mould, the shape of groove, size, spacing and quantity can adjust flexibly according to practical application; Conductive powder, liquid macroimolecule material and organic solvent in certain ratio are mixed, utilizes mechanical raking and sonic oscillation that conductive nano powder is disperseed in mixed solution, and under the effect of crosslinking chemical and catalyzer, form compound substance jelly; Compound substance jelly is coated in equably on bottom packaging film, controlling by microcomputer the male-type pressure-sensitive film mould be fixed on program control jacking gear movable platform to move down, is the conductive polymer composite film of surface with array protruding block by the extruding of compound substance jelly; After compound substance jelly sulfidization molding, remove male-type top layer packaging film mould, form male-type pressure-sensitive film, and guarantee that thin electrode is covered completely by male-type pressure-sensitive film, and make two thin electrodes be positioned at the side of male-type pressure-sensitive film; Cuboid rigid material is carved array groove, and as male-type top layer packaging film mould, the shape of groove, size, spacing and quantity can adjust flexibly according to practical application; Crosslinking chemical is added in liquid macroimolecule material, rubbery polymeric substrate is formed after stirring, and be coated on male-type pressure-sensitive film, control by microcomputer the male-type top layer packaging film mould be fixed on program control jacking gear movable platform to move down, being extruded by rubbery polymeric substrate is the macromolecule material film that required surface has array protruding block, and guarantee that it covers male-type pressure-sensitive film completely, after sulfidization molding, remove male-type top layer packaging film mould, form convex type flexible pressure sensitive element.
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| CN103994844B (en) * | 2014-05-21 | 2016-03-23 | 东南大学 | A kind of pressure-active element based on thermoplastic elastomer and face load diatibution measuring method |
| CN107328494B (en) * | 2017-06-26 | 2020-04-10 | 华中科技大学 | Micro-projectile nano pressure sensor and health monitoring system |
| CN110108395B (en) * | 2019-06-14 | 2024-01-16 | 清华大学深圳研究生院 | Touch and slide sensor and preparation method thereof |
| CN111595506B (en) * | 2020-06-05 | 2021-04-27 | 中国科学院兰州化学物理研究所 | Flexible force-sensitive sensor based on composite micro-nano fibers and preparation method thereof |
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| CN101059380A (en) * | 2007-02-16 | 2007-10-24 | 中国科学院上海微***与信息技术研究所 | Flexible capacitance type touch sensor production method |
| CN102141451A (en) * | 2011-04-06 | 2011-08-03 | 东北大学 | Method for developing flexible pressure sensitive probe with side electrode |
| CN102419226A (en) * | 2011-09-07 | 2012-04-18 | 东北大学 | Thinned flexible pressure sensor sensitive unit based on flatfish type electrode structure |
| CN102589759A (en) * | 2012-02-20 | 2012-07-18 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
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| JP4742577B2 (en) * | 2004-12-14 | 2011-08-10 | 日産自動車株式会社 | Pressure sensor and manufacturing method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101059380A (en) * | 2007-02-16 | 2007-10-24 | 中国科学院上海微***与信息技术研究所 | Flexible capacitance type touch sensor production method |
| CN102141451A (en) * | 2011-04-06 | 2011-08-03 | 东北大学 | Method for developing flexible pressure sensitive probe with side electrode |
| CN102419226A (en) * | 2011-09-07 | 2012-04-18 | 东北大学 | Thinned flexible pressure sensor sensitive unit based on flatfish type electrode structure |
| CN102589759A (en) * | 2012-02-20 | 2012-07-18 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
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