CN103736606B - Integrated form outgoing runner structural manufacturing process nozzle - Google Patents
Integrated form outgoing runner structural manufacturing process nozzle Download PDFInfo
- Publication number
- CN103736606B CN103736606B CN201310719283.0A CN201310719283A CN103736606B CN 103736606 B CN103736606 B CN 103736606B CN 201310719283 A CN201310719283 A CN 201310719283A CN 103736606 B CN103736606 B CN 103736606B
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- Prior art keywords
- plate body
- nozzle
- slit
- manufacturing process
- blind hole
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
- B05B1/04—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape in flat form, e.g. fan-like, sheet-like
- B05B1/044—Slits, i.e. narrow openings defined by two straight and parallel lips; Elongated outlets for producing very wide discharges, e.g. fluid curtains
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nozzles (AREA)
Abstract
A kind of integrated form outgoing runner structural manufacturing process nozzle, comprise the nozzle body being provided with storage tank and the first plate body being provided with outgoing runner, first plate body and nozzle body are oppositely arranged closes formation cavity by described storage tank, nozzle body is provided with the liquid feeding channel being communicated with described cavity, wherein, the edge-on setting of described first plate body, described outgoing runner comprises one and vertically goes out to flow slit and the horizontal blind hole of a plurality of hydrojet, blind hole outer end connects described cavity, blind hole the inner connects stream slit, and the lower surface of the first plate body is run through in the lower end going out to flow slit.This technique nozzle not only can slow down spray coating liquor to the surge of sprayed surface, can even application be realized, and can effectively to avoid owing to going out to flow the uneven and instability problem of spraying that deformed slits causes.
Description
Technical field
The present invention relates to the nozzle, particularly integrated form outgoing runner structural manufacturing process nozzle of spraying, be mainly used in IC (integrated circuit) manufacture the spraying coating process (but being not limited to developing process) that develops in photoetching process.
Background technology
Developing method is generally divided into three major types: immersion development, automatic rotation development, revolve cover immersion development.Immersion development exists developer solution consumption does not have developing process more greatly, almost, and each development conditions can not be consistent, and repeatedly the development of more wafers can affect the quality of developer solution, can be mixed into the defects such as impurity, and development coating does not now use the method.Automatic rotation development, revolve that to cover immersion development be use more developing method now, because it uses developing nozzle equipment can control the consumption of developer solution well in spraying, the parameter such as spraying rate and spraying height can regulate and control simultaneously, and manufacturability is stronger.
Along with the continuous progress of photoetching technique and constantly reducing of chip feature sizes, also require more and more higher to the spraying property of nozzle in developing process, not only to meet the low impact to sprayed surface for the requirement of injector arrangement during spraying, also will meet the requirement of uniformity simultaneously.There is the technical problems such as spraying is uneven, spray coating liquor impacts excessive to sprayed surface, the quality of destruction sprayed surface in existing developing nozzle.Therefore, the requirement for design new structure nozzle is also just more and more urgent.
Summary of the invention
The object of this invention is to provide a kind of integrated form outgoing runner structural manufacturing process nozzle, with to solve in existing chip developing process nozzle exist the uneven and spray coating liquor of spraying excessive technical problem is impacted to sprayed surface and in using because nozzle outgoing runner is out of shape the uneven and instability problem of the spraying caused.
For reaching above-mentioned purpose, a kind of integrated form outgoing runner structural manufacturing process nozzle provided by the invention comprises the nozzle body being provided with storage tank and the first plate body being provided with outgoing runner, first plate body and nozzle body are oppositely arranged closes formation cavity by described storage tank, nozzle body is provided with the liquid feeding channel being communicated with described cavity, wherein, the edge-on setting of described first plate body, described outgoing runner comprises one and vertically goes out to flow slit and the horizontal blind hole of a plurality of hydrojet, blind hole outer end connects described cavity, blind hole the inner connects stream slit, the lower surface of the first plate body is run through in the lower end going out to flow slit.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, from the top down, two plate faces of the first plate body are sloping inwardly gradually near lower end, the longitudinal section of the first plate body lower end is del, and the lower end going out to flow slit is arranged on the summit place of this del bottom.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, the interior angle at the described summit place of described del is not more than 90 degree.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, described in go out to flow the bottom surface of slit lower end lower than nozzle body, go out to flow slit lower end and be less than 3 millimeters to the distance of nozzle body bottom surface, described blind hole is near the bottom of described cavity.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, described cavity bottom arranges transition circle cambered surface away from the first plate body.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, go out to flow the width of slit between 0.3 to 1.5 millimeter described in.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, the aspect ratio (degree of depth: diameter) of described a plurality of blind hole is not more than 12, and described a plurality of blind hole is arranged in a row or more along the long side direction of the first plate body.
