CN103741099A - Process for making PCB (Printed Circuit Board) micro-fine tool by nitrogen chromic oxide and diamond-like carbon film composite coating - Google Patents
Process for making PCB (Printed Circuit Board) micro-fine tool by nitrogen chromic oxide and diamond-like carbon film composite coating Download PDFInfo
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- CN103741099A CN103741099A CN201310736145.3A CN201310736145A CN103741099A CN 103741099 A CN103741099 A CN 103741099A CN 201310736145 A CN201310736145 A CN 201310736145A CN 103741099 A CN103741099 A CN 103741099A
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Abstract
The invention provides a process for making PCB (Printed Circuit Board) micro-fine tool by adopting CrO2N+DLC (diamond-like carbon), namely nitrogen chromic oxide and diamond-like carbon film composite coating. The process is completed through steps of cleaning and drying, polishing and grinding, pretreating, depositing to obtain the nitrogen chromic oxide and diamond-like carbon film dual-layer composite coating by using high-vacuum multi-arc target high-ionization magnetic filtration plasma DLC deposition equipment. The PCB micro-fine tool using the CrO2N+DLC composite coating keeps the flexibility of a hard alloy matrix, and has high hardness, low friction coefficient and better lubricating performance and heat radiation performance; the problems of tool breaking, tool adhering, plate clamping, tearing, galling and the like which are usually caused by a PCB micro drill or mill are solved.
Description
Technical field
The present invention relates to PCB processing cutting tool field, that concrete is a kind of CrO that can improve PCB cutter life and working efficiency
2n+DLC is: the PCB milling cutter of nitrogen chromic oxide+diamond-film-like compound coating and micro-brill (drill point).
Background technology
The PCB development work of China starts from 1956, and 1963-1978 progressively expands and forms PCB industry.Latter more than 20 year of reform and opening-up, due to Importing Foreign Advanced Technology and equipment, single sided board, dual platen and multi-ply wood all obtain fast development, and domestic PC B industry is ascending progressively to grow up.China, because concentrated and labor force's cost of land of downstream industry is relatively low, becomes the most powerful region of growth momentum.2002, become the third-largest PCB output state.2003, the PCB output value and import-export volume, all over 6,000,000,000 dollars, surmounted the U.S. for the first time, became second-biggest-in-the-world PCB output state.Within 2006, China has replaced Japan, becomes PCB production base and the most active country of technical development of global output value maximum.The main products of PCB industry turns to multi-ply wood by single sided board, dual platen, and from 4～6 layers to 6～8 layers of above lifting.Along with the rapid growth of multi-ply wood, HDI plate, flexible board, the PCB industrial structure of China is progressively being optimized and is improving.Long service life, the PCB cutter of excellent cutting performance are just more urgently expected in the optimization of the raising of output and product structure and quality and material.
Current most PCB manufacturer is used numerical control drilling machine, numerical control drilling machine is used be high-speed tool steel determine handle drill bit.Plate for drilling printed drill bit generally all adopts Wimet, because the multiple copper foil plate of epoxy glass fabric is fast especially to the wearing and tearing of cutter.And Wimet is wear-resisting compared with high-speed tool steel drill bit, there is some strength, be suitable for high speed cutting.But wear-resisting still poor for pcb board material, quick abrasion, life-span is short, in order to improve the performance of carbide drill, milling cutter, some employings deposit titanium carbide (TIC) or titanium nitride (TIN) on carbonization matrix, although these single-layer coating comparison Wimet finishing tool results of use increase, still can not solve sticky cutter, clamping plate, tear, import and export the problems such as (feed mouth and go out aperture) plucking.
Adopt CVD diamond film coating, there is higher hardness, also can overcome above-mentioned drawback, but because diamond film coating must be processed through the de-cobalt of peracid, alkali, and diamond film coating chamber temp 700-900 °, because PCB milling cutter and micro-drill diameter only have 0.1-3.3mm, although cause fine cutter after coating to improve the hardness and wear resistance of drill bit, but poor toughness, is highly brittle, easy especially breaking.
