CN103759222B - Adopt microlens array as four interference light path Infrared jamming simulation systems of beam-expanding element - Google Patents
Adopt microlens array as four interference light path Infrared jamming simulation systems of beam-expanding element Download PDFInfo
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- CN103759222B CN103759222B CN201410059919.8A CN201410059919A CN103759222B CN 103759222 B CN103759222 B CN 103759222B CN 201410059919 A CN201410059919 A CN 201410059919A CN 103759222 B CN103759222 B CN 103759222B
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- 238000004088 simulation Methods 0.000 title claims abstract description 20
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 11
- 239000010703 silicon Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 229910052732 germanium Inorganic materials 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000203 mixture Substances 0.000 claims 1
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 4
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- 229910052724 xenon Inorganic materials 0.000 description 3
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- 238000010586 diagram Methods 0.000 description 2
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- 239000005357 flat glass Substances 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
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- 238000001228 spectrum Methods 0.000 description 2
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- 239000013307 optical fiber Substances 0.000 description 1
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Abstract
Adopt microlens array as four interference light path Infrared jamming simulation systems of beam-expanding element, belong to infrared semi-true object emulation technology field.Described Infrared jamming simulation system comprises interference light path, complex objective lens (5), microlens array (14) and collimator objective (8) successively along optical path direction, the parallel beam that interference light path sends incides microlens array (14) through complex objective lens (5), receives after microlens array (14) is assembled through collimator objective (8) collimation for target seeker.When the present invention adopts microlens array as beam-expanding element, the interference light beam inciding microlens array front surface is assembled further, changes the direction of propagation of light beam, expands the angle of divergence of light beam.Now, interference light can be full of collimator objective, and interference luminous energy collection efficiency increases substantially.
Description
Technical field
The invention belongs to infrared semi-true object emulation technology field, relate to a kind of microlens array that adopts as four interference light path Infrared jamming simulation systems of beam-expanding element.
Background technology
Infrared jamming simulator can simulate resemblance, spectrum radiation performance, the motion state of jamming target and background thereof, is the important component part of semi-matter simulating system.Because the number of jamming bomb is more, and actual conditions are more complicated, and an independent interference light path cannot be simulated exactly.Many interference light path can obtain good simulate effect, but due to target seeker bore limited, interference light path light only have a little part to enter target seeker, light energy collection efficiency is very low.
Though the application of the beam-expanding elements such as reticulate pattern mirror, image translation fiber, frosted glass, diffraction grating can expanded light beam the angle of divergence and realize expanding stray light beam divergence angle and improving light energy collection efficiency, all existing defects.Because reticulate pattern mirror beam-expanding element need adopt reflection type optical path that light path can be caused elongated, simulation system volume is larger.And though image translation fiber can realize expanding function, light is repeatedly totally reflected in a fiber, and the track of light cannot accurate Calculation, and after Optical Fiber Transmission, the effect that expands of stray light exists very large randomness, and it is uneven to expand effect.Conventional light-scattering component has diffraction grating and two kinds, frosted glass, and it is uneven and occur diffraction intensity extreme value at diverse location that diffraction grating expands effect, although and frosted glass expands uniform in effect, energy loss is very serious.The raising of light energy collection efficiency is the serious problems run in multi-pass Infrared jamming simulator engineering chemistry database, and how reasonably to expand interference light beam is the key problem improving light energy collection efficiency.
Infrared jamming simulator can simulate resemblance, spectrum radiation performance, the motion state of jamming bomb and background thereof, is the important component part of semi-matter simulating system.But because the number of jamming bomb is more than target, and actual conditions are more complicated, an independent interference light path cannot be simulated exactly.
Summary of the invention
The beam expander technology that the present invention is directed to two interference light path Infrared jamming simulator is studied, provide a kind of microlens array that adopts as four interference light path Infrared jamming simulation systems of beam-expanding element, improve the efficiency of energy collection on interference road significantly.
The object of the invention is to be achieved through the following technical solutions:
A kind of microlens array that adopts is as four interference light path Infrared jamming simulation systems of beam-expanding element, interference light path, complex objective lens, microlens array and collimator objective is comprised successively along optical path direction, described interference light path is four, four interference light paths are arranged in border circular areas equably, and with four edge end points inscribes in the level of annulus and vertical direction, four parallel beams disturbing light path to send incide microlens array through complex objective lens, receive after microlens array is assembled through collimator objective collimation for target seeker.
