CN103743338A - Laser tracking measurement system having spherical revolution bounce error compensation function and compensation method thereof - Google Patents
Laser tracking measurement system having spherical revolution bounce error compensation function and compensation method thereof Download PDFInfo
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- CN103743338A CN103743338A CN201310718319.3A CN201310718319A CN103743338A CN 103743338 A CN103743338 A CN 103743338A CN 201310718319 A CN201310718319 A CN 201310718319A CN 103743338 A CN103743338 A CN 103743338A
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Abstract
The invention discloses a laser tracking measurement system having the spherical revolution bounce error compensation function and a compensation method thereof. The laser tracking measurement system comprises a horizontal rotary table; a support is installed on the horizontal rotary table; and a spherical revolution mechanism is installed at the support. The spherical revolution mechanism includes a standard ball, a support plate with an opening at the center, a first displacement sensor, a second displacement sensor, and a laser head; the standard ball is arranged at the center of the support; the central opening of the support plate passes through the standard ball and then is installed at the support; the first displacement sensor and the second displacement sensor are arranged at a reversed extension line of a laser beam emitted by the laser head and are respectively arranged at the two sides of the standard ball. The standard ball is not contacted with the support plate because of the location at the center of the spherical revolution mechanism and the distance between the sphere center and the target point is obtained precisely based on the measurement value and the calibration value, so that the spherical revolution bounce error of the spherical laser tracking mechanism is compensated and thus the good measurement precision can be realized under the circumstances that the revolution bounce of the laser tracking mechanism is high.
Description
Technical field
The present invention relates to laser tracking measurement field, relate in particular to a kind of laser tracking measurement system with sphere revolution runout error compensate function.
Background technology
In the manufacturing process of the Large-Scale Equipments such as aircraft, the hydraulic turbine, wind turbine and solar panel, the accessory size in need to producing it and the pose in assembling process etc. are accurately measured.
In the large-scale metrology equipment using at present, laser tracking measurement equipment is due to its high precision and the advantage such as measurement range is wide, be widely used in field of industrial production, laser tracking measurement mainly contains spherical coordinates mensuration and polygon Furthest Neighbor, and wherein in spherical coordinates mensuration, the angular error in measuring process can be along with the proportional amplification of the increase of measuring distance; In polygon distance measurement method, use the optimized algorithms such as least square method, target is optimized to the distance value of many transmitters, obtain the coordinate of impact point, do not have the introducing of angular error.But in polygon method measuring process,, in the situation of interferometry determine precision, the sphere revolution runout error that changes the follower of laser beam sensing can be introduced larger error in last range observation.Sphere rotating accuracy requirement to laser tracking measurement mechanism in traditional laser tracking measurement equipment is high, and processing and manufacturing difficulty is large, cost is high.
Summary of the invention
For above-mentioned defect or deficiency, the object of the present invention is to provide the laser tracking measurement system with sphere revolution runout error compensate function, can, in the case of reducing the processing and manufacturing difficulty of laser tracking mechanism, make laser tracking measurement system keep high measuring accuracy.
For reaching above object, the technical scheme of this reality invention is:
A kind of laser tracking measurement system with sphere revolution runout error compensate function, comprise: be positioned over the horizontal revolving stage on desktop, support is installed on horizontal revolving stage, sphere slew gear is installed on support, described sphere slew gear comprises standard ball, the back up pad of central opening, the first displacement transducer, second displacement sensor, and laser head, wherein, standard ball is arranged at the center of support, the central opening of back up pad is installed on support through after standard ball, the first displacement transducer, the second sensor, and laser head is installed in back up pad, wherein, the first displacement transducer and the second sensor are positioned on the reverse extending line of laser beam that laser head is penetrated, and be positioned at the both sides of standard ball.
On described support, be connected with the motor for driving support to rotate.
Comprise mark the first accurate ball fixed mount, the first fixed mount is arranged on desktop, and standard ball is fixedly installed on the first standard ball fixed mount.
Also comprise frame and intersect and be installed on the first roller axle collar and the second roller axle collar in frame; Support is installed in frame, the interior ring infall of the first roller axle collar and the second roller axle collar is provided with the push rod for promoting back up pad rotation, and the first roller axle collar is connected with hollow torque motor respectively with the second roller axle collar, by hollow torque motor, rotate and drive the first roller axle collar and the second roller axle collar to rotate, and by push rod, adjust the position of sphere slew gear.
