CN103726030B - Precipitation equipment and the manufacturing method for using its organic light-emitting display device - Google Patents
Precipitation equipment and the manufacturing method for using its organic light-emitting display device Download PDFInfo
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- CN103726030B CN103726030B CN201310476160.9A CN201310476160A CN103726030B CN 103726030 B CN103726030 B CN 103726030B CN 201310476160 A CN201310476160 A CN 201310476160A CN 103726030 B CN103726030 B CN 103726030B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
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Abstract
Precipitation equipment according to the present invention, including：Sedimentary origin for accommodating deposited material；It is arranged in the side of sedimentary origin, and multiple nozzles for being ejected into the deposited material on opposite substrate along a first direction.Sedimentary origin is divided into the peripheral region of central area and the central area both ends on the basis of the first direction.Precipitation equipment further includes：It is removably formed on the nozzle being arranged in each peripheral region, and the terminal surface of the injection deposited material is made to be formed as the nipple top along the first direction and substrate surface composition inclination angle and the lateral direction towards the sedimentary origin.According to an embodiment of the invention, by improving the incident angle for the deposited material for being incident on substrate, shade phenomenon that deposited material penetrates between deposition mask and substrate can be inhibited, deposition surplus is reduced and deposition uniformity and deposition efficiency can be improved.It is possible thereby to the high-resolution of organic light-emitting display device easy to implement.
Description
Technical field
The present invention relates to precipitation equipment and using its organic light-emitting display device manufacturing method, more particularly, to can
With the angle by controlling jet deposition substance to prevent the precipitation equipment of shade phenomenon and the system of organic light-emitting display device
Make method.
Background technology
In a display device, organic light-emitting display device not only has the advantages that visual angle is wide and excellent contrast, but also
Have many advantages, such as fast response time, therefore attracts attention as next generation display device.
In general, in order to using make from anode and cathode injected holes and electronics luminescent layer in conjunction with and luminous principle
Realize that color, organic light-emitting display device have the stepped construction for being inserted into luminescent layer between the anode and the cathode.But pass through this
Kind of structure be difficult to obtain it is efficient shine, so selectively, being extraly inserted into such as electricity between each electrode and luminescent layer
Sub- implanted layer, electron transfer layer, hole transmission layer and hole injection layer middle layer used.
In the panel display apparatus of such as organic light-emitting display device, organic matter is formed by vacuum deposition method or is used as
Electrode and the metal etc. used, wherein it is thin to be formed on tablet to deposit respective substance under vacuum conditions according to vacuum deposition method
Film.In vacuum deposition method, it would be desirable to the substrate for being formed on film is positioned over inside vacuum chamber, make its be close to have with
It is such as organic by using the evaporation of deposition source unit or distillation after thinking the deposition mask that film to be formed etc. has identical patterns
The deposited material of object is to deposit on substrate.
But the angle of substrate is sprayed and reached according to deposited material, it may occur that organic substance penetrates into deposition mask
Shade phenomenon between substrate.
Invention content
According to an aspect of the present invention, its purpose is to provide precipitation equipment, which can improve and be incident on base
The incident angle of the deposited material of plate.
In addition, another side according to the present invention, its purpose is to provide the manufacturing methods of organic light-emitting display device, should
Method can improve deposition uniformity and deposition efficiency.
Precipitation equipment according to the present invention includes sedimentary origin and multiple nozzles.Sedimentary origin is for accommodating deposited material；It is multiple
Nozzle is arranged in the side of sedimentary origin along a first direction, and for the deposited material to be ejected into opposite substrate.
Along the first direction, the sedimentary origin is divided into central area and the external zones positioned at the central area both ends
Domain, the precipitation equipment further include nipple top, which, which is removably formed in, is arranged in each external zones
On the nozzle on domain, the terminal surface for being sprayed the deposited material of the nipple top is along the first direction and institute
The surface for stating substrate constitutes inclination angle, and towards the lateral direction of the sedimentary origin.
In precipitation equipment according to the present invention, center and the sedimentary origin edge of the substrate along the first direction
The center alignment of the first direction, the central area of the sedimentary origin preferably has under satisfaction along a first direction
The length of condition is stated,
Wherein, L1It is the central area along the length of the first direction, L2For the substrate deposition region along institute
The length of first direction is stated, T is the distance between the end of the substrate and the nozzle, and θ is the inclination angle.