Summary of the invention
In order to solve above technical problem, the object of this invention is to provide a kind of CrO
2the manufacture craft of the micro-brill of N+DLC compound coating PCB or milling cutter.Because DLC coating process working temperature only has 80-200 °, and coating CrO
2in N+DLC technique, do not need to carry out acid, the de-cobalt processing of alkali, can not damage Co and the W of matrix, can keep the original performance of Wimet.Use: chromium nitride adds the PCB milling cutter of diamond-film-like compound coating and micro-brill (drill point) and not only kept the toughness of hard alloy substrate but also brought into play chromium nitride to add high rigidity, low-friction coefficient and good lubricity and the heat dispersion of diamond-film-like compound coating, the solution that compound coating PCB cutter of the present invention is satisfactory breaking, sticky cutter, clamping plate, tear, import and export the problems such as plucking.Improved significantly work-ing life and processing quality, reduced production costs, enhanced productivity.
Above-mentioned purpose is achieved through the following technical solutions:
Based on object of the present invention, the present invention uses a kind of name be called the coating apparatus of " the high ionization filtered cathode arc plasma of high vacuum multiple arc target DLC depositing device " and invent new processing method.
The described high ionization filtered cathode arc plasma of high vacuum multiple arc target DLC depositing device is the new principle coating apparatus that the inventor develops.It comprises coating chamber, planetary rotation work rest, magnetic filtered arc source, molecular pump, vacuum system, described coating chamber is vertical type cylinder shape, whole Double-layer water cold type structure, front portion, described coating chamber is provided with feeding gate, the top of described coating chamber is provided with tubular heater, thermopair interface, the bottom of described coating chamber is provided with inlet mouth and planetary rotation work rest, described planetary rotation work rest bottom is connected with drive system, the sidewall of described coating chamber is provided with magnetic filtered arc source, and the rear portion of described coating chamber is provided with molecular pump and vacuum system.
Described magnetic filtered arc source by arc electrode, cathode anchor, target, push away arc solenoid, focus on solenoid, elbow forms, described target is arranged on cathode anchor, the external striking power supply of described arc electrode and described cathode anchor, described in push away arc solenoid and described focusing solenoid and be arranged on the periphery that described arc electrode and cathode anchor produce electric arc place.
Further, described elbow is that 2 ° of crooked radians of tapering are the tapering elbow of 100 °, and the outside surface of described tapering elbow is provided with a plurality of arc of curvature solenoids, forms the bent magnetic field that intensity is 0～20 mT in tapering elbow.
This equipment makes full use of between trigger electrode in arc source and graphite cathode and produces vacuum arc discharge, excite the carbon plasma of high ionization level, adopt magnetic to filter coil filtering and fall macrobead and the neutral atom that arc source produces, what can make to arrive substrate is all almost carbon ion, can prepare without hydrogen film by higher sedimentation rate, adopt this technology can obtain sp3 linkage content up to 70%, hardness is up to the hydrogen-free carbon films of～4500HV0.025, (CVD) is close for its character and epitaxial diamond films.
The present invention utilizes the high ionization filtered cathode arc plasma of homemade high vacuum multiple arc target DLC depositing device, takes following processing method:
The first step: fine milling cutter (micro-brill) is anti-to fracture: milling cutter is inserted in high-density sponge plate, prevent that trickle cutting edge from fractureing in operation;
Second step: cleaning by degreasing: the sponge plate that sticks with milling cutter is placed in to Ultrasonic Cleaners and uses handkerchief Ka Lai Tianjin grease-removing agent FC-4360 to carry out cleaning by degreasing;
The 3rd step: physics mode pre-treatment: milling cutter is placed in to blaster, sprays milling cutter cutting blade, etching workpiece surface with W5 diadust;
The 4th step: use Ultrasonic Cleaners, add acetone and dehydrated alcohol according to the formulated scavenging solution of the weight ratio of 3:7 cleaning-drying again;
The 5th step: workpiece packs " DLC depositing device " chamber milling cutter unit clamp into;
Described unit clamp: be to be fixed on the intubate that endoporus on star rotary hanging rack equals handle of a knife diameter;
The 6th step: pass into Ar to about 1Pa, workpiece is added to negative bias-150V～-600V, temperature is controlled at 85～200 ℃, flame current is 50A～70A, by Ar ionization and to workpiece generation ion bombardment effects, remove the effect of workpiece surface micro inclusion and etching activating surface, improve deposition bonding force, time 60min;
The 7th step: the ratio of 2:2:1 passes into N and C, H to 2～5Pa by volume, to workpiece coat side forming core, is prime coat and the working lining braided framework of the required densification of coating, and nucleated time is 60min;
The 8th step: the ratio of 2:2:3 passes into N and O by volume
2, open 2 arc targets, negative electrode adopts 99.9% Metal Cr target, sedimenting chromium chloride transition layer NO
2cr, arc source electric current 35A, time: 4h, coating NO
2 cr thickness 15～20 μ m;
The 9th step: the ratio of 2:2:1 passes into N and Ar, CH by volume
4, open 8 magnetic filtered arc source negative electrodes and adopt 99.9% graphite target, deposition DLC coating, arc source electric current 30A, time: 4h, coating DLC thickness 10～15 μ m.