Described support comprises the second accurate ball fixed mount being arranged on desktop, on the second accurate ball fixed mount, is arranged with bracing frame, and bracing frame is installed in frame, and back up pad is installed on bracing frame upper end.
Described hollow torque motor is connected with the outer shroud of the first roller axle collar and the second roller axle collar by fixture.
Described push rod is connected with the second roller axle collar with the first roller axle collar by bearing, and the centre of gyration that is positioned at of the axis of push rod.
An error compensating method with the laser tracking measurement system of sphere revolution runout error compensate function, comprises the following steps:
1) obtain scalar quantity: the distance B between two displacement transducers, the radius R of standard ball, laser emitting are put the distance A 1 of second displacement sensor;
2) obtain measuring amount: laser emitting is put the distance A 2 of impact point, and the first displacement transducer and the second sensor divide the distance B and the C that are clipped to standard ball sphere;
3) according to above-mentioned scalar quantity and measuring amount, ask impact point to arrive the distance of the standard ball centre of sphere, by impact point, to the compensated distance of the standard ball centre of sphere, fall laser head with respect to the beating of the centre of gyration, concrete computing formula is as follows:
Obtain impact point as follows to the computing formula of the distance L of the standard ball centre of sphere:
Wherein, A is the distance of second displacement sensor to target ball;
X is the half of the standard ball sphere chord length that intercepts of the first displacement transducer and second displacement sensor;
X1 is that the standard ball centre of sphere does the orthocenter of the first displacement transducer and second displacement sensor string to the distance of target ball;
The distance of the X2 standard ball sphere string that to be the standard ball centre of sphere intercept to the first displacement transducer and second displacement sensor.
Compared with the prior art, beneficial effect of the present invention is:
In the laser tracking measurement system with sphere revolution runout error compensate function provided by the invention, by standard ball, be arranged on mechanism's sphere centre of gyration, two displacement transducers are arranged on the reverse extending line of outgoing laser beam, carry out the measurement that sphere revolution is transferred, because standard ball is arranged at the center of sphere slew gear, and do not contact with back up pad, make displacement transducer in mechanism kinematic process not move interference with standard ball, reduced the measuring error of laser tracking mechanism, in addition, because this apparatus structure is simple, and then can accurately obtain by measuring amount and scalar quantity the distance of the centre of sphere and impact point, and then the sphere revolution runout error of sphere laser tracking mechanism is compensated, thereby at laser tracking mechanism, turn round the large situation of beating and be issued to the measuring accuracy arriving very much, processing and manufacturing difficulty and the cost of laser tracking mechanism have been reduced.
The error compensating method of the laser tracking measurement system with sphere revolution runout error compensate function provided by the invention, by acquisition, there is the laser tracking measurement system of sphere revolution runout error compensate function, scalar quantity in acquisition system and measuring amount, and calculate in conjunction with geometric relationship, the final distance of impact point to the standard ball centre of sphere that obtain, compensation is fallen laser head with respect to the beating of the centre of gyration, and has improved the measuring accuracy of system.
Accompanying drawing explanation
Fig. 1 is the structural representation that has the series laser tracing measurement system of sphere turn error runout compensation function in the present invention;
Fig. 2 is the structural representation that has the laser tracking measurement system in parallel of sphere turn error runout compensation function in the present invention;
Fig. 3 is sphere revolution runout error compensation method geometric representation;
Fig. 4 is the structural scheme of mechanism that has the laser tracking measurement system support in parallel of sphere turn error runout compensation function in the present invention.