At above-mentioned integrated form outgoing runner structural manufacturing process nozzle, preferably, described nozzle body and the first plate body are all in strip; Nozzle body is used for the end face that is combined with the first plate body, and on top edge place and Liang Geshu edge arrange the first recessed bar and make to form flange face at the oral area of described storage tank; First plate body be used for the first plate face of being combined with nozzle body on top edge and two vertical edge edge the first ridge is set, described first plate face coordinates with described flange face sealing and described first ridge coordinates with described first recessed bar.
Vertically go out to flow slit and horizontal blind hole because outgoing runner comprises, when spraying, spray coating liquor is not directly injected to sprayed surface but is first ejected into out stream slit inner surface then through going out to flow narrow slit flow to sprayed surface, therefore, it is possible to slow down the surge of spray coating liquor to sprayed surface.On the other hand, spray coating liquor is ejected into out stream slit inner surface and flows in the process of sprayed surface and easily form uniform water curtain along going out to flow slit inner surface and realize even application.
Due to form outgoing runner vertically go out to flow slit and horizontal blind hole is all molded over the first plate body, namely outgoing runner is integral type outgoing flow passage structure or integrated form outgoing flow passage structure, go out to flow slit during use can not be out of shape, therefore, it is possible to effectively avoid owing to going out to flow the uneven and instability problem of spraying that deformed slits causes.
In addition, present invention process nozzle volume is little, and structure is simple, and processability of product structure is strong, can meet the requirement of developing process development.
Accompanying drawing explanation
Fig. 1 is the structural representation of preferred embodiment integrated form outgoing runner structural manufacturing process nozzle;
Fig. 2 is the front view of its nozzle body;
Fig. 3 is the A-A cutaway view Amplified image of its nozzle body;
Fig. 4 is the front view of its first plate body;
Fig. 5 is the side-looking enlarged drawing of its first plate body.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the present invention is further described.
With reference to Fig. 1-5, this integrated form outgoing runner structural manufacturing process nozzle comprises nozzle body 1 and the first plate body 2, and they are all in strip.Nozzle body 1 is provided with storage tank 1b, and the length of storage tank 1b is slightly less than the length of nozzle body 1, and oral area is rectangular.First plate body 2 is provided with outgoing runner 2a.
The edge-on setting of first plate body 2, nozzle body 1 to be arranged on the left of the first plate body 2 and with (the left plate face in Fig. 1, the first plate face of the first plate body 2, right panel face in Fig. 5) 2b seals combination, namely the first plate body 2 is oppositely arranged with nozzle body 1 and storage tank 1b is closed formation cavity 3, and cavity 3 is for storing spray coating liquor.Nozzle body 1 arranges the liquid feeding channel 1a being communicated with cavity 3.
Outgoing runner 2a comprises one and vertically goes out to flow slit 2a1 and the horizontal blind hole 2a2 of a plurality of hydrojet, and blind hole 2a2 outer end connects cavity 3, blind hole 2a2 the inner and connects stream slit 2a1, and the lower surface of the first plate body 2 is run through in the lower end going out to flow slit 2a1.
During use, spray coating liquor flows into cavity 3 from liquid feeding channel 1a, is ejected into out the inner surface of stream slit 2a1 through a plurality of blind hole 2a2, then along the inner surface going out to flow slit 2a1 through going out to flow slit 2a1 to downstream to sprayed surface.Because spray coating liquor is not be directly injected to sprayed surface, but flow to sprayed surface again after being ejected into out the inner surface of stream slit 2a1, so effectively slow down the pressure of fluid, the impact of spray coating liquor to sprayed surface is reduced greatly, thus efficiently solves spray coating liquor and go out excessive difficult problem sprayed surface being produced to large impact of injection pressure.Meanwhile, the inner surface that spray coating liquor is ejected into out stream slit 2a1 flows to the uniform water curtain of easy formation in the process of sprayed surface downwards along this inner surface, thus can improve the uniformity of spraying.