In precipitation equipment according to the present invention, the inclination angle ranges preferably from 43 degree to 53 degree.
In precipitation equipment according to the present invention, the inclination angle ranges preferably from 25 degree to 35 degree.
In precipitation equipment according to the present invention, the nipple top of the first jet is preferably installed to described
It is symmetrical on the basis of the center of the sedimentary origin on first direction.
The manufacturing method of organic light-emitting display device according to the present invention, including：Preparation includes for accommodating deposited material
Sedimentary origin, and be arranged in the side of sedimentary origin along a first direction and for the deposited material to be ejected into substrate
Multiple nozzles precipitation equipment；To be relatively arranged substrate with the nozzle；And along vertical with the first direction
Second direction moves the sedimentary origin and sprays the deposited material by the nozzle.In addition, along the first direction, institute
It states sedimentary origin and is divided into central area and the peripheral region positioned at the central area both ends；Preferably, the method is also
Including：The nipple top being removably formed on the nozzle arranged in each peripheral region, and make
The nipple top is used to spray the terminal surface of the deposited material along the first direction and substrate surface composition is inclined
The nipple top at oblique angle and lateral direction towards the sedimentary origin.
In the manufacturing method of organic light-emitting display device according to the present invention, it is aligned in the substrate along described first
The center in direction and the center along the first direction in the central area, the central area is preferably along first party
To with the length for meeting following conditions,
Wherein, L1It is the central area along the length of the first direction, L2For the substrate deposition region along institute
The length of first direction is stated, T is the distance between the end of the substrate and the nozzle, and θ is the inclination angle.
In the manufacturing method of organic light-emitting display device according to the present invention, the inclination angle ranges preferably from 43 degree
To 53 degree.
In the manufacturing method of organic light-emitting display device according to the present invention, the inclination angle ranges preferably from 25 degree
To 35 degree.
In the manufacturing method of organic light-emitting display device according to the present invention, it is preferable that be installed to the first jet
The nipple top it is symmetrical on the basis of the center of the sedimentary origin in said first direction.
According to an embodiment of the invention, by improving the incident angle for the deposited material for being incident on substrate, it is heavy to inhibit
Product penetration between deposition mask and substrate shade phenomenon, reduce deposit surplus and can improve deposition uniformity and
Deposition efficiency.It is possible thereby to the high-resolution of organic light-emitting display device easy to implement.
Description of the drawings
Fig. 1 is the stereogram according to the precipitation equipment of one embodiment of the invention.
Fig. 2 and Fig. 3 is to indicate the deposited material sprayed from nozzle in precipitation equipment according to an embodiment of the invention
The concept map of distribution.
Fig. 4 is to indicate the incidence for being incident on the deposited material of substrate in precipitation equipment according to an embodiment of the invention
The concept map of correlation between angle and the position of nozzle.
Fig. 5 is the side for determining central area and peripheral region in precipitation equipment according to an embodiment of the invention
The concept map of method.
Fig. 6 A to Fig. 6 D are the view of the variation for the nipple top for indicating precipitation equipment according to an embodiment of the invention.
Reference sign
100：Sedimentary origin 112,114a, 114b：Nozzle
200：Substrate securing part 210：Substrate
220：Mask
Specific implementation mode
Organic light emitting display next, with reference to attached drawing to precipitation equipment according to the present invention and the use precipitation equipment
The manufacturing method of device is specifically described.But the present invention is not limited to embodiments disclosed belows, and can be with it
He variform realizes that these embodiments are of the invention just for the sake of complete disclosure, and in order to fully to this field
Technical staff informs the range of invention and provides.In attached drawing, identical reference numeral indicates identical element.
In addition, through specification full text, when being expressed as a certain inscape of certain a part of " comprising ", unless otherwise special
It refers to, expression can also be included other inscapes rather than exclude other inscapes.In addition, through specification full text,
When being expressed as " above ", it is the up or down indicated positioned at object part, is not to be necessarily located to be with gravity direction
The upside of benchmark.
Fig. 1 is the stereogram according to the precipitation equipment of one embodiment of the invention.
