CN103752562A - Technology for utilizing plasma cleaning machine to clean liquid crystal display screen substrate - Google Patents
Technology for utilizing plasma cleaning machine to clean liquid crystal display screen substrate Download PDFInfo
- Publication number
- CN103752562A CN103752562A CN201410050016.3A CN201410050016A CN103752562A CN 103752562 A CN103752562 A CN 103752562A CN 201410050016 A CN201410050016 A CN 201410050016A CN 103752562 A CN103752562 A CN 103752562A
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- Prior art keywords
- crystal display
- liquid crystal
- display screen
- substrate
- screen substrate
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
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- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention relates to a technology for utilizing a plasma cleaning machine to clean a liquid crystal display screen substrate. The technology comprises the steps that a manufacturing worker places the liquid crystal display screen substrate on a dedicated aluminum disk, places the aluminum disk containing the liquid crystal display screen substrate into a plasma cleaning machine table, sets the parameters of the plasma cleaning machine table, starts a power supply for cleaning, and takes out the cleaned substrate for utilization or places the cleaned substrate into a nitrogen cabinet for storage. The technology enables the surface of the liquid crystal display screen substrate to obtain uniform cleaning degree, is used for effective treatment of smudginess and an oxidation layer on the surface, and can greatly reduce the reject ratio of products so as to control, to a largest degree, extra cost, generated by after-sales services, of products.
Description
Technical field
The present invention relates to a kind of cleaning process flow, relate in particular to one and utilize plasma cleaner washing lotion crystal display screen substrate process.
Background technology
The makers' cleaning solution crystal display screen of most substrate process flow process, liquid crystal display panel substrate takes out from vacuum bag, manufactory be all with alcohol or erasing rubber directly and oxide layer dirty to LCDs substrate surface process, although above method is very effective, but in the middle of invisible, LCDs substrate surface coating can be destroyed and substrate surface cleannes are inconsistent, when clean with erasing rubber, also can operating environment of pollution, product is caused to secondary pollution.
Summary of the invention
The object of the invention is to be to provide one to utilize plasma cleaner washing lotion crystal display screen substrate process, this technique technical problem to be solved is to overcome the deficiencies in the prior art.
In order to realize above-mentioned technical purpose, the technical scheme that the present invention takes is: one is utilized plasma cleaner washing lotion crystal display screen substrate process, it is characterized in that, it has comprised manufacturing process personnel liquid crystal display panel substrate is placed into special aluminium dish, the aluminium dish that liquid crystal display panel substrate is housed is put into plasma cleaning board, sets plasma cleaning board parameter and started power supply and clean, by cleaning complete substrate, take out stand-by or put into nitrogen cabinet and preserve several steps.
In the present invention, manufacturing process personnel are placed into liquid crystal display panel substrate in special aluminium dish with manual mode orientation according to the rules.
In the present invention, manufacturing process personnel are sent to plasma cleaning board place in modes such as hand-held or go-cart tractions by the aluminium dish that liquid crystal display panel substrate is housed.
In the present invention, manufacturing process personnel arrange plasma cleaner parameter for different liquid crystal display panel substrates.
In the present invention, liquid crystal display panel substrate can be aluminium base or ceramic substrate.
Advantage of the present invention and good effect are: 1. can allow LCDs substrate surface obtain conforming cleannes, effects on surface is dirty effectively to be processed with oxide layer; 2. can greatly reduce the fraction defective of product, thereby control to greatest extent product, because reprocessing, produce extra cost.
Accompanying drawing explanation
Accompanying drawing described herein be used to provide to of the present invention enter lower understanding, form the application's a part, do not form limitation of the invention.
Fig. 1 is that one is utilized plasma cleaner washing lotion crystal display screen substrate process flow chart.
Wherein: 1,2,3,41,42 is process flow steps.
Specific embodiments
Below in conjunction with accompanying drawing, to further instruction of the present invention, the composition processing step in annex map might not meet ratio, but describes out flow process of the present invention in the mode of emphasizing.
Referring to Fig. 1, it is the flow chart of steps of manufacturing process of the present invention.First in step 1,2, manufacturing process personnel are encased in special aluminium dish liquid crystal display panel substrate, special aluminium dish is fixed on aluminium plate rail, between layers at intervals, then aluminium plate rail is transmitted by plasma cleaning board with the mode of traction of hand-held or go-cart.In step 3, manufacturing process personnel are that cleaning fluid crystal display screen substrate is selected after plasma cleaning board, manufacturing process personnel can set its fabrication process parameters, with manual mode, the aluminium plate rail that liquid crystal display panel substrate is housed are sent in selected plasma cleaning board.Fabrication process parameters comprises this quantity of wanting to carry out cell substrates, technological parameter or website etc.In step 4, after LCDs base-plate cleaning completes, manufacturing process personnel manually take out the aluminium frame that is loaded with liquid crystal display panel substrate, and deliver to next stop technologist and use, if exceeding 24 hours after LCDs base-plate cleaning does not use, should put in time nitrogen cabinet and preserve, to prevent that LCDs substrate surface from polluting and oxidation.
In the present invention; above-described specific embodiment; object of the present invention, technical scheme and effect are had been described in detail; should understand and be; the foregoing is only specific embodiments of the invention, the protection domain being not intended to limit the present invention, within the spirit and principles in the present invention all; any modification, replacement and the improvement etc. made, all should be included in protection scope of the present invention.
