CN103681996A - 一种紫外发光二极管及其制备方法 - Google Patents
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- CN103681996A CN103681996A CN201310487194.8A CN201310487194A CN103681996A CN 103681996 A CN103681996 A CN 103681996A CN 201310487194 A CN201310487194 A CN 201310487194A CN 103681996 A CN103681996 A CN 103681996A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
- H01L33/105—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector with a resonant cavity structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
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Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108183151A (zh) * | 2018-01-09 | 2018-06-19 | 湘能华磊光电股份有限公司 | 一种led芯片及其制作方法 |
CN108615797A (zh) * | 2018-04-28 | 2018-10-02 | 南京大学 | 具有表面等离激元圆台纳米阵列的AlGaN基紫外LED器件及其制备方法 |
CN110047982A (zh) * | 2019-02-27 | 2019-07-23 | 华灿光电(苏州)有限公司 | 发光二极管、外延片及其制备方法 |
CN110676357A (zh) * | 2019-08-28 | 2020-01-10 | 南京南邮信息产业技术研究院有限公司 | 一种超薄结构深紫外led及其制备方法 |
CN111816740A (zh) * | 2020-08-28 | 2020-10-23 | 北京蓝海创芯智能科技有限公司 | 一种提高AlGaN基深紫外LED空穴注入效率的结构 |
CN112670383A (zh) * | 2020-12-25 | 2021-04-16 | 广东省科学院半导体研究所 | 一种紫外光电器件及其制备方法 |
CN113328018A (zh) * | 2021-06-04 | 2021-08-31 | 厦门士兰明镓化合物半导体有限公司 | 半导体发光元件及其制备方法 |
CN114171652A (zh) * | 2020-09-11 | 2022-03-11 | 北京大学 | 一种提高AlGaN基DUV-LED光提取效率的结构及其应用 |
CN114583031A (zh) * | 2022-01-27 | 2022-06-03 | 南京邮电大学 | 一种基于LSPs耦合增强的紫外Micro-LED |
WO2023159514A1 (zh) * | 2022-02-25 | 2023-08-31 | 京东方科技集团股份有限公司 | 发光器件和发光装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011216555A (ja) * | 2010-03-31 | 2011-10-27 | Furukawa Electric Co Ltd:The | 発光素子 |
KR20110118956A (ko) * | 2010-04-26 | 2011-11-02 | 전북대학교산학협력단 | 코어-쉘 나노입자를 이용한 표면 플라즈몬 공명-기반 발광 다이오드 |
CN102544298A (zh) * | 2012-02-07 | 2012-07-04 | 厦门大学 | 有效提高外量子效率的深紫外发光二极管及其制备方法 |
CN103346232A (zh) * | 2013-06-28 | 2013-10-09 | 厦门大学 | 一种深紫外发光二极管及其制备方法 |
CN203596359U (zh) * | 2013-10-17 | 2014-05-14 | 武汉光电工业技术研究院有限公司 | 一种紫外发光二极管 |
-
2013
- 2013-10-17 CN CN201310487194.8A patent/CN103681996B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011216555A (ja) * | 2010-03-31 | 2011-10-27 | Furukawa Electric Co Ltd:The | 発光素子 |
KR20110118956A (ko) * | 2010-04-26 | 2011-11-02 | 전북대학교산학협력단 | 코어-쉘 나노입자를 이용한 표면 플라즈몬 공명-기반 발광 다이오드 |
CN102544298A (zh) * | 2012-02-07 | 2012-07-04 | 厦门大学 | 有效提高外量子效率的深紫外发光二极管及其制备方法 |
CN103346232A (zh) * | 2013-06-28 | 2013-10-09 | 厦门大学 | 一种深紫外发光二极管及其制备方法 |
CN203596359U (zh) * | 2013-10-17 | 2014-05-14 | 武汉光电工业技术研究院有限公司 | 一种紫外发光二极管 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108183151B (zh) * | 2018-01-09 | 2019-08-06 | 湘能华磊光电股份有限公司 | 一种led芯片及其制作方法 |
CN108183151A (zh) * | 2018-01-09 | 2018-06-19 | 湘能华磊光电股份有限公司 | 一种led芯片及其制作方法 |
CN108615797A (zh) * | 2018-04-28 | 2018-10-02 | 南京大学 | 具有表面等离激元圆台纳米阵列的AlGaN基紫外LED器件及其制备方法 |
CN108615797B (zh) * | 2018-04-28 | 2019-07-02 | 南京大学 | 具有表面等离激元圆台纳米阵列的AlGaN基紫外LED器件及其制备方法 |
CN110047982B (zh) * | 2019-02-27 | 2020-07-07 | 华灿光电(苏州)有限公司 | 发光二极管、外延片及其制备方法 |
CN110047982A (zh) * | 2019-02-27 | 2019-07-23 | 华灿光电(苏州)有限公司 | 发光二极管、外延片及其制备方法 |
CN110676357A (zh) * | 2019-08-28 | 2020-01-10 | 南京南邮信息产业技术研究院有限公司 | 一种超薄结构深紫外led及其制备方法 |
CN111816740A (zh) * | 2020-08-28 | 2020-10-23 | 北京蓝海创芯智能科技有限公司 | 一种提高AlGaN基深紫外LED空穴注入效率的结构 |
CN114171652A (zh) * | 2020-09-11 | 2022-03-11 | 北京大学 | 一种提高AlGaN基DUV-LED光提取效率的结构及其应用 |
CN114171652B (zh) * | 2020-09-11 | 2024-04-19 | 北京大学 | 一种提高AlGaN基DUV-LED光提取效率的结构及其应用 |
CN112670383A (zh) * | 2020-12-25 | 2021-04-16 | 广东省科学院半导体研究所 | 一种紫外光电器件及其制备方法 |
CN113328018A (zh) * | 2021-06-04 | 2021-08-31 | 厦门士兰明镓化合物半导体有限公司 | 半导体发光元件及其制备方法 |
WO2022252721A1 (zh) * | 2021-06-04 | 2022-12-08 | 厦门士兰明镓化合物半导体有限公司 | 半导体发光元件及其制备方法 |
CN114583031A (zh) * | 2022-01-27 | 2022-06-03 | 南京邮电大学 | 一种基于LSPs耦合增强的紫外Micro-LED |
WO2023159514A1 (zh) * | 2022-02-25 | 2023-08-31 | 京东方科技集团股份有限公司 | 发光器件和发光装置 |
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