In this technique nozzle, the slit 2a1 and horizontal blind hole 2a2 that vertically goes out to flow forming outgoing runner 2a is all molded over the first plate body 2, and namely outgoing runner is integral type outgoing flow passage structure or integrated form outgoing flow passage structure.Compared to the technique nozzle of separate type outgoing flow passage structure, (described separate type outgoing flow passage structure refers to that the transverse jet fluid apertures of outgoing runner is arranged on a plate body, the slit that vertically goes out to flow of outgoing runner is surrounded by this plate body and another baffle plate), the width that this integrated form outgoing runner structural manufacturing process nozzle in use goes out to flow slit 2a1 not easily occurs being out of shape (especially this advantage is more remarkable when going out to flow slit 2a1 and being sharp mouth slit), therefore further increases uniformity and the stability of spraying.Integrated form outgoing flow passage structure also makes nozzle assemble simple, good airproof performance, the assembling that separate type can be avoided to bring, sealing problem simultaneously.
In order to make spray coating liquor from go out to flow slit 2a1 flow out after, stream surface can not be gathered in out, realize evenly effectively spraying better, go out to flow slit 2a1 in preferred embodiment and adopt sharp mouth narrow slit structure, that is, from the top down, two plate faces 2b, 2c of the first plate body 2 are sloping inwardly gradually near lower end, the longitudinal section of the first plate body 2 lower end is del, and the lower end going out to flow slit 2a1 is arranged on the 2d place, summit of this del bottom.The interior angle at the 2d place, summit of described del is preferably not more than 90 degree.
Go out to flow the bottom surface 1c of slit 2a1 lower end lower than nozzle body 1, go out to flow slit 2a1 lower end and be less than 3 millimeters to the bottom surface 1c distance of nozzle body 1, and blind hole 2a2 is near the bottom of cavity 3.By the distance between bottom the distance going out to flow between slit 2a1 lower end and nozzle body 1 bottom surface and blind hole 2a2 and cavity 3 is arranged less, spray coating liquor can be shortened in the flow distance going out to flow slit 2a1 inner surface, the uniformity of spraying can be improved further.
Away from the first plate body 2 bottom cavity 3 while arrange transition circle cambered surface 3a, this transition circle cambered surface 3a can slow down liquid and concentrate at the nozzle interior stress produced that flows, the flowing of liquid of releiving.
The better width going out to flow slit 2a1 is 0.3 to 1.5 millimeter.A plurality of blind hole 2a2 adopts little aspect ratio, and aspect ratio is preferably not more than 12, to facilitate processing.A plurality of spray hole 2a can be arranged in a row along the long side direction of the first plate body 2, also can be arranged in many rows (i.e. array arrangement).
In the preferred embodiment, for end face (right side namely in Fig. 1 and Fig. 3) 1d that is combined with the first plate body 2, on top edge place and Liang Geshu edge arrange the first recessed bar 1e and make to form flange face 1f at the oral area of described storage tank 1b nozzle body 1; Accordingly, for the first plate face 2b of being combined with nozzle body 1, on top edge and two vertical edge edge arrange the first ridge 2e to first plate body 2, first plate face 2b is sealed and matched with described flange face 1f and the first ridge 2e coordinates with described first recessed bar 1e, realizes the assembling of nozzle body 1 and the first plate body 2.The sealing of joint portion can adopt viscosity glue to seal.
The developer solution that this technique nozzle is used for developing process in the photoetching process of IC manufacturing field exports, not only can solve existing nozzle and excessive technical problem is impacted to sprayed surface, and can solve during existing nozzle uses and be out of shape the uneven and instability problem of the spraying caused due to nozzle outgoing runner.This technique nozzle is not limited to and uses at developing process.
Above by specific embodiment to invention has been detailed description, these concrete descriptions can not think that the present invention is only only limitted to the content of these embodiments.Those skilled in the art according to the present invention's design, these describe and any improvement made in conjunction with general knowledge known in this field, equivalents, all should be included in the protection domain of the claims in the present invention.
Claims (7)
1. an integrated form outgoing runner structural manufacturing process nozzle, comprise the nozzle body (1) being provided with storage tank (1b) and the first plate body (2) being provided with outgoing runner (2a), first plate body (2) and nozzle body (1) are oppositely arranged closes formation cavity (3) by described storage tank (1b), nozzle body (1) is provided with the liquid feeding channel (1a) being communicated with described cavity (3), it is characterized in that: the edge-on setting of described first plate body, described outgoing runner (2a) comprises one and vertically goes out to flow slit (2a1) and the horizontal blind hole of a plurality of hydrojet (2a2), blind hole outer end connects described cavity (3), blind hole the inner connects stream slit (2a1), the lower surface of the first plate body is run through in the lower end going out to flow slit,
From the top down, two plate faces (2b, 2c) of the first plate body (2) are sloping inwardly gradually near lower end, the longitudinal section of the first plate body lower end is del, and the lower end going out to flow slit (2a1) is arranged on summit (2d) place of this del bottom.
2. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that: the interior angle at described summit (2d) place of described del is not more than 90 degree.
3. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, it is characterized in that: described in go out to flow the bottom surface (1c) of slit (2a1) lower end lower than nozzle body (1), go out to flow slit (2a1) lower end and be less than 3 millimeters to the distance of nozzle body bottom surface, described blind hole (2a2) is near the bottom of described cavity (3).
4. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that: described cavity (3) bottom arranges transition circle cambered surface (3a) away from the first plate body.
5. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that: described in go out to flow the width of slit (2a1) between 0.3 to 1.5 millimeter.
6. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, it is characterized in that: the aspect ratio of described a plurality of blind hole (2a2) is not more than 12, and described a plurality of blind hole is arranged in a row or more along the long side direction of the first plate body (2).
7. integrated form outgoing runner structural manufacturing process nozzle according to claim 1, is characterized in that:
Described nozzle body (1) and the first plate body (2) all in strip,
For the end face (1d) that is combined with the first plate body, on top edge place and Liang Geshu edge arrange the first recessed bar (1e) and make to form flange face (1f) at the oral area of described storage tank (1b) nozzle body (1);
First plate body (2) for the first plate face (2b) of combining with nozzle body (1) on top edge and two vertical edge edge the first ridge (2e) is set, described first plate face coordinates with described flange face sealing and described first ridge (2e) coordinates with described first recessed bar (1e).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719283.0A CN103736606B (en) | 2013-12-23 | 2013-12-23 | Integrated form outgoing runner structural manufacturing process nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719283.0A CN103736606B (en) | 2013-12-23 | 2013-12-23 | Integrated form outgoing runner structural manufacturing process nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103736606A CN103736606A (en) | 2014-04-23 |
| CN103736606B true CN103736606B (en) | 2016-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310719283.0A Expired - Fee Related CN103736606B (en) | 2013-12-23 | 2013-12-23 | Integrated form outgoing runner structural manufacturing process nozzle |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105045049B (en) * | 2015-07-31 | 2019-05-14 | 清华大学深圳研究生院 | A kind of developing nozzle with exhaust passage |
| CN107340616A (en) * | 2017-08-30 | 2017-11-10 | 武汉华星光电技术有限公司 | Moisture film generating means and developing machine, cleaning machine |
| EP3714984A1 (en) | 2019-03-26 | 2020-09-30 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO | A fluid handling structure and method for a gas phase deposition apparatus |
Citations (5)
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| CN1574221A (en) * | 2003-06-04 | 2005-02-02 | 大日本网目版制造株式会社 | Liquid supplying device and substrate processing device |
| CN1611304A (en) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | Slit nozzle |
| CN101547744A (en) * | 2007-09-18 | 2009-09-30 | 喷雾***(日本)株式会社 | Two fluid slit nozzle and method for manufacturing the same |
| CN101879484A (en) * | 2010-05-28 | 2010-11-10 | 友达光电股份有限公司 | Slit nozzle |
| TW201143901A (en) * | 2010-06-07 | 2011-12-16 | Applied Materials Inc | Slit nozzle and wire saw system comprising the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006205120A (en) * | 2005-01-31 | 2006-08-10 | Ikeuchi:Kk | Slit nozzle |
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2013
- 2013-12-23 CN CN201310719283.0A patent/CN103736606B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1574221A (en) * | 2003-06-04 | 2005-02-02 | 大日本网目版制造株式会社 | Liquid supplying device and substrate processing device |
| CN1611304A (en) * | 2003-10-27 | 2005-05-04 | 东京応化工业株式会社 | Slit nozzle |
| CN101547744A (en) * | 2007-09-18 | 2009-09-30 | 喷雾***(日本)株式会社 | Two fluid slit nozzle and method for manufacturing the same |
| CN101879484A (en) * | 2010-05-28 | 2010-11-10 | 友达光电股份有限公司 | Slit nozzle |
| TW201143901A (en) * | 2010-06-07 | 2011-12-16 | Applied Materials Inc | Slit nozzle and wire saw system comprising the same |
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| CN103736606A (en) | 2014-04-23 |
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Granted publication date: 20160406 Termination date: 20201223 |