Although not showing chamber in various figures for the convenience of explanation, all structures shown in FIG. 1 are all arranged
In the vacuum chamber that can maintain appropriate vacuum degree.According to handled substrate apperance, various shapes may be used in vacuum chamber.
For example, when the substrate of processing is round, the shape of generally cylinder may be used in vacuum chamber；When the substrate of processing is rectangle
When, the shape of generally cuboid may be used in vacuum chamber.In addition, in vacuum chamber can also have pass through to
Gas inside outside discharge vacuum chamber is to reduce the vacuum pump of vacuum chamber internal pressure（It is not shown）With by vacuum
Chamber interior injects gas appropriate to improve the ventilation device of vacuum chamber internal pressure（It is not shown）Deng composition.
Sedimentary origin 100 as by the way that device of the deposited material to be deposited on substrate 210 is discharged, inside can have
It is useful for accommodating the space of the deposited material such as organic matter（It is not shown）.Deposited material accommodation space can be by with excellent heat
The aluminium oxide of radiativity（Al2O3）, aluminium nitride（AlN）Ceramic material formed, but it is not limited to this, can be by with excellent
Heat radiation and the multiple material of heat resistance are constituted.Can have in the outside of deposited material accommodation space and be enclosed in a manner of being close to
The heater made of outside（It is not shown）, be used to execute heating deposition substance so that its vaporization function.Corresponding to
On opposite substrate 210 along a first direction on（yAxis direction）Length, sedimentary origin 100 extends along a first direction.Edge
First direction, sedimentary origin 100 can be divided into the peripheral region 104a at 102 both ends of central area 102 and central area
With peripheral region 104b.The jet angle of the nozzle 112 for being arranged in central area 102 can be positioned at different angles and be arranged in
The jet angle of peripheral region 104a, the nozzle 114a of peripheral region 104b, nozzle 114b, will be described below this.
It is formed with nozzle 112, nozzle 114a, nozzle 114b on the side of the sedimentary origin 110 opposite with substrate 210, sprays
Mouth 112, nozzle 114a, nozzle 114b can be formed with round tube shape and be connected with the inner space of sedimentary origin 100, will
It is ejected on substrate 210 in the deposited material that inner space vaporizes or distils.
It is provided with multiple nozzles 112, nozzle 114a, nozzle 114b, and along the deposition extended to form with first direction
Source 100 is arranged in a row.In order to form deposited material, substrate 210 can be constituted with the plate shape of rectangle, along a first direction line
Property arrangement multiple nozzles 112, nozzle 114a, nozzle 114b so that it is parallel with a side of substrate 210.As shown in Figure 1, spray
Mouth 112, nozzle 114a, nozzle 114b can be arranged in a side-by a row, but be not limited to a row, nozzle 112, nozzle 114a,
Nozzle 114b can also be arranged to two row or more.
Substrate 210 is fixed by substrate securing part 200 with opposite with nozzle 112, nozzle 114a, nozzle 114b, because
For during forming film over the substrate 210 substrate securing part 200 need steadily fixed substrate 210 and after completion processing to
Outside discharge substrate 210, so substrate securing part 200 have can easy removal substrate 210 structure.Substrate 210 is covered with deposition
Film 220 is fixed to substrate securing part 200 together, and deposition mask 220 for forming organic film figure over the substrate 210, therefore
Deposition mask 220 forms opening portion between the shielding portion for blocking organic deposition, and organic matter can pass through opening
Portion deposits on substrate 210.The structure of substrate securing part 200 is identical as the structure used in common precipitation equipment, therefore
Description is omitted.Substrate 210 and sedimentary origin 100 are fitly arranged, to be directed at the center of the first direction of substrate 210 and sink
The center of the first direction in product source 100.
It can be deposited when sedimentary origin 100 is relatively moved with substrate 210.But when substrate 210 is fixed, deposition
Source 100 can be separated by certain interval with substrate and along the second direction intersected with first direction（X-axis direction）It is moved
It is dynamic.It, can be flatly on the top of sedimentary origin 100 when sedimentary origin 100 is arranged to, and deposited material is discharged along vertical direction
Arrange substrate 210；It, can be with vertically arranged substrate when sedimentary origin 100 is arranged to, and deposited material is discharged along horizontal direction
210.In an embodiment of the present invention, although showing that sedimentary origin 100 is disposed on the bottom surface of vacuum chamber and 210 quilt of substrate
The case where being arranged horizontally at the upside of sedimentary origin 100, but it is not limited to this.