Microlens array can make the parallel rays inciding its front surface produce convergent effect, lenticular focal plane produces the hot spot dot matrix corresponding with each unit microlens center, hot spot dot matrix continues forward direction, forms more divergent beams, thus realizes expanding effect.Microlens array is placed on before complex objective lens focal plane and close focal plane, the light before now microlens array can make focal plane is assembled further, and light can become large by the angle of divergence after microlens array.So microlens array also can realize expanding function, and have that to expand Light distribation even, array parameter can optimal design, Machinability Evaluation advantages of higher, thus can obtain good to expand effect and higher light energy collection efficiency.
Due to Zhong tetra-tunnel interference light path symmetric offset spread of the present invention, and whole system is along the optical axis Rotational Symmetry of complex objective lens, only sets forth for an interference light path below.The parallel beam that interference light path sends receives for target seeker through collimator objective collimation after complex objective lens is assembled.Because stray light beam divergence angle is too small, interference light can not be full of collimator objective, interference luminous energy collection efficiency.
When adopting microlens array as beam-expanding element, the interference light beam inciding microlens array front surface is assembled further, changes the direction of propagation of light beam, expands the angle of divergence of light beam.Now, interference light can be full of collimator objective, and interference luminous energy collection efficiency increases substantially.
Accompanying drawing explanation
Fig. 1 is the locus figure of four interference light paths of Infrared jamming simulation system of the present invention.
Fig. 2 is the Infrared jamming simulation system schematic diagram not using beam-expanding element.
Fig. 3 is the Infrared jamming simulation system schematic diagram employing beam-expanding element.
Fig. 4 is the index path not having the Infrared jamming simulation system of beam-expanding element of the present invention.
Fig. 5 is the hot spot distribution plan not having the collimator objective surface of beam-expanding element of the present invention.
Fig. 6 is the interference index path that employing microlens array of the present invention expands.
Fig. 7 is the hot spot distribution plan on the collimator objective surface after of the present invention expanding.
Fig. 8 is the 3 d shape figure of microlens array of the present invention through atomic force microscope test gained.
Wherein, 1 is the 4th road stray light for first via stray light, 2 be the second road stray light, 3 is the 3rd road stray light, 4,5 is complex objective lens, 6 is sheet glass, 7 is beam-expanding element, 8 is collimator objective, 9 is target seeker, 10 is the first lens of complex objective lens, 11 is second lens of complex objective lens, 12 is the 3rd lens of complex objective lens, and 13 is the hot spot figure of the first via stray light at collimator objective front surface place in non-beam-expanding system, and 14 for expanding the hot spot figure of the first via stray light at collimator objective front surface place in rear system.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is further described; but be not limited thereto; everyly technical solution of the present invention modified or equivalent to replace, and not departing from the spirit and scope of technical solution of the present invention, all should be encompassed in protection scope of the present invention.
As shown in Fig. 1,2,5, the present invention has the Infrared jamming simulation system of four interference light paths, comprises interference light path, complex objective lens 5, beam-expanding element 7 and collimator objective 8.Infrared jamming simulation system service band is 1 ~ 5 μm.
Described interference light path comprises first via stray light 1, second road stray light 2, the 3rd road stray light 3 and the 4th road stray light 4 four interference light path.
Described complex objective lens 5 is made up of first lens 10, second lens 11 and the 3rd lens 12 3 lens successively along optical path direction.
The bore of described first lens 10 is 62.4mm, and forward and backward surface curvature radius is 144.0mm, 295.1mm, and thickness is 16.0mm, and material is silicon, with second lens 11 at a distance of 20.3mm.
The bore of described second lens 11 is 49.5mm, and forward and backward surface curvature radius is 422.7mm, 201.4mm, and thickness is 12.1mm, and material is germanium, with the 3rd lens 12 at a distance of 111.5mm.
The bore of described 3rd lens 12 is 24.5mm, and forward and backward surface curvature radius is 48.7mm, 49.5mm, and thickness is 11.7mm, and material is silicon, with microlens array 7 at a distance of 23.9mm.
The bore of described collimator objective 8 is 114.2mm, and forward and backward surface curvature radius is 530.0mm ,-530.0mm, and thickness is 10.0mm, and material is silicon.