In figure, 1 is standard ball, and 1-1 is the first accurate ball fixed mount, 2 is the first displacement transducer, and 3 is second displacement sensor, and 4 is horizontal revolving stage, 5 is motor, and 6 is laser head, and 7 is target mirror, 8 is laser emitting point, 9 is support, and 9-1 is the second accurate ball fixed mount, and 9-2 is bracing frame, 10 is laser beam, 11 is fagging, and 12 is frame, and 13 is the first roller axle collar, 14 is the second roller axle collar, 15 is push rod, and 16 is the first hollow torque motor, and 17 is the second hollow torque motor, 18 is the first fixture, and 19 is the second fixture.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
As shown in Figure 1, the invention provides a kind of series laser tracing measurement system with sphere revolution runout error compensate function, comprise: be positioned over the horizontal revolving stage 4 on desktop, support 9 is installed on horizontal revolving stage 4, sphere slew gear is installed on support 9, described sphere slew gear comprises standard ball 1, the back up pad 11 of central opening, the first displacement transducer 2, the second sensor 3, and laser head 6, wherein, standard ball 1 is arranged at the center of support 9, the central opening of back up pad 11 is installed on support 9 through after standard ball 1, the first displacement transducer 2, the second sensor 3, and laser head 6 is installed in back up pad 11, wherein, the first displacement transducer 2 and the second sensor 3 are positioned on the reverse extending line of laser head 6 outgoing laser beams 9, and be positioned at the both sides of standard ball 1.On described support 9, be connected with the motor 5 for driving support 9 to rotate, described motor 5 is for overlooking motor.The present invention comprises the first accurate ball fixed mount 1-1, and the first fixed mount 1-1 is arranged on desktop, and standard ball 1 is fixedly installed on the first standard ball fixed mount 1-1.
In this series laser tracking measurement mechanism, standard ball 1 is arranged on to sphere slew gear center, the first displacement transducer 2, second displacement sensor 3 is arranged on the reverse extending line of outgoing laser beam 10.Horizontal revolving stage 4 and motor 5 lead agency rotations guarantee laser beam sensing target mirror 7, wherein in laser head 6, carry out interferometry and tracking signal collection.Distance between the first displacement transducer 2, the second sensor 3 and standard ball 1 sphere should be within the finding range of displacement transducer, and in mechanism kinematic process, displacement transducer should not move interference with standard ball 1.
As shown in Figure 2, the invention provides a kind of laser tracking measurement system in parallel with sphere revolution runout error compensate function, on series laser tracing measurement system basis, also comprise frame 12 and intersect being installed on the first roller axle collar 13 and the second roller axle collar 14 in frame 12; Support 9 is installed in frame 12, support 9 is gimbal, the interior ring infall of the first roller axle collar 13 and the second roller axle collar 14 is provided with the push rod 15 rotating for promoting back up pad 11, the first roller axle collar 13 is connected with the first empty torque motor 16, the empty torque motor 17 of the second roller axle collar 14 second connects, by first and second sky torque motor 16,17, rotate and drive the first roller axle collar 13 and the second roller axle collar 14 to rotate, and by push rod 15, adjust the position of sphere slew gear.
The first hollow torque motor 16 is connected with the outer shroud of the first roller axle collar 13 by the first fixture 18, and the second hollow torque motor 17 is connected with the outer shroud of the second roller axle collar 14 by the second fixture 19.Described support 9 is gimbal.Described push rod 15 is connected with the second roller axle collar 14 with the first roller axle collar 13 by bearing, and the axis of push rod 15 is by the centre of gyration of mechanism.Be arranged in frame 12 in first and second sky torque motor 16,17 by first and second fixture 18,19, drive the rotation of decussation roller axle collars; Sphere slew gear back up pad 11 installation position displacement sensors and tracking measurement light path, realize the backoff algorithm of carrying in invention.In this mechanism, require the axis of push rod 4 by the centre of gyration of mechanism, so require to be installed to by bearing the push rod intersecting on the ball axle collar, have certain radial beat eccentricity, to guarantee that axis passes through the centre of gyration; Standard ball 1 in mechanism is arranged on the centre of gyration and maintains static, because standard ball 1 is by fixed they sup-port, and be not subject to External force interference, so supporting the support bar of gimbal 9 need to be hollow, as shown in Figure 4, described support 9 comprises the second accurate ball fixed mount 9-1 being arranged on desktop, on the second accurate ball fixed mount 9-1, be arranged with bracing frame 9-2, bracing frame 9-2 is installed in frame 12, back up pad 11 is installed on bracing frame 9-2 upper end, between the second accurate ball fixed mount 9-1 and bracing frame 9-2, has space.