Peripheral region 104a, the nozzle 114a of peripheral region 104b, nozzle 114b is arranged in respectively to respectively include for adjusting
Nipple top 124a, the nipple top 124b of the injection direction of whole deposited material.Nozzle is formed in a manner of it can install and dismantle
Top 124a, nipple top 124b.Nipple top 124a, nipple top 124b are arranged to heavy for spraying in a first direction
Terminal surface and 210 surface of substrate of product substance constitute inclination angle and towards the lateral directions of sedimentary origin 100.
Before the injection direction to nozzle illustrates, the distribution of the deposited material first to being sprayed from nozzle is seen
It examines.
Fig. 2 and Fig. 3 is to indicate the deposited material sprayed from nozzle in precipitation equipment according to an embodiment of the invention
The concept map of distribution.For the convenience of explanation, the diagram for the deposition mask 220 for being tightly attached to substrate 210 will be omitted.
Because the deposited material DM sprayed from nozzle 112, nozzle 114a, nozzle 114b is injected into vacuum, such as
Shown in Fig. 2, in no direction, by nozzle 112, nozzle 114a, nozzle 114b terminal surface on the basis of carried out with 0 to 90 ° of angle
Diffusion, i.e., be diffused with all directions in front.Therefore, when forming nozzle 112, nozzle 114a, nozzle 114b, preferably
Consider nozzle 112, nozzle 114a, nozzle 114b terminal surface towards angle.When according to the diffusion angle of deposited material DM and
It, will be as shown in table 1 below when the jeting area of jet deposition substance DM is divided into a-quadrant and B area by distributive law.
Table 1
| Jeting area divides | Diffusion angle（°） | Distributive law（%） |
| A | 0~18 | 0.054 |
| B | 18~90 | 99.946 |
The deposition of deposited material increases as jet angle increases since 0 °, and is deposited when jet angle is 90 °
Amount is maximum.Deposited material sharply increases from jet angle is about 18 °.With the end of nozzle 112, nozzle 114a, nozzle 114b
On the basis of face, a-quadrant is with being equivalent to 0 ° with up to the region of 18 ° of less than jet angles, and B area is with being equivalent to 18 °
With up to the region of 90 ° of jet angles below.From the deposited material DM that nozzle 112, nozzle 114a, nozzle 114b spray, point
The deposited material DM of cloth to a-quadrant is equivalent to 0.054%, thus be equivalent to a-quadrant jet angle deposited material DM for
The influence of substrate 210 is relatively small.On the contrary, because the deposited material DM with the jet angle for being equivalent to B area is largely sunk
In product to substrate 210, so the B area with the jet angle for being equivalent to 18 to 90 ° is appointed as effective jeting area.It is this to have
Effect jeting area is not limited to this, can be different according to the type of deposited material.It will be equivalent to be λ from the point of view of a-quadrant,
To set the angle that is constituted of terminal surface and substrate 210 of nozzle 112, nozzle 114a, nozzle 114b, this will be retouched below
It states.
Fig. 4 is to indicate the incidence for being incident on the deposited material of substrate in precipitation equipment according to an embodiment of the invention
The concept map of correlation between angle and the position of nozzle.
When deposited material is deposited on substrate 210, certain angle θ is constituted with substrate 210 on the basis of first direction
And incidence is carried out, and by considering substrate 210 with sedimentary origin 100 at a distance from, the size of substrate 210, deposition etc., setting deposit
The minimum incident angle of matter.The minimum incident angle of the incidence angle of setting is preferably formed in the range of 43 ° to 53 °.When heavy
When the minimum angles of product substance incidence are less than 43 °, will cause to occur deposited material penetrate into deposition mask 220 and substrate 210 it
Between shade phenomenon, when minimum angles be more than 53 ° when, cause deposition efficiency low because the amount of incident of deposited material is few.
Hereinafter if do not illustrated, using first direction as benchmark if incident angle and relative angle.