The width of light beam of described four interference light paths are 40mm, are arranged in equably in border circular areas that radius is 130mm, and with the level of annulus and four edge end points inscribes in vertical direction, respectively disturb the distance 90mm between light path light axis.The distance of the four tunnel interference ends of light path and the first lens 10 of complex objective lens 5 is 60mm.
As shown in Figure 3, do not place beam-expanding element 7 after complex objective lens 5, when only placing sheet glass 6, interference light beam only has a little part can enter into collimator objective 8.And the part light entering collimator objective is oblique incidence, the angle of its central ray and horizontal optical axis is 7.41
o, be unfavorable for the reception of collimator objective 8.Shown in Fig. 4, can see from the interference beam and focus distribution situation of collimator objective 8 surface, the light number entering collimator objective accounts for the ratio of total incident interference light number seldom, and known by calculating, interference luminous energy collection efficiency is now only 7.2%.
As shown in Figure 5, adopt microlens array as beam-expanding element 7, microlens array is placed on the rear 24mm place of the 3rd lens 12, the interference light beam inciding microlens array front surface is assembled further, change the direction of propagation of light beam, expand the angle of divergence of light beam.And the angle of the central ray and horizontal optical axis that enter the part light of collimator objective 8 is close to 0
o, be conducive to the reception of target seeker 9.As shown in Figure 6, can see from the interference beam and focus distribution situation of collimator objective 8 surface, light can be full of collimator objective equably, and the ratio that the light number entering collimator objective 8 accounts for the light number of total incident interference light beam significantly increases.Known by calculating, interference luminous energy collection efficiency now brings up to 30.8%.
The design parameter data of microlens array comprise the parameter of unit microlens in the parameter of whole array and array.Whole microlens array is of a size of the round silicon chip that bore is 30mm, and silicon wafer thickness is 4mm; The bore of unit microlens is 20 μm, radius-of-curvature is 50 μm, the silicon materials microlens array of substrate.Have 1767145 on all four lenticule unit of shape in array, lenticular arrangement is as Fig. 7.
Microlens array adopts melting photoresist technology and ion beam etching technology.Fabrication cycle is the circular light barrier array of 20 μm, carries out uv-exposure, form the microlens array of photoresist structure after hot melt to the silicon chip scribbling photoresist.Photoresist microlens structure can be transferred in silicon base by ion beam etching technology, the microlens array of the silicon materials needed for formation.
The testing apparatus of microlens array surface shape adopts atomic force microscope, and because lenticule face shape is very large on the impact of system luminous energy receiving efficiency, atomic force microscope can obtain the measuring accuracy of nanometer scale.
During the collection efficiency test of Infrared jamming simulation system interference luminous energy, xenon lamp should be adopted as light source.Xenon lamp can provide the infrared light radiation of 1 ~ 5um, and emittance is larger.With the lighting source of xenon lamp as interference light path, light path is built according to the structure of Fig. 5, the stray light energy that the stray light energy received with thermal infrared imager collimation object lens sends with interference light path is tested respectively, the luminous energy test result of two positions is divided by, just can obtains the efficiency of energy collection that microlens array expands rear collimator objective.
Claims (5)
1. adopt microlens array as four interference light path Infrared jamming simulation systems of beam-expanding element, interference light path is comprised successively along optical path direction, complex objective lens (5), microlens array (14) and collimator objective (8), the parallel beam that interference light path sends incides microlens array (14) through complex objective lens (5), receive for target seeker through collimator objective (8) collimation after microlens array (14) is assembled, it is characterized in that described complex objective lens (5) along optical path direction successively by first lens (10), second lens (11) and the 3rd lens (12) three lens compositions, wherein: the bore of first lens (10) is 62.4mm, before, rear surface radius-of-curvature is 144.0mm, 295.1mm, thickness is 16.0mm, material is silicon, with second lens (11) at a distance of 20.3mm, the bore of second lens (11) is 49.5mm, and forward and backward surface curvature radius is 422.7mm, 201.4mm, and thickness is 12.1mm, and material is germanium, with the 3rd lens (12) at a distance of 111.5mm, the bore of the 3rd lens (12) is 24.5mm, and forward and backward surface curvature radius is 48.7mm, 49.5mm, and thickness is 11.7mm, and material is silicon, with microlens array (7) at a distance of 23.9mm, the unit microlens bore of described microlens array (14) is 20 μm, radius-of-curvature is 50 μm, substrate thickness is 4mm, and material is silicon.