Shown in Figure 3, the present invention also provides a kind of error compensating method of the laser tracking measurement system with sphere revolution runout error compensate function, it is characterized in that, comprises the following steps:
1) obtain scalar quantity: the distance B between two displacement transducers, the radius R of standard ball, laser emitting are put the distance A 1 of second displacement sensor 3;
2) obtain measuring amount: laser emitting point 8 arrives the distance A 2 of impact point, and 3 points of the first displacement transducer 2 and the second sensors are clipped to distance B and the C of standard ball 1 sphere;
3) according to above-mentioned scalar quantity and measuring amount, ask impact point to arrive the distance of standard ball 1 centre of sphere, by impact point, to the compensated distance of standard ball 1 centre of sphere, fall laser head with respect to the beating of the centre of gyration, concrete computing formula is as follows:
Obtain impact point as follows to the computing formula of the distance L of standard ball 1 centre of sphere:
Wherein, A is the distance of second displacement sensor 3 to target ball 7;
The half of the X standard ball 1 sphere chord length that to be the first displacement transducer 2 intercept with second displacement sensor 3;
X1 is that standard ball 1 centre of sphere does the orthocenter of the first displacement transducer 2 and second displacement sensor 3 strings to the distance of target ball 7;
The distance of the X2 standard ball 1 sphere string that to be standard ball 1 centre of sphere intercept to the first displacement transducer 2 and second displacement sensor 3.
The present invention turns in order to solve requirement in conventional laser tracing measurement system the difficult point that precision is high, manufacturing cost is high, this system can compensate the sphere revolution runout error of laser tracking mechanism, thereby at laser tracking mechanism, turn round the large situation of beating and be issued to the measuring accuracy arriving very much, reduced processing and manufacturing difficulty and the cost of laser tracking mechanism.
Claims (8)
1. one kind has the laser tracking measurement system of sphere revolution runout error compensate function, it is characterized in that, comprise: be positioned over the horizontal revolving stage (4) on desktop, support (9) is installed on horizontal revolving stage (4), support is provided with sphere slew gear on (9), described sphere slew gear comprises standard ball (1), the back up pad (11) of central opening, the first displacement transducer (2), second displacement sensor (3), and laser head (6), wherein, standard ball (1) is arranged at the center of support (9), the central opening of back up pad (11) is installed on support (9) through after standard ball (1), the first displacement transducer (2), the second sensor (3), and laser head (6) is installed in back up pad (11), wherein, the first displacement transducer (2) and the second sensor (3) be positioned at laser head (6) on the reverse extending line of the laser beam of penetrating (10), and be positioned at the both sides of standard ball (1).
2. the laser tracking measurement system with sphere revolution runout error compensate function according to claim 1, is characterized in that, is connected with the motor (5) for driving support (9) to rotate on described support (9).
3. the laser tracking measurement system with sphere revolution runout error compensate function according to claim 1 and 2, it is characterized in that, comprise the first accurate ball fixed mount (1-1), the first fixed mount (1-1) is arranged on desktop, and standard ball (1) is fixedly installed on the first standard ball fixed mount (1-1).
4. the laser tracking measurement system with sphere revolution runout error compensate function according to claim 1, it is characterized in that, also comprise frame (12) and intersect being installed on the first roller axle collar (13) and the second roller axle collar (14) in frame (12); Support (9) is installed in frame (12), the interior ring infall of the first roller axle collar (13) and the second roller axle collar (14) is provided with the push rod (15) for promoting back up pad (11) rotation, and the first roller axle collar (13) is connected with hollow torque motor respectively with the second roller axle collar (14), by hollow torque motor, rotate and drive the first roller axle collar (13) and the second roller axle collar (14) to rotate, and by push rod (15), adjust the position of sphere slew gear.
5. the laser tracking measurement system with sphere revolution runout error compensate function according to claim 4, it is characterized in that, described support (9) comprises the second accurate ball fixed mount (9-1) being arranged on desktop, on the second accurate ball fixed mount (9-1), be arranged with bracing frame (9-2), it is upper that bracing frame (9-2) is installed on frame (12), and back up pad (11) is installed on bracing frame (9-2) upper end.
6. the laser tracking measurement system with sphere revolution runout error compensate function according to claim 4, is characterized in that, described hollow torque motor is connected with the outer shroud of the first roller axle collar (13) and the second roller axle collar (14) by fixture.