In substrate 210, when the thickness deposition with setting has the region of deposited material to be referred to as deposition region, such as Fig. 4
Shown, deposition region is respectively provided with along a first direction（Y-axis direction）On outermost point N1, N2.When deposited material incidence
Minimum incident angle when being set as θ, when marking the arbitrary line with the tiltangleθ for being equivalent to minimum incident angle from N1,
Arbitrary line intersects on the P2 as a point of sedimentary origin 100.Similarly, it is marked with the arbitrary of angle, θ when from N2
When line, arbitrary line intersects on the P1 as a point of sedimentary origin 100.Region between P1 and P2 is referred to as central area
102, the region being arranged on the outside of P1 and the region being arranged on the outside of P2 are referred to as peripheral region 104a, peripheral region 104b.
For any point of the deposition region between N1 and N2, being formed in nozzle 112 on central area 102 can be with
The incident angle of deposited material is greater than or equal to the mode jet deposition substance of minimum incident angle θ.On the contrary, as shown in figure 4, setting
Nozzle 114a, the nozzle 114b set in the peripheral region on the outside of P1, P2 will be with θ ', the θ ' ' less than predetermined minimum incidence angle θ
Incident angle.
Therefore, it is necessary to being sprayed from nozzle 114a, the nozzle 114b for being arranged in peripheral region 104a, peripheral region 104
The incident angle for the deposited material penetrated is adjusted.As described above, because nozzle is sprayed with all directions in its front, institute
With as shown in figure 3, the terminal surface of nozzle is incident on as deposited material on substrate 210 with the inclination angle phi that substrate 210 is constituted
Incident angle θ.Therefore, peripheral region 104a, the nozzle 114a of peripheral region 104, nozzle 114b are arranged in and is arranged to its end
Lateral direction of the end face towards sedimentary origin 100.That is, when the incident angle θ of setting belongs to 43 ° to 53 ° of range, the end of nozzle
The inclination angle phi that face and the surface of substrate 210 are constituted belongs to 43 ° to 53 ° of range.In addition, when considering being equivalent to for above description
When 18 ° of the angle λ of a-quadrant, the inclination angle that the surface of the terminal surface of nozzle and substrate 210 is constituted more preferably is formed as 25 °
To 35 ° of range.
It will be described for determining the size of the central area 102 and peripheral region 104a, peripheral region 104b of sedimentary origin 100
Method.Fig. 5 is the method for determining central area and peripheral region according in the precipitation equipment of one embodiment of the invention
Concept map.
By substrate 210 and sedimentary origin 100 be positioned in substrate 210 center on along a first direction in sedimentary origin
In 100 along a first direction on center alignment.Later, when central area 102 along a first direction on length be L1, in advance
Determine deposition region along a first direction on length be L2, the distance between substrate 210 and the terminal surface of nozzle are T, are made a reservation for
Incidence angle is θ, and as shown in figure 5, when the crosspoint as line segment N1P2 and line segment N2P1 is set as M, the end of crosspoint M and nozzle
The distance between end is t1, the distance between crosspoint M and substrate 210 are t2When, it can be indicated with following relational expression between it
Relationship.
Mathematical expression 1
Because of t1+t2=T, so by t1=T-t2When substituting into mathematical expression 1, mathematical expression 2 can be expressed as.
Mathematical expression 2
When with reference to Fig. 5, t2It can be expressed as mathematical expression 3.
Mathematical expression 3
When mathematical expression 3 is substituted into mathematical expression 2, mathematical expression 4 can be expressed as.
Mathematical expression 4
I.e., it is possible to by between pre-determined tilt angle, θ, substrate 210 and nozzle 112, nozzle 114a, nozzle 114b away from
From the deposited area length L in T and substrate 2102Relevant relational expression indicate central area 102 along a first direction on
Length L1。
In sedimentary origin 100 in addition to central area 102 along a first direction on length L1Other than comparable part
Part then become peripheral region 104a, peripheral region 104b.
Fig. 6 A to Fig. 6 D are the view of the variation for the nipple top for indicating precipitation equipment according to an embodiment of the invention.