Positively effect of the present invention is: CrO of the present invention
2n+DLC compound coating PCB bores, milling cutter main performance index: DLC film hardness value is about HV4500; Coating is fine and close DLC film, and its structure is typical non-crystal structure; Film surface is smooth, zero defect; DLC coating frictional coefficient is about 0.13; Coating adhesion reaches 37N; Coat-thickness all reaches 10 microns.Use CrO
2n+DLC compound coating, not only keep the toughness of hard alloy substrate but also brought into play high rigidity, low-friction coefficient and good lubricity, corrosion resistance nature and the heat dispersion of compound coating, solve breaking, sticky cutter, clamping plate, torn, imported and exported the problems such as plucking, improved significantly work-ing life and processing quality.
Accompanying drawing explanation
Fig. 1 is the vertical view of the high ionization filtered cathode arc plasma of high vacuum multiple arc target DLC depositing device.
Fig. 2 is the left view of the high ionization filtered cathode arc plasma of high vacuum multiple arc target DLC depositing device.
Fig. 3 is the structural representation in magnetic filtered arc source.
Fig. 4 is process flow sheet of the present invention.
In accompanying drawing: 1-magnetic filtered arc source, 2-coating chamber, 3-vacuum system, 4-frame, 5-molecular pump, 6-planetary rotation work rest, 7-feeding gate, 8-thermopair interface, 9-tubular heater, 10-drive system, 11-inlet mouth, 12-cathode anchor, 13-arc electrode, 14-push away arc solenoid, 15-target, 16-elbow, 17-arc of curvature solenoid, 18-focusing solenoid.
Embodiment
As shown in Figure 1 and Figure 2, a kind of coating apparatus of high adhesive force high rigidity low-friction coefficient diamond-film-like, comprises coating chamber 2, planetary rotation work rest 6, magnetic filtered arc source 1, molecular pump 5, frame 4.
The bottom of coating chamber 2 is provided with inlet mouth 11 and planetary rotation work rest 6, described planetary rotation work rest 6 bottoms are connected with drive system 10, described planetary rotation work rest 6 passes to planetary gears (planetary gears is comprised of sun wheel, sun and planet gear and internal wheel) by direct-current machine by rotary power, drive the work hanger being connected with sun and planet gear to do rotation, drive again the big disk being connected with internal wheel to revolve round the sun simultaneously, thereby realize workpiece " rotation " and " revolution " in deposition process and guarantee that workpiece is comprehensive, uniformly DLC films deposited layer.Planetary rotation work rest 6 aims in enormous quantities, industrialization Production design, and station is many, and substrate load scope is large, and speed of rotation is that 0～20RPM is adjustable, loading capacity: with 130 calculating of φ, can fill 2000/stove.
The sidewall of coating chamber 2 is provided with a plurality of magnetic filtered arc source 1, as shown in Figure 3, described magnetic filtered arc source 1 by arc electrode 13, cathode anchor 12, target 15, push away arc solenoid 14, focus on solenoid 18, elbow 16 forms.Described target 15 is arranged on cathode anchor 12, the external striking power supply of described arc electrode 13 and described cathode anchor 12, this striking power supply has can be identified the burning of electric arc or extinguish status bit, send as required striking pulse, restarting automatically after the arc automatic starting while starting and blow-out.Described arc solenoid 14 and the described focusing solenoid 18 of pushing away is arranged on the periphery that described arc electrode 13 and cathode anchor 12 produce electric arc places.Push away the surface that is transitioned into rapidly negative electrode after arc solenoid 14 can make electric arc ignite, also can prevent the electric arc backward water-cooled cathode support 12 roots burnings of igniting.The impellent that focuses on solenoid 18 generations is pushed electric arc to the place ahead, suitably regulate the coil current that pushes away arc solenoid 14 and focus on solenoid 18, all right control cathode spot is in the scope of cathode surface motion, make negative electrode carry out even etching, obtain the cold plasma electric arc of a stable burning.Two coils all can produce the electromagnetic field of 0～40 mT.