2. employing microlens array according to claim 1 is as four interference light path Infrared jamming simulation systems of beam-expanding element, it is characterized in that described interference light path comprises first via stray light (1), the second road stray light (2), the 3rd road stray light (3) and the 4th road stray light (4) four interference light path, four interference light paths are arranged in border circular areas equably, and with four edge end points inscribes in the level of annulus and vertical direction.
3. employing microlens array according to claim 2 is as four interference light path Infrared jamming simulation systems of beam-expanding element, it is characterized in that described four width of light beam disturbing light paths are 40mm, be arranged in border circular areas that radius is 130mm equably, the distance 90mm between each interference light path light axis.
4. the employing microlens array according to Claims 2 or 3, as four interference light path Infrared jamming simulation systems of beam-expanding element, is characterized in that the described four tunnel interference ends of light path and the distance of complex objective lens (5) are 60mm.
5. employing microlens array according to claim 1 is as four interference light path Infrared jamming simulation systems of beam-expanding element, it is characterized in that the bore of described collimator objective (8) is 114.2mm, forward and backward surface curvature radius is 530.0mm ,-530.0mm, thickness is 10.0mm, and material is silicon.
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| CN103969832A (en) * | 2014-05-27 | 2014-08-06 | 哈尔滨工业大学 | Laser beam-expanding dodging device based on microlens array |
| CN105717651B (en) * | 2014-12-02 | 2019-02-15 | 哈尔滨新光光电科技有限公司 | It is a kind of based on beam cementing prism and the multi-channel target simulation system for expanding field lens |
| CN108106494B (en) * | 2018-01-17 | 2019-08-23 | 哈尔滨工业大学 | A kind of medium-wave infrared target simulation system using telecentric beam path in image space |
| CN109699112B (en) * | 2019-01-30 | 2020-04-24 | 北京科技大学广州新材料研究院 | Natural light interference simulation method for infrared communication detection |
| CN112821958B (en) * | 2020-12-30 | 2022-05-13 | 西安电子科技大学 | Underwater blue-green laser communication emission method and system based on random micro-lens array |
| CN114157370A (en) * | 2021-12-02 | 2022-03-08 | 浙江大学 | Collimating light path design method for increasing working distance of underwater wireless optical communication system |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5693951A (en) * | 1995-12-11 | 1997-12-02 | Northrop Grumman Corporation | Missile launch and flyout simulator |
| CN102279093A (en) * | 2011-04-13 | 2011-12-14 | 中国兵器工业第二〇五研究所 | Infrared dynamic triangular target simulator |
| CN103486906A (en) * | 2013-09-06 | 2014-01-01 | 北京理工大学 | Laser, infrared point source and infrared imaging combined target simulator |
| CN103529550A (en) * | 2013-10-29 | 2014-01-22 | 哈尔滨工业大学 | Infrared broadband target simulation optical system |
-
2014
- 2014-02-21 CN CN201410059919.8A patent/CN103759222B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5693951A (en) * | 1995-12-11 | 1997-12-02 | Northrop Grumman Corporation | Missile launch and flyout simulator |
| CN102279093A (en) * | 2011-04-13 | 2011-12-14 | 中国兵器工业第二〇五研究所 | Infrared dynamic triangular target simulator |
| CN103486906A (en) * | 2013-09-06 | 2014-01-01 | 北京理工大学 | Laser, infrared point source and infrared imaging combined target simulator |
| CN103529550A (en) * | 2013-10-29 | 2014-01-22 | 哈尔滨工业大学 | Infrared broadband target simulation optical system |
Non-Patent Citations (3)
| Title |
|---|
| 《微透镜阵列光学耦合扩束技术研究》;于双双;《硕士学位论文》;20110630;第二章2.1节、第三章3.22-3.节、3.3.2-3.3.3节 * |
| 《红外目标模拟光学耦合技术研究》;张嘉轩;《硕士学位论文》;20100731;第2章第2.1节 * |
| 《红外目标模拟器耦合扩束***的装调误差分析》;刘少锋;《硕士学位论文》;20110630;第2章第2.1节 * |
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