As shown in Figure 6A, the terminal surface of the jet deposition substance of nipple top 130a, which can have, favours 210 table of substrate
The tiltangleθ in face.In addition, as shown in Figure 6B, nipple top 130b can laterally block the one of nozzle in a manner of asymmetric
The terminal surface of part, nipple top 130b can have the face vertically formed.In addition, as shown in Figure 6 C, nipple top 130c can
To wrap up the part in front of jet port to form the shape of nipple top 130c in a manner of asymmetric.In such as Fig. 6 B and Fig. 6 C
Shown in nipple top 130b, nipple top 130c, when marking the dotted line tangent with end along a first direction, then the void
The angle of line has the tiltangleθ for favouring 210 surface of substrate.In addition, as shown in Figure 6 D, nipple top 130d be formed as towards
Injection direction becomes narrow gradually, and terminal surface can have the tiltangleθ on the surface for favouring substrate 210.Nipple top is not
It is limited to example, even if the shape of nipple top is different, as long as the terminal surface of nipple top is to have to tilt along a first direction
The shape of angle, you can be realized in a manner of numerous variations.
With reference to the accompanying drawings, the system of the operation to precipitation equipment according to an embodiment of the invention and organic light emitting apparatus
The method of making illustrates.
First, substrate 210 is introduced into vacuum chamber（It is not shown）, and substrate 210 is arranged to deposit with for being discharged
The sedimentary origin 100 of substance is opposite.In this case, sedimentary origin 100 is adjusted at a distance from substrate 210, so that deposited material
With predetermined incident angle θ incidences.Furthermore, it is possible to which substrate 210 is arranged to meet above-mentioned mathematical expression 4.
Along the second direction vertical with first direction（X-axis direction）Mobile sedimentary origin 100 simultaneously passes through nozzle 112, nozzle
114a, nozzle 114b jet deposition substances.Because according to nipple top 124a, nipple top 124b, being arranged in peripheral region
Nozzle 114a, nozzle 114b are with minimum value incidence angle θ jet deposition substance along a first direction, so as shown in figure 5, deposition
Substance is flown into the incidence angle more than or equal to minimum incidence angle θ and is attached on substrate 210.
This deposited material is preferably the organic substance that organic luminous layer is used to form in organic light-emitting display device,
It is displayed in red that is, being used to form（R）, green（G）, blue（B）Sub-pixel organic substance.
Appended attached drawing is only used for conclusivelying show the skill being included in the present invention in the present embodiment and this specification
A part for art thought, it should be understood that can be from the specification and attached drawing for being included in the present invention including those skilled in the art
Technological thought in the range of be easy class release various deformation example and specific embodiment be included in the present invention interest field
It is interior.
Claims (8)
1. a kind of precipitation equipment, including：
Sedimentary origin, for accommodating deposited material；And
Multiple nozzles are arranged in the side of the sedimentary origin along a first direction, and for the deposited material to be ejected into
On opposite substrate,
In said first direction, the sedimentary origin is divided into central area and the periphery positioned at the central area both ends
Region,
The precipitation equipment further includes：Nipple top is removably formed in and is arranged in each peripheral region
The nozzle on,
The terminal surface for spraying the deposited material of the nipple top is along the table of the first direction and the substrate
Face constitutes inclination angle, and towards the lateral direction of the sedimentary origin,
Wherein, the substrate along the first direction center and the sedimentary origin along the first direction center pair
Standard,
The central area of the sedimentary origin has the length for meeting following conditions along the first direction,
Wherein, L1It is the central area along the length of the first direction, L2For the substrate deposition region along described
The length of first direction, T are the distance between the end of the substrate and the nozzle, and θ is the inclination angle.
2. precipitation equipment as described in claim 1, wherein
Ranging from 43 degree to 53 degree of the inclination angle.
3. precipitation equipment as described in claim 1, wherein
Ranging from 25 degree to 35 degree of the inclination angle.
4. precipitation equipment as described in claim 1, wherein
It is installed to the nipple top on the nozzle being arranged in each peripheral region in said first direction
It is symmetrical on the basis of the center of the sedimentary origin.