As shown in Figure 3, described elbow 16 is that 2 ° of crooked radians of tapering are the tapering elbow 16 of 100 °, described tapering elbow 16, the outside surface of described tapering elbow 16 is provided with a plurality of arc of curvature solenoids 17, the bent magnetic field that is 0～20 mT in the interior formation intensity of tapering elbow 16, plays the effect that crooked electric arc filters the macroscopic particle groups such as neutral particle.
Adopt homemade " the high ionization filtered cathode arc plasma of high vacuum multiple arc target DLC depositing device ", the PCB Φ 0.55mm milling cutter (hereinafter to be referred as " milling cutter ") of Taiwan company consigned processing of take is example, specification: diamond grooved (Diamond cut) 0.55～2.70; Diameter at edge part Φ 0.55mm; Flute length (L) (Flute length) 2.7mm; Overall length 38.1mm.CrO
2the preparation technology of N+DLC compound coating is as follows:
1, fine milling cutter is anti-fracture: for preventing that the cutting edge that Φ 0.55mm is trickle from rupturing in operation, must by milling cutter inserting thickness, be in 20-25mm high-density sponge plate.
2, cleaning by degreasing: the sponge plate that sticks with milling cutter is placed in to Ultrasonic Cleaners and uses handkerchief Ka Lai Tianjin grease-removing agent FC-4360 to carry out cleaning by degreasing;
3, physics mode pre-treatment: milling cutter is placed in to blaster, sprays milling cutter cutting blade, etching workpiece surface with W5 diadust;
4, use Ultrasonic Cleaners cleaning-drying again, scavenging solution is: acetone+dehydrated alcohol (3:7 proportioning);
5, workpiece packs " DLC depositing device " chamber milling cutter unit clamp into; The endoporus that unit clamp system is fixed on star-like rotary hanging rack equals in the intubate of handle of a knife diameter;
6, pass into Ar to about 1Pa, workpiece is added to negative bias-150V～-600V, temperature is controlled at 85～200 ℃, flame current is 50A～70A, by Ar ionization and to workpiece generation ion bombardment effects, remove the effect of workpiece surface micro inclusion and etching activating surface, improve deposition bonding force, time 60min;
7, the ratio of 2:2:1 passes into N and C, H to 2～5Pa by volume, to workpiece coat side forming core, is prime coat and the working lining braided framework of the required densification of coating, and nucleated time is 60min;
8, the ratio of 2:2:3 passes into N and O by volume
2, open 2 arc targets, negative electrode adopts 99.9% Metal Cr target, deposition nitrogen chromic oxide transition layer NO2Cr, arc source electric current 30A, time: 4h, coating NCr thickness 15～20 μ m;
9, the ratio of 2:2:1 passes into N and Ar, CH by volume
4, open 8 magnetic filtered arc sources, negative electrode adopts 99.9% graphite target, deposition DLC coating, arc source electric current 25A, time: 4h, coating DLC thickness 10～15 μ m;
10, cleaning, detection, mark, packing.
After testing, CrO of the present invention
2n+DLC compound coating PCB bores, milling cutter main performance index is as follows: DLC film hardness value is about HV4500; Coating is fine and close DLC film, and its structure is typical non-crystal structure; Film surface is smooth, zero defect; DLC coating frictional coefficient is about 0.13; Coating adhesion reaches 37N; Coat-thickness all reaches 10 microns.Use CrO
2n+DLC is: chromium nitride adds PCB milling cutter and micro-brill of diamond-film-like compound coating, not only kept the toughness of hard alloy substrate but also brought into play chromium nitride to add high rigidity, low-friction coefficient and good lubricity and the heat dispersion of diamond-film-like compound coating, the solution that compound coating PCB cutter of the present invention is satisfactory breaking, sticky cutter, clamping plate, tear, import and export the problems such as plucking.Improved significantly work-ing life and processing quality, reduced production costs, enhanced productivity.
