CN103737467B - 一种超精密平面陶瓷件的加工方法 - Google Patents
一种超精密平面陶瓷件的加工方法 Download PDFInfo
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- CN103737467B CN103737467B CN201310650501.XA CN201310650501A CN103737467B CN 103737467 B CN103737467 B CN 103737467B CN 201310650501 A CN201310650501 A CN 201310650501A CN 103737467 B CN103737467 B CN 103737467B
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- ceramic member
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- ceramic
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310650501.XA CN103737467B (zh) | 2013-12-03 | 2013-12-03 | 一种超精密平面陶瓷件的加工方法 |
Applications Claiming Priority (1)
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CN201310650501.XA CN103737467B (zh) | 2013-12-03 | 2013-12-03 | 一种超精密平面陶瓷件的加工方法 |
Publications (2)
Publication Number | Publication Date |
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CN103737467A CN103737467A (zh) | 2014-04-23 |
CN103737467B true CN103737467B (zh) | 2016-04-06 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201310650501.XA Active CN103737467B (zh) | 2013-12-03 | 2013-12-03 | 一种超精密平面陶瓷件的加工方法 |
Country Status (1)
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CN (1) | CN103737467B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113021121A (zh) * | 2020-11-09 | 2021-06-25 | 南京施密特光学仪器有限公司 | 碳化硅反射镜改性加工与检测控制***及方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101456668A (zh) * | 2008-12-30 | 2009-06-17 | 上海申菲激光光学***有限公司 | 高精度超薄玻璃基片制备工艺 |
CN101508025A (zh) * | 2009-03-13 | 2009-08-19 | 厦门大学 | 一种非球面光学元件轴对称自由曲面的加工控制方法 |
CN102303224A (zh) * | 2011-05-31 | 2012-01-04 | 哈尔滨工业大学 | 一种光学零件加工与检测一体化制造装置及制造方法 |
CN103128645A (zh) * | 2013-03-21 | 2013-06-05 | 上海交通大学 | 压力可控、速度可变的主动柔顺机器人研磨***及方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001053039A (ja) * | 1999-08-05 | 2001-02-23 | Okamoto Machine Tool Works Ltd | ウエハの研磨終点検出方法および研磨終点検出装置 |
-
2013
- 2013-12-03 CN CN201310650501.XA patent/CN103737467B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101456668A (zh) * | 2008-12-30 | 2009-06-17 | 上海申菲激光光学***有限公司 | 高精度超薄玻璃基片制备工艺 |
CN101508025A (zh) * | 2009-03-13 | 2009-08-19 | 厦门大学 | 一种非球面光学元件轴对称自由曲面的加工控制方法 |
CN102303224A (zh) * | 2011-05-31 | 2012-01-04 | 哈尔滨工业大学 | 一种光学零件加工与检测一体化制造装置及制造方法 |
CN103128645A (zh) * | 2013-03-21 | 2013-06-05 | 上海交通大学 | 压力可控、速度可变的主动柔顺机器人研磨***及方法 |
Non-Patent Citations (1)
Title |
---|
复杂非球面镜高效超精密车削加工方法;张效栋等;《纳米技术与精密工程》;20100731;第8卷(第4期);全文 * |
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CN103737467A (zh) | 2014-04-23 |
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Effective date of registration: 20170601 Address after: 101500 No. 25, No. 32, science and technology road, Miyun Economic Development Zone, Beijing, -14 Patentee after: Zhongke fine sense of intelligence (Beijing) Technology Co., Ltd. Address before: Kolding road high tech Zone of Suzhou City, Jiangsu Province, No. 88 215000 Patentee before: Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences |
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Effective date of registration: 20190724 Address after: Kolding road high tech Zone of Suzhou City, Jiangsu Province, No. 88 215000 Patentee after: Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences Address before: 101500 No. 25, No. 32, science and technology road, Miyun Economic Development Zone, Beijing, -14 Patentee before: Zhongke fine sense of intelligence (Beijing) Technology Co., Ltd. |