5. a kind of manufacturing method of organic light-emitting display device, including：
Preparation includes the sedimentary origin for accommodating deposited material, and is arranged in side and the use of sedimentary origin along a first direction
In the precipitation equipment for the multiple nozzles being ejected into the deposited material on substrate；
By the arrangement of nozzles at opposite with substrate；And
The sedimentary origin is moved along the second direction vertical with the first direction and the deposition is sprayed by the nozzle
Substance,
The wherein described sedimentary origin is divided into central area and in said first direction positioned at the central area both ends
Peripheral region, and further include the spray being removably formed on the nozzle arranged in each peripheral region
At the top of mouth, the nipple top is used to spray the terminal surface of the deposited material along the table of the first direction and the substrate
Face constitutes inclination angle, and towards the lateral direction of the sedimentary origin,
Wherein, the substrate along the central area center and the sedimentary origin along the first direction center pair
Standard,
The central area has the length for meeting following conditions along a first direction,
Wherein, L1It is the central area along the length of the first direction, L2For the substrate deposition region along described
The length of first direction, T are the distance between the end of the substrate and the nozzle, and θ is the inclination angle.
6. the manufacturing method of organic light-emitting display device as claimed in claim 5, wherein
Ranging from 43 degree to 53 degree of the inclination angle.
7. the manufacturing method of organic light-emitting display device as claimed in claim 5, wherein
Ranging from 25 degree to 35 degree of the inclination angle.
8. the manufacturing method of organic light-emitting display device as claimed in claim 5, wherein
It is installed to the nipple top on the nozzle arranged in each peripheral region in said first direction
It is symmetrical on the basis of the center of the sedimentary origin.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2012-0114395 | 2012-10-15 | ||
| KR1020120114395A KR102039684B1 (en) | 2012-10-15 | 2012-10-15 | Depositing apparatus and method for manufacturing organic light emitting diode display using the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103726030A CN103726030A (en) | 2014-04-16 |
| CN103726030B true CN103726030B (en) | 2018-09-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310476160.9A Active CN103726030B (en) | 2012-10-15 | 2013-10-12 | Precipitation equipment and the manufacturing method for using its organic light-emitting display device |
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| Country | Link |
|---|---|
| KR (1) | KR102039684B1 (en) |
| CN (1) | CN103726030B (en) |
| TW (1) | TWI625415B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102480457B1 (en) * | 2015-07-27 | 2022-12-22 | 삼성디스플레이 주식회사 | Deposition apparatus |
| CN110191976B (en) | 2017-07-18 | 2021-12-10 | 京东方科技集团股份有限公司 | Evaporation crucible and evaporation equipment |
| WO2020213228A1 (en) * | 2019-04-19 | 2020-10-22 | 株式会社アルバック | Vapor deposition source and vapor deposition device |
| CN110592538B (en) * | 2019-09-26 | 2021-12-24 | 京东方科技集团股份有限公司 | Evaporation device, evaporation source and nozzle |
| KR102371118B1 (en) * | 2020-07-30 | 2022-03-07 | 주식회사 선익시스템 | Nozzle for spraying deposited particle and deposition apparatus with the same |
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| CN102703866A (en) * | 2012-01-13 | 2012-10-03 | 东莞宏威数码机械有限公司 | Linear evaporation source device and precise evaporation rate control evaporating unit with same |
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| KR100579406B1 (en) * | 2004-08-25 | 2006-05-12 | 삼성에스디아이 주식회사 | Vertical Moving Type Apparatus for Depositing Organic Material |
| KR100687007B1 (en) * | 2005-03-22 | 2007-02-26 | 세메스 주식회사 | Apparatus for depositing organic film used in manufacturing organicelectro luminescence device |
| KR100980729B1 (en) * | 2006-07-03 | 2010-09-07 | 주식회사 야스 | Multiple nozzle evaporator for vacuum thermal evaporation |
| KR101131960B1 (en) * | 2009-08-14 | 2012-04-12 | 주식회사 원익아이피에스 | Organic thin film deposition system |
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2012
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102703866A (en) * | 2012-01-13 | 2012-10-03 | 东莞宏威数码机械有限公司 | Linear evaporation source device and precise evaporation rate control evaporating unit with same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20140047969A (en) | 2014-04-23 |
| TWI625415B (en) | 2018-06-01 |
| KR102039684B1 (en) | 2019-11-04 |
| CN103726030A (en) | 2014-04-16 |
| TW201418507A (en) | 2014-05-16 |
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