CN103730388B - Diffusion machine - Google Patents
Diffusion machine Download PDFInfo
- Publication number
- CN103730388B CN103730388B CN201210389832.8A CN201210389832A CN103730388B CN 103730388 B CN103730388 B CN 103730388B CN 201210389832 A CN201210389832 A CN 201210389832A CN 103730388 B CN103730388 B CN 103730388B
- Authority
- CN
- China
- Prior art keywords
- boiler tube
- fire door
- protecting cover
- diffusion machine
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims description 6
- 239000010453 quartz Substances 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 238000012545 processing Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 230000008439 repair process Effects 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/223—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a gaseous phase
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
Abstract
The invention discloses a kind of diffusion machine.This diffusion machine comprises a boiler tube, a fire door and a protecting cover.Boiler tube includes an opening and a first surface, and this first surface is positioned at the outside of opening.Fire door includes a second surface corresponding with first surface, and wherein second surface can contact with each other with first surface.Protecting cover is located at least one in first surface and second surface.
Description
Technical field
The invention relates to a kind of semiconductor processing platform, and in particular to a kind of diffusion machine.
Background technology
In general diffusion process, it is common that reacting gas is imported in boiler tube, reacting gas spread in boiler tube and with substrate surface produce needed for reaction.But, owing to fire door is not enough with the closure at the interface of boiler tube, the reacting gas ordering about part flows to the interface of fire door and boiler tube, and these reacting gas easily condense at the intersection of fire door with boiler tube, and then forms the liquid even residual of solid at this intersection.
The residual of these processing fluid and solid easily corrodes the quartz of fire door and the intersection of boiler tube, and makes fire door impaired with boiler tube.After fire door is impaired with furnace tube port, maintenance personnel need to dismantle boiler tube and fire door.So, due to boiler tube and fire door remove and install need to time-consuming working day more than two, repair boiler tube if even sending, whole maintenance time, more more than two weeks, has a strong impact on the carrying out producing or testing.
Because removing and installing of boiler tube and fire door is tangible the most time-consuming, so at present when the maintenance being diffused board, boiler tube and fire door can't be dismantled, but to be passed through deionized water and to form steam in high temperature and clean.But, the processing fluid of the intersection residual cleaning and cannot effectively removing fire door and furnace tube port of deionized water and solid, cause the intersection of fire door and furnace tube port to be still susceptible to the corrosion of processing fluid and solid.
Summary of the invention
Therefore, an aspect of of the present present invention is exactly to provide a kind of diffusion machine, and it is provided with protecting cover on boiler tube opening part and/or fire door, can protect boiler tube and fire door.Therefore, can significantly reduce the dismounting and change time of boiler tube and fire door, and then yield can be increased.
Another aspect of the present invention is to provide a kind of diffusion machine, and it can be prevented effectively from boiler tube damage, therefore can repair boiler tube or the number of times repaiied is sent in reduction without sending, and then can avoid producing or experiment is interrupted, and significantly reduces the downtime of board.
According to the above-mentioned purpose of the present invention, a kind of diffusion machine is proposed.This diffusion machine comprises a boiler tube, a fire door and a protecting cover.Boiler tube includes an opening and a first surface, and this first surface is positioned at the outside of opening.Fire door includes a second surface corresponding with first surface, and wherein second surface can contact with each other with first surface.Protecting cover is located at least one in first surface and second surface.
According to one embodiment of the invention, above-mentioned protecting cover is arranged on the first surface.
According to another embodiment of the present invention, above-mentioned protecting cover has two extensions, and this two extension is respectively perpendicular first surface and extends in the same direction.
According to another embodiment of the present invention, the inner tubal wall of the two above-mentioned extensions opening part of contact furnace pipe respectively and outer tube wall.
According to one more embodiment of the present invention, above-mentioned protecting cover configures on a second surface.
According to one more embodiment of the present invention, above-mentioned protecting cover includes a first module and a second unit, and first module is arranged on the first surface, and second unit is arranged on a second surface.
According to one more embodiment of the present invention, the material of above-mentioned protecting cover includes quartz.
According to one more embodiment of the present invention, when above-mentioned fire door is closed to the opening of boiler tube, first surface, protecting cover sequentially contact with each other with second surface.
According to one more embodiment of the present invention, when above-mentioned fire door is closed to the opening of boiler tube, first surface is parallel to each other with second surface.
Accompanying drawing explanation
For the above and other purpose of the present invention, feature, advantage can be become apparent with embodiment, being described as follows of appended accompanying drawing:
Fig. 1 is the generalized section illustrating a kind of diffusion machine according to one embodiment of the present invention；
Fig. 2 is the partial enlarged drawing of the diffusion machine illustrating Fig. 1；
Fig. 3 is the axonometric chart of the first module illustrating a kind of protecting cover according to one embodiment of the present invention；
Fig. 4 is the axonometric chart of the second unit illustrating a kind of protecting cover according to one embodiment of the present invention.