Claims (5)
1. one kind is utilized plasma cleaner washing lotion crystal display screen substrate process, it is characterized in that, it has comprised manufacturing process personnel liquid crystal display panel substrate is placed into special aluminium dish, the aluminium dish that liquid crystal display panel substrate is housed is put into plasma cleaning board, sets plasma cleaning board parameter and started power supply and clean, by cleaning complete substrate, take out stand-by or put into nitrogen cabinet and preserve several steps.
2. one is utilized plasma cleaner washing lotion crystal display screen substrate process according to claim 1, it is characterized in that, described manufacturing process personnel are placed into liquid crystal display panel substrate in special aluminium dish with manual mode orientation according to the rules.
3. one is utilized plasma cleaner washing lotion crystal display screen substrate process according to claim 1, it is characterized in that, described manufacturing process personnel are sent to plasma cleaning board place in modes such as hand-held or go-cart tractions by the aluminium dish that liquid crystal display panel substrate is housed.
4. one is utilized plasma cleaner washing lotion crystal display screen substrate process according to claim 1, it is characterized in that, described manufacturing process personnel arrange plasma cleaner parameter for different liquid crystal display panel substrates.
5. one is utilized plasma cleaner washing lotion crystal display screen substrate process according to claim 1, it is characterized in that, described liquid crystal display panel substrate can be aluminium base or ceramic substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410050016.3A CN103752562A (en) | 2014-02-13 | 2014-02-13 | Technology for utilizing plasma cleaning machine to clean liquid crystal display screen substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410050016.3A CN103752562A (en) | 2014-02-13 | 2014-02-13 | Technology for utilizing plasma cleaning machine to clean liquid crystal display screen substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103752562A true CN103752562A (en) | 2014-04-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410050016.3A Pending CN103752562A (en) | 2014-02-13 | 2014-02-13 | Technology for utilizing plasma cleaning machine to clean liquid crystal display screen substrate |
Country Status (1)
| Country | Link |
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| CN (1) | CN103752562A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104438228A (en) * | 2014-10-09 | 2015-03-25 | 昆山诃德新能源科技有限公司 | Process for cleaning substrate of high-power condensation solar energy photoelectric receiver |
| CN109366967A (en) * | 2018-11-13 | 2019-02-22 | 广州市安旭特电子有限公司 | A kind of method and segment encode liquid crystal device for reducing the fitting of waterproofing protection film and generating bubble |
| CN115446061A (en) * | 2022-09-05 | 2022-12-09 | 乐金显示光电科技(中国)有限公司 | OLED module processing method and device, electronic equipment and storage medium |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101903984A (en) * | 2007-12-21 | 2010-12-01 | 应用材料股份有限公司 | Passivation layer formation by plasma clean process to reduce native oxide growth |
| CN102468118A (en) * | 2010-11-12 | 2012-05-23 | 北大方正集团有限公司 | Jig and cleaning machine |
| CN102626702A (en) * | 2012-04-27 | 2012-08-08 | 成都聚合科技有限公司 | Process for cleaning high power spotlight photovoltaic conversion receiver substrate |
| US8337623B2 (en) * | 2006-02-15 | 2012-12-25 | Lam Research Corporation | Methods for plasma cleaning an internal peripheral region of a plasma processing chamber |
| JP2013135072A (en) * | 2011-12-26 | 2013-07-08 | Panasonic Corp | Plasma processing apparatus and plasma processing method |
-
2014
- 2014-02-13 CN CN201410050016.3A patent/CN103752562A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8337623B2 (en) * | 2006-02-15 | 2012-12-25 | Lam Research Corporation | Methods for plasma cleaning an internal peripheral region of a plasma processing chamber |
| CN101903984A (en) * | 2007-12-21 | 2010-12-01 | 应用材料股份有限公司 | Passivation layer formation by plasma clean process to reduce native oxide growth |
| CN102468118A (en) * | 2010-11-12 | 2012-05-23 | 北大方正集团有限公司 | Jig and cleaning machine |
| JP2013135072A (en) * | 2011-12-26 | 2013-07-08 | Panasonic Corp | Plasma processing apparatus and plasma processing method |
| CN102626702A (en) * | 2012-04-27 | 2012-08-08 | 成都聚合科技有限公司 | Process for cleaning high power spotlight photovoltaic conversion receiver substrate |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104438228A (en) * | 2014-10-09 | 2015-03-25 | 昆山诃德新能源科技有限公司 | Process for cleaning substrate of high-power condensation solar energy photoelectric receiver |
| CN109366967A (en) * | 2018-11-13 | 2019-02-22 | 广州市安旭特电子有限公司 | A kind of method and segment encode liquid crystal device for reducing the fitting of waterproofing protection film and generating bubble |
| CN109366967B (en) * | 2018-11-13 | 2021-07-23 | 广州市安旭特电子有限公司 | Method for reducing bubbles generated by attaching waterproof protective film and segment code liquid crystal device |
| CN115446061A (en) * | 2022-09-05 | 2022-12-09 | 乐金显示光电科技(中国)有限公司 | OLED module processing method and device, electronic equipment and storage medium |
| CN115446061B (en) * | 2022-09-05 | 2023-11-24 | 乐金显示光电科技(中国)有限公司 | OLED module processing method and device, electronic equipment and storage medium |
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Application publication date: 20140430 |