CN103757690A - Polycrystalline silicon ingot furnace - Google Patents
Polycrystalline silicon ingot furnace Download PDFInfo
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- CN103757690A CN103757690A CN201410030643.0A CN201410030643A CN103757690A CN 103757690 A CN103757690 A CN 103757690A CN 201410030643 A CN201410030643 A CN 201410030643A CN 103757690 A CN103757690 A CN 103757690A
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- insulation cage
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- thermal insulation
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Abstract
The invention discloses a polycrystalline silicon ingot furnace and relates to the technical field of thermal field insulation of polycrystalline silicon ingot furnaces. A thermal insulation cage is arranged outside a crucible and a heater and consists of a fixed thermal insulation cage top plate, a bottom plate and a movable thermal insulation cage side plate, wherein the thermal insulation cage side plate consists of a thermal insulation cage inner side plate and a thermal insulation cage outer side plate; the thermal insulation cage inner side plate and the thermal insulation cage outer side plate are divided into an upper part and a lower part respectively; at least one composite board is arranged on the inner side of the lower thermal insulation cage inner side plate; the composite board is fixed with the lower thermal insulation cage inner side plate and the lower thermal insulation cage outer side plate through fixing screws; the composite board is a graphite carbon composite board. According to the polycrystalline silicon ingot furnace, a powder falling phenomenon caused by long-term high-temperature baking of the original thermal insulation cage inner side plate is reduced, so that the service life of the inner side thermal insulation panel of the thermal insulation plate can be prolonged to be about two years, the thermal insulation properties inside the thermal insulation cage are improved, the energy is saved, the consumption is reduced, and the production cost is reduced.
Description
Technical field
The present invention relates to polycrystalline silicon ingot casting technical field, especially relate to a kind of polycrystalline silicon ingot or purifying furnace.
Background technology
Polycrystalline silicon ingot or purifying furnace heat-insulation cage comprises the heat-insulation cage side plate of heat-insulation cage top board, heat-insulation cage base plate and surrounding, and heat-insulation cage side plate is divided into upper and lower two portions and inside and outside two-layer.Described heat insulation side plate is made by graphite carbon felt material, after long-time high bake, thermal baffle there will be serious efflorescence to drop, and then affect the integral heat insulation effect of heat-insulation cage, while causing moving, the thermograde of heating power increase and thermal field occurs inhomogeneous, thereby while causing the long crystalline substance of silicon ingot, occur shade, in order to guarantee the normal use of stove, lock heat-insulation cage side plate will be changed about 1 year, increase maintenance cost, and affected production schedule to a certain extent.
Summary of the invention
The object of the invention is to, for the problems referred to above, provide a kind of polycrystalline silicon ingot or purifying furnace of long service life.
The object of the invention is to be achieved through the following technical solutions:
A kind of polycrystalline silicon ingot or purifying furnace, comprise crucible, well heater, heat-insulation cage, housing, on described crucible, be provided with well heater, the outer setting of described crucible and well heater has heat-insulation cage, described heat-insulation cage is by the heat insulation top board of fixing up and down, the movable heat-insulation cage side plate composition of heat insulation bottom board and surrounding, described heat-insulation cage side plate is comprised of heat-insulation cage outer panel and heat-insulation cage interior plate, described heat-insulation cage interior plate is divided into upper and lower two portions, go up heat-insulation cage interior plate and lower heat-insulation cage interior plate, described heat-insulation cage outer panel is arranged on heat-insulation cage interior plate outside, described heat-insulation cage outer panel is divided into upper and lower two portions, go up heat-insulation cage outer panel and lower heat-insulation cage outer panel, described lower heat-insulation cage interior plate inner side is provided with at least one protective shield, described protective shield is composition board, described composition board and described lower heat-insulation cage interior plate and lower heat-insulation cage outer panel are fixed, described composition board adopts graphite carbon Material cladding plate.
Further, described graphite carbon Material cladding plate is fixed on described lower heat-insulation cage interior plate and lower heat-insulation cage outer panel by retaining screw, and described retaining screw is comprised of graphite screw rod and graphite nut.
Further, described graphite carbon Material cladding plate carbon element content >=99%.
Further, the requirement of described graphite carbon Material cladding plate, parallel fibers direction, vertical fibers direction tensile strength all >=5MPa, thermal conductivity >=0.06W/mK.
Further, described protective shield is set to four, in the same size, and the length of every is 663mm, and wide is 330mm, and thick is 40mm.