[main element symbol description]
100: diffusion machine 102: boiler tube
104: opening 106: air inlet
108: fire door 110: first module
112: second unit 114: protecting cover
116: first surface 118: second surface
120: extension 122: extension
124: inner tubal wall 126: outer tube wall
128: protection portion 130: protection portion
132: extension 134: snap fit
136: reaction chamber 138: lateral surface
140: bottom surface
Detailed description of the invention
Refer to Fig. 1 and Fig. 2, it is the partial enlarged drawing of the diffusion machine illustrating the generalized section of a kind of diffusion machine according to one embodiment of the present invention and Fig. 1 respectively.In the present embodiment, diffusion machine 100 mainly can comprise boiler tube 102, fire door 108 and protecting cover 114.In one embodiment, diffusion machine 100 is applicable to carry out the diffusion process of solaode.Owing to the reaction temperature of diffusion process is the most at a relatively high, therefore boiler tube 102, fire door 108 can comprise quartz with the material of protecting cover 114.
Boiler tube 102, in hollow tubular body, has reaction chamber 136 inside it.As it is shown in figure 1, one end of boiler tube 102 has opening 104, the base material being intended to be diffused processing can be loaded in cassette, then enters the reaction chamber 136 of boiler tube 102 from this opening 104, is diffused processing.The relative other end of boiler tube 102 then has air inlet 106.This air inlet 106 is available for gas nozzle and arranges, and sprays reacting gas above the pending base material in reaction chamber 136.As in figure 2 it is shown, the outside of the opening 104 of boiler tube 102 further includes first surface 116.
Fire door 108 is movably disposed on the opening 104 of boiler tube 102, to be turned on and off the opening 104 of boiler tube 102.As in figure 2 it is shown, fire door 108 comprises second surface 118.Wherein, the second surface 118 of fire door 108 is corresponding with the first surface 116 of boiler tube 102, and along with the Guan Yukai of fire door 108, second surface 118 can close to each other with the first surface 116 of boiler tube 102 contact or away from.
In one embodiment, as in figure 2 it is shown, protecting cover 114 can comprise first module 110 and second unit 112.First module 110 can all comprise quartz with the material of second unit 112.First module 110 can be arranged on the first surface 116 of boiler tube 102 in the form of a ring, with completely obscured firmly first surface 116.Please with reference to Fig. 3, coordinating the shape of the first surface 116 of boiler tube 102, first module 110 can be circular ring.
In an exemplary embodiment, as in figure 2 it is shown, the first module 110 of protecting cover 114 can comprise protection portion 128 and two extensions 120 and 122.This two extension 120 can be respectively arranged at the relative dual side-edge of protection portion 128 with 122, and can vertically protection portion 128 court extend in the same direction.Therefore, in the exemplary embodiment, the section shape of the first module 110 that protection portion 128 and two extensions 120 and 122 are constituted can be in class C font structure.
When the first module 110 of protecting cover 114 is arranged on the first surface 116 of boiler tube 102, protection portion 128 can contact with the first surface 116 of boiler tube 102, and covers whole first surface 116.On the other hand, extension 120 contacts the outer tube wall 126 at the opening 104 of boiler tube 102 and inner tubal wall 124 respectively with 122.In an example, now the extension 120 and 122 of first module 110 all can the first surface 116 of vertical furnace tube 102.
Referring once again to Fig. 2, second unit 112 can be arranged on the second surface 118 of fire door 108 in the form of a ring, with completely obscured live second surface 118, or only cover and having at the scope contacted with this first surface 116.Please with reference to Fig. 4, coordinating the shape of the second surface 118 of fire door 108, second unit 112 can be circular ring.In an exemplary embodiment, as in figure 2 it is shown, the second unit 112 of protecting cover 114 can comprise protection portion 130, multiple extension 132 and snap fit 134.In second unit 112, protection portion 130 is respectively provided on the relative dual side-edge of extension 132 with snap fit 134, and towards extending in the same direction, wherein snap fit 134 only convexedly stretches in side a small distance of extension 132.
When the second unit 112 of protecting cover 114 is arranged on the second surface 118 of fire door 108, protection portion 130 can contact with the second surface 118 of fire door 108, and covers whole second surface 118.It addition, extension 132 contacts the lateral surface 138 of fire door 108, snap fit 134 then contacts the bottom surface 140 of fire door 108, to be more securely arranged on fire door 108 by whole second unit 112.In another embodiment, second unit 112 can not comprise snap fit 134, and may utilize the tight fit between protection portion 130 and extension 132 and fire door 108, is firmly placed on fire door 108 by second unit 112, as shown in Figure 4.
Referring once again to Fig. 2, when fire door 108 closes at the opening 104 of boiler tube 102, the first surface 116 of boiler tube 102, the first module 110 of protecting cover 114 and second unit 112 sequentially contact with each other with the second surface 118 of fire door 108.In one embodiment, when fire door 108 is closed to the opening 104 of boiler tube 102, the first surface 116 of boiler tube 102 can be parallel to each other with the second surface 118 of fire door 108.