Claims (1)
1. a manufacture craft for nitrogen chromic oxide and the fine cutter of diamond-film-like compound coating PCB, is characterized in that its processing step is:
The first step: anti-fractureing: micro-brill or milling cutter are inserted in high-density sponge plate, prevent that trickle cutting edge from fractureing in operation;
Second step: cleaning by degreasing: the sponge plate that sticks with micro-brill or milling cutter is placed in to Ultrasonic Cleaners and uses handkerchief Ka Lai Tianjin grease-removing agent FC-4360 to carry out cleaning by degreasing;
The 3rd step: physics mode pre-treatment: micro-brill or milling cutter are placed in to blaster, spray milling cutter cutting blade, etching workpiece surface with W5 diadust;
The 4th step: use Ultrasonic Cleaners, add acetone and dehydrated alcohol according to 3:7 the formulated scavenging solution of weight ratio, again by micro-brill or milling cutter cleaning-drying;
The 5th step: micro-brill or milling cutter are packed into the unit clamp in " the high ionization filtered cathode arc plasma of high vacuum multiple arc target DLC depositing device " chamber;
Described unit clamp: be to be fixed on the intubate that endoporus on star rotary hanging rack equals handle of a knife diameter;
The 6th step: pass into Ar to about 1Pa, add negative bias-150V～-600V, temperature is controlled at 85～200 ℃, flame current is 50A～70A, by Ar ionization and to workpiece generation ion bombardment effects, remove the effect of micro-brill or milling cutter surface microscopic impurity and etching activating surface, improve deposition bonding force, time 60min;
The 7th step: the ratio of 2:2:1 passes into N and C, H to 2～5Pa by volume, to micro-brill or milling cutter coat side forming core, is prime coat and the working lining braided framework of the required densification of coating, and nucleated time is 60min;
The 8th step: the ratio of 2:2 passes into N and O by volume
2, open 2 arc targets, it is 99.9% Metal Cr target that negative electrode adopts purity, deposition nitrogen chromic oxide transition layer NO
2cr, arc source electric current 35A, time: 4h, coat-thickness 15～20 μ m;
The 9th step: the ratio of 2:2:1 passes into N and Ar, CH by volume
4, open 8 magnetic filtered arc sources, it is 99.9% graphite target that negative electrode adopts purity, deposition DLC coating, arc source electric current 30A, time: 4h, coating DLC thickness 10～15 μ m.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106142205A (en) * | 2015-04-22 | 2016-11-23 | 大连崇达电路有限公司 | Diameter 0.25mm following printed wiring board finished hole processing method |
| CN113278954A (en) * | 2021-05-25 | 2021-08-20 | 南京邮电大学 | Composite coating, preparation method, application and preparation system thereof |
| CN114101725A (en) * | 2021-10-20 | 2022-03-01 | 广东工业大学 | Heat-dissipating diamond-coated tool and manufacturing method thereof |
-
2013
- 2013-12-29 CN CN201310736145.3A patent/CN103741099A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106142205A (en) * | 2015-04-22 | 2016-11-23 | 大连崇达电路有限公司 | Diameter 0.25mm following printed wiring board finished hole processing method |
| CN113278954A (en) * | 2021-05-25 | 2021-08-20 | 南京邮电大学 | Composite coating, preparation method, application and preparation system thereof |
| CN114101725A (en) * | 2021-10-20 | 2022-03-01 | 广东工业大学 | Heat-dissipating diamond-coated tool and manufacturing method thereof |
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Inventor after: Chen Yuanda Inventor after: Yang Zhongkai Inventor after: Wang Shengyun Inventor after: He Jing Inventor after: Yang Yi Inventor after: Shen Jun Inventor before: Chen Yuanda Inventor before: Wang Shengyun Inventor before: He Jing |
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Effective date of registration: 20180515 Address after: 430040 Hubei Wuhan New Technology Development Zone, East Lake 999 Applicant after: WUHAN CENTURY ZHONGHANG SUPERPOWER DIAMOND FILM HIGH-TECH CO., LTD. Address before: 415200 Linli County Anfu Industrial Park, Changde, Hunan Applicant before: HUNAN ZHONGHANG SUPER DIAMOND FILM HIGH-TECH CO., LTD. |
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Effective date of abandoning: 20190326 |