Beneficial effect of the present invention is, compared with prior art described polycrystalline silicon ingot or purifying furnace by being fixed with composition board in lower heat-insulation cage interior plate, promote the heat-insulating property of heat-insulation cage inside, energy-saving and cost-reducing, reduce the dry linting phenomenon that the long-time high bake of former lower heat-insulation cage interior plate causes, can make extend to about 2 years the work-ing life of warming plate inside thermal baffle, reduce production costs.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of polycrystalline silicon ingot or purifying furnace of providing of the specific embodiment of the invention 1.
In figure:
1, furnace chamber housing; 2, well heater; 3, crucible; 4, composition board; 5, pillar stiffener; 6, heat-insulation cage base plate; 7, graphitic cooling block; 8, retaining screw; 91, lower heat-insulation cage interior plate; 92, upper heat-insulation cage interior plate; 101, lower heat-insulation cage outer panel; 102, upper heat-insulation cage outer panel; 11, fixed link; 12, observation tube; 13, heat-insulation cage enhancing screw; 14, heat-insulation cage top board.
Embodiment
Below in conjunction with accompanying drawing and by embodiment, further illustrate technical scheme of the present invention.
Please refer to shown in Fig. 1, in the present embodiment, a kind of polycrystalline silicon ingot or purifying furnace comprises crucible 3, well heater 2, heat-insulation cage, furnace chamber housing 1, in described furnace chamber, be provided with crucible 3, described crucible 3 is placed on graphitic cooling block 7, described graphitic cooling block 7 is supported by pillar stiffener 5, described pillar stiffener 5 is through heat-insulation cage bottom, bottom is fixed on furnace chamber housing 1 inwall, the top of described crucible 3 is provided with well heater 2, described well heater 2 is fixed on well heater fixed link 11 lower ends, and the central authorities of furnace chamber are provided with observation tube 12 from top to bottom, heat-insulation cage is arranged at the outside of crucible 3 and well heater 2, described heat-insulation cage is rectangular parallelepiped mechanism, be divided into six faces, by the heat-insulation cage top board 14 of fixing up and down, the movable heat-insulation cage side plate composition of heat-insulation cage base plate 6 and surrounding, the heat-insulation cage side plate upper end of described activity is connected with heat-insulation cage enhancing screw 13, described heat-insulation cage side plate is comprised of heat-insulation cage outer panel and heat-insulation cage interior plate, described heat-insulation cage interior plate is divided into upper and lower two portions, go up heat-insulation cage interior plate 92 and lower heat-insulation cage interior plate 91, described heat-insulation cage outer panel is arranged on heat-insulation cage interior plate outside, described heat-insulation cage outer panel is also divided into upper and lower two portions, go up heat-insulation cage outer panel 102 and lower heat-insulation cage outer panel 101, described lower heat-insulation cage interior plate 91 inner sides are provided with four protective shields, described protective shield is composition board 4, described composition board 4 is fixing with described lower heat-insulation cage interior plate 91 and lower heat-insulation cage outer panel 101, described composition board 4 is that the retaining screw 8 by being comprised of graphite screw rod and graphite nut is fixing.
Described composition board 4 is made for graphite charcoal felt material, the composition board 4 that described graphite charcoal felt material is made requires: described composition board 4 can be high temperature resistant, can more than 2000 ℃, under temperature environment, work long hours, carbon element content is more than or equal to 99%, and requires that parallel fibers direction, vertical fibers direction tensile strength are all more than or equal to 10MPa, thermal conductivity is more than or equal to 0.06W/mK.
Described four composition boards 4 are in the same size, and the length of every is 663mm, and wide is 330mm, and thick is 40mm.
Heat-insulation cage moving part top is fixed in heat-insulation lifting screw mandrel 13 lower ends.When needs are adjusted temperature, can promote the moving part of heat-insulation cage, now, upper heat-insulation cage interior plate 92, upper heat-insulation cage outer panel 102 are promoted to certain altitude, it is larger that the bottom of heat-insulation cage moving part and heat-insulation cage base plate 6 are connected gap, and heat-insulation cage heat sheds from gap, formation temperature gradient, be upper and lower temperature difference, upper surface temperature relative superiority or inferiority surface temperature is low.