By the setting of the first module 110 of protecting cover 114 with second unit 112, not only can promote the leak tightness of boiler tube 102 and the intersection of fire door 108, more can protect the first surface 116 of boiler tube 102 and the second surface 118 of fire door 108 respectively.Consequently, it is possible to the corrosion to boiler tube 102 with the intersection of fire door 108 of the processing procedure reactant can be greatly reduced.And, when diffusion machine 100 is maintained, protecting cover 114 directly can be removed cleaning or change, at all without dismantling or change boiler tube 102 and fire door 108 again, repair boiler tube 102 without sending.Therefore, it is possible to decrease production cost, more can significantly reduce and produce and the downtime of experiment, effectively promote production capacity.
In other embodiments of the present invention, protecting cover 114 can only have a unit, and protecting cover 114 is provided only at least one in the first surface 116 of boiler tube 102 or the second surface 118 of fire door 108.For example, protecting cover 114 only has first module 110, and protecting cover 114 is now arranged on the first surface 116 of boiler tube 102.In another example, protecting cover 114 only has second unit 112, and now protecting cover 114 is arranged on the second surface 118 of fire door 108.
From above-mentioned embodiment, an advantage of the present invention is just because the boiler tube opening part of diffusion machine and/or fire door is provided with protecting cover, can protect boiler tube and fire door.Therefore, can significantly reduce the dismounting and change time of boiler tube and fire door, and then yield can be increased.
From the embodiment of above-mentioned, another advantage of the present invention is just because protecting cover can be prevented effectively from boiler tube damage, therefore can repair boiler tube or the number of times repaiied is sent in reduction without sending, and then can avoid producing or experiment is interrupted, and significantly reduces the downtime of board.
Although the present invention is disclosed above with embodiment; so it is not limited to the present invention; any those having an ordinary knowledge in this technical field; without departing from the spirit and scope of the present invention; when being used for a variety of modifications and variations, therefore protection scope of the present invention is when being defined in the range of standard depending on appending claims.
Claims (8)
1. a diffusion machine, it is characterised in that comprise:
One boiler tube, including an opening and a first surface, this first surface is positioned at the outside of this opening；
One fire door, including a second surface corresponding with this first surface；And
One protecting cover, including a first module and a second unit, this first module is arranged on the first surface, and this second unit is arranged on the second surface, and this first module can contact with each other with this second unit.
Diffusion machine the most according to claim 1, it is characterised in that what the first module of this protecting cover was completely obscured is arranged on this first surface.
Diffusion machine the most according to claim 2, it is characterised in that the first module of this protecting cover has two extensions, this two extension is respectively perpendicular this first surface and extends in the same direction.
Diffusion machine the most according to claim 3, it is characterised in that this two extension contacts inner tubal wall and the outer tube wall of this opening part of this boiler tube respectively.
Diffusion machine the most according to claim 1, it is characterised in that second unit this second surface completely obscured of this protecting cover, or only cover and have at the scope contacted with this first surface at this second surface.
6. according to the diffusion machine described in claim any one of claim 1 to 5, it is characterised in that the material of this protecting cover includes quartz.
Diffusion machine the most according to claim 1, it is characterised in that when this fire door is closed to this opening of this boiler tube, this first surface, this protecting cover sequentially contact with each other with this second surface.
Diffusion machine the most according to claim 1, it is characterised in that when this fire door is closed to this opening of this boiler tube, this first surface is parallel to each other with this second surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210389832.8A CN103730388B (en) | 2012-10-15 | 2012-10-15 | Diffusion machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210389832.8A CN103730388B (en) | 2012-10-15 | 2012-10-15 | Diffusion machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103730388A CN103730388A (en) | 2014-04-16 |
| CN103730388B true CN103730388B (en) | 2016-08-03 |
Family
ID=50454409
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210389832.8A Expired - Fee Related CN103730388B (en) | 2012-10-15 | 2012-10-15 | Diffusion machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103730388B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5217369A (en) * | 1992-05-28 | 1993-06-08 | Micron Techology, Inc. | Atmospheric furnace door counterbalance |
| CN101693973A (en) * | 2009-09-27 | 2010-04-14 | 上海大学 | Method and device thereof for preparing Nd-Mg-Ni hydrogen storage alloy by microwave sintering |
| CN102410726A (en) * | 2011-10-24 | 2012-04-11 | 中南大学 | Removable horizontal glue removing furnace for hard alloy production |
-
2012
- 2012-10-15 CN CN201210389832.8A patent/CN103730388B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5217369A (en) * | 1992-05-28 | 1993-06-08 | Micron Techology, Inc. | Atmospheric furnace door counterbalance |
| CN101693973A (en) * | 2009-09-27 | 2010-04-14 | 上海大学 | Method and device thereof for preparing Nd-Mg-Ni hydrogen storage alloy by microwave sintering |
| CN102410726A (en) * | 2011-10-24 | 2012-04-11 | 中南大学 | Removable horizontal glue removing furnace for hard alloy production |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103730388A (en) | 2014-04-16 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160803 Termination date: 20191015 |
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| CF01 | Termination of patent right due to non-payment of annual fee |