CN103708409B - 压力传感器和惯性传感器及其形成方法 - Google Patents
压力传感器和惯性传感器及其形成方法 Download PDFInfo
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- CN103708409B CN103708409B CN201310508730.8A CN201310508730A CN103708409B CN 103708409 B CN103708409 B CN 103708409B CN 201310508730 A CN201310508730 A CN 201310508730A CN 103708409 B CN103708409 B CN 103708409B
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CN201310508730.8A CN103708409B (zh) | 2013-10-25 | 2013-10-25 | 压力传感器和惯性传感器及其形成方法 |
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CN103708409A CN103708409A (zh) | 2014-04-09 |
CN103708409B true CN103708409B (zh) | 2015-10-07 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105293424B (zh) * | 2014-05-26 | 2017-04-05 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件以及制备方法、电子装置 |
CN105236347B (zh) * | 2014-06-03 | 2017-04-05 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制作方法和电子装置 |
CN105439077A (zh) * | 2014-06-18 | 2016-03-30 | 上海丽恒光微电子科技有限公司 | 压力传感器的制备方法 |
CN105300591B (zh) * | 2014-07-15 | 2018-02-02 | 中芯国际集成电路制造(上海)有限公司 | 微机电***压力传感器 |
CN105651450B (zh) * | 2014-11-14 | 2018-07-06 | 中芯国际集成电路制造(上海)有限公司 | 压力传感器及其形成方法 |
CN104891418B (zh) * | 2015-05-29 | 2016-09-21 | 歌尔股份有限公司 | Mems压力传感器、mems惯性传感器集成结构 |
CN107758606B (zh) * | 2016-08-19 | 2020-01-24 | 上海丽恒光微电子科技有限公司 | 压力传感器的封装方法 |
CN107092880B (zh) * | 2017-04-14 | 2023-06-20 | 杭州士兰微电子股份有限公司 | 超声波指纹传感器及其制造方法 |
CN110823259B (zh) * | 2019-10-15 | 2021-08-27 | 上海集成电路研发中心有限公司 | 一种惯性传感器及其制备方法 |
Family Cites Families (7)
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KR100701152B1 (ko) * | 2005-12-08 | 2007-03-28 | 한국전자통신연구원 | 단차를 가지지 않는 일체형 mems 센서 및 그 제조방법 |
CN102530832B (zh) * | 2010-12-27 | 2014-06-18 | 上海丽恒光微电子科技有限公司 | 惯性微机电传感器及其制作方法 |
CN102183677B (zh) * | 2011-03-15 | 2012-08-08 | 迈尔森电子(天津)有限公司 | 集成惯性传感器与压力传感器及其形成方法 |
CN102156203B (zh) * | 2011-03-15 | 2013-07-24 | 迈尔森电子(天津)有限公司 | Mems惯性传感器及其形成方法 |
CN102515090B (zh) * | 2011-12-21 | 2014-11-05 | 上海丽恒光微电子科技有限公司 | 压力传感器及其形成方法 |
CN202614451U (zh) * | 2012-05-29 | 2012-12-19 | 上海丽恒光微电子科技有限公司 | 复合式压力传感器 |
CN102692294B (zh) * | 2012-05-29 | 2014-04-16 | 上海丽恒光微电子科技有限公司 | 复合式压力传感器及其形成方法 |
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Denomination of invention: Pressure sensor and inertial sensor and method of forming the same Effective date of registration: 20220811 Granted publication date: 20151007 Pledgee: Zhejiang Tailong Commercial Bank Co., Ltd. Lishui Branch Pledgor: Zhejiang Core Microelectronics Co.,Ltd. Registration number: Y2022330001717 |
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