7. the laser tracking measurement system with sphere revolution runout error compensate function according to claim 4, described push rod (15) is connected with the second roller axle collar (14) with the first roller axle collar (13) by bearing, and the centre of gyration that is positioned at of the axis of push rod (15).
8. the error compensating method based on the laser tracking measurement system with sphere revolution runout error compensate function claimed in claim 1, is characterized in that, comprises the following steps:
1) obtain scalar quantity: the distance B between two displacement transducers, the radius R of standard ball, laser emitting point (8) arrive the distance A 1 of second displacement sensor (3);
2) obtain measuring amount: laser emitting point (8) is to the distance A 2 of impact point, and the first displacement transducer (2) and the second sensor (3) divide the distance B and the C that are clipped to standard ball (1) sphere;
3) according to above-mentioned scalar quantity and measuring amount, ask impact point to arrive the distance of standard ball (1) centre of sphere, by impact point, to the compensated distance of standard ball (1) centre of sphere, fall laser head with respect to the beating of the centre of gyration, concrete computing formula is as follows:
Obtain impact point as follows to the computing formula of the distance L of standard ball (1) centre of sphere:
Wherein, A is the distance of second displacement sensor (3) to target ball (7);
The half of X standard ball (1) the sphere chord length that to be the first displacement transducer (2) intercept with second displacement sensor (3);
X1 is that standard ball (1) centre of sphere does the orthocenter of the first displacement transducer (2) and second displacement sensor (3) string to the distance of target ball (7);
The distance of X2 standard ball (1) the sphere string that to be standard ball (1) centre of sphere intercept to the first displacement transducer (2) and second displacement sensor (3).
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| CN105806220A (en) * | 2016-04-23 | 2016-07-27 | 北京工业大学 | Structural error compensation method for laser tracking measuring system with master ball as reflection device |
| CN106094889A (en) * | 2016-07-27 | 2016-11-09 | 中国电子科技集团公司第三十八研究所 | A kind of laser-bounce target ball actively self-adaptive regulating |
| CN106352839A (en) * | 2016-10-14 | 2017-01-25 | 哈尔滨工业大学 | Three-dimensional attitude measurement method for air floating ball bearing |
| CN106705821A (en) * | 2015-07-31 | 2017-05-24 | 北京航天计量测试技术研究所 | Rotary axis system orthogonality measuring method and device |
| CN107065123A (en) * | 2017-06-09 | 2017-08-18 | 中国科学院长春光学精密机械与物理研究所 | The side support pad fine adjustment positioner of large caliber reflecting mirror |
| CN110388862A (en) * | 2019-07-22 | 2019-10-29 | 上海理工大学 | A kind of method of simplicity positioning machine tool turntable rotation axis |
| CN111151890A (en) * | 2020-01-17 | 2020-05-15 | 广东省特种设备检测研究院珠海检测院 | Container laser marking device and system |
| CN112276942A (en) * | 2020-09-30 | 2021-01-29 | 成都卡诺普自动化控制技术有限公司 | Consistency compensation method for robot arm |
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| CN106352839B (en) * | 2016-10-14 | 2019-01-18 | 哈尔滨工业大学 | A kind of air-floating ball bearing 3 d pose measurement method |
| CN107065123B (en) * | 2017-06-09 | 2019-04-16 | 中国科学院长春光学精密机械与物理研究所 | The side support pad fine adjustment positioning device of large caliber reflecting mirror |
| CN107065123A (en) * | 2017-06-09 | 2017-08-18 | 中国科学院长春光学精密机械与物理研究所 | The side support pad fine adjustment positioner of large caliber reflecting mirror |
| CN110388862A (en) * | 2019-07-22 | 2019-10-29 | 上海理工大学 | A kind of method of simplicity positioning machine tool turntable rotation axis |
| CN111151890A (en) * | 2020-01-17 | 2020-05-15 | 广东省特种设备检测研究院珠海检测院 | Container laser marking device and system |
| CN112276942A (en) * | 2020-09-30 | 2021-01-29 | 成都卡诺普自动化控制技术有限公司 | Consistency compensation method for robot arm |
| CN112276942B (en) * | 2020-09-30 | 2021-10-29 | 成都卡诺普机器人技术股份有限公司 | Consistency compensation method for robot arm |
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