Above embodiment has just set forth ultimate principle of the present invention and characteristic; the present invention is not limited by above-described embodiment; without departing from the spirit and scope of the present invention, the present invention also has various variations and change, and these variations and change all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (5)
1. a polycrystalline silicon ingot or purifying furnace, comprise crucible, well heater, heat-insulation cage, furnace chamber housing, on described crucible, be provided with well heater, the outer setting of described crucible and well heater has heat-insulation cage, described heat-insulation cage is by the heat insulation top board of fixing up and down, the movable heat-insulation cage side plate composition of heat insulation bottom board and surrounding, described heat-insulation cage side plate is comprised of heat-insulation cage outer panel and heat-insulation cage interior plate, described heat-insulation cage interior plate is divided into upper and lower two portions, go up heat-insulation cage interior plate and lower heat-insulation cage interior plate, described heat-insulation cage outer panel is arranged on heat-insulation cage interior plate outside, described heat-insulation cage outer panel is divided into upper and lower two portions, go up heat-insulation cage outer panel and lower heat-insulation cage outer panel, it is characterized in that: described lower heat-insulation cage interior plate inner side is fixed with at least one protective shield, described protective shield is composition board, described composition board adopts graphite carbon Material cladding plate.
2. a kind of polycrystalline silicon ingot or purifying furnace according to claim 1, it is characterized in that: described graphite carbon Material cladding plate is fixed on described lower heat-insulation cage interior plate and lower heat-insulation cage outer panel by retaining screw, and described retaining screw is comprised of graphite screw rod and graphite nut.
3. a kind of polycrystalline silicon ingot or purifying furnace according to claim 1, is characterized in that: described graphite carbon Material cladding plate carbon element content >=99%.
4. a kind of polycrystalline silicon ingot or purifying furnace according to claim 1, is characterized in that: the parallel fibers direction of described graphite carbon Material cladding plate, vertical fibers direction tensile strength all >=5MPa, thermal conductivity >=0.06W/mK.
5. a kind of polycrystalline silicon ingot or purifying furnace according to claim 1, is characterized in that: described protective shield is set to four, in the same size, the length of every is 663mm, and wide is 330mm, and thick is 40mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410030643.0A CN103757690A (en) | 2014-01-22 | 2014-01-22 | Polycrystalline silicon ingot furnace |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410030643.0A CN103757690A (en) | 2014-01-22 | 2014-01-22 | Polycrystalline silicon ingot furnace |
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| CN103757690A true CN103757690A (en) | 2014-04-30 |
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| CN201410030643.0A Pending CN103757690A (en) | 2014-01-22 | 2014-01-22 | Polycrystalline silicon ingot furnace |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104195640A (en) * | 2014-08-28 | 2014-12-10 | 杭州铸泰科技有限公司 | Thermal field system for sapphire single crystal growth |
| CN105019021A (en) * | 2015-07-20 | 2015-11-04 | 无锡荣能半导体材料有限公司 | Polysilicon cast ingot thermal field structure |
| CN105386123A (en) * | 2015-12-21 | 2016-03-09 | 晶科能源有限公司 | Polycrystalline ingot casting furnace and side portion thermal insulation apparatus thereof |
| CN106346278A (en) * | 2016-11-14 | 2017-01-25 | 苏州亨达尔工业材料有限公司 | Tool for horizontally fixing abnormal-shape ABS (Acrylonitrile Butadiene Styrene) composite board |
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2014
- 2014-01-22 CN CN201410030643.0A patent/CN103757690A/en active Pending
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| DE102006017622A1 (en) * | 2006-04-12 | 2007-10-18 | Schott Ag | Manufacturing multi-crystalline silicon comprises placing detachable upper section at an upper edge of crucible furnace to build container structure, filling the container structure with silicon filling, and heating the container structure |
| CN102134744A (en) * | 2011-04-26 | 2011-07-27 | 安阳市凤凰光伏科技有限公司 | Heat insulation device of polycrystalline silicon ingot furnace |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104195640A (en) * | 2014-08-28 | 2014-12-10 | 杭州铸泰科技有限公司 | Thermal field system for sapphire single crystal growth |
| CN105019021A (en) * | 2015-07-20 | 2015-11-04 | 无锡荣能半导体材料有限公司 | Polysilicon cast ingot thermal field structure |
| CN105386123A (en) * | 2015-12-21 | 2016-03-09 | 晶科能源有限公司 | Polycrystalline ingot casting furnace and side portion thermal insulation apparatus thereof |
| CN106346278A (en) * | 2016-11-14 | 2017-01-25 | 苏州亨达尔工业材料有限公司 | Tool for horizontally fixing abnormal-shape ABS (Acrylonitrile Butadiene Styrene) composite board |
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Application publication date: 20140430 |